TWI294336B - - Google Patents

Download PDF

Info

Publication number
TWI294336B
TWI294336B TW094121400A TW94121400A TWI294336B TW I294336 B TWI294336 B TW I294336B TW 094121400 A TW094121400 A TW 094121400A TW 94121400 A TW94121400 A TW 94121400A TW I294336 B TWI294336 B TW I294336B
Authority
TW
Taiwan
Prior art keywords
workpiece
transfer robot
frame member
hand
air
Prior art date
Application number
TW094121400A
Other languages
English (en)
Chinese (zh)
Other versions
TW200603966A (en
Inventor
Fukuma Kunio
Original Assignee
Daihen Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daihen Corp filed Critical Daihen Corp
Publication of TW200603966A publication Critical patent/TW200603966A/zh
Application granted granted Critical
Publication of TWI294336B publication Critical patent/TWI294336B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/0014—Gripping heads and other end effectors having fork, comb or plate shaped means for engaging the lower surface on a object to be transported
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
    • B25J15/0616—Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum
    • B25J15/065—Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum provided with separating means for releasing the gripped object after suction
    • B25J15/0658—Pneumatic type, e.g. air blast or overpressure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/0009—Constructional details, e.g. manipulator supports, bases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/02—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)
TW094121400A 2004-07-01 2005-06-27 Transfer robot TW200603966A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004195470A JP2006016144A (ja) 2004-07-01 2004-07-01 トランスファロボット

Publications (2)

Publication Number Publication Date
TW200603966A TW200603966A (en) 2006-02-01
TWI294336B true TWI294336B (https=) 2008-03-11

Family

ID=35790735

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094121400A TW200603966A (en) 2004-07-01 2005-06-27 Transfer robot

Country Status (3)

Country Link
JP (1) JP2006016144A (https=)
KR (1) KR20060049255A (https=)
TW (1) TW200603966A (https=)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5013987B2 (ja) 2007-06-22 2012-08-29 東京エレクトロン株式会社 基板処理装置および基板搬送装置
WO2009034854A1 (ja) 2007-09-13 2009-03-19 Kabushiki Kaisha Yaskawa Denki 移送ロボットおよび移送方法および制御方法
JP5480605B2 (ja) * 2009-12-01 2014-04-23 東京エレクトロン株式会社 基板搬送装置および基板処理システム
JP5613001B2 (ja) * 2010-10-13 2014-10-22 東京エレクトロン株式会社 基板処理システム及び基板搬送方法
JP5895939B2 (ja) * 2011-09-20 2016-03-30 株式会社安川電機 ハンドリングシステム
KR101386035B1 (ko) * 2012-03-16 2014-04-24 (주)동부로봇 다단 슬라이드형 기판이송장치
CN102922525B (zh) * 2012-10-24 2015-11-25 宁波江丰生物信息技术有限公司 机械手、玻片自动装卸系统和数字病理切片扫描仪
JP5717797B2 (ja) 2013-06-26 2015-05-13 ファナック株式会社 物品を搬送するためのロボットハンド、ロボットハンドを備えたロボットおよびロボットシステム、ならびにロボットハンドの制御方法
TW201507829A (zh) * 2013-08-23 2015-03-01 Chiuan Yan Technology Co Ltd 升降取送裝置
KR101606259B1 (ko) 2014-02-18 2016-03-24 (주) 러스 트랜스퍼용 수평 운송 암 및 이 수평 운송 암이 적용된 트랜스퍼 로봇
JP6869137B2 (ja) * 2017-07-28 2021-05-12 日本電産サンキョー株式会社 産業用ロボット
CN109695363A (zh) * 2017-10-24 2019-04-30 刘思邦 塔式立体停车库
CN109407359A (zh) * 2018-10-29 2019-03-01 武汉华星光电技术有限公司 机械手
JP7179680B2 (ja) * 2019-05-27 2022-11-29 株式会社メイキコウ 荷下ろし装置
CN110587635A (zh) * 2019-08-02 2019-12-20 湖南海纳赋能科技有限公司 一种用于寄存柜中的智能存储机械手
WO2021095169A1 (ja) * 2019-11-13 2021-05-20 株式会社安川電機 バッテリー装着システム及びバッテリー装着方法
CN111017541A (zh) * 2019-11-19 2020-04-17 哈工大机器人南昌智能制造研究院 一种板类零件的转运装置及其转运方法
JP7425701B2 (ja) * 2020-09-16 2024-01-31 芝浦メカトロニクス株式会社 基板搬送装置
TWI834061B (zh) * 2021-09-10 2024-03-01 鴻勁精密股份有限公司 載送機構及其應用之輸送裝置、作業機
CN115431584A (zh) * 2022-09-05 2022-12-06 格林美（天津）城市矿产循环产业发展有限公司 一种报废汽车压扁系统

Also Published As

Publication number Publication date
KR20060049255A (ko) 2006-05-18
JP2006016144A (ja) 2006-01-19
TW200603966A (en) 2006-02-01

Similar Documents

Publication Publication Date Title
TWI294336B (https=)
TWI286989B (en) Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists
JP4756372B2 (ja) 基板処理方法
TW200521056A (en) Carrying apparatus and carrying control method for sheet-like substrate
TW200540085A (en) Transfer robot
TW200825003A (en) Method and apparatus for transporting, queuing, and loading of large area substrates in multi-tool processing operations
JP2013000839A (ja) 搬送ロボット
TW200836840A (en) Coating method and coating apparatus
WO2003105216A1 (ja) 容器搬送システム
TW200904729A (en) Article storage
TW201144195A (en) Transport device and transport method
TWI821552B (zh) 行走車系統
JP2005064431A (ja) 基板搬送装置及び基板搬送方法
JPH059339B2 (https=)
CN210010907U (zh) 一种热交换芯装配机
JP2003145473A (ja) 吸着パッド
JP4631433B2 (ja) 基板搬送装置及び基板搬送方法
JP2679284B2 (ja) 天井走行車
CN214383438U (zh) 一种具有防护功能的车厘子苗木转运设备
CN213201484U (zh) 一种双工位自动送料台车
TWI469245B (zh) Substrate transfer device
JPH0710267A (ja) クリーンルーム用移載装置
JP2003045935A (ja) 液晶ガラス基板などフラットパネルの縦型カセット、シフター及びロボット
JP2010005126A (ja) ゴルフバッグ搬送機およびゴルフバッグ搬送システム
JPS6377672A (ja) ワ−ク搬送ロボツト

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees