KR101271439B1 - Capacitance type differential sensor module and inspection apparatus of display panel used thereof - Google Patents

Abstract

The present invention relates to a capacitive differential sensor module and an inspection apparatus of a display panel, wherein a non-contact sensor corresponding to a pattern electrode on the other side of the pattern electrode to which AC power is applied while applying AC power from one side of the pattern electrode formed on the display panel And the non-contact differential sensor in the longitudinal direction of the pattern electrode in parallel with the non-contact sensor to measure the voltage through the non-contact sensor and the differential voltage through the non-contact differential sensor can accurately check the cross short.

Description

CAPACITANCE TYPE DIFFERENTIAL SENSOR MODULE AND INSPECTION APPARATUS OF DISPLAY PANEL USED THEREOF}

The present invention relates to a capacitive differential sensor module and an inspection apparatus for a display panel. More particularly, the present invention relates to a pattern electrode on the other side of a pattern electrode to which an AC power is applied while applying AC power from one side of a pattern electrode formed on the display panel. A capacitive differential sensor module for measuring a cross short circuit by measuring a voltage through a non-contact sensor and a differential voltage through a non-contact differential sensor by placing a non-contact differential sensor in a longitudinal direction of a pattern electrode in parallel with a corresponding non-contact sensor and a non-contact sensor; An inspection apparatus for a display panel.

Recently, as the resolution of the display panel increases, the spacing of the pattern electrodes is further reduced. In addition, the active matrix type display panels have a single substrate in which the data pattern electrodes arranged in the vertical direction and the gate pattern electrodes arranged in the vertical direction are used. It is formed on the top.

In order to check for defects such as open, short and cross short of the pattern electrode generated in the display panel, a signal is applied at one end of the pattern electrode and a signal is detected at the other end. If the magnitude of the detected signal is different from the normal magnitude, it is examined in a manner that determines that a defect has occurred.

Background art of the present invention is disclosed in Republic of Korea Patent Registration No. 10-799161 (January 29, 2008).

If the size of the display panel is large when the display panel is inspected for defects, if the defect occurs at a location far from one end where the failure occurs, that is, near the other end, the power supply may be supplied due to the line resistance of the pattern electrode. Since the size of the applied signal decreases as it moves away from the position, even if a defect occurs, the magnitude of the abnormal signal obtained due to the defect is also reduced, which makes it difficult to detect the defect.

As such, when the size of the bad signal is small, it is difficult to detect the bad signal, and it is difficult to distinguish between the bad signal and the noise, which causes an error in the inspection, and the inspection performance is remarkably degraded in some areas when inspecting the cross short. There is a problem.

The present invention has been made to improve the above problems, the present invention provides a non-contact sensor corresponding to the pattern electrode on the other side of the pattern electrode to which the AC power is applied while applying the AC power from one side of the pattern electrode formed on the display panel; Inspecting device of capacitive differential sensor module and display panel that arranges non-contact differential sensor in the longitudinal direction of pattern electrode in parallel with non-contact sensor and measures cross voltage through non-contact sensor and differential voltage through non-contact differential sensor The purpose is to provide.

A capacitive differential sensor module according to an aspect of the present invention for realizing the above object comprises a non-contact sensor for outputting a sensed voltage corresponding to the pattern electrode; And a non-contact differential sensor disposed in parallel with the non-contact sensor and outputting a differential voltage at the pattern electrode adjacent to the pattern electrode.

In the present invention, the non-contact differential sensor is characterized in that it is disposed on both sides of the non-contact sensor.

In the present invention, the non-contact differential sensor includes a plurality of sensor electrodes disposed to correspond in the longitudinal direction of the pattern electrode adjacent to the pattern electrode; And a comparator configured to differentially input voltages sensed from the plurality of sensor electrodes and output differential voltages.

In the present invention, in the plurality of sensor electrodes, a first sensor electrode, a second sensor electrode, and a third sensor electrode are arranged in a row, the first sensor electrode and the third sensor electrode are connected to one terminal of the comparator, and the second sensor An electrode is connected to the other terminal of the comparator.

According to another aspect of the present invention, a capacitive differential sensor module includes: a plurality of sensor electrodes disposed correspondingly in a longitudinal direction of a pattern electrode; And a comparator configured to differentially input voltages detected from the plurality of sensor electrodes and output a differential voltage, wherein the plurality of sensor electrodes include a first sensor electrode, a second sensor electrode, and a third sensor electrode arranged in a line. The first and third sensor electrodes are connected to one terminal of the comparator, and the second sensor electrode is connected to the other terminal of the comparator.

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According to another aspect of the present invention, an inspection apparatus for a display panel using a capacitive differential sensor includes: a feeding probe configured to apply AC power to the pattern electrode while scanning in a vertical direction at one end of the pattern electrode of the display panel; A capacitive differential sensor module for measuring the voltage at the pattern electrode and the difference voltage at the adjacent pattern electrode while scanning in the vertical direction at the other end of the pattern electrode to which the AC power is applied through the feed probe; And a controller configured to control a scan of the feed probe and the capacitive differential sensor module and determine a cross short of the pattern electrode contacted with the feed probe based on the voltage and the differential voltage measured from the capacitive differential sensor module. It features.

In the present invention, the capacitive differential sensor module includes a non-contact sensor for outputting a sensed voltage corresponding to the pattern electrode; And a non-contact differential sensor disposed in parallel with the non-contact sensor and outputting a differential voltage at the pattern electrode adjacent to the pattern electrode.

In the present invention, the non-contact differential sensor is characterized in that it is disposed on both sides of the non-contact sensor.

In the present invention, the non-contact differential sensor includes a plurality of sensor electrodes disposed to correspond in the longitudinal direction of the pattern electrode adjacent to the pattern electrode; And a comparator configured to differentially input voltages sensed from the plurality of sensor electrodes and output differential voltages.

In the present invention, in the plurality of sensor electrodes, a first sensor electrode, a second sensor electrode, and a third sensor electrode are arranged in a row, the first sensor electrode and the third sensor electrode are connected to one terminal of the comparator, and the second sensor An electrode is connected to the other terminal of the comparator.

According to another aspect of the present invention, an inspection apparatus for a display panel using a capacitive differential sensor includes: a feeding probe configured to apply AC power to the pattern electrode while scanning in a vertical direction at one end of the pattern electrode of the display panel; A capacitive differential sensor module for measuring a differential voltage at the pattern electrode while scanning in the vertical direction from the other end of the pattern electrode to which an AC power is applied through a feed probe; And a controller configured to control a scan of the feed probe and the capacitive differential sensor module and determine a cross short of the pattern electrode contacted with the feed probe based on the difference voltage measured from the capacitive differential sensor module. do.

In the present invention, the capacitive differential sensor module comprises: a plurality of sensor electrodes disposed corresponding to the length direction of the pattern electrode; And a comparator configured to differentially input voltages sensed from the plurality of sensor electrodes and output a difference voltage.

In the present invention, in the plurality of sensor electrodes, a first sensor electrode, a second sensor electrode, and a third sensor electrode are arranged in a row, the first sensor electrode and the third sensor electrode are connected to one terminal of the comparator, and the second sensor An electrode is connected to the other terminal of the comparator.

As described above, the present invention may apply the AC power from one side of the pattern electrode formed on the display panel to the longitudinal direction of the pattern electrode in parallel with the non-contact sensor and the non-contact sensor corresponding to the pattern electrode on the other side of the pattern electrode to which AC power is applied. Non-contact differential sensors can be placed to accurately measure cross shorts by measuring the voltage across the non-contact sensor and the differential voltage through the non-contact differential sensor.

1 is a block diagram showing a capacitive differential sensor module according to a first embodiment of the present invention.
2 is a block diagram showing a non-contact differential sensor of the capacitive differential sensor module according to the first embodiment of the present invention.
3 is a block diagram showing a capacitive differential sensor module according to a second embodiment of the present invention.
4 is a block diagram showing a capacitive differential sensor module according to a third embodiment of the present invention.
5 is a block diagram showing a non-contact differential sensor of the capacitive differential sensor module according to a third embodiment of the present invention.
6 is a block diagram showing a capacitive differential sensor module according to a fourth embodiment of the present invention.
7 is a block diagram showing an inspection apparatus of a display panel using a capacitive differential sensor module according to an embodiment of the present invention.
8 is a block diagram showing an inspection apparatus of a display panel using a capacitive differential sensor module according to another embodiment of the present invention.

Hereinafter, with reference to the accompanying drawings will be described an embodiment of a capacitive differential sensor module and an inspection apparatus of a display panel using the same. In this process, the thicknesses of the lines and the sizes of the components shown in the drawings may be exaggerated for clarity and convenience of explanation. In addition, the terms described below are defined in consideration of the functions of the present invention, which may vary depending on the intention or custom of the user, the operator. Therefore, definitions of these terms should be made based on the contents throughout this specification.

1 is a block diagram showing a capacitive differential sensor module according to a first embodiment of the present invention, Figure 2 is a block diagram showing a non-contact differential sensor of a capacitive differential sensor module according to a first embodiment of the present invention 3 is a configuration diagram illustrating a capacitive differential sensor module according to a second embodiment of the present invention.

As shown in FIG. 1, the capacitive differential sensor module 100 according to the first embodiment of the present invention includes a non-contact sensor 110 and a non-contact differential sensor 120.

The non-contact sensor 110 outputs a sensed voltage corresponding to the plurality of pattern electrodes 10, and the non-contact differential sensor 120 is disposed in parallel with the non-contact sensor 110 to form a pattern electrode adjacent to the pattern electrode 10 ( Output the difference voltage in 10).

In this case, the non-contact differential sensor 120 may be disposed on both sides of the non-contact sensor 110 to detect a differential voltage even when inspecting the pattern electrode 10 formed at the outermost part of the display panel according to the scanning direction.

The configuration of the non-contact differential sensor 120 includes first to second sensor electrodes 121 and 122 and a comparator 126 as shown in FIG. 2.

The first to second sensor electrodes 121 and 122 are disposed to correspond to the length direction of the pattern electrode 10 formed on the display panel (not shown).

The comparator 126 has a first sensor electrode 121 connected to the non-inverting terminal (+) and a second sensor electrode 122 connected to the inverting terminal (-), thereby providing a first to second sensor electrode 121 (122). The differential voltage (Vout) is output from the sensed voltage.

Accordingly, the voltage difference is detected not only by the pattern electrode 10 through the non-contact sensor 110 but also by the difference between the first sensor electrode 121 and the second sensor electrode 122 in the longitudinal direction of the adjacent pattern electrode 10. In the normal state, the differential voltage outputs a value of 0.

In addition, the capacitive differential sensor module according to the second embodiment of the present invention is composed of only the non-contact differential sensor 120, as shown in Figure 3, the first to second sensor electrodes 121, 122 and the comparator ( 126).

The first to second sensor electrodes 121 and 122 are disposed to correspond to the length direction of the pattern electrode 10 formed on the display panel (not shown).

The comparator 126 has a first sensor electrode 121 connected to the non-inverting terminal (+) and a second sensor electrode 122 connected to the inverting terminal (-), thereby providing a first to second sensor electrode 121 (122). The differential voltage (Vout) is output from the sensed voltage.

Therefore, as the difference voltage is sensed through the first sensor electrode 121 and the second sensor electrode 122 in the longitudinal direction of the pattern electrode 10, the difference voltage outputs a value of 0 in a normal state.

4 is a block diagram showing a capacitive differential sensor module according to a third embodiment of the present invention, Figure 5 is a block diagram showing a non-contact differential sensor of the capacitive differential sensor module according to a third embodiment of the present invention 6 is a configuration diagram illustrating a capacitive differential sensor module according to a fourth embodiment of the present invention.

The capacitive differential sensor module 100 according to the third embodiment of the present invention includes a non-contact sensor 110 and a non-contact differential sensor 120 as shown in FIG. 4, and the non-contact sensor 110 includes a plurality of patterns. The voltage detected in correspondence with the electrode 10 is output, and the non-contact differential sensor 120 is disposed in parallel with the non-contact sensor 110 so that the differential voltage Vout at the pattern electrode 10 adjacent to the pattern electrode 10 is output. Outputs

In this case, the non-contact differential sensor 120 includes third to fifth sensor electrodes 123 to 125 and a comparator 126 as shown in FIG. 5.

The third to fifth sensor electrodes 123 to 125 are arranged in a line corresponding to the length direction of the pattern electrode 10 formed on the display panel (not shown).

The comparator 126 has a third sensor electrode 123 and a fifth sensor electrode 125 connected to the non-inverting terminal (+), and a fourth sensor electrode 124 is connected to the inverting terminal (-) to form a third and fifth electrodes. The voltage sensed from the sensor electrodes 123 and 125 and the fourth sensor electrode 124 is differentially input and outputs a difference voltage Vout.

Therefore, the flatness of the pattern electrode 10 is poor when measuring the difference voltage at the adjacent pattern electrode 10, and thus the change of the distance between the third to fifth sensor electrodes 123 to 125 and the pattern electrode 10 is changed. As a result, the error generated by compensating the third sensor electrode 123 and the fifth sensor electrode 125 disposed before and after the fourth sensor electrode 124 can detect a stable difference voltage.

The capacitive differential sensor module according to the fourth embodiment of the present invention is composed of only the non-contact differential sensor 120 as shown in FIG. 6 and the third to fifth sensor electrodes 123 to 125 and the comparator 126. Include.

The third to fifth sensor electrodes 123 to 125 are arranged in a line corresponding to the length direction of the pattern electrode 10 formed on the display panel (not shown).

The comparator 126 has a third sensor electrode 123 and a fifth sensor electrode 125 connected to the non-inverting terminal (+), and a fourth sensor electrode 124 is connected to the inverting terminal (-) to form a third and fifth electrodes. The voltage sensed from the sensor electrodes 123 and 125 and the fourth sensor electrode 124 is differentially input and outputs a difference voltage Vout.

Therefore, when measuring the difference voltage at the pattern electrode 10, the flatness of the pattern electrode 10 is poor, so that the change of the distance between the third to fifth sensor electrodes 123 to 125 and the pattern electrode 10 is changed. As a result, the difference generated by compensating the third sensor electrode 123 and the fifth sensor electrode 125 disposed before and after the fourth sensor electrode 124 can detect a stable difference voltage.

7 is a block diagram showing an inspection apparatus of a display panel using a capacitive differential sensor module according to an embodiment of the present invention.

As shown in FIG. 7, a test apparatus for a display panel using a capacitive differential sensor module according to an embodiment of the present invention includes a contact probe 300, a capacitive differential sensor module 100, and a controller 200. It includes.

The touch probe 300 applies AC power to the data pattern electrode 30 while scanning in a vertical direction at one end of the data pattern electrode 30 of the display panel (not shown).

In this case, the touch probe 300 uses the disc wheel probe disclosed in the "Panel Probe Module for LCD Panel Inspection and Inspection Device and Method Using the Same" of Patent No. 0458930 (published Dec. 3, 2004), to which the applicant is a patent owner. Or the ball probe disclosed in the "contact probe using a ball" of the patent applicant No. 0752938 (August 30, 2007).

The capacitive differential sensor module 100 scans the data pattern electrode 30 from the non-contact sensor 110 while scanning in the vertical direction at the other end of the data pattern electrode 30 to which AC power is applied through the contact probe 300. And the difference voltage at the data pattern electrode 30 adjacent to the data pattern electrode 30 from the non-contact differential sensor 120 is measured and output.

In this case, the length of the non-contact differential sensor 120 is formed to be approximately 20% of the length of the data pattern electrode 30 so that the voltage measured in the longitudinal direction with respect to the data pattern electrode 30 corresponds to a region below the set voltage. In a TFT-LCD display panel using an active matrix pattern, a single non-contact sensor 110 reduces the size of an AC power applied due to the line resistance of the data pattern electrode 30, so that it is defective even in an area where it is difficult to detect a defect. Can be detected.

The control unit 200 controls the scan of the contact probe 300 and the capacitive differential sensor module 100 and the voltage at the data pattern electrode 30 measured from the non-contact sensor 110 and the non-contact differential sensor 120. Based on the difference voltage in the data pattern electrode 30 adjacent to the data pattern electrode 30 measured from the cross short circuit of the data pattern electrode 30 and the gate pattern electrode 40 in contact with the contact probe 300 To judge.

In addition, when the non-contact sensor 110 measures the voltage in a state in which the non-contact sensor 110 corresponds to the plurality of data pattern electrodes 30, a cross short occurs at a point close to the contact probe 300 to which AC power is applied. In this case, the cross short may be determined through the voltage measured from the non-contact sensor 110.

A detailed operation of the inspection apparatus of the display panel configured as described above is as follows.

First, as illustrated in FIG. 7, AC power is applied while scanning in one direction at one end of the data pattern electrode 30 through the contact probe 300.

The voltage at the data pattern electrode 30 through the non-contact sensor 110 is scanned vertically at the other end of the data pattern electrode 30 to which AC power is applied through the capacitive differential sensor module 100. The difference voltage at the data pattern electrode 30 adjacent to the data pattern electrode 30 is measured through the non-contact differential sensor 120.

At this time, since the first sensor electrode 121 and the second sensor electrode 122 of the non-contact differential sensor 120 are disposed not only on the same data pattern electrode 30 but also adjacent to each other, the non-contact differential sensor 120 When measuring the difference voltage, all of them are canceled and the value close to '0' is outputted.

However, when a cross short occurs between the data pattern electrode 30 and the gate pattern electrode 40 at the point 'A', the gate of which the second sensor electrode 122 of the non-contact differential sensor 120 is cross shorted at the point 'A' As it is positioned to correspond to the pattern electrode 40, the AC power is transferred from the data pattern electrode 30 to the gate pattern electrode 40 through the point 'A' to the voltage measured by the second sensor electrode 122. As the voltage measured by the signal input from the electrode 40 is measured, the voltage measured by the first sensor electrode 121 and the second sensor electrode 122 is changed, and the difference voltage of the non-contact differential sensor 120 is greatly changed.

Therefore, the control unit 200 controls the scan of the contact probe 300 and the capacitive differential sensor module 100 and the voltage at the data pattern electrode 30 measured from the non-contact sensor 110 and the non-contact differential sensor ( The cross between the data pattern electrode 30 and the gate pattern electrode 40 in contact with the contact probe 300 based on the difference voltage in the data pattern electrode 30 adjacent to the data pattern electrode 30 measured from 120. The paragraph can be judged.

8 is a block diagram showing an inspection apparatus of a display panel using a capacitive differential sensor module according to another embodiment of the present invention.

As shown in FIG. 8, a test apparatus for a display panel using a capacitive differential sensor module according to another embodiment of the present invention includes a contact probe 300, a capacitive differential sensor module 100, and a controller 200. It includes.

The touch probe 300 applies AC power to the data pattern electrode 30 while scanning in a vertical direction at one end of the data pattern electrode 30 of the display panel (not shown).

The capacitive differential sensor module 100 scans the differential voltage at the data pattern electrode 30 while scanning in the vertical direction at the other end of the data pattern electrode 30 to which AC power is applied through the contact probe 300. Measure and output.

At this time, the length of the capacitive differential sensor module 100 is approximately 20% of the length of the data pattern electrode 30 so that the voltage measured in the longitudinal direction with respect to the data pattern electrode 30 is less than the set voltage. In this case, the size of the applied AC power is reduced due to the line resistance of the data pattern electrode 30 in the TFT-LCD display panel by the active matrix pattern, so that the failure can be detected even in an area where it is difficult to detect the failure. .

The controller 200 controls the scan of the contact probe 300 and the capacitive differential sensor module 100 based on the differential voltage at the data pattern electrode 30 measured from the capacitive differential sensor module 100. The cross short circuit of the data pattern electrode 30 and the gate pattern electrode 40 in contact with the furnace contact probe 300 is determined.

A detailed operation of the inspection apparatus of the display panel configured as described above is as follows.

First, as illustrated in FIG. 8, an AC power is applied while scanning in one direction at one end of the data pattern electrode 30 through the contact probe 300.

Then, the differential voltage at the data pattern electrode 30 is measured while scanning in the vertical direction at the other end of the data pattern electrode 30 to which the AC power is applied through the capacitive differential sensor module 100.

In this case, since the first sensor electrode 121 and the second sensor electrode 122 of the capacitive differential sensor module 100 are not only disposed on the same data pattern electrode 30 but also adjacent to each other, the difference voltage can be measured. In this case, all values are canceled and a value close to '0' is output.

However, when a cross short occurs between the data pattern electrode 30 and the gate pattern electrode 40 at the point 'A', the second sensor electrode 122 of the capacitive differential sensor module 100 crosses at the 'A' point. As it is positioned to correspond to the shorted gate pattern electrode 40, the AC power is transferred from the data pattern electrode 30 to the gate pattern electrode 40 through the point 'A' to the voltage measured by the second sensor electrode 122. As a result, the voltage measured by the signal input from the gate pattern electrode 40 is measured so that the voltage measured by the first sensor electrode 121 and the second sensor electrode 122 is different, so that the differential voltage of the non-contact differential sensor 120 is large. Will change.

Therefore, the controller 200 controls the scan of the contact probe 300 and the capacitive differential sensor module 100 while controlling the scan voltage of the data pattern electrode 30 measured from the capacitive differential sensor module 100. On the basis of this, it is possible to determine a cross short between the data pattern electrode 30 and the gate pattern electrode 40 in contact with the contact probe 300.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it will be understood by those of ordinary skill in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims. I will understand. Accordingly, the technical scope of the present invention should be defined by the following claims.

