KR100722073B1 - 무기 배향막의 형성 방법 - Google Patents
무기 배향막의 형성 방법 Download PDFInfo
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- KR100722073B1 KR100722073B1 KR1020040069723A KR20040069723A KR100722073B1 KR 100722073 B1 KR100722073 B1 KR 100722073B1 KR 1020040069723 A KR1020040069723 A KR 1020040069723A KR 20040069723 A KR20040069723 A KR 20040069723A KR 100722073 B1 KR100722073 B1 KR 100722073B1
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- liquid crystal
- film
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- inorganic alignment
- alignment film
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/10—Glass or silica
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5826—Treatment with charged particles
- C23C14/5833—Ion beam bombardment
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
- G02F1/13378—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K2323/00—Functional layers of liquid crystal optical display excluding electroactive liquid crystal layer characterised by chemical composition
- C09K2323/02—Alignment layer characterised by chemical composition
- C09K2323/021—Inorganic, e.g. glass or silicon oxide
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
- G02F1/133734—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by obliquely evaporated films, e.g. Si or SiO2 films
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
- G02F1/13378—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
- G02F1/133792—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation by etching
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2202/00—Materials and properties
- G02F2202/09—Materials and properties inorganic glass
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- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Organic Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Mathematical Physics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Liquid Crystal (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
Claims (16)
- 기재 상에 무기 배향막을 형성하는 방법으로서,상기 기재 상에 무기 재료로 구성된 막을 형성하는 성막 공정과,상기 막의 표면에, 상기 표면의 수직 방향에 대하여 2° 이상 90° 미만의 경사진 방향으로부터 이온 빔을 조사함으로써 얻어지는 방향성을 갖는 오목부를 형성하는 밀링 공정을 갖는 것을 특징으로 하는 무기 배향막의 형성 방법.
- 삭제
- 삭제
- 제 1 항에 있어서,상기 밀링 공정에서의 상기 이온 빔을 조사할 때의 상기 이온 빔의 가속 전압은 400∼1400V인 무기 배향막의 형성 방법.
- 제 1 항에 있어서,상기 밀링 공정에서 조사되는 상기 이온 빔의 이온 빔 전류는 100∼1000㎃인 무기 배향막의 형성 방법.
- 제 1 항에 있어서,상기 밀링 공정에서의 상기 막 근방에서의 분위기의 압력은 5.0× 10-3 Pa 이하인 무기 배향막의 형성 방법.
- 제 1 항에 있어서,상기 성막 공정에서의 상기 막의 형성은 스퍼터법에 의해 행하여지는 무기 배향막의 형성 방법.
- 제 1 항에 있어서,상기 무기 재료는 실리콘의 산화물을 주성분으로 하는 것인 무기 배향막의 형성 방법.
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Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003310203A JP2005077925A (ja) | 2003-09-02 | 2003-09-02 | 無機配向膜の形成方法、無機配向膜、電子デバイス用基板、液晶パネルおよび電子機器 |
JPJP-P-2003-00310203 | 2003-09-02 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20050024241A KR20050024241A (ko) | 2005-03-10 |
KR100722073B1 true KR100722073B1 (ko) | 2007-05-25 |
Family
ID=34412140
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020040069723A KR100722073B1 (ko) | 2003-09-02 | 2004-09-01 | 무기 배향막의 형성 방법 |
Country Status (5)
Country | Link |
---|---|
US (1) | US7262897B2 (ko) |
JP (1) | JP2005077925A (ko) |
KR (1) | KR100722073B1 (ko) |
CN (1) | CN1595263A (ko) |
TW (1) | TWI238982B (ko) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007108371A (ja) * | 2005-10-13 | 2007-04-26 | Seiko Epson Corp | 液晶パネル、液晶パネルの製造方法および電子機器 |
KR100814146B1 (ko) * | 2005-11-02 | 2008-03-14 | 연세대학교 산학협력단 | 플라즈마를 이용한 액정표시장치용 무기배향막의표면처리방법 |
KR20070052183A (ko) * | 2005-11-16 | 2007-05-21 | 삼성전자주식회사 | 배향막 형성 방법, 그에 의해 형성된 배향막 및 배향막을포함하는 액정 표시 장치 |
JP4736759B2 (ja) * | 2005-12-02 | 2011-07-27 | セイコーエプソン株式会社 | 液晶装置、液晶装置の製造方法及びプロジェクタ |
CN102033361B (zh) * | 2008-03-21 | 2013-03-06 | 北京京东方光电科技有限公司 | 液晶取向层的制作方法 |
JP5169490B2 (ja) * | 2008-05-28 | 2013-03-27 | セイコーエプソン株式会社 | 液晶装置、電子機器、および液晶装置の製造方法 |
FR3108989B1 (fr) * | 2020-04-02 | 2022-04-01 | Bnl Eurolens | Procédé de traitement d’un article optique miroité |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0588177A (ja) * | 1991-09-30 | 1993-04-09 | Toshiba Corp | 液晶表示素子 |
JPH05181738A (ja) * | 1991-12-30 | 1993-07-23 | Nec Corp | データ記憶システム |
JPH06281937A (ja) * | 1993-01-29 | 1994-10-07 | Sharp Corp | 液晶表示装置の製造方法 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA2114459C (en) * | 1993-01-29 | 1999-09-07 | Shigeaki Mizushima | Liquid crystal display apparatus with a substrate having a rough alignment layer, and a method for producing the same |
US5770826A (en) * | 1996-05-10 | 1998-06-23 | International Business Machines Corporation | Atomic beam alignment of liquid crystals |
JP2853682B2 (ja) | 1996-11-29 | 1999-02-03 | 日本電気株式会社 | 液晶表示素子およびその製造方法 |
JPH1115000A (ja) * | 1997-06-26 | 1999-01-22 | Seiko Epson Corp | 液晶表示装置およびその製造方法 |
JP2000227578A (ja) * | 1998-11-12 | 2000-08-15 | Fujitsu Ltd | 投写型表示装置 |
US6632483B1 (en) * | 2000-06-30 | 2003-10-14 | International Business Machines Corporation | Ion gun deposition and alignment for liquid-crystal applications |
US6665033B2 (en) | 2000-11-30 | 2003-12-16 | International Business Machines Corporation | Method for forming alignment layer by ion beam surface modification |
JP2002287146A (ja) | 2001-03-23 | 2002-10-03 | Seiko Epson Corp | 液晶装置および液晶装置の製造方法、投射型液晶装置並びに電子機器 |
JP4166013B2 (ja) * | 2001-12-26 | 2008-10-15 | 富士通株式会社 | 薄膜キャパシタ製造方法 |
JP3739001B2 (ja) * | 2003-09-04 | 2006-01-25 | セイコーエプソン株式会社 | 無機配向膜の形成方法、無機配向膜、電子デバイス用基板、液晶パネルおよび電子機器 |
JP3739002B2 (ja) * | 2003-09-04 | 2006-01-25 | セイコーエプソン株式会社 | 無機配向膜の形成方法、無機配向膜、電子デバイス用基板、液晶パネルおよび電子機器 |
JP2005084147A (ja) * | 2003-09-04 | 2005-03-31 | Seiko Epson Corp | 配向膜の形成方法、配向膜、電子デバイス用基板、液晶パネルおよび電子機器 |
JP3767589B2 (ja) * | 2003-09-04 | 2006-04-19 | セイコーエプソン株式会社 | 無機配向膜の形成方法、無機配向膜、電子デバイス用基板、液晶パネルおよび電子機器 |
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2003
- 2003-09-02 JP JP2003310203A patent/JP2005077925A/ja active Pending
-
2004
- 2004-08-27 TW TW093125835A patent/TWI238982B/zh not_active IP Right Cessation
- 2004-08-31 CN CNA2004100683476A patent/CN1595263A/zh active Pending
- 2004-09-01 KR KR1020040069723A patent/KR100722073B1/ko active IP Right Grant
- 2004-09-01 US US10/931,813 patent/US7262897B2/en active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0588177A (ja) * | 1991-09-30 | 1993-04-09 | Toshiba Corp | 液晶表示素子 |
JPH05181738A (ja) * | 1991-12-30 | 1993-07-23 | Nec Corp | データ記憶システム |
JPH06281937A (ja) * | 1993-01-29 | 1994-10-07 | Sharp Corp | 液晶表示装置の製造方法 |
Non-Patent Citations (1)
Title |
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JP03251822NU L |
Also Published As
Publication number | Publication date |
---|---|
US20050084626A1 (en) | 2005-04-21 |
CN1595263A (zh) | 2005-03-16 |
TW200511172A (en) | 2005-03-16 |
JP2005077925A (ja) | 2005-03-24 |
KR20050024241A (ko) | 2005-03-10 |
TWI238982B (en) | 2005-09-01 |
US7262897B2 (en) | 2007-08-28 |
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