WO2006129385A1

WO2006129385A1 - Substrate carrying device

Info

Publication number: WO2006129385A1
Application number: PCT/JP2005/019021
Authority: WO
Inventors: Kensuke Hirata; Susumu Murayama
Original assignee: Ishikawajima-Harima Heavy Industries Co., Ltd.
Priority date: 2005-06-02
Filing date: 2005-10-17
Publication date: 2006-12-07
Also published as: JP4904722B2; TWI307675B; KR101226733B1; CN101035725A; CN101035725B; KR20080016518A; JP2006335518A; TW200642933A

Abstract

A substrate carrying device, comprising a cassette side conveyor (3) capable of carrying out substrates (W) from a cassette (CS), a process side transfer hand (5) capable of feeding the substrates (W) to a process device for processing the substrates (W), and a substrate delivery means (7) capable of delivering the substrates (W) between the cassette side conveyor (3) and the process side transfer hand (5).

Description

Specification

Substrate transfer device

Technical field

TECHNICAL FIELD [0001] The present invention relates to a substrate transfer device, and in particular, a substrate is placed between a cassette that can be stacked and stored using a competitor and a transfer node, and a process device that processes the substrate. It relates to what is transported.

Background art

Conventionally, a cassette in which glass substrates used for a plasma display panel or the like are stacked and stored, and is loaded at a predetermined position of a loading station using a transfer node ( Insert the transfer node into the cassette) and take out the glass substrates present at any position of the force set one by one, and place the removed glass substrates on the roller conveyor to place them on the glass substrate. There has been known a substrate transport apparatus configured to be loaded into a process apparatus that performs processing such as printing (see, for example, JP-A-2002-167039).

By the way, in the conventional substrate transfer apparatus, when a glass substrate is taken out from a cassette using a transfer node, a transfer node is inserted between the glass substrates, and the transfer hand is inserted after the insertion. The glass substrate (cassette) is raised relative to the glass substrate to be transported slightly to support the glass substrate, and the supporting force of the cassette is also separated from the glass substrate. The substrate is placed on the transfer node, and after the placement, the transfer node is moved out of the cassette, and the glass substrate is taken out of the cassette.

[0004] Therefore, a space for inserting the transfer node between the glass substrates and slightly lifting the glass substrate to be transported is required, and between the glass substrates stacked in the cassette is required. The vertical pitch of the glass substrates to be stacked in the cassette may increase, and the vertical pitch of the glass substrates stacked in the cassette may increase, reducing the number of glass substrates that can be stored and increasing the efficiency of storing the glass substrates in the cassette. There is a problem of decline.

[0005] It should be noted that the size of the glass substrate is increased, and the portion overhanging from the transfer node is increased. Then, when the glass substrate is lifted slightly to carry it out of the cassette, the stagnation of the glass substrate (overhanging from the transfer node and at the same time the portion that was in contact with the support portion of the cassette). The problem becomes more prominent because the stagnation) becomes larger and the glass substrate needs to be lifted further to disengage the support force of the cassette.

[0006] On the other hand, in the conventional substrate transfer apparatus, the force process apparatus side that uses a roller competitor to carry the glass substrate into the process apparatus often requires transfer using a transfer node. That is, for example, a part of a process apparatus for processing a substrate is partitioned from the outside by a cover, and when the substrate is loaded, a part of the cover that can be opened and closed is opened, Since it is necessary to carry in the substrate, the roller competitor has a drawback that it may be difficult to carry the glass substrate into the process apparatus.

[0007] If a multi-joint robot or the like is installed between the roller competitor and the process device to compensate for the drawbacks, the configuration of the substrate transfer device becomes complicated, and the installation area of the substrate transfer device increases. There's a problem.

[0008] It should be noted that the above-mentioned problem also occurs in the same manner in a substrate made of a material other than glass.

[0009] The present invention has been made in view of the above problems, and is a substrate transport apparatus that transports a substrate between a cassette that can store a substrate and a process device that performs processing on the substrate. It is an object of the present invention to provide a substrate transfer apparatus that can increase the storage efficiency of the apparatus, has a simple configuration, and can reduce the installation area. Disclosure of the invention

[0010] The invention according to the first aspect of the present invention can be carried out by moving the substrate in a horizontal direction from a cassette that can be stored in multiple stages with the substrate horizontal, or by moving the substrate in the horizontal direction. The cassette-side compressor that can be loaded into the cassette and the substrate can be supplied to a process device that moves the substrate in the horizontal direction and processes the substrate, or the substrate moves from the process device in the horizontal direction. A process-side transfer hand that can be carried out, and substrate transfer means that can transfer the substrate between the cassette-side and the process-side transfer hand, and the cassette-side compressor and the process The side transfer hand and the substrate transfer means only move the substrate in parallel. A substrate transfer apparatus configured to move.

[0011] According to the invention based on the first aspect, since the substrate is carried out from the cassette using the cassette-side competitor or the substrate is carried into the cassette, it is not necessary to move the substrate up and down during this loading / unloading. In addition, since there is no need to insert the transfer node between the substrates, the interval between the substrates stacked in the wire cassette (the vertical interval) can be reduced. The substrate storage efficiency can be increased.

[0012] Further, since the substrate is loaded into the process apparatus using the process side transfer node or the substrate of the process apparatus is also unloaded, it is possible to meet the requirements of the process apparatus side, and the process apparatus has many additional processes. Since it is not necessary to provide a joint robot or the like, the configuration of the substrate transfer apparatus can be simplified and the installation area can be reduced.

[0013] In addition, since the movement of the substrate by the cassette-side competitor, the process-side transfer hand, and the substrate delivery means is only a parallel movement that does not involve a rotational movement that changes the posture of the substrate, Space for rotating (turning) the substrate is not required, and the installation area of the substrate transfer device can be reduced.

[0014] The invention according to the second aspect of the present invention can carry out the substrate by moving the substrate in the horizontal direction while holding the end surface or the vicinity of the end surface of the substrate from a cassette that can store the substrate horizontally and in multiple stages. Alternatively, a cassette-side transfer node that holds the end face of the substrate or the vicinity of the end surface, moves the substrate in the horizontal direction and can be loaded into the cassette, and moves the substrate in the horizontal direction to the substrate. A process-side transfer hand that can be supplied to a process apparatus that performs processing, or that can move the substrate horizontally and carry it out of the process apparatus; and the cassette-side transfer hand and the process-side transfer hand. Substrate transfer means capable of transferring the substrate between them, and the cassette side transfer node, the process side transfer hand, and the substrate transfer means only perform parallel movement. It allows a Configured Ru substrate transport apparatus to move the substrate.

[0015] According to the invention based on the second aspect, since the substrate is carried out from the cassette or the substrate is carried into the cassette using the cassette-side transfer node, the substrate is moved upward and downward during the loading and unloading. Since the substrate side is held by the cassette side transfer node that does not need to be moved, the substrate is carried in and out, so that it is not necessary to move the substrate up and down during this loading and unloading. It is not necessary to insert the transfer side transfer node deeply between the substrates. Therefore, the distance between the substrates stacked in the wire cassette (interval in the vertical direction) can be reduced, and the efficiency of storing the substrates in the force set can be increased.

[0016] Further, when the substrate is unloaded from the cassette or loaded into the cassette, the loading and unloading is performed while holding the end portion of the substrate. Therefore, there is a possibility that the substrate may be damaged or the substrate may be contaminated. Further avoidance is possible. In addition, since the substrate is loaded into the process apparatus using the process side transfer node or the substrate is unloaded from the process apparatus, it is possible to meet the requirements of the process apparatus side. Therefore, it is possible to simplify the configuration of the substrate transport apparatus and reduce the installation area.

[0017] In addition, the movement of the substrate by the cassette-side competitor, the process-side transfer hand and the substrate transfer means is only a parallel movement that does not involve a rotational movement that changes the posture of the substrate. Space for rotating (turning) the substrate is not required, and the installation area of the substrate transfer device can be reduced.

[0018] The invention according to the third aspect of the present invention is the substrate transfer apparatus according to the second aspect, wherein the cassette-side transfer node includes a slide base that extends long in the loading / unloading direction of the substrate; A movable member movable in the loading / unloading direction of the substrate relative to the slide base; and a holding member capable of holding the substrate and movable in the loading / unloading direction of the substrate relative to the moving member; And the holding member is configured to be movable and positionable relative to the slide base.

According to the invention based on the third aspect, the holding member force of the cassette-side transfer node is provided so as to be movable with respect to the moving member that is movable with respect to the base member. It is possible to avoid as much as possible the increase in the installation area of the substrate transfer device due to the increased stroke (substrate transfer stroke).

[0020] An invention based on the fourth aspect of the present invention is the substrate transport apparatus according to any one of the first aspect to the third aspect, wherein the cassette side comparer or the cassette side transfer node is a substrate by the end. The loading / unloading direction of the substrate and the loading / unloading direction of the substrate by the process-side transfer hand coincide with each other, and the cassette-side compressor or The substrate transferred from the cassette at the cassette side transfer node or the substrate transferred from the cassette at the process side transfer node, or the substrate transferred also from the process equipment by the process side transfer node. This is a substrate transfer device having substrate movement positioning means that can be moved and positioned in a horizontal direction intersecting with the loading / unloading direction of the substrate by the process side transfer node.

[0021] According to the invention described in the fourth aspect, the loading / unloading direction (X-axis direction) of the substrate by the cassette side conveyor or the cassette side transfer node and the substrate by the process side transfer node Since the loading / unloading direction (X-axis direction) coincides with each other, and the substrate movement positioning means that can move and position the substrate in the Y-axis direction is provided, the configuration of the entire substrate transfer device is further simplified. In addition, the substrate can be transferred between the cassette and the process apparatus even if the cassette and the process apparatus are located at positions shifted in the Y-axis direction.

[0022] In addition, a plurality of cassettes arranged in the Y-axis direction on one end side in the X-axis direction and a plurality of cassettes arranged in the Y-axis direction on the other end side in the X-axis direction with the substrate transport device in between. The substrate can be transferred between multiple process devices.

[0023] The invention based on the fifth aspect of the present invention is any one of the first aspect to the fourth aspect.

2. The substrate transfer apparatus according to the aspect 1, wherein the substrate transfer means is movable in a vertical direction relatively relative to the force setting side or the cassette side transfer node and the process side transfer node. It is equipped with a delivery competition that is

When the substrate mounting portion of the delivery competitor passes through each notch or each through hole provided in the process side transfer node, the force setting side compressor or the The substrate is transferred between the cassette-side transfer node and the process-side transfer node, or the substrate transfer means is the cassette-side compressor or the cassette A transfer air float means or a transfer ultrasonic float means that is movable in the vertical direction relative to the side transfer hand and the process side transfer node, and the process side transfer hand. Each notch or each through-hole provided in the mounting node is connected to the air flow means for the transfer or the ultrasonic wave for the transfer. Placing the substrate in over preparative means The substrate is configured to be able to pass the substrate between the cassette-side compressor or the cassette-side transfer node and the process-side transfer node by passing a portion to be transferred! It is a transport device.

[0024] According to the invention described in the fifth aspect, each of the substrate transfer means includes a transfer competitor that is movable in the vertical direction, and is provided in each process-side transfer node. The substrate can be delivered between the cassette-side competitor and the process-side loading node by passing the notch or each through hole through the portion of the delivery competitor where the substrate is placed. Thus, the substrate can be delivered with a simple configuration and only by moving in the vertical direction, and the possibility of scratching the substrate can be avoided.

[0025] Further, according to the invention described in the fifth aspect, since the delivery means is composed of delivery air float means and delivery ultrasonic float means, the construction is simple and vertically. The substrate can be delivered only by moving, and the substrate can be further prevented from being damaged or contaminated when the substrate is transferred.

[0026] An invention based on a sixth aspect of the present invention provides a substrate transfer apparatus according to any one of the first aspect to the fifth aspect, and a base end side of the process side transfer node. Include an intermediate converter for supporting the weight of the substrate moving in a horizontal direction between the cassette-side conveyor or the cassette-side transfer node and the process-side transfer node, or the cassette An intermediate air float means or an intermediate ultrasonic float means is provided for supporting the weight of the substrate moving horizontally between the side conveyor or the cassette side transfer hand and the process side transfer node. It is a substrate transfer device.

[0027] According to the invention described in the sixth aspect, since the intermediate compressor is provided, the cassette-side compressor and the transfer-use conveyor are supported while the substrate is supported using the intermediate competitor. It is possible to deliver the substrate between the two, and it is possible to reliably deliver the substrate.

[0028] According to the invention described in the sixth aspect, the intermediate air float means or the intermediate super Since the sonic float means is provided, it is possible to reliably deliver the substrate in the same manner. Further, when the substrate is transferred, there is a further possibility that the substrate is damaged or the substrate is contaminated. It can be avoided.

[0029] The invention based on the seventh aspect of the present invention is any one of the first aspect to the sixth aspect.

1. The substrate transfer apparatus according to aspect 1, wherein a plurality of the process side transfer nodes are provided side by side in an upward and downward direction.

[0030] According to the seventh aspect of the invention, since a plurality of the process side transfer nodes are provided in parallel in the vertical direction, the substrate is unloaded from the process apparatus and the substrate is loaded into the process apparatus. Can be performed in a short time.

Brief Description of Drawings

FIG. 1 is a plan view showing a schematic configuration of a substrate transfer apparatus according to a first embodiment of the present invention.

FIG. 2 is a side view showing a schematic configuration of the substrate transfer apparatus.

FIG. 3 is a side view showing the operation of the substrate transfer apparatus.

FIG. 4 is a side view showing the operation of the substrate transfer apparatus.

FIG. 5 is a side view showing the operation of the substrate transfer apparatus.

FIG. 6 is a side view showing the operation of the substrate transfer apparatus.

FIG. 7 is a side view showing the operation of the substrate transfer apparatus.

FIG. 8 is a view showing a state in which a plurality of substrate transport hands are provided.

FIG. 9 is a plan view showing a modified example of the substrate transfer apparatus.

FIG. 10 is a perspective view showing a schematic configuration of a substrate transfer apparatus according to a second embodiment of the present invention.

FIG. 11 is a diagram showing an XI arrow in FIG.

[FIG. 12] FIG. 12 is a view showing the arrow in FIG.

FIG. 13 is a perspective view showing a schematic configuration of a substrate transfer apparatus according to a second embodiment of the present invention.

FIG. 14 is a perspective view showing a schematic configuration of a substrate transfer apparatus according to a second embodiment of the present invention. FIG. 15 is a perspective view showing a schematic configuration of a substrate transfer apparatus according to a second embodiment of the present invention.

FIG. 16 is a perspective view showing a schematic configuration of a substrate transfer apparatus according to a second embodiment of the present invention.

BEST MODE FOR CARRYING OUT THE INVENTION

[First Embodiment]

FIG. 1 is a plan view showing a schematic configuration of the substrate transfer apparatus 1 according to the first embodiment of the present invention, and FIG. 2 is a side view showing the schematic configuration of the substrate transfer apparatus 1.

In FIG. 2, the side member 35 on one side (the lower side in FIG. 1), the transfer hand support member 39, and the intermediate member 41 are not shown in FIG. Further, in this specification, for convenience of explanation, one horizontal direction is defined as an X-axis direction, and another horizontal direction that is perpendicular to the X-axis direction is defined as a Y-axis direction. The direction is the Z-axis direction.

[0034] The substrate transfer apparatus 1 includes a cassette CS that can store a glass substrate (for example, a rectangular and plate-like glass substrate used for a plasma display panel, a liquid crystal display panel, etc.) W, and the glass substrate (hereinafter simply referred to as a glass substrate) Sometimes referred to as “substrate”.) A device that transports the substrate W to and from a process device (not shown in FIGS. 1 and 2) for processing (processing) W. 3 and process transfer node 5 are provided.

The cassette CS can store the substrates W in multiple stages by stacking the substrates W in the vertical direction slightly apart from each other.

[0036] The cassette-side compressor 3 moves linearly in the horizontal direction (only in the X-axis direction) with the substrate W stored in the cassette CS in the lowermost position! And can be taken out one by one. Further, the cassette-side compressor 3 moves the substrate W linearly (only in the X-axis direction) in a straight line so that the substrates W can be loaded one by one into the cassette CS. It is summer. In the cassette CS, the substrates W are arranged from top to bottom in order from the first loaded.

[0037] The process-side transfer hand 5 can move the substrate W one by one in the horizontal direction (only in the X-axis direction) linearly and supply it to the process apparatus. Move horizontally (only in the X-axis direction) and move it out of the process equipment Has become possible. As already understood, the transport direction of the substrate W by the cassette-side conveyor 3 and the transport direction of the substrate W by the process-side transfer node 5 coincide with each other.

[0038] Further, the substrate W is transferred to the substrate transfer device 1 by moving the substrate W only in the Z-axis direction between the cassette side conveyor 3 and the process side transfer hand 5. A substrate transfer means 7 is provided.

[0039] The cassette-side competitor 3, the process-side transfer hand 5, and the substrate transfer means 7 only translate the substrate W, in other words, the substrate without changing the posture of the substrate W. By moving W only in parallel, the substrate W is moved.

[0040] The cassette-side compressor 3 has a force described later in detail. When the substrate W is unloaded or loaded, the cassette W is moved from the vertical direction at a position that does not interfere with the cassette CS and the substrate transfer means 7. It is comprised so that it may pinch and move.

[0041] The substrate transfer means 7 includes a transfer comparator 9 that is movable in the vertical direction relative to the cassette-side competitor 3 and the process-side transfer hand 5, and the process. When the portion 13 on which the substrate is placed in the transfer competitor 9 passes through the notches 11 provided in the side transfer hand 5, the cassette side compressor 3 and the process side transfer node The substrate W is configured to be able to move in a linear manner only in the Z-axis direction between the substrate 5 and the substrate 5. A through hole may be provided instead of the notch 11.

[0042] On the base end side of the process side transfer hand 5 (cassette CS side; the side opposite to the process apparatus), the space between the cassette side conveyor 3 and the process side transfer hand 5 is set horizontally. An intermediate compressor 19 is provided for supporting the weight of the moving substrate W and the lower force of the substrate W.

[0043] The substrate transfer means 7 is provided between the cassette-side conveyor 3 and the transfer-use conveyor 9 in the process-side transfer node 5 (more specifically, a transfer hand support member 39 to be described later). And a portion 15 on which the substrate W is placed is a substrate placement portion 17 of the process side transfer node 5 (pass line; the substrate on the process side transfer hand 5). The substrate W is transferred between the cassette side compressor 3 and the transfer competitor 9 by using an intermediate compressor 19 provided higher than the lower surface of the substrate w when transporting w. It is configured to be possible.

[0044] That is, the substrate placement portion of the delivery competitor 9 (the lower surface of the substrate W when the substrate W is placed on the delivery competitor 9; the nose line of the delivery competitor 9) 13 At least the pass line of the cassette side competitor 3 (the lower surface of the substrate W when the substrate W is placed on the cassette side competitor 3) 21 and the process side transfer It is possible to move up and down between the position below the pass line 17 of the node 5.

[0045] For example, each roller 23 force of the delivery competitor 9 constituted by a roller competitor can move up and down the range through the notch 11! /.

[0046] The cassette-side competitor 3 has the substrate W placed thereon, the pass line 17 of the process-side transfer hand 5 is present at a position lower than the pass line 21 of the cassette-side competitor 3, and The workpiece placement part of the intermediate competitor 19 (the lower surface of the substrate W when the substrate W is placed on the intermediate competitor 19; the pass line of the intermediate competitor 19) 15 is a path of the cassette-side competitor 3 When the height is the same as the line 21, the substrate mounting portion 13 of the transfer competitor 9 is set to the same height as the pass line 21 of the cassette-side competitor 3, and the intermediate Then, the substrate W is transferred from the cassette side conveyor 3 to the delivery competitor 9, and after this transfer, the pass line 13 of the delivery competitor 9 is moved to the pass of the process side transfer hand 5. By reducing to a lower position than the line 17, the consist cassette side Konpeya 3 to be able to pass the substrate W to the process side transfer Nono command 5, Ru.

On the other hand, the process side transfer node 5 has the substrate W placed thereon, and the pass line 17 of the process side transfer node 5 is located at a position lower than the pass line 21 of the cassette side conveyor 3. And when the pass line 15 of the intermediate competitor 19 is at the same height as the pass line 21 of the cassette side compressor 3, the position is lower than the pass line 17 of the process side transfer node 5 The transfer conveyor 9 existing in the cassette side is raised until it reaches the same height as the pass line 21 of the cassette side competitor 3, and the process side transfer node 5 is placed thereon. The substrate W that has been placed is placed on the delivery conveyor 9, and the substrate W on which the delivery competitor 9 is placed is relayed by the intermediate competitor 19 and transferred to the cassette-side conveyor 3. The substrate W can be transferred from the process side transfer node 5 to the cassette side competitor 3.

Here, the substrate transfer apparatus 1 will be described in more detail.

[0049] The cassette CS is configured in a rectangular parallelepiped shape, and includes side members CS1 at both ends in the Y-axis direction. Between each side member CS1, a linear member (for example, a wire; not shown) is stretched to place and store a plurality of substrates W in the cassette CS.

[0050] A plurality of the wires are provided at the same position (at the same height) in the Z-axis direction, extending in the Y-axis direction with a predetermined interval in the X-axis direction, thereby providing one substrate One wire group that can support (place) W is formed.

[0051] By providing a plurality of the wire group forces at predetermined small intervals in the ¾ axis direction, the cassette CS can be stored in multiple stages with the substrates W horizontal. The cassette CS thus configured may be referred to as a wire cassette.

[0052] Further, an opening is provided on one side surface of the cassette CS in the X-axis direction (the surface on the side where the process side transfer hand 5 is provided) so that the substrate W can freely enter and exit. ing.

[0053] Instead of the wire cassette CS, a normal cassette (a cassette configured to support the substrate W with support members provided at both ends in the Y-axis direction) may be employed.

[0054] The wire cassette CS is placed on a cassette placing device (not shown) using a stagger crane or overhead crane (not shown), and is moved and positioned in the Z-axis direction.

[0055] The cassette-side compressor 3 is constituted by, for example, a roller competitor, and is provided at the upper end of a plurality of roller support members 25 provided on a base member 24 provided on the floor so as to rotate freely. A plurality of rollers 27 are provided.

Each roller support member 25 is erected with a predetermined interval in the X-axis direction. Then, when the wire cassette CS is placed on the cassette placing device and the wire cassette CS is moved up and down, the substrate of the wire cassette CS is stored in a state where the substrate W is not stored. The rollers 27 and the roller support members 25 can be inserted between the wires. In other words, the rollers 27 and the roller support members 25 enter the wire cassette CS without interfering with the wire cassette CS or the cassette transfer device.

[0057] Each roller 27 of the cassette side compressor 3 is rotated by an actuator such as a motor via a power transmission member such as a belt or a chain with a central axis extending in the Y-axis direction as a rotation center, and the substrate W is rotated. It comes to carry. The upper end portion of each roller 27 forms the pass line 21 of the cassette side conveyor 3.

It should be noted that the roller 27A, which is located on the most side (on the intermediate compressor 19 side) among the rollers 27, is provided at a position where it does not enter the cassette CS. A roller 26 is provided above the front roller 27A. The roller 26 can be rotated by an actuator such as a V, a motor (not shown), and is also moved toward and away from the roller 27A (Z axis) by an actuator such as a fluid pressure cylinder (not shown). Direction).

[0059] When the substrate W is unloaded or loaded, the substrate W can be moved with the vertical force sandwiched between the roller 27A and the roller 26. Remove the actuator for rotating the roller 26, and configure the roller 26 to rotate freely.

[0060] A process-side transfer node 5 is provided on one side of the cassette-side compressor 3 in the X-axis direction. This process-side transfer node 5 is formed in a thin plate shape with a rectangular appearance, and the thickness direction is provided in the Z-axis direction. Further, from the tip end portion of the process side transfer hand 5 in the X-axis direction (the end portion opposite to the side where the cassette-side compressor 3 is provided) to the base end side in the X-axis direction, Y A plurality of rectangular cutouts 11 are formed at predetermined intervals in the axial direction. By forming the notches 11 in this way, it can be said that the process-side transfer node 5 is formed in a comb-teeth shape.

In addition, the substrate transport apparatus 1 receives the substrate W unloaded from the cassette CS by the cassette-side comparer 3 or the substrate W unloaded by the process-side transfer node 5 by the process apparatus force. Substrate unloading by the cassette-side compressor 3 and the process-side transfer node 5 Substrate movement positioning means 30 that can move and position in a horizontal direction (for example, the orthogonal Y-axis direction) intersecting the input direction (X-axis direction) is provided.

More specifically, a base member 29 is provided on the floor surface adjacent to the base member 24 (on one side in the X-axis direction), and the guide rail 31 provided on the base member 29 is provided with a base rail 29. Thus, the base 33 is movable in the Y-axis direction. The base 33 is freely positionable in the γ-axis direction by an actuator such as a motor (not shown) through a power transmission means such as a ball screw (not shown).

[0063] Each side member 35 is erected on both ends of the base 33 in the Y-axis direction. Inside each side member 35, a transfer node support member 39 is provided so as to be movable in the Z-axis direction via a guide rail 37 provided integrally with each side member 35. . The transfer node support member 39 can be positioned in the Z-axis direction by an actuator such as a motor (not shown) via a power transmission means such as a ball screw (not shown).

[0064] An intermediate member 41 is provided on the inner side of the transfer support member 39 so as to be movable in the X-axis direction. Further, the process-side transfer hand 5 is provided inside the intermediate member 41 so as to be movable in the X-axis direction. Further, the process-side transfer hand 5 is not shown via a power transmission means such as a ball screw, but is not shown in the figure, with an actuator such as a motor in the X-axis direction (the direction opposite to the cassette-side compressor 3). The movement position can be freely determined by projecting from the transfer hand support member 39 to the position indicated by the two-dot chain line in FIGS.

Further, a delivery competitor 9 is provided on one side of the cassette-side competitor 3 in the X-axis direction. As described above, the delivery competitor 9 is constituted by, for example, a roller competitor, and the pass line 13 of the roller competitor can freely move in the Z-axis direction.

More specifically, guide rails provided integrally with the respective side members 35 are provided below the transfer hand support member 39, the intermediate member 41, and the process side transfer hand 5. A transfer competitor base member 43 is provided via a rod 37 so as to be movable in the Z-axis direction. The delivery competitor base member 43 is not shown through a force transmission means such as a ball screw (not shown), and is an actuator such as a motor (the transfer hand support portion). The actuator that is different from the actuator that drives the material 39) is self-positioning in the Z-axis direction.

A plurality of roller support members 45 are provided on the delivery competitor base member 43 at predetermined intervals in the Y-axis direction, and a plurality of rollers are provided at the upper end of the roller support member 45. 23 is rotatably provided.

[0068] When the transfer-compartment base member 43 is moved in the vertical direction relative to the transfer support member 39, the roller support member 45 and the roller 23 of the transfer-comparator 9 are moved. The process side transfer hand 5 moves through the notch 11 of the process side transfer hand 5.

That is, the pass line 13 of the delivery competitor 9 moves at least between a predetermined position separated downward from the process side transfer node 5 and the pass line 21 of the cassette side competitor 3. It is like that.

[0070] Each roller 23 of the delivery competitor 9 is rotated by an actuator such as a motor via a power transmission member such as a belt or a chain with the central axis extending in the Y-axis direction as the rotation center. Then, the substrate W is transported.

[0071] On the other end side of the process side transfer hand 5 (base end side; between the cassette side conveyor 3 and the notches 11), the above-described intermediate compressor (for example, roller compressor) 19 is provided. Is provided.

Each roller 47 of the intermediate compressor 19 is rotatable with respect to a rectangular plate-like roller support member 48 installed so that the thickness direction is in the vertical direction, and the roller support member 48 Is provided integrally with the transfer node support member 39. Accordingly, the rollers 47 of the intermediate compressor 19 are rotatable with respect to the transfer support and the support member 39.

[0073] Each roller 47 of the intermediate compressor 19 is rotated by an actuator such as a motor via a power transmission member such as a belt or a chain with the central axis extending in the Y-axis direction as a rotation center, and conveys the substrate W. It is like that. It should be noted that a device for rotating the rollers 47 of the intermediate compressor 19 (such as the belt actuator) may be omitted.

The process side transfer node 5 is supported by the roller below the roller support member 48. It is provided away from member 48. Further, a notch 11 of the process side transfer node 5 is formed, and the state (the state shown in FIG. 2) is such that the process side transfer node 5 extends to the process apparatus side. ) Is located below the roller support member 48.

[0075] As described above, the intermediate compressor 19 is provided to support the weight of the W that moves between the cassette-side competitor 3 and the process-side transfer node 5 (the delivery competitor 9). Now that I can do it!

[0076] Next, the operation of the substrate transfer apparatus 1 will be described.

3 to 7 are side views showing the operation of the substrate transport apparatus 1. FIG. FIG. 6 is a plan view under the state shown in FIG.

A case where the substrate W is transferred from the cassette CS to the process apparatus (processing apparatus) will be described.

First, as shown in FIG. 2, the cassette CS containing the substrate W is positioned above the cassette-side competitor 3, and the pass line 21 of the cassette-side competitor 3 and the pass line 15 of the intermediate competitor 19 are Are located at the same height, and the pass line 13 of the delivery competitor 9 is located below the pass line 17 of the process-side transfer node 5.

[0080] In this state, the cassette CS is placed until the lowermost substrate W of the substrates W on which the cassette CS is placed contacts the roller 27 of the cassette-side compressor 3. While moving downward, the delivery competitor base member 43 ascends until the nose line 15 of the intermediate competitor 19 and the pass line 13 of the delivery competitor 9 coincide with each other (see FIG. 3).

[0081] Subsequently, the respective substrates 3, 19, 9 are driven to move the substrate W until the lowermost substrate W is placed on the delivery competitor 9 (see FIG. 4). ). When the substrate W is moved in this way, the substrate W is sandwiched between the roller 27A and the roller 26.

Subsequently, the delivery competitor base member 43 is lowered, and the delivery conveyor 9 is placed! /, And the substrate W is placed on the process side transfer node 5 (see FIG. 5).

[0083] Subsequently, the process-side transfer node 5 and the intermediate member 41 are extended to process the substrate W. Bring it into the process equipment (see Figures 6 and 7).

[0084] It should be noted that even if the process side transfer node 5, the intermediate member 5 and the intermediate member 41 extend, the rotatable intermediate compressor 19 does not move. The intermediate transfer unit 19 may be moved at the same time when the process side transfer node 5 and the intermediate member 41 are provided on the side transfer node 5 and extend.

[0085] After the loading, the process-side transfer node 5, the intermediate member 41 and the intermediate member 41 are retracted, and the next substrate on which the roller 27 of the cassette-side compressor 3 is mounted on the cassette CS (the cassette CS The cassette CS is lowered and the next substrate W is unloaded until it comes into contact with the substrate W which is present on the lowermost side of the substrates W placed on the substrate.

[0086] When the substrate W is transferred from the process apparatus to the cassette CS, the substrate W is transferred by an operation substantially opposite to the above operation.

[0087] According to the substrate transfer device 1, the substrate W is unloaded from the cassette CS or loaded into the cassette CS using the cassette-side comparer 3, so that the substrate W is moved up and down during loading / unloading. In addition, it is not necessary to insert a transfer node between the substrates, so that the interval between the substrates W stacked in the wire cassette CS (interval in the vertical direction) is reduced. Thus, the efficiency of storing the substrate in the cassette CS can be increased.

[0088] Further, since the substrate W is carried into the process apparatus using the process side transfer node 5 or the substrate W is also carried out by the process apparatus force, the process apparatus side request can be answered. In addition, it is not necessary to separately provide an articulated robot or the like, so that the configuration of the substrate transfer apparatus 1 can be simplified and the installation area can be reduced.

[0089] Further, the movement (conveyance) of the substrate W by the cassette-side competitor 3, the process-side transfer node 5 and the substrate transfer means 7 can be performed only by a parallel movement that does not involve a rotational movement that changes the posture of the substrate W. As a result, a space for rotating (turning) the substrate W becomes unnecessary, and the installation area of the substrate transfer apparatus 1 can be reduced.

More specifically, when the rectangular substrate W is swung around the center (the axis extending through the center and extending in the Z-axis direction) as a swivel center, the space required for the swirling is at least the diagonal line of the substrate W. Is required for the circle whose diameter is. Furthermore, whether the turning center is the center of the substrate W If shifted, the space required for turning becomes even larger, and the position of the substrate W may shift due to angular acceleration (tangential acceleration) and centripetal acceleration (normal acceleration) generated by turning.

On the other hand, if the substrate W is moved only by parallel movement, the space required for turning the substrate W becomes unnecessary, and therefore the installation area of the substrate transfer apparatus 1 can be reduced. Can do. Further, it is possible to avoid the possibility that the substrate W is displaced due to the turning.

[0092] As described above, if the installation area of the substrate transfer apparatus 1 can be reduced, the size of the clean room itself, which is an expensive facility, can be reduced when the substrate transfer apparatus 1 is used in a clean room. . Further, since there is no need to turn the substrate W, a mechanism for turning the substrate W as described above becomes unnecessary.

[0093] By the way, the mechanism for rotating the large substrate W generally rotates the mounting table on which the substrate is mounted by means of an actuator such as a motor via a speed reducer composed of a gear or the like. It is configured. In this configuration, there is a gear knock, so that a positioning mechanism using positioning pins or the like is required for accurately positioning the mounting table as described above, and the configuration of the substrate transfer apparatus becomes complicated. Further, in order to prevent the displacement of the substrate W due to the rotation of the substrate W and the displacement of the substrate W due to the shock generated when the mounting table is positioned by the positioning pin, the mounting table and the positioning pin are operated slowly. This necessitates a reduction in substrate W transfer efficiency.

[0094] The substrate transfer apparatus 1 according to the present invention does not require a turning mechanism for the substrate W, so that the configuration is simple. Further, since the substrate W is not turned, the displacement of the substrate W during the turning of the substrate is reduced. Therefore, the transfer speed of the substrate W can be increased and the transfer efficiency of the substrate W can be improved.

[0095] Further, according to the substrate transfer apparatus 1, when the substrate W is carried out or carried in, the substrate W is sandwiched and moved by the roller 26 and the mouth roller 27A. Suppresses the possibility of slippage between the substrate W and the cassette side compressor 3 even if a large force is applied to the substrate W to carry it (even if the acceleration (including negative acceleration) applied to the substrate W is large). The substrate W can be transported quickly. Further, according to the substrate transfer apparatus 1, the substrate transfer means 7 includes the transfer competitor 9 that is movable in the vertical direction, and is provided in the process-side transfer node 5. The substrate W can be transferred between the cassette-side competitor 3 and the process-side transfer node 5 by passing through each notch 11 by a portion on the transfer-use competitor 9 where the substrate W is placed. Since it is configured to be possible, the substrate W can be delivered simply by moving the force upward and downward with a simple configuration, and the possibility of the substrate W being damaged can be avoided.

[0097] Further, according to the substrate transport apparatus 1, since the intermediate competitor 19 is provided, the cassette-side competitor 3 and the delivery competitor 9 are supported while the substrate W is supported using the intermediate competitor 19. The substrate W can be delivered between the two, so that the substrate W can be reliably delivered.

[0098] It should be noted that, as already understood, notches 11 in the process side transfer node 5 are provided, and the not-not-formed portions are provided at intervals from each other. It is indispensable to connect the place (the part where the notch 11 is provided) together

[0099] On the other hand, since the notch non-formation part in the process side transfer hand 5 constitutes the delivery means 7 and each roller 47 cannot pass therethrough, This means that delivery means 7 is provided.

[0100] Therefore, if the intermediate compressor 19 is not provided, the notch that is present between the cassette CS and the loading part of the process side transfer node 5 is not formed. There is no means for supporting the downward force of the substrate W moving between the cassette CS and the process-side transfer node 5 at the site, and the substrate W to be transported is grabbed by gravity, etc. The substrate may not be transported smoothly.

[0101] However, in the substrate transfer apparatus 1, since the intermediate competitor 19 is provided, the substrate w can be supported by the downward force even in the not-cut portion, and the substrate due to gravity during substrate transfer is supported. W stagnation can be avoided and the substrate W can be transported smoothly.

[0102] Also, according to the substrate transport apparatus 1, the loading / unloading direction of the substrate W by the cassette side compressor 3 ( The X-axis direction) and the loading / unloading direction (X-axis direction) of the substrate W by the process-side transfer node 5 coincide with each other, and the substrate W can be moved and positioned in the Y-axis direction. Since the means 30 is provided, the overall structure of the substrate transfer apparatus 1 is further simplified, and even if the cassette CS and the process apparatus are located at positions shifted in the Y-axis direction, the cassette CS and the process apparatus The substrate can be transferred between the two.

[0103] Further, a plurality of cassettes CS arranged in the Y-axis direction on one end side in the X-axis direction and the cassette transport apparatus 1 in the Y-axis direction on the other end side in the X-axis direction. The substrate W can be transferred between a plurality of process apparatuses.

By the way, as shown in FIG. 8 (a diagram showing a state in which a plurality of process-side transfer nodes 5 are provided), a plurality of process-side transfer nodes 5 are arranged in the vertical direction (for example, 2 Tsu) It ’s set up.

[0105] According to the substrate transport apparatus configured as described above, it is possible to carry out the substrate W with the process apparatus power and the substrate W into the process apparatus in a short time.

[0106] For example, with the unprocessed substrate W placed on the process side transfer node 5B existing below, the process side transfer nodes 5A and 5B are moved to the process equipment. After the substrate W processed by the process apparatus is placed on the process side transfer node 5A existing above, the substrate on which the process side transfer node 5B is placed is placed on the substrate. If the process side transfer nodes 5A and 5B are separated from the process equipment force after carrying in the process equipment, the substrate W is unloaded from the process equipment and the substrate W is carried into the process equipment. Can be performed in a short time.

In the first embodiment, as shown in FIG. 9 (plan view showing a modified example of the substrate transport apparatus), the transport direction (X-axis) of the substrate W by each of the competitors 3, 9, 19 is shown. The transfer direction (Y-axis direction) of the substrate W by the process side transfer node 5 may be changed.

[Second Embodiment]

FIGS. 10 and 11 to 16 are perspective views showing a schematic configuration of the substrate transfer apparatus 101 according to the second embodiment of the present invention, and FIG. 11 is a view showing an arrow XI in FIG. FIG. 12 is a diagram showing the arrow in FIG. [0109] The substrate transfer apparatus 101 according to the second embodiment uses a transfer node instead of a competitor to carry out a substrate from a cassette or carry a substrate into a cassette. Except for the point that the competitor is composed of an air float, it is configured in substantially the same manner as the substrate transfer apparatus 1 according to the first embodiment and has substantially the same effect, and the substrate does not touch the competitor. The degree of cleanliness can be further increased.

More specifically, the substrate transfer apparatus 101 includes a cassette side transfer node 102.

