TWI293059B - - Google Patents
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- Publication number
- TWI293059B TWI293059B TW94110134A TW94110134A TWI293059B TW I293059 B TWI293059 B TW I293059B TW 94110134 A TW94110134 A TW 94110134A TW 94110134 A TW94110134 A TW 94110134A TW I293059 B TWI293059 B TW I293059B
- Authority
- TW
- Taiwan
- Prior art keywords
- substrate
- jaws
- transfer device
- nozzle
- transported
- Prior art date
Links
Landscapes
- Manipulator (AREA)
- Specific Conveyance Elements (AREA)
- Liquid Crystal (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW094110134A TW200633919A (en) | 2005-03-30 | 2005-03-30 | Substrate carrying device and method used thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW094110134A TW200633919A (en) | 2005-03-30 | 2005-03-30 | Substrate carrying device and method used thereof |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200633919A TW200633919A (en) | 2006-10-01 |
TWI293059B true TWI293059B (ja) | 2008-02-01 |
Family
ID=45067718
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW094110134A TW200633919A (en) | 2005-03-30 | 2005-03-30 | Substrate carrying device and method used thereof |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW200633919A (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWM554094U (zh) * | 2017-06-29 | 2018-01-11 | 盟立自動化股份有限公司 | 檢測系統 |
TWI654704B (zh) | 2017-08-07 | 2019-03-21 | 煜峰投資顧問有限公司 | 一種基板輸送系統及使用該系統輸送基板之方法 |
-
2005
- 2005-03-30 TW TW094110134A patent/TW200633919A/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
TW200633919A (en) | 2006-10-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |