TWI303345B - Method of manufacturing liquid crystal display device - Google Patents
Method of manufacturing liquid crystal display device Download PDFInfo
- Publication number
- TWI303345B TWI303345B TW092130657A TW92130657A TWI303345B TW I303345 B TWI303345 B TW I303345B TW 092130657 A TW092130657 A TW 092130657A TW 92130657 A TW92130657 A TW 92130657A TW I303345 B TWI303345 B TW I303345B
- Authority
- TW
- Taiwan
- Prior art keywords
- liquid crystal
- unit
- crystal display
- main substrate
- thin film
- Prior art date
Links
- 239000004973 liquid crystal related substance Substances 0.000 title claims description 245
- 238000004519 manufacturing process Methods 0.000 title claims description 25
- 239000000758 substrate Substances 0.000 claims description 282
- 239000010408 film Substances 0.000 claims description 174
- 238000000034 method Methods 0.000 claims description 127
- 239000010409 thin film Substances 0.000 claims description 97
- 125000000524 functional group Chemical group 0.000 claims description 36
- 238000012360 testing method Methods 0.000 claims description 25
- 239000011203 carbon fibre reinforced carbon Substances 0.000 claims description 23
- 239000000463 material Substances 0.000 claims description 13
- 239000004575 stone Substances 0.000 claims description 10
- CREMABGTGYGIQB-UHFFFAOYSA-N carbon carbon Chemical compound C.C CREMABGTGYGIQB-UHFFFAOYSA-N 0.000 claims description 8
- 239000013078 crystal Substances 0.000 claims description 6
- 230000005484 gravity Effects 0.000 claims description 6
- 239000012925 reference material Substances 0.000 claims description 5
- 239000007788 liquid Substances 0.000 claims description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 3
- 210000003298 dental enamel Anatomy 0.000 claims description 2
- 229910052737 gold Inorganic materials 0.000 claims description 2
- 239000010931 gold Substances 0.000 claims description 2
- 229910004298 SiO 2 Inorganic materials 0.000 claims 1
- 229910010413 TiO 2 Inorganic materials 0.000 claims 1
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 230000008878 coupling Effects 0.000 claims 1
- 238000010168 coupling process Methods 0.000 claims 1
- 238000005859 coupling reaction Methods 0.000 claims 1
- 238000010884 ion-beam technique Methods 0.000 description 162
- 229910052799 carbon Inorganic materials 0.000 description 127
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 121
- 239000007789 gas Substances 0.000 description 77
- 230000008569 process Effects 0.000 description 73
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 67
- 229910003460 diamond Inorganic materials 0.000 description 59
- 239000010432 diamond Substances 0.000 description 59
- 150000002500 ions Chemical class 0.000 description 56
- IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Substances N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 44
- 229910052786 argon Inorganic materials 0.000 description 38
- -1 Mail4 Inorganic materials 0.000 description 36
- 230000010287 polarization Effects 0.000 description 36
- 238000005520 cutting process Methods 0.000 description 33
- 239000001257 hydrogen Substances 0.000 description 29
- 229910052739 hydrogen Inorganic materials 0.000 description 29
- 230000001681 protective effect Effects 0.000 description 27
- 229910052757 nitrogen Inorganic materials 0.000 description 26
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 23
- 229920000642 polymer Polymers 0.000 description 21
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 21
- 238000010494 dissociation reaction Methods 0.000 description 20
- 230000005593 dissociations Effects 0.000 description 20
- 230000001133 acceleration Effects 0.000 description 18
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 17
- 239000012495 reaction gas Substances 0.000 description 15
- 125000004429 atom Chemical group 0.000 description 14
- 238000010586 diagram Methods 0.000 description 12
- 239000007921 spray Substances 0.000 description 12
- 238000012546 transfer Methods 0.000 description 11
- 239000008367 deionised water Substances 0.000 description 10
- 229910021641 deionized water Inorganic materials 0.000 description 10
- 239000004744 fabric Substances 0.000 description 9
- 239000000126 substance Substances 0.000 description 9
- 238000007689 inspection Methods 0.000 description 8
- 230000007547 defect Effects 0.000 description 7
- 150000002431 hydrogen Chemical class 0.000 description 7
- 239000001301 oxygen Substances 0.000 description 7
- 229910052760 oxygen Inorganic materials 0.000 description 7
- 239000002245 particle Substances 0.000 description 7
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 5
- 150000001721 carbon Chemical group 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- XPDWGBQVDMORPB-UHFFFAOYSA-N Fluoroform Chemical compound FC(F)F XPDWGBQVDMORPB-UHFFFAOYSA-N 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 4
- DIOQZVSQGTUSAI-UHFFFAOYSA-N decane Chemical compound CCCCCCCCCC DIOQZVSQGTUSAI-UHFFFAOYSA-N 0.000 description 4
- 238000000151 deposition Methods 0.000 description 4
- 229910052732 germanium Inorganic materials 0.000 description 4
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 4
- 239000001307 helium Substances 0.000 description 4
- 229910052734 helium Inorganic materials 0.000 description 4
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 4
- GPRLSGONYQIRFK-UHFFFAOYSA-N hydron Chemical compound [H+] GPRLSGONYQIRFK-UHFFFAOYSA-N 0.000 description 4
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 4
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 4
- 230000007935 neutral effect Effects 0.000 description 4
- 230000005693 optoelectronics Effects 0.000 description 4
- 229910052721 tungsten Inorganic materials 0.000 description 4
- 239000010937 tungsten Substances 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 239000002131 composite material Substances 0.000 description 3
- 238000011109 contamination Methods 0.000 description 3
- 238000013500 data storage Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 229910001873 dinitrogen Inorganic materials 0.000 description 3
- 238000010894 electron beam technology Methods 0.000 description 3
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 3
- 239000011159 matrix material Substances 0.000 description 3
- 238000006116 polymerization reaction Methods 0.000 description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 2
- 239000004988 Nematic liquid crystal Substances 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 2
- 125000004432 carbon atom Chemical group C* 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000012459 cleaning agent Substances 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- RWRIWBAIICGTTQ-UHFFFAOYSA-N difluoromethane Chemical compound FCF RWRIWBAIICGTTQ-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000007943 implant Substances 0.000 description 2
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 2
- 239000002244 precipitate Substances 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 150000003254 radicals Chemical class 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- 229910052684 Cerium Inorganic materials 0.000 description 1
- YZCKVEUIGOORGS-OUBTZVSYSA-N Deuterium Chemical compound [2H] YZCKVEUIGOORGS-OUBTZVSYSA-N 0.000 description 1
- YZCKVEUIGOORGS-UHFFFAOYSA-N Hydrogen atom Chemical group [H] YZCKVEUIGOORGS-UHFFFAOYSA-N 0.000 description 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- 102220501206 Scaffold attachment factor B1_S25G_mutation Human genes 0.000 description 1
- 240000008866 Ziziphus nummularia Species 0.000 description 1
- 230000003796 beauty Effects 0.000 description 1
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 150000001723 carbon free-radicals Chemical class 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 229910052805 deuterium Inorganic materials 0.000 description 1
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000004334 fluoridation Methods 0.000 description 1
- 230000036541 health Effects 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 150000002466 imines Chemical class 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910003437 indium oxide Inorganic materials 0.000 description 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000012811 non-conductive material Substances 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 238000000053 physical method Methods 0.000 description 1
- 230000000379 polymerizing effect Effects 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 102220247850 rs1421233354 Human genes 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 238000007665 sagging Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000000344 soap Substances 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 238000013112 stability test Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 239000011345 viscous material Substances 0.000 description 1
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
- G02F1/133711—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by organic films, e.g. polymeric films
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1341—Filling or closing of cells
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1341—Filling or closing of cells
- G02F1/13415—Drop filling process
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mathematical Physics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Liquid Crystal (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020020072796A KR100867726B1 (ko) | 2002-11-21 | 2002-11-21 | 액정표시장치의 제조 방법 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200422747A TW200422747A (en) | 2004-11-01 |
| TWI303345B true TWI303345B (en) | 2008-11-21 |
Family
ID=32322282
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW092130657A TWI303345B (en) | 2002-11-21 | 2003-11-03 | Method of manufacturing liquid crystal display device |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US6999154B2 (enExample) |
| JP (1) | JP2004310031A (enExample) |
| KR (1) | KR100867726B1 (enExample) |
| TW (1) | TWI303345B (enExample) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SG142160A1 (en) * | 2001-03-19 | 2008-05-28 | Semiconductor Energy Lab | Method of manufacturing a semiconductor device |
| US6850080B2 (en) * | 2001-03-19 | 2005-02-01 | Semiconductor Energy Laboratory Co., Ltd. | Inspection method and inspection apparatus |
| US7202923B2 (en) * | 2001-11-27 | 2007-04-10 | Sharp Kabushiki Kaisha | Liquid crystal display with polarizer with inclined edge portion |
| US7661810B2 (en) * | 2005-03-02 | 2010-02-16 | Fujifilm Corporation | Image recording apparatus and inkjet apparatus for double-side recording |
| KR100966434B1 (ko) * | 2005-06-20 | 2010-06-28 | 엘지디스플레이 주식회사 | 카세트 적재장비 |
| KR100719104B1 (ko) * | 2005-07-29 | 2007-05-17 | 삼성전자주식회사 | 액정표시장치용 유기 박막 트랜지스터의 제조방법 |
| KR20070023958A (ko) * | 2005-08-25 | 2007-03-02 | 삼성전자주식회사 | 액정 표시 장치용 기판 절단 시스템 및 상기 시스템을이용한 액정 표시 장치용 기판 절단 방법 |
| KR100819540B1 (ko) * | 2006-07-11 | 2008-04-08 | 강삼태 | 평판디스플레이 제조용 물류이송장치 |
| WO2008028553A1 (en) * | 2006-09-02 | 2008-03-13 | Merck Patent Gmbh | Particle beam process for the alignment of reactive mesogens |
| JP5057304B2 (ja) * | 2007-06-08 | 2012-10-24 | 国立大学法人名古屋大学 | 車載通信システム及び車載通信方法 |
| CN104678619A (zh) * | 2015-03-23 | 2015-06-03 | 合肥鑫晟光电科技有限公司 | 一种滚压机及其滚压方法 |
| CN108133932B (zh) * | 2016-12-01 | 2020-04-10 | 京东方科技集团股份有限公司 | 阵列基板及其制作方法、显示面板 |
| CN109814287B (zh) * | 2019-01-30 | 2021-11-02 | 深圳市华星光电半导体显示技术有限公司 | 显示面板的检测方法及装置、控制器、存储介质 |
| CN116643112B (zh) * | 2023-07-21 | 2023-09-19 | 深圳市隆显智能设备有限公司 | 基于夹持施压便于固定的显示屏检测设备 |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63246727A (ja) * | 1987-04-01 | 1988-10-13 | Matsushita Electric Ind Co Ltd | アクテイブマトリツクスアレイおよびその検査方法 |
| US5235272A (en) * | 1991-06-17 | 1993-08-10 | Photon Dynamics, Inc. | Method and apparatus for automatically inspecting and repairing an active matrix LCD panel |
| US6369867B1 (en) * | 1998-03-12 | 2002-04-09 | Gl Displays, Inc. | Riveted liquid crystal display comprising at least one plastic rivet formed by laser drilling through a pair of plastic plates |
| KR100297943B1 (ko) * | 1998-06-17 | 2001-09-06 | 김덕중 | 간섭계를이용한액정배향막의다영역형성방법 |
| JP3653200B2 (ja) * | 1998-10-02 | 2005-05-25 | シャープ株式会社 | 表示装置の製造方法 |
| US6632483B1 (en) * | 2000-06-30 | 2003-10-14 | International Business Machines Corporation | Ion gun deposition and alignment for liquid-crystal applications |
| JP2002040445A (ja) * | 2000-07-28 | 2002-02-06 | Sanyo Electric Co Ltd | 液晶表示パネルの製造方法及びシール硬化用の緩衝板 |
| KR100416962B1 (ko) * | 2000-11-14 | 2004-02-05 | 이주현 | 비접촉식 전압감지장치 |
| JP2002156417A (ja) * | 2000-11-17 | 2002-05-31 | Oht Inc | 回路基板の検査装置及び検査方法 |
| SG142160A1 (en) * | 2001-03-19 | 2008-05-28 | Semiconductor Energy Lab | Method of manufacturing a semiconductor device |
| US6850080B2 (en) * | 2001-03-19 | 2005-02-01 | Semiconductor Energy Laboratory Co., Ltd. | Inspection method and inspection apparatus |
| JP2002340989A (ja) * | 2001-05-15 | 2002-11-27 | Semiconductor Energy Lab Co Ltd | 測定方法、検査方法及び検査装置 |
-
2002
- 2002-11-21 KR KR1020020072796A patent/KR100867726B1/ko not_active Expired - Fee Related
-
2003
- 2003-10-22 US US10/689,633 patent/US6999154B2/en not_active Expired - Fee Related
- 2003-11-03 TW TW092130657A patent/TWI303345B/zh not_active IP Right Cessation
- 2003-11-21 JP JP2003392740A patent/JP2004310031A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| JP2004310031A (ja) | 2004-11-04 |
| US20040100612A1 (en) | 2004-05-27 |
| US6999154B2 (en) | 2006-02-14 |
| TW200422747A (en) | 2004-11-01 |
| KR20040044675A (ko) | 2004-05-31 |
| KR100867726B1 (ko) | 2008-11-10 |
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