CN108039405B - Piezoelectric element, piezoelectric sensor, speed and displacement detection device - Google Patents
Piezoelectric element, piezoelectric sensor, speed and displacement detection device Download PDFInfo
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- CN108039405B CN108039405B CN201810026290.5A CN201810026290A CN108039405B CN 108039405 B CN108039405 B CN 108039405B CN 201810026290 A CN201810026290 A CN 201810026290A CN 108039405 B CN108039405 B CN 108039405B
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/1051—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D21/00—Measuring or testing not otherwise provided for
- G01D21/02—Measuring two or more variables by means not covered by a single other subclass
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
- H10N30/302—Sensors
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
- H10N30/308—Membrane type
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/857—Macromolecular compositions
Abstract
The present invention relates to a piezoelectric element, a piezoelectric sensor, and a speed and displacement detection device. The piezoelectric element comprises a piezoelectric sheet, wherein the piezoelectric sheet comprises a piezoelectric film layer, electrode layers arranged on the upper surface and the lower surface of the piezoelectric film layer, and an insulating layer covered on the outer surface of each electrode layer; each electrode layer leads out a signal line. The piezoelectric sensor comprises a piezoelectric element and a flexible mechanism, wherein the flexible mechanism comprises a base serving as a sensor probe and flexible substrates embedded on two sides of the base, the piezoelectric element is adhered to the surface of at least any flexible substrate, the bottom end of the piezoelectric element is aligned with one end of the flexible substrate, and the top end of the piezoelectric element is aligned with the edge of the base. The speed and displacement detection device comprises a piezoelectric sensor, wherein one signal wire is connected with the anodes of the charge amplifier and the current amplifier, and the other signal wire is connected with the cathodes of the charge amplifier and the current amplifier. The piezoelectric element and the piezoelectric sensor can meet the requirements of high-precision and high-frequency response measurement of displacement and linear speed with strict volume requirements.
Description
Technical Field
The invention belongs to the technical field of sensing and testing, and particularly relates to a piezoelectric element, a piezoelectric sensor and a speed and displacement detection device.
Background
Piezoelectric thin films, such as the well-known PVDF piezoelectric sheet, the well-known piezoelectric fibers, and the like, are used in large numbers for manufacturing sensors due to their excellent flexible and bendable properties. The basic principle of the piezoelectric sensor is based on the positive piezoelectric effect of piezoelectric materials, namely external force or displacement promotes the piezoelectric sheet to generate strain, and then charges are generated on the surface of the piezoelectric sheet. The piezoelectric sensor has the advantages of high precision and high frequency response, and is particularly suitable for dynamic measurement.
Piezoelectric patches are known today for measuring wind speed, strain, force and vibration acceleration in large numbers. For example, patent No. 201310634131.0 designs PVDF ultrasonic sensors for airflow detection; the 201310712358.2 patent uses a piezoelectric PVDF film to measure the stress of concrete; patent No. 200810243318.7 proposes a PVDF array tactile sensor that measures pulse.
Most of currently known sensors for measuring body displacement with high precision are laser displacement sensors, capacitance displacement sensors, eddy current sensors and the like. The laser displacement sensor has a large volume, and although the capacitance micrometer and the eddy current sensor can have the volume of centimeter, the sensors can not be used for displacement measurement in very narrow space, for example, a small multi-degree-of-freedom precision positioning platform has very strict volume and installation of the sensor. In addition, conventional laser displacement sensors, capacitance micrometers, etc., are very expensive for displacement measurement with high accuracy (submicron and nanometer scale), high frequency response (kilohertz on top), and the like.
On the other hand, the currently known rotation speed measurement generally adopts a grating or other modes, but for the measurement of the linear speed, the corresponding sensors are fewer, especially for the high-frequency response and high-precision linear speed measurement of the reciprocating motion, the currently known laser Doppler sensor is very expensive, and the measurement system is complex.
Disclosure of Invention
The invention aims to solve the technical problem of providing a piezoelectric element, a piezoelectric sensor and a speed and displacement detection device, wherein the piezoelectric element and the piezoelectric sensor can meet the requirements of high-precision and high-frequency response measurement of displacement and linear speed with strict volume requirements.
The technical scheme for solving the technical problems is as follows:
the piezoelectric element based on the piezoelectric film comprises a piezoelectric sheet, wherein the piezoelectric sheet comprises a piezoelectric film layer, electrode layers arranged on the upper surface and the lower surface of the piezoelectric film layer, and an insulating layer covered on the outer surface of each electrode layer; and each electrode layer is led out of a signal wire.
The beneficial effects of the invention are as follows: the charge leakage of the piezoelectric sheet is reduced, and the measurement accuracy is improved.
Further, the piezoelectric sheet is triangular in shape and is a flexible piezoelectric sheet, and the insulating layer is a flexible insulating layer.
The beneficial effects of adopting the further scheme are as follows: high sensitivity measurement of body displacement and linear velocity is ensured.
Further, the piezoelectric film layer is a PVDF piezoelectric film.
The piezoelectric sensor based on the piezoelectric film comprises the piezoelectric element and the flexible mechanism, wherein the flexible mechanism comprises a base serving as a sensor measuring head and flexible substrates embedded on two sides of the base, the piezoelectric element is adhered to at least any one surface of the flexible substrates, the bottom end of the piezoelectric element is aligned with one end of the flexible substrates, and the top end of the piezoelectric element is aligned with the edge of the base.
The beneficial effects of the invention are as follows: the transmission and sensing of displacement and speed are realized by using the deformation of the flexible mechanism.
Further, the flexible substrate comprises two support blocks, and each support block is respectively and rigidly connected with one end of each flexible substrate.
The beneficial effects of adopting the further scheme are as follows: the support structure is made stationary relative to the object under measurement during measurement, thereby effecting measurement of body displacement and velocity.
The invention also provides a device for detecting the speed and the displacement based on the piezoelectric film, which comprises the piezoelectric sensor, wherein one signal wire is connected with the anodes of the charge amplifier and the current amplifier, and the other signal wire is connected with the cathodes of the charge amplifier and the current amplifier.
The beneficial effects of the invention are as follows: the invention is a piezoelectric sensor formed by flexible piezoelectric sheet and flexible mechanism, its outstanding characteristic is that the flexible piezoelectric sheet is triangle-shaped, the charge amplifier is the well-known charge amplifying circuit, its output voltage is used for measuring the displacement; the current amplifier is a well-known current amplifying circuit, and the output voltage of the current amplifier is used for measuring the speed, so that the measurement of the body displacement and the linear speed is ensured, the current amplifier is suitable for occasions with very small volume and installation space, and has high measurement precision and frequency response and popularization and use values.
Drawings
Fig. 1 is a schematic view of a piezoelectric element according to the present invention;
FIG. 2 is a block diagram of a sensor in accordance with the present invention;
FIG. 3 is a schematic diagram of five piezoelectric element layouts of the sensor according to the present invention; A-E in the figure respectively show the layout modes of five piezoelectric elements of the sensor;
FIG. 4 is a block diagram of a speed and displacement detection device of the present invention;
FIG. 5 is one embodiment of the measurement method of the present invention for precision positioning stage displacement and velocity measurement;
FIG. 6 is one embodiment of the sensor of the present invention for vibration displacement and velocity measurement.
In the figure: the piezoelectric device comprises a 1-piezoelectric sheet, a 2-insulating layer, a 3-signal wire, a 4-supporting structure, a 5-charge amplifier, a 6-current amplifier, a 7-flexible substrate, an 8-base, a 9-piezoelectric film layer, a 10-electrode layer, an 11-precision positioning platform and a 12-vibration table.
Detailed Description
The principles and features of the present invention are described below with reference to the drawings, the examples are illustrated for the purpose of illustrating the invention and are not to be construed as limiting the scope of the invention.
As shown in fig. 1, the present invention relates to a piezoelectric element based on a piezoelectric film, comprising a piezoelectric sheet 1, wherein the piezoelectric sheet 1 comprises a piezoelectric film layer 9, electrode layers 10 arranged on the upper and lower surfaces of the piezoelectric film layer 9, and an insulating layer 2 covered on the outer surface of each electrode layer 10; each electrode layer 10 leads out one signal line 3.
The piezoelectric sheet 1 is triangular in shape and is a flexible piezoelectric sheet, and the insulating layer is a flexible insulating layer. The piezoelectric film layer 9 is a PVDF piezoelectric film.
As shown in fig. 2 and 3, a piezoelectric sensor based on a piezoelectric film comprises the piezoelectric element and a flexible mechanism, wherein the flexible mechanism comprises a base 8 serving as a sensor probe and flexible substrates 7 embedded on two sides of the base 8, the piezoelectric element is adhered to at least one surface of the flexible substrates 7, the bottom end of the piezoelectric element is aligned with one end of the flexible substrates 7, and the top end of the piezoelectric element is aligned with the edge of the base 8.
The flexible substrate comprises a flexible substrate, and is characterized by further comprising two supporting blocks, wherein each supporting block is respectively and rigidly connected with one end of each flexible substrate.
As shown in fig. 4, a device for detecting speed and displacement based on a piezoelectric film includes the piezoelectric sensor, in which one signal line 3 is connected to the positive electrodes of the charge amplifier 5 and the current amplifier 6, and the other signal line 3 is connected to the negative electrodes of the charge amplifier 5 and the current amplifier 6. Wherein the charge amplifier 5 is a well-known charge amplifying circuit, and the output voltage thereof is used for measuring displacement; the current amplifier 6 is a well-known current amplifying circuit, and the output voltage thereof is used for measuring the speed. The flexible mechanism is fixed at two ends and consists of a flexible substrate 7 and a base 8, and the movement displacement and the speed of the base are measured objects. The piezoelectric element is adhered to the surface of the flexible substrate 7 of the flexible mechanism, the bottom end of the piezoelectric element is aligned with the fixed end of the flexible substrate 7, and the top end of the piezoelectric element is aligned with the edge of the base 8 of the flexible mechanism. When the base 8 of the flexible mechanism moves and displaces, the flexible substrate 7 bends, and further strain is generated inside the flexible substrate, so that the piezoelectric element generates charges, and the measured sensing is realized. The support structure 4 is a structural support body of the sensor, and the support structure 4 is stationary relative to the object to be measured during measurement.
As shown in fig. 5, a known precision positioning platform 11 is shown, a large number of flexible mechanisms exist in the precision positioning platform 11, and when the precision positioning platform is applied, the piezoelectric element is only required to be adhered on the surface of a flexible substrate 7 of the flexible mechanism, wherein one signal wire 3 is connected with the positive poles of the charge amplifier 5 and the current amplifier 6, and the other signal wire 3 is connected with the negative poles of the charge amplifier 5 and the current amplifier 6. Wherein the charge amplifier 5 is a well-known charge amplifying circuit, and the output voltage thereof is used for measuring displacement; the current amplifier 6 is a well-known current amplifying circuit, and the output voltage thereof is used for measuring the speed. The motion displacement of the base 8 of the flexible mechanism is approximately equal to the displacement of the output end of the precision positioning platform 11, the displacement and the speed of the base 8 are measured through the piezoelectric element, and the motion displacement and the motion speed of the precision positioning platform can be obtained.
Specifically, the piezoelectric sheet 1 is preferably a known piezoelectric polymer film, that is, a PVDF piezoelectric film.
Specifically, two identical piezoelectric sheets 1 are simultaneously adhered to the upper and lower surfaces of the flexible substrate 7 to form a differential measurement mode, thereby improving measurement accuracy.
As shown in fig. 6, an embodiment of the present invention for measuring vibration displacement and linear velocity on the vibration table 12 includes the piezoelectric sensor described above, in which one signal line is connected to the positive electrodes of the charge amplifier and the current amplifier, and the other signal line is connected to the negative electrodes of the charge amplifier and the current amplifier. During measurement, the base 8 of the sensor, namely the sensor probe, is stuck to a measured object, wherein one signal wire 3 is connected with the anodes of the charge amplifier 5 and the current amplifier 6, and the other signal wire 3 is connected with the cathodes of the charge amplifier 5 and the current amplifier 6. Wherein the charge amplifier 5 is a well-known charge amplifying circuit, and the output voltage thereof is used for measuring displacement; the current amplifier 6 is a well-known current amplifying circuit, and the output voltage thereof is used for measuring the speed. When the tested object is displaced, the flexible substrate 7 of the sensor is bent and deformed, so that the piezoelectric element adhered to the surface of the flexible substrate 7 is strained, and the vibration displacement and the speed are measured.
The foregoing description of the preferred embodiments of the invention is not intended to limit the invention to the precise form disclosed, and any such modifications, equivalents, and alternatives falling within the spirit and scope of the invention are intended to be included within the scope of the invention.
Claims (3)
1. A piezoelectric sensor, comprising a piezoelectric element and a flexible mechanism, wherein the flexible mechanism comprises a base serving as a sensor probe and flexible substrates embedded on two sides of the base, the piezoelectric element is adhered to the surface of at least any flexible substrate, the bottom end of the piezoelectric element is aligned with one end of the flexible substrate, and the top end of the piezoelectric element is aligned with the edge of the base;
the piezoelectric element comprises a piezoelectric sheet, wherein the piezoelectric sheet comprises a piezoelectric film layer, electrode layers arranged on the upper surface and the lower surface of the piezoelectric film layer, and an insulating layer covered on the outer surface of each electrode layer; each electrode layer is led out of a signal wire; the piezoelectric sheet is triangular in shape and flexible, and the insulating layer is a flexible insulating layer; the piezoelectric film layer is a PVDF piezoelectric film.
2. The piezoelectric sensor of claim 1, further comprising two support blocks, each support block rigidly connected to one end of each flexible substrate.
3. A speed and displacement detecting device comprising the piezoelectric sensor according to claim 1 or 2, wherein one signal line is connected to the positive electrodes of the charge amplifier and the current amplifier, and the other signal line is connected to the negative electrodes of the charge amplifier and the current amplifier.
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| CN108039405B true CN108039405B (en) | 2023-10-20 |
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