10: pattern electrode 30: data pattern electrode
40: gate pattern electrode 100: capacitive differential sensor module
110: non-contact sensor 120: non-contact differential sensor
121 to 125: first to fifth sensor electrodes
126: comparator 200: control unit
300: contact probe

Claims (14)

The capacitive differential sensor module includes a non-contact sensor outputting a sensed voltage corresponding to the pattern electrode; And
And a non-contact differential sensor disposed in parallel with the non-contact sensor and outputting a differential voltage from the pattern electrode adjacent to the pattern electrode.
The capacitive differential sensor module according to claim 1, wherein the non-contact differential sensor is disposed on both sides of the non-contact sensor.
The non-contact differential sensor of claim 1, wherein the non-contact differential sensor comprises: a plurality of sensor electrodes disposed corresponding to the length direction of the pattern electrode adjacent to the pattern electrode; And
And a comparator configured to differentially input voltages sensed from the plurality of sensor electrodes and output differential voltages.
4. The sensor of claim 3, wherein the plurality of sensor electrodes include a first sensor electrode, a second sensor electrode, and a third sensor electrode arranged in a row, and the first sensor electrode and the third sensor electrode are connected to one terminal of the comparator. And the second sensor electrode is connected to the other terminal of the comparator.
A plurality of sensor electrodes arranged to correspond in the longitudinal direction of the pattern electrode; And
And a comparator configured to differentially input voltages sensed from the plurality of sensor electrodes and output a differential voltage.
In the plurality of sensor electrodes, a first sensor electrode, a second sensor electrode, and a third sensor electrode are arranged in a line, and the first sensor electrode and the third sensor electrode are connected to one terminal of the comparator. Capacitive differential sensor module, characterized in that the two sensor electrode is connected to the other terminal of the comparator.
delete A feeding probe configured to apply AC power to the pattern electrode while scanning in a vertical direction at one end of the pattern electrode of the display panel;
A capacitive differential sensor module configured to measure a voltage at the pattern electrode and a difference voltage at an adjacent pattern electrode while scanning in the vertical direction at the other end of the pattern electrode to which AC power is applied through the feed probe; And
Determining a cross short of the pattern electrode in contact with the feed probe based on the voltage measured from the capacitive differential sensor module and the differential voltage while controlling the scan of the feed probe and the capacitive differential sensor module. An inspection apparatus for a display panel using a capacitive differential sensor module comprising a control unit.
The method of claim 7, wherein the capacitive differential sensor module comprises a non-contact sensor for outputting a sensed voltage corresponding to the pattern electrode; And
And a non-contact differential sensor disposed in parallel with the non-contact sensor and outputting a differential voltage from the pattern electrode adjacent to the pattern electrode.
The apparatus of claim 8, wherein the non-contact differential sensor is disposed on both sides of the non-contact sensor.
The non-contact differential sensor of claim 8 or 9, further comprising: a plurality of sensor electrodes correspondingly disposed in the longitudinal direction of the pattern electrode adjacent to the pattern electrode; And
And a comparator configured to differentially input voltages sensed by the plurality of sensor electrodes and output differential voltages.
The sensor of claim 10, wherein the plurality of sensor electrodes include a first sensor electrode, a second sensor electrode, and a third sensor electrode arranged in a row, and the first sensor electrode and the third sensor electrode are connected to one terminal of the comparator. And a second sensor electrode is connected to the other terminal of the comparator.
A feeding probe configured to apply AC power to the pattern electrode while scanning in a vertical direction at one end of the pattern electrode of the display panel;
A capacitive differential sensor module for measuring a differential voltage at the pattern electrode while scanning in the vertical direction at the other end of the pattern electrode to which AC power is applied through the feed probe; And
A control unit for controlling a scan of the feed probe and the capacitive differential sensor module to determine a cross short of the pattern electrode contacting the feed probe based on the difference voltage measured from the capacitive differential sensor module; Display panel inspection device using a capacitive differential sensor module comprising a.
The method of claim 12, wherein the capacitive differential sensor module
A plurality of sensor electrodes arranged to correspond in the longitudinal direction of the pattern electrode; And
And a comparator configured to differentially input voltages sensed by the plurality of sensor electrodes and output differential voltages.
The sensor of claim 13, wherein the plurality of sensor electrodes include a first sensor electrode, a second sensor electrode, and a third sensor electrode arranged in a row, and the first sensor electrode and the third sensor electrode are connected to one terminal of the comparator. And a second sensor electrode is connected to the other terminal of the comparator.

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