The cassette-side transfer node 102 holds the substrate W from the cassette that can accommodate the substrates W in a multilevel manner and holds the substrate W (position shown in FIG. 14; first position). It is configured so that it can be carried out to a predetermined position PS 1).

[0111] Further, the cassette-side transfer node 102 can carry the substrate W present at the position PS1 shown in FIG. 14 while holding the end face or the vicinity of the end face of the substrate W into the cassette. It is configured as follows.

[0112] The cassette-side transfer node 102 includes an L-shaped moving member 106. The moving member 106 extends in the loading / unloading direction (X-axis direction) of the substrate W, and is movable and positioned in the loading / unloading direction of the substrate W with respect to the slide base (base member) 107. The slide base 107 extends long in the loading / unloading direction (X-axis direction) of the substrate W and is provided integrally with the base member 104.

Note that the base member 104 is movable and positionable in the X-axis direction and the Y-axis direction, like the delivery competitor base member 43.

The moving member 106 is provided with a holding member 108 for holding the substrate W. The holding member 108 is movable and positioned in the X-axis direction with respect to the moving member 106.

[0115] With this configuration, even if the movement stroke of the holding member 108 relative to the base member 104 is increased, the length of the substrate transfer apparatus 101 in the X-axis direction can be reduced, and the installation area can be reduced. Increase can be avoided as much as possible.

[0116] The holding member 108 includes, for example, a suction cup 110, and can hold the substrate W by adsorbing the lower surface near the end face of the substrate W as shown in FIG. It ’s a sea urchin. Instead of the suction cup 110, the vicinity of the end face of the substrate W may be sandwiched to hold the substrate w.

[0117] In order to stably transport (transfer) the substrate W, a plurality (for example, two) of the moving member 106, the holding member 108, and the like are provided apart from each other in the Y-axis direction.

[0118] Further, there is provided cassette side air float means (not shown) for supporting the weight of the substrate W carried out or carried in the cassette side transfer node 102 on the lower side of the cassette. Yes.

[0119] The cassette-side air float means includes, for example, a support member made of ceramic having air permeability, and the compressed air supplied by the compressed air supply means is ejected from the support member, The weight of the substrate W can be supported in a non-contact state with the substrate W! /.

[0120] Note that the support member may be made of a breathable sintered metal or the like instead of the breathable ceramics. Further, using a member such as a metal that is not air permeable and filled with a material, a plurality of holes are provided in the member such as a metal, and compressed air is ejected from these holes to support the substrate W. Even so, よう.

[0121] Further, the substrate transfer apparatus 101 transfers the substrate W present at the second predetermined position (position PS3 shown in FIG. 15) located below the first predetermined position. A process-side transfer hand 112 that can be supplied to a process device that processes the substrate W, or can carry the substrate W out of the process device to the second predetermined position (the process-side transfer hand 5). It is constructed in the same manner as the above, and is equipped with a transfer hand).

[0122] The process-side transfer node, 112, is similar to the process-side transfer node, 5, and the transfer hand support member 114 (the transfer hand) via the intermediate member 115 (see FIG. 16). Similarly to the support member 39, the process-side transfer node 112 is provided for the transfer node support member 114 with respect to the transfer node support member 114. It can be moved by protruding in the axial direction.

[0123] Further, the substrate transfer apparatus 101 includes a substrate transfer means 116 capable of transferring the substrate W between the first predetermined position and the second predetermined position.

[0124] The delivery means 116 includes the cassette side transfer node 102, the process side transfer node 102, and the process side transfer node. A transfer air float means 118 that is movable in the vertical direction relative to the terminal 112, and each notch provided on the process side transfer node 112 is connected to the transfer air. By passing the portion on which the substrate W of the float means 118 is placed, the substrate W can be delivered between the first predetermined position and the second predetermined position. Become.

In more detail, the delivery air float means 118 includes a support member 120, which extends in the X-axis direction above the base member 104 and is spaced in the Y-axis direction. A plurality of the base members 104 are integrally provided.

[0126] The support member 120 is configured in the same manner as the support member of the cassette-side air float means, and can support the substrate W by ejecting air.

In addition, intermediate air float means 122 for supporting the substrate W transported by the cassette-side transfer node 102 is provided between the first predetermined position and the cassette. It has been.

[0128] The intermediate air float means 122 includes a support member 124. The support member 124 is spaced from the cassette side and inside the transfer hand support member 114 in the Y-axis direction. A plurality of the base members 104 are integrally provided.

[0129] In order to avoid interference with the process side transfer node 112 and the support member 124, the moving member 106 has the process side transfer hand 112 and the support member 124 in the Y-axis direction. It is provided between.

[0130] Here, the operation of the substrate transfer apparatus 101 will be described.

FIG. 10 shows an initial state. In this initial state, the lower surface of the substrate W located at the lowest position of the cassette, the upper end of the suction cup 110, the upper surface of the support member 124, and the upper surface of the support member 120 are substantially the same height. In addition, the upper surface of the process-side transfer hand 112 is positioned below the upper surfaces of the support members 120 and 124. Further, the moving member 106 does not protrude toward the cassette side, but is accommodated inside the base member 104 in a plan view.

[0132] In the initial state, the moving member 106 extends toward the cassette side, and the holding member 108 also moves toward the cassette side, and the end surface of the lowermost substrate W is moved by the suction cup 110. Adsorb the lower part in the vicinity and hold the substrate W (see Fig. 11 and Fig. 13)

Subsequently, the air float in each of the support members 120 and 124 is turned on, and the air is moved in the support members 120 and 124 by moving the moving member 106 and the holding member 108 away from the cassette. The substrate W is transported to the first predetermined position PS1 while floating and supporting the weight of the substrate W (see FIG. 14).

[0133] Next, when the base member 104 is moved downward, the substrate W supported by the support member 120 is also moved downward along with the movement. It is placed on the process side transfer node 112, and this placed position becomes the second predetermined position PS3 (see FIG. 15).

[0134] With the substrate W present at the position PS3, the airflow of the support members 120 and 124 is turned off.

Subsequently, the process side transfer node 112 is extended to the process apparatus side, and the substrate W is loaded into the process apparatus (see FIG. 16). After the loading, the process side transfer hand 112 is loaded. The height of the base member 104 and the transfer hand support member 114 is adjusted as appropriate, and the initial state is restored.

[0136] The above operations are repeated, and the substrates W are carried one by one from the cassette into the process apparatus.

Note that, when the substrate is transferred to the cassette, the process apparatus force also performs an operation opposite to the operation described above.

Further, as already understood, the transfer directions of the substrates W by the respective transfer hands 102 and 112 coincide with each other as in the first embodiment.

[0139] According to the substrate transfer device 101, the substrate W is unloaded from the cassette using the cassette side transfer node 102, or the substrate W is loaded into the cassette. It is not necessary to move the substrate W up and down at the time of loading / unloading, since the end of the substrate W is held by the cassette-side transfer node 102 which does not need to move to / from the substrate. There is no need to insert the cassette side transfer node 102 between the substrates W deeply. Therefore, the interval between the substrates W stacked in the cassette (interval in the vertical direction) can be reduced, and the storage efficiency of the substrates in the cassette can be increased. [0140] Furthermore, when the substrate W is unloaded from the cassette or loaded into the cassette, the end portion of the substrate W is held and loaded and unloaded, so that the central portion of the substrate W may be damaged. The possibility that the substrate W is contaminated can be further avoided. In addition, since the process side transfer node No. 112 is used to carry the substrate W into the process apparatus or the process apparatus force also unloads the substrate W, it is possible to answer the request from the process apparatus side, Since it is not necessary to provide a separate articulated robot or the like, the configuration of the substrate transfer apparatus 101 can be simplified and the installation area can be reduced.

[0141] Further, the movement of the substrate W by the cassette-side competitor, the process-side transfer hand, and the substrate transfer means can be performed only by parallel movement without accompanying rotational movement that changes the posture of the substrate W. Therefore, a space for rotating (turning) the substrate W becomes unnecessary, and the installation area of the substrate transfer apparatus 101 can be reduced.

[0142] By the way, as in the first embodiment, a plurality of the process-side transfer hands 112 may be arranged in an upward and downward direction!

[0143] Further, instead of the air float means, an ultrasonic float means that floats the substrate W using ultrasonic waves may be employed.

[0144] The ultrasonic float means supports the weight of the substrate W by a thin air film formed between the substrate W and the substrate support member by vibrating the substrate support member with an ultrasonic vibrator. Come on! /

[0145] The ultrasonic float means includes an ultrasonic wave generation element (for example, a piezo element).

[0146] A horn for amplifying the vibration generated by the ultrasonic wave generating element is provided above the ultrasonic wave generating element. The substrate support member is provided on the upper portion of the horn via a connecting member.

[0147] Then, the vibration generated by the ultrasonic wave generating element is transmitted to the substrate support member, and the substrate support member vibrates mainly in the thickness direction of the substrate W, whereby the substrate W and the substrate support described above are supported. A radiation pressure using air as a medium (radiation pressure due to air density waves) is generated between the members, and a thin air film is generated between the substrate W and the substrate support member by the radiation pressure, The weight of the substrate W can be supported by the substrate support member. It has become.

[0148] The entire content of Japanese Patent Application No. 2005-162225 (filed on June 2, 2005) is incorporated herein by reference.

[0149] Further, the present invention can be implemented in other modes by making appropriate modifications without being limited to the above-described embodiments.

Claims

The scope of the claims

[1] A cassette-side compressor capable of moving the substrate horizontally and carrying it out of a cassette that can be stored in multiple stages with the substrates placed horizontally, or moving the substrate horizontally and loaded into the cassette When;

A process-side transfer hand capable of moving the substrate in the horizontal direction and supplying it to a process apparatus for processing the substrate, or moving the substrate in the horizontal direction and carrying it out of the process apparatus; ;

Substrate transfer means capable of transferring the substrate between the cassette side conveyor and the process side transfer hand;

And the cassette side conveyor, the process side transfer hand, and the substrate transfer means are configured to move the substrate only by parallel movement.

Substrate transfer device characterized by V.

[2] From a cassette that can store substrates in multiple stages horizontally, the substrate can be carried out by moving the substrate in the horizontal direction while holding the substrate near the end surface or near the end surface, or holding the substrate end surface or near the end surface A cassette-side transfer hand capable of moving the substrate horizontally and carrying it into the cassette;

A process-side transfer hand capable of moving the substrate in a horizontal direction and supplying it to a process apparatus for processing the substrate, or moving the substrate in a horizontal direction and carrying it out of the process apparatus;

Substrate transfer means capable of transferring the substrate between the cassette side transfer node and the process side transfer node;

The cassette side transfer node, the process side transfer hand, and the substrate transfer means are configured to move the substrate only by parallel movement !. A substrate transfer device.

[3] In the substrate transfer apparatus according to claim 2,

The cassette side transfer node is:

A slide base extending long in the loading / unloading direction of the substrate;

A moving member movable in the loading / unloading direction of the substrate with respect to the slide base; A holding member capable of holding the substrate and movable in the loading / unloading direction of the substrate with respect to the moving member;

And the holding member is configured to be movable and positionable with respect to the slide base.

[4] In the substrate transfer apparatus according to any one of claims 1 to 3,

The loading / unloading direction of the substrate by the cassette-side conveyor or the cassette-side transfer node and the loading / unloading direction of the substrate by the process-side transfer node coincide with each other,

A substrate unloaded from the cassette by the cassette side transferer or the cassette side transfer node, or a substrate unloaded from the process apparatus card by the process side transfer node, or the cassette side transferor A substrate transfer apparatus comprising substrate transfer positioning means capable of moving and positioning in a horizontal direction intersecting with a loading / unloading direction of a substrate by the cassette side transfer node and the process side transfer hand.

[5] In the substrate transfer apparatus according to any one of claims 1 to 4,

The substrate delivery means includes a delivery competitor that is movable in the vertical direction relative to the cassette side conveyor or the cassette side transfer node and the process side transfer node. At the same time, the cassette-side conveyor or the cassette-side transfer is made by passing the notch or each through-hole provided in the process-side transfer node through the portion of the transfer competitor where the substrate is placed. The substrate is transferred between the loading node and the process-side transfer node.

Alternatively, the substrate transfer means is a transfer air float means or transfer means that is movable in the vertical direction relative to the cassette side conveyor or the cassette side transfer node and the process side transfer node. Ultrasonic float means is provided, and each notch or each through-hole provided in the process side transfer hand is passed through the air float means for delivery or the substrate in the ultrasonic float means for delivery. By passing the part to be placed, the substrate is transferred between the cassette side conveyor or the cassette side transfer node and the process side transfer node. A substrate transfer device configured to be capable of being moved.

[6] The substrate transfer apparatus according to any one of claims 1 to 5,

The base side of the process side transfer node supports the weight of the base plate that moves in the horizontal direction between the cassette side conveyor or the force setting side transfer hand and the process side transfer hand. Or an intermediate air float means for supporting the weight of the cassette moving in the horizontal direction between the cassette side conveyor or the cassette side transfer hand and the process side transfer hand, or An intermediate ultrasonic float means is provided!

[7] In the substrate transfer apparatus according to any one of claims 1 to 6,

A substrate transfer apparatus, wherein a plurality of the process side transfer nodes are provided side by side in the vertical direction.