TWI299530B - - Google Patents

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Publication number
TWI299530B
TWI299530B TW91112080A TW91112080A TWI299530B TW I299530 B TWI299530 B TW I299530B TW 91112080 A TW91112080 A TW 91112080A TW 91112080 A TW91112080 A TW 91112080A TW I299530 B TWI299530 B TW I299530B
Authority
TW
Taiwan
Prior art keywords
metal
forming
layer
substrate
semiconductor substrate
Prior art date
Application number
TW91112080A
Other languages
English (en)
Chinese (zh)
Inventor
Chau-Jie Tsai
Jeng-Yang Pan
Jr-Nan Wu
Meng-Chang Liou
Shu-You Ye
Original Assignee
Taiwan Semiconductor Mfg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiwan Semiconductor Mfg filed Critical Taiwan Semiconductor Mfg
Priority to TW91112080A priority Critical patent/TWI299530B/zh
Application granted granted Critical
Publication of TWI299530B publication Critical patent/TWI299530B/zh

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  • Cleaning Or Drying Semiconductors (AREA)
TW91112080A 2002-06-05 2002-06-05 TWI299530B (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW91112080A TWI299530B (ja) 2002-06-05 2002-06-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW91112080A TWI299530B (ja) 2002-06-05 2002-06-05

Publications (1)

Publication Number Publication Date
TWI299530B true TWI299530B (ja) 2008-08-01

Family

ID=45069713

Family Applications (1)

Application Number Title Priority Date Filing Date
TW91112080A TWI299530B (ja) 2002-06-05 2002-06-05

Country Status (1)

Country Link
TW (1) TWI299530B (ja)

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees