KR20070056950A - Sensor substrate, and inspecting method and apparatus using the sensor substrate - Google Patents

Abstract

A sensor substrate, and an inspecting method and a device using the sensor substrate are provided to determine that a cable is disconnected if an abnormal signal is output from a sensor circuit, by relatively moving the sensor substrate and a substrate to be inspected, and then supplying an inspection signal from a feed electrode to the cable. A sensor substrate(20) for inspecting a substrate having plural cables arranged at regular intervals in a first direction and extended in a second direction is composed of at least one feed electrode(24) supplying an inspection signal without contacting to the cable; plural receiving electrodes(28) aligned at regular intervals at least in a first direction and extended at regular intervals from the feed electrode toward a second direction to receive the inspection signal fed to the cable without contact; and plural sensor circuits outputting an electric signal indicating whether the receiving electrodes receive the signal or not.

Description

Sensor Substrate, and Inspecting Method and Apparatus Using the Sensor Substrate}

1 is a plan view showing the relationship between the sensor substrate and the inspected object according to the present invention.

FIG. 2 is a right side view of FIG. 1.

3 is a bottom view of one embodiment of a sensor substrate.

4 is a diagram illustrating an embodiment of a sensor circuit.

5 is a view showing waveforms of electric signals.

6 is a diagram for explaining one example of a detection method of disconnection.

7 is a view for explaining an example of the detection method of the mutual short circuit.

8 is a diagram for explaining one example of the detection method of a cross short circuit.

9 is a bottom view showing another embodiment of a sensor substrate.

FIG. 10 is a bottom view showing one embodiment of a cross short circuit when the sensor substrate shown in FIG. 9 is used.

11 is a view showing an embodiment of an electric circuit of the inspection apparatus according to the present invention.

FIG. 12 is a diagram for explaining one embodiment of a method for detecting disconnection and short circuit by the circuit of FIG.

Figure 13 is a front view showing one embodiment of a mechanism of the inspection apparatus according to the present invention.

FIG. 14 is a plan view of the inspection apparatus shown in FIG. 13, in which part of the sensor substrate and the conveying apparatus and a part of the supporting member are omitted.

FIG. 15 is a right side view of the inspection apparatus shown in FIG.

Fig. 16 is an enlarged front view showing the relationship between the transfer device and the sensor substrate.

Figure 17 is an enlarged plan view of one embodiment of a holder mechanism and a holder carrying mechanism.

18 is a cross-sectional view taken along line 18-18 of FIG.

19 is a layout view showing another embodiment of a sensor substrate.

Description of the main symbols in the drawings

10: inspection device 12: test substrate

14, 36: glass plate 16, 18: converter

20, 60: sensor substrate 22: sensor circuit group

24, 26, 62: power feeding electrode 28: power receiving electrode

30, 32, 34: terminal 38: sensor circuit

30, 40, 41, 44: wiring 42: flat cable

54: disconnection part 56: short circuit pattern

58: cross disconnection part 130: frame

132: conveying device 136: delivery device

138: centering device 144, 146: first and second conveying member

148: base plate 150: assembly device

158: conveying auxiliary device 160: support member

162: substrate holder 164, 176: actuator

166: Shanghai East Organization 168: Stopper

170: groove 172: rod

174: bush 178: sensor circuit

Field of invention

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sensor substrate used for inspecting a test target substrate having a plurality of wirings, such as a glass substrate for a liquid crystal display panel, and an inspection method and apparatus using the same.

Background of the Invention

Substrates, such as glass substrates used in liquid crystal display panels, having a plurality of wires (i.e., converters) extending longitudinally and horizontally, are inspected for disconnection and short-circuit of these wires. . There is a technique described in Patent Document 1 as one of a sensor substrate used for such an inspection, an inspection method and an apparatus using the same.

[Patent Document 1] Japanese Patent Laid-Open No. 2004-191381

The sensor substrate in the prior art is provided with at least one pair of feeding electrodes and receiving electrodes spaced in the longitudinal direction of the wiring formed on the glass substrate as the test target board.

The inspection using the sensor substrate is performed by supplying an AC signal from the feed electrode toward the wiring with the feed electrode and the receiving electrode of the sensor substrate facing each other at one end and the other end of the inspected region of the wiring, respectively, and the inspection. This is done by moving the sensor substrate across a number of wires to be inspected while receiving a signal at the receiving electrode through the wires.

An abnormality in wiring is performed by determining that the wiring is disconnected when the test signal is not received by the power receiving electrode through the wiring even though the power feeding electrode and the receiving electrode face the wiring.

However, in the prior art, the sensor substrate is moved in a direction crossing the wiring in a state where both electrodes are spaced apart in the longitudinal direction of the wiring. Therefore, the presence or absence of a disconnection can be detected only by the above inspection, but the disconnection part in the longitudinal direction of a wiring cannot be detected.

Therefore, in the above-mentioned prior art, in order to specify the disconnected portion, the two electrodes are returned to the position of the disconnected wiring, and the test signal is received by allowing one of both electrodes to approach the other side while transmitting and receiving the test signal again. The operation which detects the part which cannot be received by an electrode is performed for every disconnected wiring.

In the above prior art, the step of specifying the disconnection part in the longitudinal direction of the wiring must be performed in addition to the inspection step for the presence or absence of disconnection, and must be performed for each disconnected wiring.

The present invention has been made to solve such a problem, and its object is to make the presence or absence of disconnection and the disconnection part by moving the sensor substrate and the inspected substrate relatively once.

The sensor substrate according to the present invention and an inspection method and apparatus using the same are used for inspection of a substrate under test such as a glass substrate of a display panel having a plurality of converters extending in a second direction at intervals in a first direction.

The sensor substrate according to the present invention contacts at least one feed electrode for supplying an inspection signal without contacting the converter, and a plurality of receiving electrodes spaced in at least the first direction, the inspection signal supplied to the converter at least. And a plurality of receiving electrodes spaced apart from the feeding electrode in the second direction so as to be accommodated therein, and a plurality of sensor circuits for outputting an electrical signal indicating the presence or absence of a received signal at the receiving electrode.

At least two power feeding electrodes spaced in the first direction are provided, and the plurality of power receiving electrodes are each at least one power receiving electrode group corresponding one to one to the power feeding electrodes at intervals in the first direction. It is also preferable that each is divided into a group of receiving electrodes including a plurality of receiving electrodes capable of receiving inspection signals from corresponding feed electrodes.

It is also preferable that a plurality of the feeding electrodes spaced apart in the first direction is provided, and the plurality of receiving electrodes correspond one-to-one to the feeding electrodes.

It is also preferable that the plurality of sensor circuits are connected one-to-one to the receiving electrode.

The substrate to be inspected further includes a plurality of second converters extending in the first direction at intervals in the second direction, and the sensor substrate further includes at least two supplying a second test signal to the second converter. It may further include a second feed electrode.

The second feed electrode may be disposed at a portion deviated from the placement of the feed electrode and the receiver electrode in the first direction.

In the inspection method according to the present invention, in a state in which the feed electrode and the receiving electrode are opposed to each other at intervals in the second direction, a moving step of relatively moving the sensor substrate and the inspected substrate in the second direction. And a feeding step of supplying a test signal to the feeding electrode during the moving step, and a determining step of determining whether the converter is defective based on the output signal of the sensor circuit during the feeding step.

Preferably, the power feeding step supplies the inspection signals to the plurality of feeding electrodes at different timings, and the determining step is synchronized with the feeding timing of the feeding electrodes to determine whether the converter is defective. .

The determining step may also determine whether the converter is defective based on the output signal of the sensor circuit connected to the receiving electrode opposite to the converter and the output signal of the sensor circuit connected to the receiving electrode not opposite to the converter. Do.

The feeding step or inspection signal generating circuit supplies the second inspection signal to the second feeding electrode, and the determining step or the determining circuit crosses a path opposite to the electrode receiving the second inspection signal. May be determined to be.

In the determining step, the defective portion of the converter may be specified from the relative position of the sensor substrate and the inspected substrate in the second direction when the converter is judged to be defective.

An inspection apparatus according to the present invention includes a test signal generating circuit for generating a test signal supplied to the feed electrode, the sensor substrate as described above in a state in which the feed electrode and the receiving electrode face each other at intervals in the second direction; A moving device for relatively moving the substrate under test in the second direction, and an output signal of the sensor circuit while the sensor substrate and the substrate under test are moved by the moving apparatus and the inspection signal is supplied to the feed electrode; On the basis of the, and includes a determination circuit for determining whether the converter is defective.

The determination circuit determines whether the converter is defective based on the output signal of the sensor circuit connected to the receiving electrode opposite to the converter and the output signal of the sensor circuit connected to the receiving electrode not opposite to the converter. desirable.

The inspection signal generating circuit may further supply the second inspection signal to the second feed electrode, and the determination circuit may determine that the path opposite to the electrode receiving the second inspection signal is a cross failure.

It is also preferable that the determination circuit specifies the defective portion of the converter from the relative position of the sensor substrate and the inspected substrate in the second direction when the converter is judged to be defective.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

Example

[Example of Substrate to Test]

1 and 2, the inspection apparatus 10 is used to inspect the substrate 12 to be inspected. The inspected substrate 12 is an unfinished inspected substrate, such as a glass substrate for a liquid crystal display panel, and has a plurality of wiring areas (6 in the example in the figure), each of which serves as a glass substrate of the completed liquid crystal display panel. .

The substrate under test 12 includes a plurality of first converters 16 formed in parallel on one surface of each wiring region of the rectangular glass plate 14 having flexibility, and a plurality of second formed in parallel. Has a converter 18. The first and second converters 16 and 18 are electrically insulated by transparent insulating layers (not shown) disposed therebetween.

The first converter 16 extends in-plane parallel to the glass plate 14 in the second direction at intervals in the first direction, and the second converter 18 is in-plane parallel to the glass plate 14. Extends in the first direction at intervals in a second direction crossing the first direction.

Both the first and second converters 16 and 18 are part of the conductive wiring pattern (ie, wiring), and the second converters 18 are formed on the glass plate 14 side rather than the first converter 16. Laminated through an insulating layer.

[Example of sensor board]

The inspection apparatus 10 includes a sensor substrate 20.

As shown in Fig. 3, the sensor substrate 20 includes a sensor circuit group 22 including a plurality of sensor circuits 38 to be described below, at least two feed electrodes 24 and 26, and a sensor. A plurality of power receiving electrodes 28 one-to-one corresponding to the circuit 38, a plurality of terminals 30 connected one-to-one to the terminals of the sensor circuit 38, and at least one-to-one connected to the feeding electrodes 24 and 26. Two terminals 32 and 34 are formed on one surface of the rectangular glass plate 36.

The feed electrodes 24 and 26 have a long band-like shape in the longitudinal direction of the glass plate 36 (in the example shown in the first direction), and the second direction in the width direction of the glass plate 36 (in the example shown in the figure). Direction) is formed at intervals in the first direction at one end.

In the example of illustration, the feed electrodes 24 and 26 are each the center area | region 24a and 26a which continue in a 1st direction (left-right direction in FIG. 3), and the width direction of the center area | region 24a and 26a, respectively. It has protrusions 24b and 26b projecting in the second direction (up and down direction in Fig. 3) at intervals in the first direction from the edges.

The receiving electrode 28 is formed in a zigzag shape in the center region of the width direction of the glass plate 14 so that the electrodes 28 adjacent to each other are spaced in the first direction and the second direction, and the feeding electrode 24 or 26 is divided into two electrode groups corresponding one-to-one.

The position of each power receiving electrode 28 in the first direction is such that the inspection signal from the corresponding power supply electrode 24 or 26 can be received in the first direction of the corresponding power supply electrode 24 or 26. Is consistent with the location. In the example of illustration, in order to raise the certainty of transmission and reception of a test signal, the position of each receiving electrode 28 in a 1st direction is matched with the position of the protrusion part 24b or 26b of the same direction.

The terminal 30 is formed at the other end in the width direction of the glass plate 36 at intervals in the first direction. The terminals 32 and 34 are formed in the outer region of one end and the other end of the arrangement area of the terminal 30 in the first direction, respectively.

The feed electrodes 24 and 26 are connected to the terminals 32 and 34 by the wirings 39 and 40, respectively, and each of the power receiving electrodes 28 is connected to the corresponding sensor circuit 38 by the wiring 41. have.

Each terminal 30 is connected to any terminal of the sensor circuit 38 by the wiring 44 as described below with reference to FIG. The terminals 30, 32, and 34 are connected to any wiring of the plurality of flat cables 42 having flexibility.

As shown in FIG. 4, each sensor circuit 38 of the sensor circuit group 22 includes a field effect thin film transistor 46, a load resistor 48 whose one end is connected to the source electrode of the transistor 46, and One end includes an output diode 50 connected between the source electrode of the transistor 46 and the load resistor 48.

The output signal of the sensor circuit 38 is sequentially read when the test signal is supplied to the corresponding feeder electrode 24 or 26 to the control device 78 described below, and the converter (s) is connected to the control device 78. 16) is used to determine whether there is a defect and to specify a defective portion.

The gate electrode of the transistor 46 is connected to the corresponding receiving electrode 28 by the wiring 41, the other end of the load resistor 48 is connected to the terminal 30 by the wiring 44, and the output The other end of the diode 50 is connected to the terminal 30 by the other wiring 44. In contrast, the drain electrode of the transistor 46 is connected to the earth electrode in common with the drain electrode of the other transistor 46 by the internal wiring 52.

At least one terminal 30 is an earth terminal and is connected to the earth electrode by a certain wiring 52.

The sensor circuit group 22 manufactures a known thin film semiconductor integrated circuit together with a feed electrode 24, 26, a detection electrode 28, terminals 30, 32, 34, and wirings 39, 40, 41, 44. It can manufacture on the lower surface of the glass plate 36 by a technique.

The inspected object 12 and the sensor substrate 20 are formed on the side of the surface where the sensor circuit group 22 is formed with the converters 16, 18 of the inspected substrate 12, and the feed electrodes 24, 26 and the power receiver are provided. The electrodes 28 are opposed to be spaced apart in the longitudinal direction of the converter 16 so that a predetermined interval G (for example, 50 µm) is maintained with respect to the substrate 12 to be inspected.

In this state, the inspected object 12 and the sensor substrate 20 are relatively moved in the longitudinal direction of the converter 16. The relative movement of the inspected object 12 and the sensor substrate 20 may be continuous or intermittent.

EXAMPLE OF INSPECTION METHOD

6 to 8, the arrangement pitch of the receiving electrode 28 in the first direction is two times or more (12 times in the example shown) of the converter 16 in the same direction. . Thus, while the object 12 and the sensor substrate 20 are relatively moved, at least one receiving electrode 28 is opposed to one converter 16, and the other at least one receiving electrode 28 The converter 16 is also not opposed.

While the inspected object 12 and the sensor substrate 20 are relatively moved as described above, the AC inspection signal is alternately supplied to the feed electrodes 24 and 26 alternately. As a result, alternating current inspection signals are induced in each of the converters 16, and the inspection for specifying the presence or absence of disconnection, mutual short circuit and cross short circuit and these defective parts is repeatedly performed.

The output signals of all the sensor circuits 38 are sequentially read at least once by the control device 78 described below at least once while the test signal is supplied to the feed electrode 24 to determine whether the converter 16 is defective. At the same time, the test signal is sequentially read by the control device 78 at least once while the test signal is supplied to the feed electrode 26, and used to determine whether the converter 16 is defective.

Fig. 5A shows one example of the waveform of the test signal supplied to the feed electrode 24, and Fig. 5B is one of the waveform of the test signal supplied to the feed electrode 26. Figs. An example is shown.

5C to 5G show signals after rectifying the output signal of the sensor circuit 38 and shaping the waveform. However, in the following description, for ease of understanding, the signals shown in Figs. 5C to 5G are simply referred to as "processed signals".

The test signal supplied to the feed electrode 24 and the test signal supplied to the feed electrode 26 have the same frequency but different supply timing, that is, feed timing (feed phase). However, it is also preferable that the test signal supplied to the feed electrode 24 and the test signal supplied to the feed electrode 26 have different frequencies.

If the converter 16 is normal, the receiving electrode 28 facing the converter 16 receives a test signal, and the sensor circuit 38 corresponding to the receiving electrode 28 has a predetermined timing, that is, the receiving timing ( A signal indicating "with signal" is output in the power reception phase).

Since the test signal is not received by the power receiving electrode 28 which is not opposed to the converter 16, the sensor circuit 38 corresponding to the power receiving electrode 28 has a " signal " Is not displayed. That is, a signal indicating "no signal" is output.

Based on the above two conditions, it can be determined that "the current position of the converter 16 is normal."

5C shows an output of the sensor circuit 38 for processing the received signal of the receiving electrode 28 opposite to the converter 16 among the receiving electrodes 28 belonging to the electrode group corresponding to the feeding electrode 24. Indicates a signal processing signal.

5D shows the output of the sensor circuit 38 for processing the received signal of the receiving electrode 28 opposite to the converter 16 among the receiving electrodes 28 belonging to the electrode group corresponding to the feeding electrode 26. Indicates a signal processing signal.

However, as shown by the numeral 54 in Fig. 6, when the converter 16a is disconnected, the test signal does not reach the receiving electrode 28a opposite to the converter 16a. As a result, a signal indicating " with signal " which becomes a processing signal indicated by a dotted line in Fig. 5E at the timing (that is, the power reception timing) at which the sensor circuit 38 corresponding to the power receiving electrode 28a should output the signal. Is not output (the output signal is a signal indicating "no signal"). Thereby, it can be determined that "the converter 16 is disconnected."

5E shows a sensor circuit 38 for processing the received signal of the receiving electrode 28a opposite to the disconnected converter 16a among the receiving electrodes 28 belonging to the electrode group corresponding to the feeding electrode 24. FIG. Indicates a processing signal of an output signal.

As shown by reference numeral 56 in FIG. 7, at least two converters 16b and 16b are short-circuited by the short-circuit pattern 56, they are not opposed to any of the converters 16 and are connected to the short-circuit pattern 56. The opposite receiving electrode 28b receives a test signal. As a result, the sensor circuit 38 corresponding to the power receiving electrode 28b outputs a signal indicating " signal present " which becomes the processing signal shown in Fig. 5F. Thereby, it can be determined that "at least two converter paths 16b are mutually shorted".

As shown by the symbol 58 in FIG. 8, when the converter 16c is shorted to the at least one converter 18c, the receiving electrode 28c opposite to the converter 16c should not receive a signal. The test signal via the converter 18c is received at the timing (that is, the non-receiver timing). As a result, the sensor circuit 38 corresponding to the power receiving electrode 28c outputs a signal indicating "with signal", which becomes the processing signal shown in Fig. 5G. Thereby, it can be determined that "the converters 16c and 18c are cross shorted."

The sensor circuit 38 that processes the received signal of the power receiving electrode 28 belonging to the electrode group corresponding to the power feeding electrode 26 has a timing of outputting a signal indicating "with signal" or "no signal" (i.e., receiving power). Timing) is different from the sensor circuit 38 which processes the received signal of the receiving electrode 28 belonging to the electrode group corresponding to the feeding electrode 24, and operates in the same manner.

As described above, the determination that the circuit 16 is disconnected, short-circuited, or cross short-circuited changes from the presence of the reception signal at the corresponding reception electrode to the absence of the reception signal at the corresponding reception electrode. Can be performed in at least one case selected from the group including when there is no reception signal at the corresponding receiving electrode and when there is no combination thereof.

The disconnected converters 16a, the mutually shorted converters 16b and 16b, the cross-connected converters 16c and 18c, and the like are in the first direction when it is determined that they are disconnected, mutual short or cross short. The relative position of the sensor substrate 20 and the substrate under test 12, that is, the coordinate value (for example, the position of the converter 16 or the receiving electrode 28 in the first direction, that is, the converter 16 or the power receiver). Number of the electrode 28).

The defective part of the converter 16 is a relative position of the sensor substrate 20 and the inspected substrate 12 in the second direction when it is determined that "the converter is defective" (for example, in the second direction). Can be specified from the coordinate electrode between the receiving electrode 28, the substrate 12 under test, or the converter 16).

As described above, the defective converter and the defective part thereof can be identified from the relative positions of the sensor substrate 20 and the inspected substrate 12 in the second direction when it is determined that "the converter is defective".

Specifically, the disconnection portion in the longitudinal direction of the converter is changed from the presence of the inspection signal to be received by the reception electrode 28 to the absence of the reception signal at the reception electrode 28, and the reception electrode. The relative position between the sensor substrate 20 and the inspected substrate 12 in the second direction in at least one case selected from the group including when the received signal in (28) changes from none to present ( That is, the coordinate value) can be specified.

[Other Embodiments of Sensor Board]

9 and 10, instead of the feed electrodes 24 and 26 in the sensor substrate 20 shown in Fig. 3, a plurality of sensor substrates 60 correspond to the power receiver electrodes 28 one-to-one. The feed electrode 62 is provided at one end in the width direction of the glass plate 14 so as to be spaced apart in the first direction and the second direction.

In the example of illustration, the arrangement pitch of the feeder electrode 62 in a 1st direction is 2 times or more (4 times in the example of illustration) of the arrangement pitch of the converter 16 in the same direction. Therefore, the feed electrode 62 is divided into four electrode groups.

Hereinafter, when referring to each of the feed electrodes 62 of each electrode group, "first feed electrode 62", "second feed electrode 62", "third feed electrode 62" or "fourth" Power feeding electrode 62 ".

In addition, the sensor substrate 60 replaces the terminals 32 and 34 of the sensor substrate 20 shown in FIG. 3 with two groups of terminals 64 each including first, second, third and fourth terminals. And 64). The terminals 64 and 64 of one and the other group are formed in one end of the arrangement area of the terminal 30 in the first direction and an outer area of the other end, respectively.

The first, second, third and fourth terminals of each group correspond to the first, second, third and fourth feed electrodes, respectively, so that the corresponding first, second, third and fourth feed electrodes It is connected to 62 in common. The feed electrode 62 is further divided into a counter electrode group corresponding to the terminal 64 of one group and a counter electrode group corresponding to the terminal 64 of the other group.

The first second, third and fourth feed electrodes 62 of one counter electrode group are respectively connected to the first, second, third and fourth terminals 64 of one group of the first, second, third and fourth terminals 64. The second, third, and fourth wirings 66 are commonly connected. The first, second, third and fourth feed electrodes 62 of the other counter electrode group are respectively connected to the terminals 64 of the other group of the first, second, third and fourth of the other group. The wirings 66 are connected in common.

However, instead of dividing the feed electrode 62 into a large electrode group and connecting the two groups of terminals 64 as described above, one group of first, second, third and fourth terminals 64 is provided. It is also preferable that the first, second, third and fourth feed electrodes 62 are commonly connected to the first, second, third and fourth terminals 64 of the one group, respectively.

In the inspection using the sensor substrate 60, while the inspection target substrate 12 and the sensor substrate 60 are relatively moved in the longitudinal direction of the converter 16, the inspection signals are first, second, third, and the like. The fourth power supply electrode 62 is sequentially supplied every predetermined time.

The order of supplying the test signal to the power feeding electrode 62 is arbitrary, but for example, it is possible to supply the test signal from the electrode at one end in the first direction to the electrode at the other end. As a result, the inspection signal is repeatedly supplied to each of the feed electrodes 62 intermittently.

The disconnection of the converter 16, the mutual short of the converter 16, the cross short of the converters 16 and 18, and the coordinates of the defective part can be determined or specified in the same manner as that on the sensor substrate 20. .

[Another Embodiment of Sensor Board]

9 and 10, the sensor substrate 60 includes at least one feed electrode 68 for supplying an AC test signal to the converter 18, and a terminal 70 connected to the feed electrode 68. It may further include.

Hereinafter, the feed electrodes 62 and 68 are referred to as first and second feed electrodes, respectively, and the test signals supplied to the first and second feed electrodes are called first and second test signals, respectively. The second test signal for supplying to the second feed electrode 68 is an AC continuous signal. The first and second test signals may be the same frequency or different frequencies.

During the inspection of the sensor substrate 60 including the second feed electrode 68, the first inspection signal while the substrate 12 to be inspected and the sensor substrate 60 are relatively moved in the longitudinal direction of the converter 16. Is sequentially and repeatedly supplied to the first feed electrode every predetermined time, and the second inspection signal is continuously supplied to the second feed electrode 68.

The disconnection of the converter 16, the mutual short circuit of the converter 16, and the coordinates of the defective portion can be determined by the same method as that in the sensor substrate 20. The mutual short circuit of the converters 16 and 18 can be determined as follows.

As shown in FIG. 10, the short circuit portion is shorted with the at least one converter 18d, the receiving electrode 28d opposed to the converter 16d should not receive a signal. The second test signal is received at a timing (i.e., no reception timing).

As a result of the above, the sensor corresponding to the power receiving electrode 28d while the short circuit portion 72 is between the power feeding electrode 62 and the power receiving electrode 28d and the power feeding electrode 68 and the converter 16d are opposed to each other. The circuit 38 continues to output a signal indicating "with signal". Thereby, it can be determined that "the converters 16d and 18d are short-circuited".

The short circuit portion 72 can be specified from the relative positions of the sensor substrate 60 and the inspected object 12 when the sensor circuit 38 outputs a signal indicating "with signal".

[Example of electric circuit of inspection device]

Referring to FIG. 11, the inspection apparatus 10 uses the sensor substrate 20 shown in FIG.

The inspection apparatus 10 includes an inspection signal generation circuit 74 for generating an AC inspection signal, a switching circuit 76 for switching the feed electrodes 24 and 26 to be connected to the inspection signal generation circuit 74, and various A control device 78 for controlling a circuit and a mechanical device and simultaneously processing a signal; a display device 80 controlled by the control device 78 to display various data so that the human eye can see it; A driving device 82 for driving the device, a memory 84 for storing various data, and a switching circuit 86 for switching the sensor circuit 38 (see Fig. 3) to be connected to the control device 78. do.

The test signal is a high frequency signal having a period shorter than the switching period in the switching circuits 76 and 86. Such a test signal is alternately and repeatedly supplied to the feed electrodes 24 and 26 by the switching circuit 76 while the inspected object 12 and the sensor substrate 20 are moved relatively.

The switching circuit 76 sequentially switches the sensor circuit 38 connected to the receiving electrode 28 belonging to the group corresponding to the feeding electrode 24 while the inspection signal is supplied to the feeding electrode 24. The sensor circuit 38 connected to the receiving electrode 28 belonging to the group corresponding to the feeding electrode 24 is sequentially connected while the control device 78 is connected and the inspection signal is supplied to the feeding electrode 26. The control unit 78 is switched to the control unit 78.

The switching frequency of the switching circuit 86 is higher than that of the switching circuit 76. The switching in the switching circuits 76 and 86 is controlled by the square wave switching signal supplied from the control device 78.

The switching frequency of the switching circuits 76 and 86 is, for example, simultaneously with the output signals of all the sensor circuits 38 being sequentially read out to the controller 78 at least once while the test signal is supplied to the feed electrode 24. The output signals of all the sensor circuits 38 can be set to values that can be sequentially read to the control device 78 at least once while the test signal is supplied to the feed electrode 26.

The control device 78 controls the switching circuit 76 to supply the test signal to the feed electrode 24 or 26, while controlling the switching circuit 86 to output an output signal of the sensor circuit 38 (i.e., a reception signal). Are sequentially stored, and the received signals are temporarily stored in the memory 84 together with the relative coordinates of the sensor substrate and the inspected substrate.

The received signal stored in the memory 84 determines the presence or absence of the disconnection and short circuit of the converter 16 in the control device 78 (i.e., whether the converter is defective) and at the same time, specifies the defective portion, and determines the data. It is used for storing in the memory 84 and for displaying on the display device 80 for each converter and for each defective part.

The drive unit 82 drives the conveying apparatus described below. In this conveying apparatus, the sensor circuit group 22 is the surface side on which the converters 16 and 18 of the substrate 12 are formed, and the feeder electrodes 24 and 26 and the receiver electrode 28 are connected to the converters 16. In a state in which the inspection object 12 and the sensor substrate 20 are opposed to each other so as to be spaced in the longitudinal direction, and the inspection object 12 and the sensor substrate 20 are kept at a predetermined interval G with respect to the inspection object substrate 12. The inspected object 12 and the sensor substrate 20 are relatively moved in the longitudinal direction of the converter 16.

Referring to Fig. 12, a method of determining whether a converter is defective by the inspection circuit will be described. 12 shows a flowchart of the determination method based on the output signal of one sensor circuit 38, but the determination based on the output signal of the other sensor circuit 38 also proceeds sequentially.

The inspection alternates the inspection signal to the feed electrodes 24 and 26 while moving the inspected object 12 and the sensor substrate 20 relatively continuously from one end to the other end of the region to be inspected in the converter 16. By supplying.

Prior to relatively moving the inspected object 12 and the sensor substrate 20, the receiving electrode 28 facing the converter 16 is specified to determine the receiving electrode 28 facing the normal converter. The process is performed.

In the above operation, in the state where the sensor substrate 20 is positioned at one end of the inspection region of the converter 16, the inspection signal is alternately supplied to the feed electrodes 24 and 26, and at this time, the receiving power reception receiving the inspection signal. This is done by confirming the electrode 28. The coordinate value in at least the first direction of the power receiving electrode 28 is stored in the memory 84 as the coordinate position of the normal converter.

Subsequently, the control device 78 receives the output signal of one sensor circuit 38, and at the same time, the relative position of the sensor substrate 20 and the inspected substrate 12 in the first direction at that time, namely The coordinate values are checked and stored in the memory together with the relative positions of the received signals (step 100).

The relative position of the sensor substrate 20 and the inspected substrate 12 in the first direction may be, for example, the position of the converter 16 or the receiving electrode 28 in the first direction, that is, the converter or the receiving electrode. The relative position of the power receiving electrode 28 and the substrate under test 12 in the second direction and the number, i.e., the coordinate value.

Subsequently, the controller 78 determines whether the power supply timing is A and the power reception timing is A, the power supply timing is B, and the power reception timing is B, or which one corresponds to (step 101).

The timings A and B are timings for supplying inspection signals to the feed electrodes 24 and 26, respectively. This is due to the alternating supply of test signals to the feed electrodes 24 and 26. Therefore, in step 101, the relationship between the power feeding at the origin and the power receiving timing are determined.

As a result of the determination in step 101, when Yes (timing of power supply and power reception coincides), control device 78 determines whether or not the converter is a normal converter (step 102). In step 102, it is determined whether or not the original view point is a timing at which an output signal of the sensor circuit 38 connected to the receiving electrode 28 opposite to the normal converter should be determined.

As a result of the determination in step 102, in the case of Yes (the determination timing of the output signal of the sensor circuit 38 connected to the receiving electrode 28 opposed to the normal converter, that is, the determination timing of the normal converter), the control device 78 ) Determines whether or not "signal present" is input (step 103). By the said step 103, the presence or absence of the disconnection of the converter 16 is confirmed.

As a result of the determination in step 103, when Yes ("signal present" is input), the control unit 78 determines that the current portion of the normal converter is normal, accepts the next signal, confirms the coordinate value, and the like. The process returns to step 100 to move to the processing of.

As a result of the determination in step 103, in the case of No (no input of " signal "), the control unit 78 determines that the "normal circuit is disconnected" and indicates that the circuit is disconnected. After writing to the memory 84 with the value, the process returns to step 100 (step 104).

As a result of the determination in step 102, in the case of No (not the position of the normal converter), the control device 78 determines whether or not "signal present" is input (step 105). By the above step 105, the mutual short of the converter 16 is confirmed.

As a result of the determination in step 105, when Yes (" signal present " is input), the control unit 78 determines that there is a mutual short circuit, and the meaning thereof together with the coordinate values of the mutual short circuit portion 84 ), The process returns to step 100 and the process proceeds to the process of accommodating the output signal of the next sensor circuit 38, checking the coordinate value, and the like (step 106).

As a result of the determination in step 105, in the case of No ("no signal is input"), the control unit 78 determines that "the current part is normal", and returns to step 100.

As a result of the determination in step 101, when No (power supply timing and power reception timing do not coincide), control device 78 determines whether or not "with signal" is input (step 107).

Determination as to whether or not "signal present" is input, i.e., whether the converter 16 is cross-shorted, in spite of the timing of power supply and faucet not being coincided (not the position of the normal converter) by step 107. This is done.

As a result of the determination in step 107, in the case of Yes ("signal present" is input), the control unit 78 stores in the memory 84 together with the coordinate values of the cross short circuit portion that the cross circuit is short-circuited. After that, the process returns to step 100, where the process proceeds to the process of accommodating the next signal and confirming the coordinate value (step 108).

As a result of the determination in step 107, in the case of No ("no signal is input"), the control unit 78 determines that "the current part is normal", and returns to step 100.

The abnormal part of the converter 16 may reach many parts. Therefore, even when an abnormal portion of the converter is found while the substrate 12 and the sensor substrate 20 are relatively moved, the above-described inspection is performed by transferring the substrate 12 and the sensor substrate 20 to the inspection region of the converter. It is repeatedly performed while moving from one end to the other end of.

[Example of Mechanism of Inspection Device]

Referring to FIGS. 13 to 18, the inspection apparatus 10 carries the frame 130 and the inspection target substrate 12, which serve as a support for supporting various mechanisms of the inspection apparatus 10, in the horizontal direction. A pair of transfer devices 136 for transferring the detection device 132, the detection head for detecting the electrical signal from the substrate 12 to be inspected, that is, the sensor substrate 20, the substrate 12 for inspection, and one side transfer. And a centering device 138 for centering the display panel 12 accommodated in the device 136.

The frame 130 includes various types of testers 140 and inspection apparatuses 10 that check and store disconnection and short circuits and defective parts (coordinate values) of converters based on electrical signals from the sensor substrate 20. The control part 142 which controls a mechanical apparatus is accommodated.

The conveying apparatus 132 is a pair of first conveying members 144 extending in parallel in the left and right direction (X direction) at intervals in the up and down direction (Z direction) and in parallel in the left and right direction at intervals in the vertical direction. And a pair of second conveying members 146 extending. The first and second conveyance members 144 and 146 form first and second conveyance portions, respectively.

Each of the first and second conveying members 144 and 146 is a known apparatus for conveying while holding or maintaining the flat member at a predetermined height position by the injection and suction of air. Such a conveying member is commercially available under the trade name such as Presser Vacuum Plate (PV plate).

 The first conveying member 144 injects air toward the substrate 12 under test and simultaneously draws air from the conveyance space of the substrate 12 under test to lower the substrate 12 from the sensor substrate 20. It is located in the upstream side of the board | substrate 12 to be inspected by the conveying apparatus 132 in the conveyance direction so that conveyance may be carried out, maintaining the 1st conveyance position spaced apart.

The second conveying member 146 injects air toward the substrate 12 under test and simultaneously sucks air from the conveyance space of the substrate 12 under test to lower the substrate 12 from the sensor substrate 20. It is arrange | positioned on the downstream side in the conveyance direction of the board | substrate 12 to be examined so that conveyance may be carried out, keeping in the 2nd conveyance position spaced apart slightly.

The first conveyance position is a position at which the inspected substrate 12 to be conveyed is greatly spaced from the sensor substrate 20 so that the inspected substrate 12 is conveyed in parallel with the lower surface of the sensor substrate 20. The distance between the lower surface of the sensor substrate 20 and the first conveyance position is equal to or greater than the value from the sensor substrate 20 to the second conveyance position plus 50 μm plus the thickness of the flat cable 42 described below. For example, it can be made into 100 micrometers or more.

The second conveyance position is a position closer to the sensor substrate 20 than the first conveyance position, and is the position at which the inspected substrate 12 is conveyed in parallel with the lower surface of the sensor substrate 20. The distance between the lower surface of the sensor substrate 20 and the second conveyance position may be a position where the substrate 12 under test is spaced about 50 μm from the sensor substrate 20.

The conveying path, on which the inspected substrate 12 is conveyed from the first conveying position to the second conveying position, acts as a curved conveying path for bending the inspected substrate 12 itself.

In order to convey the board | substrate 12 under test in the 1st or 2nd conveyance position as mentioned above, it is preferable to make the injection amount and the suction amount of air different from the upper and lower conveyance members, for example.

The lower surface of the downstream end of the upper 1st conveyance member 144 and the upper surface of the upstream end of the lower 2nd conveyance member 146 face each other. In addition, the first and second conveying members 144 and 146 on the upper side are spaced in the left and right directions so that the sensor substrate 20 is located between both sides.

As a result of the above, the substrate 12 to be inspected is formed as shown in FIG. 16 when it moves from the substrate conveyance path along the first conveyance member 144 to the substrate conveyance path along the second conveyance member 146. It is bent from the first conveyance position to the second conveyance position, that is, from the position away from the sensor substrate 20 to the position approaching the sensor substrate 20.

The lower first and second conveying members 144 and 146 are provided on the base plate 148 provided on the frame 130 so as to extend in the conveying direction of the substrate 12 under test. On the other hand, the upper 1st and 2nd conveyance members 144 and 146 are provided in the door-shaped assembly apparatus 150 provided on the frame 130. As shown in FIG.

The assembly device 150 includes a pair of support members 152 installed on the frame 130 and both support members 152 in a state in which the sensor substrate 20 is interposed therebetween and spaced in the front and rear direction with the sensor substrate 20 therebetween. And a plurality of connecting members 154 for connecting the plurality of coupling members 156 coupled to each of the connecting members 154.

In the example of illustration, five connection members 154 are provided, and three coupling members 156 are provided. Each of the first and second transfer members 144 and 146 on the upper side is provided in the coupling member 156. The remaining coupling member 156 is provided with a sensor substrate 20.

In addition, the conveying apparatus 132 synchronizes a pair of holder mechanisms which hold the substrate 12 under test in contact with its edge and jointly hold the corresponding mechanisms corresponding to these holder mechanisms in left and right directions. And a pair of holder moving mechanisms for moving.

The two groups of mechanisms, which consist of a holder mechanism and a holder moving mechanism, are spaced in the front-rear direction with the conveyance path of the substrate 12 under test interposed therebetween, and are arranged on the frame 130. These holder mechanisms and holder moving mechanisms constitute a conveyance assisting device 158 which assists conveyance of the substrate 12 under test by the first and second conveying members 144 and 146.

Each of the holder mechanisms includes a support member 160 that extends the outer side of the transport path of the substrate 12 in the left and right direction, and a support member so as to be in contact with an edge portion in the front-rear direction of the substrate 12 under test. A plurality of substrate holders 162 supported at intervals in the left and right direction at 160 and the support member 160 in the front-rear direction to allow the substrate holder 162 to enter and exit the moving path of the edge portion of the substrate 12 to be inspected. Actuator 164 to move.

Each substrate holder 162 of one holder mechanism is opposed to the front-rear direction with one of the substrate holders 162 of the other holder mechanism, and the substrate is opposed to the front-rear direction with one of the substrate holders 162 of the other holder mechanism. It forms a group or pair of holders.

Each board | substrate holder 162 is provided in the support member 160 by the shandong copper mechanism 166 which moves this to an up-down direction. In the example of illustration, each shangdong copper mechanism 166 extends to the linear rail (namely, the stator) 166a (refer FIG. 18) and the linear rail 166a which were provided in the support member 160 in the state extended in the up-down direction. A linear motor having a movable body (i.e., movable body) 166b (see Fig. 18) coupled to be movable.

Each substrate holder 162 is provided in the movable body 166b of the linear motor. The lowermost position of each substrate holder 162 is limited by the stopper 168 (see Fig. 18) provided in the linear guide 166a of the linear motor. Each substrate holder 162 has a horizontal V-shaped groove portion 170 (see Fig. 18) for accommodating the edge portion of the substrate under test 12 with movement in the front-rear direction.

 The actuator 164 is a pneumatic or hydraulic cylinder mechanism which expands and contracts in the front-rear direction in the example of illustration. The actuator 164 is supported by the holder moving mechanism in the cylinder body, and is coupled to the support member 160 in the piston rod.

Each holder mechanism also includes a plurality of rods 172 extending from the support member 160 to the opposite side of the edge of the substrate under test, and a bush 174 through which the rods 172 are movable in the front-rear direction. ). Each holder mechanism is supported by the holder movement mechanism in the bush 174 and is moved in the horizontal direction by the holder movement mechanism.

The holder moving mechanism is provided with a pair of actuators 176 spaced in the front-rear direction with the conveyance path of the substrate under test 12 interposed therebetween. The actuator 176 is a linear guide (ie, a stator) 176a installed on the frame 130 and a linear guide coupled to the linear rail 176a in a state extending in the left and right direction in the illustrated example. (I.e., movable) 176b. The actuator 164 and the bush 174 are supported by the linear guide 176b.

The carrier assisting device 158 waits at the waiting position at the far left in FIG. At this standby position, the substrate holder 162 is spaced apart from the conveyance path of the substrate 12 under test.

In the standby position, the transport aid 158 moves the support member 160 toward the substrate under test 12 by the actuator 164. Accordingly, the substrate holder 162 is moved to the conveyance path of the substrate 12 under test to hold the substrate 12 on the delivery device 136 and to receive the substrate 12 under test.

When the substrate 12 to be inspected is accommodated, the transport aid is moved from the left to the right in FIG. 14 by the actuator 176 while the substrate 12 is held by the substrate holder 162. Accordingly, the substrate 12 under test is conveyed to the right end in FIG. In this position, the substrate holder 162 is moved out of the transport path of the substrate 12 to release the substrate 12.

The holding and releasing of the substrate by the transport aid 158 is performed by moving the groups of the substrate holders 162 opposed by the two holder mechanisms together to move in and away from each other so as to enter and exit the movement path of the edge portion of the substrate under test 12. Is done. As a result, the holding of the substrate under test by the substrate holder 162 and the release thereof are reliably performed.

After the transfer of the substrate 12 under test is finished, the transfer assisting device 158 is returned to the standby position.

During the conveyance of the substrate 12 under test, each substrate holder 162 moves to the substrate conveying path along the second conveying member 146 from the substrate conveying path along the first conveying member 144. As the substrate 12 to be bent from the conveying position to the second conveying position is bent, it is lifted by the shank moving mechanism 166. As a result, the substrate 12 to be inspected is deflected reliably.

As shown in Fig. 16, each of the flat cables 42 is fixed to one end of the uppermost side of the lower surface of the sensor substrate 20 at one end thereof, and the other end is connected to the sensor substrate 20 and the upstream side thereof. It is pulled upward of the sensor substrate 20 through the upper conveyance member 144 located. The other end of each flat cable 42 is connected to the tester part 140 shown in FIG.

One transfer device 136 and the centering device 138 are disposed on the most upstream side of the substrate transfer path by the transfer device 132, and the other transfer device 136 is disposed on the substrate transfer path by the transfer device 132. It is arrange | positioned in the most downstream side.

Each transfer device 136 lifts and lifts a plurality of lifting pins 180 through a lifting mechanism (not shown) so as to transfer the inspected substrate 12 to the transfer device 132 and the transfer robot (not shown). It is a known device for elevating the substrate 12 under test.

Each transmission device 136 waits in the state where the lifting pin 180 is lowered, and raises the lifting pin 180 to accommodate the substrate under test 12 from the robot, the worker, or the transfer device 132, and the lifting and lowering of the lifting pin 180. By lowering the pin 180, the substrate 12 to be inspected is transferred to the transfer device 132, a robot, or an operator.

The centering device 138 moves the plurality of centering pins 182 toward the center of the inspected substrate 12 accommodated in one delivery device 136 by a moving mechanism (not shown), and thus the inspected substrate 12 Is a known device for centering. The substrate 12 to be inspected is prealigned by the centering device 138.

The centering device 138 spreads (waits) the centering pin 182 when the delivery device 136 delivers the substrate 12 to be inspected, and when centering the substrate 12 to be inspected, the centering pin 12. Move 182 to the center side.

The inspection apparatus 10 operates as follows.

Each substrate holder 162 is moved to a position where the substrate 12 to be inspected can be transferred and centered.

In this state, the substrate 12 to be inspected is conveyed upward by the robot or human hand above the delivery device 136 disposed at the left end in FIG. In this state, the transfer device 136 raises the lifting pin 180 to accommodate the substrate 12 under test in the lifting pin 180.

Subsequently, the centering device 138 moves the centering pins 182 in the direction of gathering with each other to center the inspected substrate 12, and then waits in a state in which the centering pins 182 are moved away from each other.

Then, the transport device 132 moves the transport aid 158 toward the substrate 12 to hold the substrate 12 to the substrate holder 162. Until this time, the substrate holder 162 is moved to a predetermined height position, for example, a position in contact with the stopper 168.

Next, the conveying apparatus 132 conveys the inspected substrate 12 from the left side to the right side in FIG. 14 through the conveying auxiliary apparatus 158 in the above state.

The inspected substrate 12 is also conveyed by the first conveyance member 144 during conveyance by the conveyance assisting device 158. Thereby, the board | substrate under test 12 is conveyed in the state hold | maintained at the 1st conveyance position which is largely spaced apart from the sensor substrate 20. FIG.

Next, the conveyance of the substrate under test 12 is transferred from the conveyance assist device 158 and the first conveyance member 144 to the conveyance assist device 158 and the first and second conveyance members 144 and 46. After conveyance by the conveyance, it transfers to conveyance by the conveyance auxiliary apparatus 158 and the 2nd conveyance member 146. As shown in FIG.

Accordingly, the substrate 12 to be inspected is bent in the curved conveyance path described above, and is held at the second conveyance position approached by the conveying auxiliary device 158 and the second conveying member 146 to the sensor substrate 20. It is returned in the state that it was.

The curved conveyance path includes at least a part of an area corresponding to the arrangement position of the sensor substrate 20 in the left and right directions and is upstream of the placement positions of the feed electrodes 24 and 26 and the receiving electrode 28. It is formed in. Therefore, the flat cable 42 is connected to the portion of the sensor substrate 20 upstream of the arrangement position of the sensor circuit 38, and the substrate 12 to be inspected does not contact the flat cable 42. A curved conveyance path and the conveyance path after that are conveyed.

Each substrate holder 162 is lifted by the shank moving mechanism 166 so as to follow the curved deformation of the substrate 12 under test as it moves the curved conveyance path. As a result, the substrate 12 to be inspected is reliably bent in the curved conveyance path.

The second conveyance position forms a parallel conveyance path for conveying the substrate 12 under test in parallel with the sensor circuit 38. This parallel conveyance path is formed from a position ahead of the position where the converter 16 of the substrate under test 12 reaches below the feed electrodes 24 and 26 and the receiver electrode 28 of the sensor substrate 20.

Since the parallel conveyance path is formed at this position, the converter 16 of the substrate 12 to be inspected before it reaches the lower side of the feed electrodes 24 and 26 and the receiver electrode 28 of the sensor substrate 20. It is displaced in parallel with the feed electrodes 24 and 26 and the power receiving electrode 28, and moves below the feed electrodes 24 and 26 and the power receiving electrode 28 in this state.

As a result of the above, each of the converters 16 of the substrate under test 12 supplies power of the sensor substrate 20 when it moves below the feed electrodes 24 and 26 and the receiver electrode 28 of the sensor substrate 20. The electrodes 24 and 26 and the receiving electrode 28 are precisely opposed.

Each of the converters 16 of the inspected object 12 is repeatedly inspected as described above using the test signal while the feed electrodes 24 and 26 and the power receiver electrode 28 of the sensor substrate 20 are moved downward. Is done.

Subsequently, when the inspected substrate 12 is conveyed upward of the conveying apparatus 136 disposed at the right end in FIG. 14, conveyance by the conveying apparatus 132 is stopped, and the conveying apparatus 136 moves up and down. 180 is raised to accommodate the inspected substrate 12 conveyed.

Thereafter, the conveying apparatus 132 is returned to the standby position and the standby state. The substrate under test 12 received in the delivery device 136 is then removed from the delivery device 136 by a robot or human hand.

While conveying the substrate under test 12 through the conveying device 132, each group of substrate holders 162 holds the substrate under test 12 in contact with its edge and jointly holds it. As a result, at least a portion corresponding to the arrangement position of the sensor substrate 20 is prevented from changing the moving position of the substrate under test 12 or displacing the edge portion of the substrate under test 12 with respect to the center area.

The first and second conveying members 144 and 146 convey the inspected substrate 12 while maintaining the inspected substrate 12 at a predetermined height position, and face the substrate holder 162 in the front-rear direction. Conveys the inspected substrate 12 in a state of holding the inspected substrate 12.

However, the first and second conveying members 144 and 146 only have a function of holding the inspected substrate 12 at a predetermined height position, and provide a conveyance force to the inspected substrate 12. It does not need to be provided. In this case, the conveyance force to the substrate 12 under test is applied by the substrate holder 162.

Thus, instead of the conveying apparatus 132 using the first and second conveying members 144 and 146 and the conveying assisting device 158, the first and second conveying members 144 and 146 and the conveying assisting device 158 A conveying apparatus having another structure and function may be used, such as a conveying apparatus using either of.

For example, instead of holding the inspected substrate 12 at a predetermined height position by the first and second conveying members 144 and 146, it is prescribed by holding means or conveying means using a plurality of rollers or one or more endless belts. You may keep at the height position of.

The sensor substrates 20 and 60 need to be provided with the feed electrodes 24, 26, the receiving electrode 28, the terminals 30, 32, 34, the sensor circuit 38, and the like on one glass plate 36. none. For example, as shown in FIG. 19, the feed electrodes 24, 26, the receiving electrode 28, the terminals 30, 32, 34, the sensor circuit 38, etc. are divided into a plurality of glass plates 36. It is also preferable to install and support these appropriate members 184.

The present invention is not limited to the above embodiments, and various changes can be made without departing from the spirit thereof.

In the present invention, in a state in which at least one feed electrode and a plurality of receiving electrodes spaced apart in the first direction are spaced apart in the longitudinal direction of the converter, the sensor substrate and the inspected substrate are opposed to each other and relatively in the longitudinal direction of the converter. In the meantime, the inspection signal is supplied from the power feeding electrode toward the converter and the inspection signal flowing through the converter is received in the receiving electrode.

If the converter is disconnected, since the test signal does not reach the receiving electrode facing the converter, an abnormal signal of "no signal" indicating that the converter is disconnected is output from the sensor circuit. Thereby, it can be determined that "the converter is disconnected".

The disconnection portion in the longitudinal direction of the converter is changed from the absence of a reception signal at the receiving electrode to the inspection signal to be received at the receiving electrode from none to the absence of a reception signal at the receiving electrode. It is possible to specify from the relative position (that is, the coordinate value) between the sensor substrate and the inspected substrate in the second direction in at least one case selected from the group including the change.

According to the present invention as described above, it is possible to specify the presence or absence of the disconnection and the disconnection portion by moving the sensor substrate and the inspected substrate relatively once.

The sensor substrate includes at least two feeder electrodes spaced in a first direction, and the plurality of power receiver electrodes are at least two feeder electrode groups corresponding one-to-one to the feeder electrodes spaced in a first direction, each corresponding to When the test signal from the feed electrode is divided into belonging to a group of receiving electrodes including a plurality of receiving electrodes that can receive the one or one corresponding to the feeding electrode, the inspection signal is supplied to the plurality of feeding electrodes at different timings, It is possible to determine whether the converter is defective by synchronizing with the power feeding timing of the power feeding electrode.

Similarly, even when the sensor substrate includes a plurality of feed electrodes spaced in the first direction and the plurality of feed electrodes correspond one-to-one to the feed electrodes, the test signal is supplied to the plurality of feed electrodes at different timings. In addition, it is possible to determine whether the converter is defective by synchronizing with the power feeding timing of the power feeding electrode.

In this way, in either case, even when the test signal is not supplied to the specific converter, the receiving electrode facing the specific converter may receive the test signal. In this case, since the specific converter is short-circuited with other converters, it is possible to easily specify the short circuit and the short circuit portion of the converters.

When the substrate under test includes a plurality of second converters crossing the converters as described above, and the sensor substrate further includes at least one second feed electrode for supplying a second test signal to the second converters. In some cases, a test signal may be received by the receiving electrode. In this case, the converter facing the receiving electrode receiving the second inspection signal is short-circuited with the second converter, so that the cross short and the short part of the converter can be easily specified.

Simple modifications and variations of the present invention can be readily used by those skilled in the art, and it can be seen that all such modifications and changes are included in the scope of the present invention.

Claims (15)

A sensor substrate used for inspecting a substrate under test having a plurality of converters extending in a second direction at intervals in a first direction, At least one feed electrode for supplying a test signal without contacting the converter; A plurality of power receiving electrodes spaced in at least said first direction, said plurality of power receiving electrodes spaced in said second direction from said power supply electrode so as to receive each of said test signals supplied to said converter without contact; And A plurality of sensor circuits for outputting an electrical signal indicating the presence or absence of a received signal at the receiving electrode; Sensor substrate comprising a. According to claim 1, At least two feed electrodes spaced in the first direction is provided, The plurality of receiving electrodes are at least two receiving electrode groups each one-to-one corresponding to the feeding electrode at intervals in the first direction, and each receiving electrode is capable of receiving test signals from the corresponding feeding electrode. Sensor substrate, characterized in that divided into a receiving electrode group comprising a. According to claim 1, wherein the plurality of the feeding electrode spaced in the first direction is provided, And the plurality of receiving electrodes correspond one-to-one to the feeding electrode. The sensor substrate according to claim 1, wherein the plurality of sensor circuits are connected one-to-one to the receiving electrode. The method of claim 1, wherein the substrate under test further comprises a plurality of second converters extending in the first direction at intervals in the second direction, The sensor substrate further comprises at least one second feed electrode for supplying a second test signal to the second converter. 6. The sensor substrate according to claim 5, wherein the second feed electrode is disposed at a portion deviating from an arrangement area of the feed electrode and the receiver electrode in the first direction. A method for inspecting a substrate under test using the sensor substrate according to any one of claims 1 to 6, A movement step of moving the feeder electrode and the power receiver electrode in the second direction so as to face the sensor substrate and the inspected substrate so as to move relatively in the second direction; A feeding step of supplying a test signal to the feeding electrode during the moving step; And A determination step of determining whether the converter is defective based on an output signal of the sensor circuit during the power feeding step; Inspection method of the substrate to be tested comprising a. The method according to claim 7, wherein the sensor substrate is described in any one of claims 2 and 3, wherein the power supply step supplies the inspection signal to a plurality of power supply electrodes at different timings, And the determining step determines whether the converter is defective in synchronization with the power feeding timing of the power feeding electrode. 8. The converter according to claim 7, wherein the determining step is based on the output signal of the sensor circuit connected to the receiving electrode opposite to the converter and the output signal of the sensor circuit connected to the receiving electrode not opposite to the converter. Inspection method, characterized in that for determining whether or not. The method of claim 7, wherein the sensor substrate is any one of claims 5 and 6, The feeding step supplies the second inspection signal to the second feeding electrode, And said determining step includes determining that a converter opposed to said electrode receiving said second inspection signal is a cross failure. 8. The determination step according to claim 7, wherein the determining step further specifies a defective portion of the converter from the relative position of the sensor substrate and the inspected substrate in the second direction when the converter is judged to be defective. method of inspection. A sensor substrate according to any one of claims 1 to 6; A test signal generation circuit for generating a test signal supplied to the power supply electrode; A moving device in which the feeding electrode and the receiving electrode are spaced in the second direction and relatively moved in the second direction by opposing the sensor substrate and the inspected substrate; And A determination circuit that determines whether the converter is defective based on an output signal of the sensor circuit while the sensor substrate and the inspected substrate are moved by the moving device and the inspection signal is supplied to the feed electrode; Inspection apparatus comprising a. The defective circuit of claim 12, wherein the determination circuit is based on an output signal of a sensor circuit connected to a receiving electrode opposite to the converter and an output signal of a sensor circuit connected to the receiving electrode not opposite to the converter. An inspection apparatus characterized by determining whether or not.  The method according to claim 12, wherein the sensor substrate is described in any one of claims 5 and 6, wherein the inspection signal generation circuit further supplies the second inspection signal to the second feed electrode, And the judging circuit further includes determining that the converter facing the electrode receiving the second inspection signal is a cross failure.  The inspection circuit according to claim 12, wherein the determination circuit further specifies a defective portion of the converter from the relative position of the sensor substrate and the inspected substrate in the second direction when the converter is judged to be defective. Device.

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