1293059 九、發明說明： 【發明所屬之技術領域】 本發明係一種基板移運裝置， 搬運裝置上。 其係運用概晶或錄面板之大小尺寸 L先雨技術】 以往先前所知之基板移運方式，通常係機械手臂將其機板移運至歡 帶上’再她餅祕基騎对之財，_鱗有各式各樣 例如其傳統皮帶式傳送輸送帶，其係細袞輪輕__達細 個滾輪於供電_步運作，其複數個併排的滾輪結構上包覆著塑膠皮帶 其係可讓其紐懒彳咖$，轉轉敎觀帶只能以1 相傳輸以胁無祕相Α奴基缺猶紅械裝置，倾將不同) 小之基板分取不的移運至存放裝置，當然除了傳統的歸皮帶之泰 ^帶還有不同材質之輸送帶外，還有所謂的滾輪式輸送帶以及階梯式齡 帶’滾輪式_魏则、滾輪為主㈣基綱㈣撐起，並紐滾動將遵 板移運至存放裝⑼，此係為了讓基板傳糾減少接_積以減少損壞， 其亦可依照基板大小調整滾輪間的寬度，但其卻亦無法料將不同大小之 板同時移運至獨之存放裝肋；再者還麵謂的階梯式輸送裝置，其 係將不_大小之基板⑽梯之方式分別送至不邮口之存放裝置内但 為配合其觀之方式，賊手域—4獨大小之基板，且此 輸送裝置亦只能-片_片以階梯的方式將基板分送至該存放裝置内，然而 還有’、他的觀τ方式，其亦朋小m朗時賴械手臂移運至輸 1293059 送帶之大小不同基板同時輸送至各個存放裝置内，使其輸送帶裝置大大的 浪費了其最佳使用狀態。 【發明内容】 本發明係一種基板移運裝置，此裝置係裝設在液晶面板之基板運送裝 置上，其係是利用機械手臂將不同大小的基板，同時移運至此基板搬運架 上，然此運送基板之基板搬運架上撐板與機械手臂之夾爪間為相互交錯狀 態，令其可輕鬆的將基板無損壞的情況下置放於基板搬運架上的撐板上， 當機械手臂將基板移運至基板搬運架之撐板上時，利用基板搬運架之撐板 為獨立支撐體的特殊裝置，將不同大小之基板於同時間撐起，且不同大小 之基板了透過獨立撐板上複數個吸嘴將基板—穩固的吸附住，當獨立撐 板上複數個吸嘴翻吸附基板後便同時將基板分送至不同的輸送帶上，輸 送帶便可同時移運多個大小不同之基板，亦改善了習知只能單一輸送基板 的陋習，以縮短基板配送之時間，大幅縮短了產品的製程時間。 【實施方式】 一域一所示，機械手臂1G係裝設在—基座13上，其基座13係裝設在 一固定璧14上（固定璧為-牆壁或連接至地面之支柱等），其機械手㈣ 之手臂12上係裝有夾爪11，且其央爪11係為複數個平行支撐架所组成， 然當機械手臂_域板要加以運送時，此時每轉板⑽起基板時可 平均分攤基板所置於夾爪u上的勤，而又配合第二圖所示，機械手臂Μ 上的夹爪u係撼板搬運㈣上之咖相互交錯，爾板21係為 目互平仃且獨立之支架，但其撑板21可同時運作不會因為獨立架構而產生 12930591293059 IX. Description of the Invention: [Technical Field of the Invention] The present invention is a substrate transfer device on a handling device. It uses the size of the crystal or the recording panel. The first rain technology is used. The previously known substrate transfer method is usually a robotic arm that transports its board to the ribbon. , _ scales have a variety of such as its traditional belt conveyor belt, which is a fine wheel light __ up to a small roller in the power supply _ step operation, its multiple side-by-side roller structure is covered with plastic belt It can be used to make it lazy, and it can only be transferred to the storage device with a one-phase transmission to threaten no secrets, and the slaves are not allowed to move. Of course, in addition to the traditional conveyor belts of belts and belts of different materials, there are also so-called roller conveyor belts and step-type belts with 'roller type _ Wei, the main wheel (four) base (four) prop up, And the new scroll will move the board to the storage device (9). This is to reduce the damage of the substrate to reduce the damage. It can also adjust the width of the wheel according to the size of the substrate, but it can not be expected to be different. The board is transported to the storage ribs at the same time; The device is sent to the storage device of the non-mail port by means of a non-size substrate (10) ladder, but in order to match the manner of the view, the thief hand domain - 4 single-sized substrate, and the conveying device can only - The film_slices the substrate into the storage device in a stepwise manner, but there is also a ', his view of the τ mode, which is also a small lang when the arm is transported to the 1292959. It is transported to each storage device, so that its conveyor belt device greatly wastes its optimal use. SUMMARY OF THE INVENTION The present invention is a substrate transfer device that is mounted on a substrate transport device of a liquid crystal panel by using a robotic arm to transport substrates of different sizes to the substrate carrier at the same time. The substrate carrier on the substrate carrier and the jaws of the robot arm are interlaced, so that the substrate can be easily placed on the support plate on the substrate carrier without damage, when the robot arm will be the substrate When transported to the support plate of the substrate carrier, the substrate of the substrate carrier is used as a special device of the independent support body, and the substrates of different sizes are propped together at the same time, and the substrates of different sizes are transmitted through the independent support plates. The nozzles hold the substrate firmly. When a plurality of nozzles on the independent support plate are slid and adsorbed to the substrate, the substrates are simultaneously distributed to different conveyor belts, and the conveyor belt can simultaneously transport a plurality of substrates of different sizes. It also improves the conventional habit of only transporting the substrate, shortening the time of substrate distribution, and greatly shortening the manufacturing process time of the product. [Embodiment] As shown in the first field, the robot arm 1G is mounted on the base 13 and the base 13 is mounted on a fixed jaw 14 (fixed to a wall or a pillar connected to the ground, etc.) The arm 12 of the manipulator (4) is equipped with a jaw 11 and the central claw 11 is composed of a plurality of parallel support frames. However, when the mechanical arm_domain plate is to be transported, at this time, each plate (10) When the substrate is used, the substrate can be evenly distributed on the jaws u, and as shown in the second figure, the jaws on the robot arm are transported by the jaws (4), and the coffee is interlaced. A flat and independent bracket, but its struts 21 can operate at the same time without generating 1229359 due to the independent architecture.
撐起基板辆力不均的情形，在搬運架之撐板上裝設有複數個吸嘴22，此 吸嘴22可將撐起之紐制之撐姐移動，不至於發生轉時偏移所造成 貝口且此吸嘴22為-軟質吸嘴(或加農彈簣機構），此可做為一緩衝裝 置田基板、、、工機械手臂1〇上之夾爪u搬移至基板搬運架2〇上時，吸嘴U 可平均分散基減置浦運架揭職生之壓力，可大幅減少基板因置放 時釋放出壓力所產生的損害，以增加基板之良率。 就如第_圖所不，當機械手臂1G上之夾爪η取得所欲搬運之大尺寸 基板後，魏11將大財基板撐起，撐起Α尺寸基紐將跡至基板搬運 架20上，此時夾爪η將大尺核板置放於基板搬運㈣上之撐板21，然 樓板21上之吸嘴22將做-緩衝侧承受Α尺寸紐置放時所產生之壓 力，朗時讀22祕大尺寸紐平輕陳，使大財基板在基板搬運 架20之撐板21上穩固不動，以便_將大尺寸基板移至正確之輸送帶23 上，當基板搬運架20之撐板21將大尺寸基板穩固吸附後，其麵手臂1〇 之夾爪11便會離開基板搬運架20再繼續搬運基板，然基板搬運架2〇之樓 板21便將大尺寸基板移運至所需之位置加以存放。 如第四圖所示，當機械手臂1〇上之夾爪U取得所欲搬運之兩中尺寸 基板後，夾爪11將兩中尺寸基板撐起，撐起兩中尺寸基板後將其移至基板 搬運架20上，此時夾爪11將兩中尺寸基板置放於基板搬運架2〇上之撐板 21，然撐板21上之吸嘴22(或加裝彈簧機構)將做一緩衝作用承受兩中尺寸 基板置放時所產生之壓力，並同時吸嘴22亦將兩中尺寸基板平均吸附住， 使兩中尺寸基板在基板搬運架20之撐板21上穩固不動，以便順利將兩中 1293059 尺寸基板移至正確之輸送帶23上；當基板搬運架20之撐板21將兩中尺寸 • 基板穩固吸附後，其機械手臂1〇之夾爪11便會離開基板搬運架20再繼續 / 搬運基板，然基板搬運架20之撐板21便將兩中尺寸基板分別移運至所需 之位置加以存放。 如第五圖所示，當機械手臂10上之夾爪11取得所欲搬運之兩個以上 不同尺寸基板後，夾爪11將兩個以上不同尺寸基板撐起，撐起兩個以上不 同尺寸基板後將其移至基板搬運架20上，此時夾爪11將兩個以上不同尺 寸基板置放於基板搬運架20上之撐板21，然撐板21上之吸嘴22將做一緩 衝作用承受兩個以上不同尺寸基板置放時所產生之壓力，並同時吸嘴Μ亦 將兩個以上不同尺寸基板平均吸附住，使兩個以上不同尺寸基板在基板搬 運架20之撐板21上穩固不動，以便順利將兩個以上不同尺寸基板移至正 確之輸送帶23上；當基板搬運架20之撐板21將兩個以上不同尺寸基板穩 固吸附後，其機械手臂10之夾爪11便會離開搬運架再繼續搬運基板，然 基板搬運架20之撐板21便將兩個以上不同尺寸基板分別移運至所需之位 置加以存放。 又’本發明之夾爪11可為伸縮式夾爪，可依照所需移運之基板大小與 數量伸縮變換夾爪數。 以及，本發明之夾爪11為可更換式夾爪，其夾爪n可照所需移運之 基板大小與數量更變換所配合之夾爪。 此外，本發明之撐板21上之吸嘴可為硬式吸嘴。又，其撐板21上之 吸嘴為加裝彈簧機構之硬式吸嘴。 1293059 綜上所述，本發明所述之基板移運裝置，不僅可達預期之實用功效外 並且為刖所未見之設計，已符合專利法發明之要件，爰依法具文申請之。 為此，謹請貴審委員詳予審查，並祈早曰賜請專利，至感德便。 以上已將發明作-詳細說明，惟以上所述者，僅為本發明之較佳實施 例而已’當不能限定本發明實施之範圍，即凡—本發明巾請專利範圍所作 之均等變化與修飾等’皆應屬本發明之專利涵蓋範圍意圖保護之範嘴。 1293059 【圖式簡單說明】 . 第一圖係為本發明基板移運裝置示意圖； , 第二圖係為本發明基板移運裝置之搬運架與夾爪相互配合示意圖； 第三圖係為本發明基板移運裝置之大尺寸基板搬運實施例圖； 第四圖係為本發明基板移運裝置之兩中尺寸基板搬運實施例圖； 第五圖係為本發明基板移運裝置之兩個以上不同尺寸基板搬運實施例 圖， 【主要元件符號說明】 10機械手臂 11夾爪 12手臂 13基座 14固定璧 20基板搬運架 21撐板 22吸嘴 23輸送帶In the case of supporting the uneven force of the substrate, a plurality of suction nozzles 22 are mounted on the support plate of the carrier, and the suction nozzle 22 can move the supporter of the newly held support, so that the shifting time does not occur. The mouth is made and the nozzle 22 is a soft nozzle (or a cannoning mechanism), which can be used as a cushioning device substrate, and the jaws on the mechanical arm 1 are moved to the substrate carrier 2 In the upper case, the suction nozzle U can reduce the pressure of the unloading base of the unloading base, and can greatly reduce the damage caused by the release of the pressure when the substrate is placed, so as to increase the yield of the substrate. As shown in the figure _, when the jaw η on the robot arm 1G obtains the large-sized substrate to be transported, Wei 11 propels up the large-capacity substrate, and propels the Α size base to the substrate carrier 20. At this time, the jaw η places the large-scale core plate on the support plate 21 on the substrate conveyance (4), and the suction nozzle 22 on the floor plate 21 will be subjected to the pressure generated when the buffer side is placed on the size of the crucible. Read 22 secret size New Zealand light, so that the large financial substrate is stable on the support plate 21 of the substrate carrier 20, so as to move the large-sized substrate to the correct conveyor belt 23, when the substrate carrier 20 is struts 21 After the large-sized substrate is stably adsorbed, the gripper 11 of the face arm 1 will leave the substrate carrier 20 and continue to transport the substrate, and then the floor 21 of the substrate carrier 2 transports the large-sized substrate to the desired one. The location is stored. As shown in the fourth figure, after the jaws U on the arm 1 of the robot arm take the two medium-sized substrates to be transported, the jaws 11 propel the two medium-sized substrates, lift the two medium-sized substrates, and then move them to On the substrate carrier 20, at this time, the jaws 11 place the two medium-sized substrates on the gusset 21 on the substrate carrier 2, and the nozzle 22 (or the spring-loading mechanism) on the gusset 21 will be a buffer. The function is to withstand the pressure generated when the two medium-sized substrates are placed, and at the same time, the suction nozzle 22 also adsorbs the two medium-sized substrates on average, so that the two medium-sized substrates are firmly fixed on the gusset 21 of the substrate carrier 20, so as to smoothly The two 1293059 size substrates are moved to the correct conveyor belt 23; when the gusset 21 of the substrate carrier 20 firmly adsorbs the two sizes of the substrate, the jaws 11 of the robot arm will leave the substrate carrier 20 again. Continuing/transporting the substrate, the gusset 21 of the substrate carrier 20 transports the two medium sized substrates to the desired locations for storage. As shown in the fifth figure, after the jaws 11 on the robot arm 10 obtain the two or more different-sized substrates to be transported, the jaws 11 support two or more different-sized substrates to support two or more different-sized substrates. Then, it is moved to the substrate carrier 20, and at this time, the jaws 11 place two or more different-sized substrates on the gusset 21 on the substrate carrier 20, and the nozzle 22 on the gusset 21 will act as a buffer. The pressure generated by the two or more different size substrates is placed, and at the same time, the suction nozzles also adsorb the two or more different size substrates on average, so that two or more different size substrates are stabilized on the support plates 21 of the substrate carrier 20. Do not move, in order to smoothly move two or more different size substrates onto the correct conveyor belt 23; when the gusset 21 of the substrate carrier 20 firmly adsorbs two or more different sized substrates, the jaws 11 of the robot arm 10 will After leaving the carrier and continuing to transport the substrate, the gusset 21 of the substrate carrier 20 transports the two or more different sized substrates to the desired positions for storage. Further, the jaws 11 of the present invention can be telescopic jaws, and the number of jaws can be changed in accordance with the size and number of substrates to be transported. Moreover, the jaws 11 of the present invention are replaceable jaws, and the jaws n can change the engaged jaws according to the size and number of substrates to be transported. Further, the nozzle on the stay 21 of the present invention may be a hard nozzle. Further, the nozzle on the stay 21 is a rigid nozzle to which a spring mechanism is attached. 1293059 In summary, the substrate transfer device of the present invention not only achieves the expected practical effect, but also has an unseen design, and has met the requirements of the patent law invention, and is applied according to law. To this end, I would like to ask the members of the audit committee to give a detailed examination and pray for the patents. The invention has been described in detail above, but the foregoing is only a preferred embodiment of the present invention, and is not intended to limit the scope of the invention, that is, the equivalent variations and modifications of the scope of the invention. And the like shall be the scope of the patent to which the invention is intended to be protected. 1293059 [Simple description of the drawings] The first figure is a schematic diagram of the substrate transporting device of the present invention; the second figure is a schematic diagram of the mutual cooperation of the carrier and the jaw of the substrate transporting device of the present invention; FIG. 4 is a schematic diagram of a two-size substrate transporting embodiment of the substrate transporting apparatus of the present invention; and FIG. 5 is a second embodiment of the substrate transporting apparatus of the present invention. Dimensional substrate handling embodiment diagram, [main component symbol description] 10 robot arm 11 jaw 12 arm 13 base 14 fixed 璧 20 substrate carrier 21 struts 22 nozzle 23 conveyor belt