JP2007185049A - Vibrator and vibration wave drive unit - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a vibrator that can improve the degree of the adhesion of a joining surface by using a small number of part items by suppressing a mechanical loss generated when vibration is excited to the vibrator, in the mechanical join and the electric connection of an electromechanical energy conversion element and a conduction component, and to provide a vibration wave drive unit. <P>SOLUTION: The vibrator of the vibration wave drive unit comprises: a vibration body 1; a flexible board 2 that has an electrode on its surface, and establishes conduction between an piezoelectric element 4 and a power supply; and the piezoelectric element 4 that has an electrode on its surface, and converts an electrical amount to a mechanical amount. The piezoelectric element 4 and the flexible board 2 are joined with an adhesive at a part of the surface having the pattern electrode 4a of the piezoelectric element 4 and at a part of the base surface being a surface not having the electrode of the flexible board 2. The piezoelectric element 4 and the flexible board 2 are constituted such that at least one (the base surface of the flexible board 2) of the mechanically joined surfaces joined with the adhesion does not have an electrode. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a vibrator in which vibration is excited and a vibration wave driving device that drives an object by vibration excited in the vibrator.

  Conventionally, many techniques related to a vibrator that excites vibrations or techniques related to a vibration wave driving device that drives a driven body by vibrations excited by the vibrator have been proposed. For example, a piezoelectric element, which is an electro-mechanical energy conversion element that converts an electrical quantity into a mechanical quantity, and a flexible substrate, which is a conductive component, are bonded so that the electrodes on the surface of each other are in contact with each other, and mechanical coupling and electrical connection are achieved. There is a vibrator to perform (for example, see Patent Document 1).

There is also a vibrator that performs mechanical coupling and electrical connection by sandwiching a piezoelectric element that is an electro-mechanical energy conversion element using a plurality of conductive conductors that are conductive parts that are not provided with an insulating film. Yes (see, for example, Patent Document 2).
Japanese Patent Laid-Open No. 7-67365 (page 4, FIGS. 1 to 4) JP-A-6-261562 (Page 4, FIGS. 1 to 4)

  However, in the vibrator disclosed in the above-mentioned Patent Document 1, unevenness is caused by a portion where the electrodes of the piezoelectric element and the flexible substrate are provided and a portion where no electrode is present, or unevenness caused by the surface roughness of the electrode surface. Therefore, there is a problem that the adhesive layer accompanying the adhesion between the piezoelectric element and the flexible substrate becomes thick, and the mechanical loss increases when vibration is excited in the vibrator.

  Further, in the vibrator disclosed in Patent Document 2, variations in thickness dimensions of a plurality of conductors that sandwich the piezoelectric element and variations in conductor attachment to the piezoelectric element occur. For this reason, the variation greatly affects the close contact state of the coupling surface between the piezoelectric element and the conductor, which may deteriorate the vibration characteristics of the vibrator. Furthermore, there is a problem that the manufacturing process becomes complicated as a result of an increase in the number of parts due to the structure in which the piezoelectric element is sandwiched between a plurality of conductors.

  An object of the present invention is to reduce mechanical loss when a vibration is excited in a vibrator in a mechanical coupling and electrical connection between an electromechanical energy conversion element and a conducting part, and to improve the degree of adhesion of a coupling surface. An object of the present invention is to provide a vibrator and a vibration wave driving device that can achieve this with a small number of parts.

  In order to achieve the above-described object, a vibrator according to the present invention has an electrode on a surface, an electro-mechanical energy conversion element that converts an electrical quantity into a mechanical quantity, and an electrode on the surface, A conduction component coupled to the energy conversion element and conducting the electro-mechanical energy conversion element and a power source, and at least one of the mechanical coupling surfaces of the electro-mechanical energy conversion element and the conduction component The mechanical coupling surface has no electrode.

  In addition, the vibration wave driving device of the present invention is characterized by including a vibrator and moving the driven body in pressure contact with the vibrator by a frictional force or transmitting force to the driven body.

  According to the present invention, since at least one of the mechanical coupling surfaces of the electromechanical energy conversion element and the conductive component does not have an electrode, the mechanical loss when vibration is excited in the vibrator. Can be reduced. In addition, it is possible to improve the degree of adhesion of the mechanical coupling surface between the electromechanical energy conversion element and the conductive component with a small number of components without using a plurality of conductive components.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

[First Embodiment]
FIG. 1 is a perspective view showing an appearance of a vibrator of the vibration wave driving device according to the first embodiment of the present invention. FIG. 2 is a diagram illustrating an electrode surface of the vibrator.

  1 and 2, the vibration wave driving device is a device that moves a contact body (not shown) or transmits a force to the contact body, and includes a vibrator. The vibrator includes a vibrating body 1, a flexible substrate 2, and a piezoelectric element 4. The vibrating body 1 is made of stainless steel and has an annular shape, and a large number of protrusions are formed along the circumferential direction of one end face. The flexible substrate 2 is a conductive component that conducts electricity between the piezoelectric element 4 and a power source (not shown). The conductive paint 3 is a conductive paint containing silver that electrically connects the piezoelectric element 4 to the vibrating body 1 and the flexible substrate 2. The piezoelectric element 4 is configured in an annular shape, and is an electro-mechanical energy conversion element that converts an electrical quantity (voltage) into a mechanical quantity (vibration).

  More specifically, in the piezoelectric element 4, one electrode (entire electrode) is formed on almost the entire surface of one end surface, and a predetermined number (16 in this embodiment) is formed on the other end surface as shown in FIG. ) Electrodes (pattern electrodes) 4a. The vibrating body 1 is coupled to the surface of the piezoelectric element 4 having the entire surface electrode by an adhesive and is also electrically connected.

  The flexible substrate 2 includes a base 2a and an electrode 2b (common ground electrode, sensor phase electrode, A phase electrode, B phase electrode), and has a multilayer structure. On one surface (electrode surface) of the flexible substrate 2, a part of the electrode 2b is exposed on the surface (FIG. 2), and no electrode is exposed on the other surface (base surface) of the flexible substrate 2. Only the base (Fig. 1).

  The piezoelectric element 4 and the flexible substrate 2 are bonded to each other by an adhesive on a part of the surface of the piezoelectric element 4 having the pattern electrode 4a and a part of the base surface that does not have the electrode of the flexible substrate 2. Yes. The piezoelectric element 4 and the flexible substrate 2 have a structure in which at least one surface (the base surface of the flexible substrate 2 in the present embodiment) does not have an electrode on each mechanical coupling surface bonded by an adhesive. Yes.

  Of the 16 pattern electrodes 4a of the piezoelectric element 4, three pattern electrodes are electrically connected to the vibrating body 1 by the conductive paint 3, and the electrode 2b (common ground) on the electrode surface of the flexible substrate 2 is used. Electrode) is also electrically connected. One of the 16 pattern electrodes 4 a of the piezoelectric element 4 is also electrically connected to the electrode 2 b (sensor phase electrode) on the electrode surface of the flexible substrate 2 by the conductive paint 3.

  Of the 16 pattern electrodes 4a of the piezoelectric element 4, the other 12 pattern electrodes are divided into two groups (in this embodiment, six groups in the upper half and six in the lower half in FIG. 2). Group). The twelve pattern electrodes are electrically connected within each group by the conductive paint 3, and are also electrically connected to the electrodes 2b (A phase electrode, B phase electrode) on the electrode surface of the flexible substrate 2. Yes.

  Next, a driving method and operational effects of the vibration wave driving device of the present embodiment having the above-described configuration will be described.

  From a power source (not shown), to the piezoelectric element 4 that constitutes the vibrator together with the vibrating body 1, via the electrode 2b (common ground electrode, A phase electrode, B phase electrode) of the flexible substrate 2, the resonance frequency of the vibrator An alternating voltage of two phases (A phase and B phase) having substantially the same frequency and different phases is applied. By applying an alternating voltage, vibration is excited in the vibrator, and an elliptical motion is generated that draws an elliptical locus on the end surface of the vibrating body 1 opposite to the end surface to which the piezoelectric element 4 is coupled. As a result, a rotational force is applied to the contact body (not shown) brought into contact with the vibrator in a pressurized state by the frictional force accompanying the elliptical motion, and the contact body is moved or the rotational force is transmitted to the contact body.

  The characteristics of the vibration wave driving device greatly depend on the characteristics of mechanical loss during vibration of the vibrator. If the bonding layer such as an adhesive for bonding the piezoelectric element and the flexible substrate is thick or the thickness of the adhesive is not uniform, the characteristics of mechanical loss during vibration of the vibrator are greatly deteriorated.

  According to the present embodiment, the electrode is not present on the other surface (base surface) of the flexible substrate 2 (the electrode is not exposed). Therefore, when the piezoelectric element 4 and the flexible substrate 2 are joined, the influence of the unevenness due to the portions where the electrodes are present and the portions where no electrodes are present, or the unevenness due to the surface roughness of the electrode surface can be extremely reduced. As a result, the bonding layer (for example, the adhesive layer) between the piezoelectric element 4 and the flexible substrate 2 can be made thinner and more uniform. Furthermore, it is possible to improve the close contact degree of the coupling surface between the piezoelectric element 4 and the flexible substrate 2 with a small number of parts without using a plurality of conductive parts, and the machine when vibration is excited in the vibrator. It is possible to improve the characteristics of the mechanical loss.

  In addition, the electrical connection between the piezoelectric element 4 and the flexible substrate 2 is performed using the conductive paint 3. Therefore, by using, for example, a printing method for electrical connection between the piezoelectric element 4 and the flexible substrate 2, it is possible to perform electrical connection with a coating film that is uniform and thin in the conductive paint 3 and has little thickness unevenness. Accordingly, it is possible to reduce mechanical loss when vibration is excited in the vibrator, and it is possible to manufacture the vibrator by a simple manufacturing process.

[Second Embodiment]
FIG. 3 is a perspective view showing the appearance of the upper surface side of the vibrator of the vibration wave driving device according to the second embodiment of the present invention. FIG. 4 is a perspective view showing the appearance of the lower surface side of the vibrator.

  3 and 4, the vibrator of the vibration wave driving device includes a vibrating body 21, a flexible substrate 22, and a piezoelectric element 24. The vibrating body 21 is made of stainless steel and has a rectangular parallelepiped shape, and two protrusions 21a are formed on one surface. The flexible substrate 22 is a conductive component that conducts electricity between the piezoelectric element 24 and a power source (not shown). The conductive paint 23 is a conductive paint containing silver that electrically connects the piezoelectric element 24 to the vibrating body 21 and the flexible substrate 22. The piezoelectric element 24 is an electro-mechanical energy conversion element configured in a rectangular parallelepiped shape.

  More specifically, the vibrating body 21 and the piezoelectric element 24 are coupled by an adhesive. The piezoelectric element 24 has a stacked structure in which a plurality of piezoelectric layers and a plurality of electrode layers are stacked in the thickness direction. The electrodes inside the piezoelectric element 24 are classified into four types of A phase +, A phase −, B phase +, and B phase −, and each electrode is electrically connected by four electrode columns penetrating in the thickness direction. It is connected to the.

  The four electrode columns are exposed on the surface of the piezoelectric element 24 opposite to the surface coupled to the vibrating body 21. The flexible substrate 22 includes a base 22a and an electrode 22b, and has a multilayer structure. On one surface (electrode surface) of the flexible substrate 22, a part of the electrode 22b is exposed on the surface (FIG. 4), and on the other surface (base surface), the electrode is not exposed and becomes only the base. (FIG. 3).

  The piezoelectric element 24 and the flexible substrate 22 are bonded by an adhesive on a part of the surface of the piezoelectric element 24 having the pattern electrode and a part of the base surface that is a surface not having the electrode of the flexible substrate 22. . The piezoelectric element 24 and the flexible substrate 22 have a structure in which neither the electrode of the piezoelectric element 24 nor the electrode 22b of the flexible substrate 22 is provided on each mechanical coupling surface bonded by an adhesive. Electrical connection between the four exposed electrode columns of the piezoelectric element 24 and the electrode 22b of the flexible substrate 22 is performed by a conductive paint 23 as shown in FIG.

  Next, a driving method and operational effects of the vibration wave driving device of the present embodiment having the above-described configuration will be described.

  From a power source (not shown), to the piezoelectric element 24 that constitutes the vibrator together with the vibrator 21, via the electrode 22b of the flexible substrate 22, the A phase (A phase) having a phase substantially different from the resonance frequency of the vibrator A two-phase alternating voltage of +, A phase −) and B phase (B phase +, B phase −) is applied. By applying the alternating voltage, two out-of-plane vibrations are excited in the vibrator, and an elliptical motion that draws an elliptical locus on the two protrusions 21a of the vibrating body 21 is generated. As a result, a moving force is applied to the contact body (not shown) brought into contact with the two protrusions 21a of the vibrating body 21 in a pressurized state by the frictional force accompanying the elliptical motion, or the contact body is moved or contacted. Transmits moving force.

  According to the present embodiment, there is a configuration in which no electrode is present on both coupling surfaces of the piezoelectric element 24 and the flexible substrate 22. Therefore, the smooth surfaces can be bonded to each other, and the bonding layer (for example, an adhesive layer) between the piezoelectric element 24 and the flexible substrate 22 can be made thinner and more uniform. Furthermore, it is possible to improve the degree of close contact between the coupling surfaces of the piezoelectric element 24 and the flexible substrate 22, and to improve the mechanical loss characteristics during vibration of the vibrator.

  In addition, electrical connection between the piezoelectric element 24 and the flexible substrate 22 is performed using a conductive paint 23. Therefore, by using, for example, a printing method for electrical connection between the piezoelectric element 4 and the flexible substrate 2, it is possible to perform electrical connection using a coating film that is uniform, thin, and has little thickness unevenness in the conductive paint 23. Accordingly, it is possible to reduce mechanical loss when vibration is excited in the vibrator, and it is possible to manufacture the vibrator by a simple manufacturing process.

[Third Embodiment]
FIG. 5 is a perspective view showing the appearance of the vibrator of the vibration wave driving device according to the third embodiment of the present invention.

  In FIG. 5, the vibrator of the vibration wave driving device includes a piezoelectric element 34 and a flexible substrate 32. The flexible substrate 32 is a conductive component that conducts electricity between the piezoelectric element 34 and a power source (not shown). The conductive paint 33 is a conductive paint containing silver that electrically connects the piezoelectric element 34 and the flexible substrate 32. The piezoelectric element 34 is an electro-mechanical energy conversion element configured in a cylindrical shape.

  More specifically, the flexible substrate 32 includes a base 32a and an electrode 32b. The piezoelectric element 34 includes one electrode (hereinafter referred to as a full-surface electrode) disposed on the substantially entire surface on the inner peripheral side, and a pattern electrode 34a divided into four along the circumferential direction on the outer peripheral side. The piezoelectric element 34 and the flexible substrate 32 are bonded to each other by an adhesive at the end surface of the piezoelectric element 34 where no electrode is provided and the base surface of the flexible substrate 32 where no electrode is provided.

  The whole surface electrode on the inner peripheral side of the piezoelectric element 34 and the electrode 32 b of the flexible substrate 32 are electrically connected by a conductive paint 33. Each pattern electrode 34 a on the outer peripheral side of the piezoelectric element 34 and the electrode 32 b of the flexible substrate 32 are electrically connected by a conductive paint 33.

  Next, a driving method and operational effects of the vibration wave driving device of the present embodiment having the above-described configuration will be described.

  An alternating voltage is applied from the power source (not shown) to the piezoelectric element 34 constituting the vibrator via the electrode 32b of the flexible substrate 32. By applying an alternating voltage, two out-of-plane vibrations are excited in the vibrator. As a result, a rotational force is applied to the contact body (not shown) brought into contact with the vibrator in a pressurized state by a frictional force, and the contact body is moved or transmitted to the contact body.

  According to the present embodiment, with the above-described configuration, it is possible to improve the mechanical loss characteristics during vibration of the vibrator, as in the first and second embodiments. Further, in the vibration characteristics of the vibrator, the piezoelectric element 34 and the flexible substrate 32 can be coupled at a more optimal position, and the flexible substrate 32 is not required to be handled.

[Fourth Embodiment]
FIG. 6 is a perspective view showing an appearance of a vibrator of a vibration wave driving device according to the fourth embodiment of the present invention.

  In FIG. 6, the vibrator of the vibration wave driving device includes a piezoelectric element 44 and a flexible substrate 42. The flexible substrate 42 is a conductive component that conducts electricity between the piezoelectric element 34 and a power source (not shown), and includes a base 42a and an electrode 42b. The conductive paint 43 is a conductive paint containing silver that electrically connects the piezoelectric element 44 and the flexible substrate 42. The piezoelectric element 44 is an electro-mechanical energy conversion element configured in a cylindrical shape, and includes an electrode 44a.

  The present embodiment is different from the above-described third embodiment in the following points. That is, four electrodes 44 a are arranged on the outer peripheral side of the piezoelectric element 44. Each of the four electrodes (first electrode, second electrode, third electrode, fourth electrode) 44a is opposed to each other with a spatial phase difference at a predetermined angle (180 degrees in the present embodiment). Are connected along the circumferential direction (the surface of the piezoelectric element or the inside of the piezoelectric element) on one end face side of the piezoelectric element 44 in the axial direction.

  More specifically, the first electrode 44 a and the second electrode 44 a are disposed in a stacked state in the radial direction of the piezoelectric element 44. In this case, in the first electrode 44a, a pair of electrodes facing each other with a spatial phase difference of 180 degrees are electrically connected along the circumferential direction of the piezoelectric element surface, and the second electrode 44a has a spatial phase difference. A pair of electrodes facing each other at 180 degrees are electrically connected along the circumferential direction inside the piezoelectric element.

  The third electrode 44a and the fourth electrode 44a are located at positions where the spatial phase difference is shifted from the first electrode 44a and the second electrode 44a by a predetermined angle (90 degrees in the present embodiment). In addition, the piezoelectric elements 44 are arranged in a laminated state in the radial direction. In this case, in the third electrode 44a, a pair of electrodes facing each other with a spatial phase difference of 180 degrees are electrically connected along the circumferential direction inside the piezoelectric element, and the fourth electrode 44a has a spatial phase difference. A pair of electrodes facing each other at 180 degrees are electrically connected along the circumferential direction inside the piezoelectric element.

  According to the present embodiment, in addition to the effects described in the third embodiment, the above configuration makes it possible to manufacture the vibrator by a simple manufacturing process and suppress an increase in manufacturing cost. Is possible. In addition, it is possible to reduce the number of electrical connections between the electrode 44a of the piezoelectric element 44 and the electrode 42b of the flexible substrate 42, which cause mechanical loss when vibration is excited in the vibrator.

[Fifth Embodiment]
FIG. 7 is a perspective view showing the appearance of the vibrator of the vibration wave driving device according to the fifth embodiment of the present invention.

  In FIG. 7, the vibrator of the vibration wave driving device includes a piezoelectric element 54 and a flexible substrate 52. The flexible substrate 52 is a conductive component that conducts electricity between the piezoelectric element 54 and a power source (not shown), and includes a base 52a and an electrode 52b. The conductive paint 53 is a conductive paint containing silver that electrically connects the piezoelectric element 54 and the flexible substrate 52. The piezoelectric element 54 is an electro-mechanical energy conversion element configured in a cylindrical shape, and includes an electrode 54a.

  The present embodiment is different from the above-described fourth embodiment in the following points. That is, the shaft 55 formed of a conductive material is inserted into the central portion of the piezoelectric element 54 in the axial direction so as to be in contact with the electrode 52 b of the flexible substrate 52. The entire surface electrode on the inner peripheral side of the piezoelectric element 54 and the electrode 52 b of the flexible substrate 52 are electrically connected by the shaft 55.

  According to the present embodiment, with the configuration described above, the electrode of the piezoelectric element 54 and the electrode of the flexible substrate 52 cause mechanical loss when vibration is excited in the vibrator as compared with the fourth embodiment. It is possible to further reduce the number of electrical connections with 52b.

[Sixth Embodiment]
FIG. 8 is a schematic view showing the outer shape of the flexible substrate of the vibrator according to the sixth embodiment of the present invention.

  In FIG. 8, the present embodiment is different from the fifth embodiment described above in that the flexible substrate 62 is connected to a cylindrical piezoelectric element (not shown) on the outer peripheral portion of the coupling surface 62a. This is a point having a plurality of missing portions 62b in which a plurality of places are missing along the direction. In the present embodiment, the shape of the missing portion 62b is a shape in which a part of the circle is missing (substantially semicircular shape). However, the shape is not limited to a specific shape, and may be an arbitrary shape. Can do.

  According to the present embodiment, due to the above configuration, in addition to the effects described in the fifth embodiment, the portion of the multilayer structure of the piezoelectric element that causes mechanical loss when vibration is excited in the vibrator. In addition, it is possible to reduce the portion of the bonding layer (for example, an adhesive layer) between the piezoelectric element and the flexible substrate.

[Seventh Embodiment]
FIG. 9 is a schematic diagram showing the outer shape of the flexible substrate of the vibrator according to the seventh embodiment of the present invention.

  In FIG. 9, the present embodiment is different from the sixth embodiment described above in that the flexible substrate 72 is connected from the in-plane to the coupling surface 72a where the flexible substrate 72 is coupled to a cylindrical piezoelectric element (not shown). This is a point having a cutout portion 72b cut out (having an open shape). In the present embodiment, the shape of the cutout portion 72b is a shape in which a part of the ring is cut out (substantially rectangular shape). However, the shape is not limited to a specific shape, and may be an arbitrary shape. be able to.

  According to the present embodiment, in addition to the effects described in the sixth embodiment, it is possible to reduce the restraining force in the in-plane direction of the coupling surface between the piezoelectric element and the flexible substrate. As a result, it is possible to reduce the shear deformation of the bonding layer (for example, the adhesive layer) between the piezoelectric element and the flexible substrate, which causes mechanical loss when vibration is excited in the vibrator.

[Other embodiments]
In the first to seventh embodiments, the vibrator and the vibration wave driving device have been described. However, the present invention relates to various technical fields in which the driven body is driven by vibration excited by the vibrator of the vibration wave driving device. It is possible to apply to. As a technical field, for example, driving of a focus lens and a zoom lens in an imaging apparatus is assumed.

1 is a perspective view showing an appearance of a vibrator of a vibration wave driving device according to a first embodiment of the present invention. FIG. 2 is a diagram illustrating an electrode surface of the vibrator of FIG. 1. It is a perspective view which shows the external appearance of the upper surface side of the vibrator | oscillator of the vibration wave drive device which concerns on the 2nd Embodiment of this invention. FIG. 4 is a perspective view showing an appearance of the lower surface side of the vibrator of FIG. 3. It is a perspective view which shows the external appearance of the vibrator | oscillator of the vibration wave drive device which concerns on the 3rd Embodiment of this invention. It is a perspective view which shows the external appearance of the vibrator | oscillator of the vibration wave drive device which concerns on the 4th Embodiment of this invention. It is a figure of a perspective view which shows the external appearance of the vibrator | oscillator of the vibration wave drive device which concerns on the 5th Embodiment of this invention. It is a schematic diagram which shows the external shape of the flexible substrate of the vibrator | oscillator which concerns on the 6th Embodiment of this invention. It is a schematic diagram which shows the external shape of the flexible substrate of the vibrator | oscillator which concerns on the 7th Embodiment of this invention.

Explanation of symbols

1,21 Vibrating body 2, 22, 32, 42, 52, 62, 72 Flexible substrate (conduction component)
2a, 22a, 32a, 42a, 52a Flexible substrate base 2b, 22b, 32b, 42b, 52b Flexible substrate electrode 3, 23, 33, 43, 53 Conductive paint (conductive paint)
4, 24, 34, 44, 54 Piezoelectric element (electro-mechanical energy conversion element)
4a, 34a, 44a, 54a Electrode of piezoelectric element 55 Shaft (member formed of conductive material)
62a coupling surface 62b missing portion 72a coupling surface 72b notched portion

Claims (7)

An electro-mechanical energy conversion element having an electrode on the surface and converting an electrical quantity into a mechanical quantity;
An electrode on the surface, coupled to the electromechanical energy conversion element, and a conductive component for conducting the electromechanical energy conversion element and a power source,
A vibrator characterized in that at least one of the mechanical coupling surfaces of the electro-mechanical energy conversion element and the conductive component has no electrode.   The vibrator according to claim 1, wherein the electromechanical energy conversion element and the conductive component are electrically connected by a conductive paint. The electro-mechanical energy conversion element has a plurality of electrodes,
The vibrator according to claim 1, wherein at least two of the plurality of electrodes are electrically connected to each other on or inside the electro-mechanical energy conversion element. The electro-mechanical energy conversion element has a plurality of electrodes,
The vibrator according to claim 1, wherein at least one of the plurality of electrodes is electrically connected to the conductive component through a member formed of a conductive material.   The vibrator according to claim 1, wherein the conductive component has a structure in which a part of a coupling surface with the electromechanical energy conversion element is missing.   The vibrator according to claim 1, wherein the conductive component has a structure cut out from an in-plane of a coupling surface with the electro-mechanical energy conversion element.   The vibrator according to any one of claims 1 to 6, wherein the driven body that is in pressure contact with the vibrator is moved by frictional force or transmitted to the driven body. Vibration wave drive device.

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