200821596 九、發明說明： 【备明所屬之技術領域】 曰本發明是關於-種在用來收容…❿咖等半導體 晶片及其他電子零件等工件的茏 、 7科工件的相把盤、與對於工件施以 二直：：理時’以不同於萬用托盤的間隔收容工 牛的專用處理用托盤之間進行工件的轉移、或是進行萬用 七盤及處理用托盤之搬運、定位等的工件搬運裝置。 【先前技術】 為了對於半導體晶片等玉件施以試驗或檢查等之各種 處理’工件會在複數個處理步驟中被搬運 此工件之搬運，是❹可同時收容複數個工件的萬用托^ ,亦卩卩排列在萬用托盤的狀態收容複數個工件，然 魏序搬運至各種處理步驟，並且在各個處理步驟將工: :個-個地或收集複數個之後，從萬用托盤取出而施以預 ^之處理，並且再度返回萬用托盤㈣運至下-個處理步 在此，施以試驗、檢查等之預定處理的處理步驟中， =了可進行最適當的處理，是將工件轉移至收容間距等盘 萬用托盤不同的專用處理用托盤並施以處理，並且使 該處理的工件再度返回萬用托盤而搬運至下—個處理= 此專用處理用托盤是以不同於萬用托盤之收容間距 (間隔）的收容間距’收容複數個工件而加以保持的方式形 成。因此’在萬用托盤與處理用托盤之間會產生轉移工^ 318739 5 200821596 龜 的作業。 如上所述，就在萬用托盤與處理用托盤之 之轉移的習知工件搬運裝置而言，已知 從萬用托盤轉移至處理用托盤的兩個裝載部種 .從處理用托盤轉移至萬用托盤的兩個卸載部，工件 德， 件之仃或列之間隔（間距）的可#機 .的可變機構的工件搬運穿置仃或列之間隔 Π侧號公報）。置⑽例如日本特開咖- 設置二:褒置Γ由於是藉由在裳載部及卸载部分別 件的門ρ:⑺距广 此可變機構，來調整用來收容工 間，在轉移動作之高速的變更動作需要時 變機構變得複雜，功能上&1土以 而且，一旦可 ，忍疋否確實變更為所希望的間隔（收 以確 設置可變機槿，而女、首Α 再者’由於 化，並且鱼及^ 裝载部及卸載部的大型化及重量 卢。此夕/、= 共同作用而產生工件的保持失誤之 虞此外，在處理小的零件時，取中乃都罢卩士 Α上 度變得很重要，但是如杲結 π的停止精確 德接太庄 一如果π私苓件時的機構多，則在各個 > 的機H就會累積，使得零件的取出及載置之 停止位置的精確度變差，，及載置之 失誤之虞。 虿產生令件的取出失誤或載置 種可上述情況而研創者，其目的在於提供-某切造之簡化、各機構之精敏化、整體裝置之 318739 6 200821596 -小型化、設置面積之省空間化、工件之轉移所需的時間之 縮短化等，一面對於半導體晶片、基板、及其他電子零件 等工件有效施以試驗、檢查、測定、加工、組裝等之各種 處理’且可使生產性提升的工件搬運裝置。 【發明内容】 • 用以達成上述目的的本發明之工件搬運裝置的構成係 包含·用來保持可收容工件的萬用托盤而可朝左右方向移 動j萬用托盤保持單元；與萬用托盤保持單元相鄰且排列 在前後方向的後方，並且用來保持將工件搬入及搬出於處 理區，的處理用托盤，並可朝左右方向移動的處理用托= 保持單兀；以及為了在萬用托盤與處理用托盤之間轉移工 件而可朝前後方向及上下方向移動的工件移載單元。 根據此構成，將未處理的工件從萬用托盤轉移至處理 用托盤時，或是將在處理區域完成預定處理的處理完畢工 件從處理用托盤轉移至萬用托盤時，萬用托盤保持單元及 處理用托盤保持單元會配合預定的收容間距適當地朝左右 方向移動，然後定位在預定的取出位置及收容位置，而且 =件移載單元會朝前後方向移動而在萬用托盤與處理用托 化之間搬運工件，並且朝上下方向移動而取出工件或收容 工件，而在萬用托盤與處理用托盤之間轉移工件。 藉此構成，由於萬用托盤保持單元及處理用托般 早几會適當地朝左右方向移動，使作為取出及收容對象的 工件經常在左右方向中位於工件移載單元的下方，而且工 件移載單元會朝上下方向及前後方向移動而轉移工件，因 318739 7 200821596 此可使工件以高速移動，且可達成轉移動作的高速化。此 外，由於萬用托盤保持單元、處理用托盤保持單元、及工 :移載早兀是採用只會在平面内之一方向(左右方向Y或 刖後方向X)移動的一個移動機構，因此在萬用牦盤與處理 •用托盤之_移工件時，機械誤差會變小，且停止位、置於 -:度會提升。結果，即使是小的工件，也可正確取出而‘ 載。 上述構成的襄置中，可採用在處理用托盤保持單元盘 處，區域之間配置有用來移送處理用托盤的處理用托盤移 送早7C的構成。 一根據此構成’由於處理用托盤是藉由處理用把盤移送 早7G而在處理用托盤保持單元與處理區域之間移送，因此 可在工件的轉移步驟之後順利轉移至處理步驟，而且可使 ^理完畢的工件順利返回處理用托盤保持單元，此外，在 ^理區域位於複數個部位時，可在適當選擇的處理區域與 处理用托盤保持單元之間移送處理用托盤。 ^ =成的裝置中，可採用以下構成··工件移載單元 她設置複數個，萬用托盤保持㈣ 理工件的去’複數個萬用托盤中包含用來收容未處 田田&理用的萬用托盤及可收容處理完畢工件的處 ，里元带用的萬用托盤。 =據此，成’在設有例如兩個王件移載單元的情況 #，σ 一面藉由一個工件移载單元，從未處理用的萬用托 盤將未處理的工件糖并5 ♦ 不U用白’萬用托 件轉私至處理用托盤，一面藉 318739 8 200821596 件移載單元，從處判㈣將處理完畢的工件轉移至處理 完畢用的萬用托盤。亦即，由於可同時進行未處理工件之 轉移及處理完畢卫件之轉移，因此比起個別進行轉移的 形’可縮短整體轉移所需的時間。 上述構成的裝置中，可採用以下構成：處理區域包含 對於工件進行預定檢查的檢查區域，處理完畢用的萬用托 盤包含用來收容滿足預定檢查的卫件的良品用萬用托盤、 以及用來收容未滿足預定檢查的工件的瑕範品用萬用托 艮據此構成’對於工件施以敎檢查後，可藉由處理 用托対送單元，將處理用托盤從檢查區域移送至處理用 =保持單元，並藉由工件移載單元，分別將良品的 :處理用㈣轉移至良品用萬用托盤，將職品的工件： ==轉移至瑕疲品用萬用托盤。如上所述 ”的同時可將檢查完畢的工件有效率地分類成良品'瑕 疵口口，且可使整體的步驟簡化。 十述構成的裝置中，可採用以下構成：萬用托 ==藉由工件移載單元進行工件之轉移的後方位 ^的=應或回收萬用托盤的前方位置之間朝前後方向移 : = 成’在萬用托盤保持單元之前後方向的前方， 應收容有工件的萬用托盤及未收容有工件的空 萬用托盤供應單元、用來回收保持在萬用托 的：用托盤的萬用托盤回收單元、以及在萬用 —早凡與萬用托盤保持單元之間及萬用托盤保持單 318739 9 200821596 .=萬用托盤回收單元之間轉移萬用托盤的萬用托盤移载 當萬用托盤保持單元移動至前方位置 ;托；=?用托盤移載單元，從萬用托盤供應單元向萬 •:托i保持早竭收容有工件的萬用托盤或空的： ，2，亚且從萬用托盤保持單元 毛 用虹船lL 〃两巾死盤回收早7G回收葚 如此’即可在-連串的-貫作業中有效率地進萬 萬用托盤的供應及回收。 進仃 上述構成的裝置中，可採用萬用托盤移载單元 持複數個萬用托盤的方式形成的構成。 了保 根據此構成’可藉由萬用托盤移载單 :固萬用托盤(例如收容有未處理工件的萬用托般:t 有工件的空的萬用托盤），而且在移载位置令皿收谷 =托盤的動作及承接收容有處理完畢用進： 地有效率地進行萬用把盤的供應及回收。了更進—步 單元裝置中’可採用以下構成：萬用托盤供岸 回收單元是朝左右方向排列而設置，萬 1載早…可朝左右方向及上下方向移動的方式： 根據此構成，由於是使萬# 口 托盤時朝左右方向之一方 i::早兀在供應萬用 朝左右方向之另一方向移動，來進萬用托盤時 因此可-面使移動行程（行程長度）縮短，—面^装置口 3J8739 】0 200821596 精緻化。 上述構成的裝置中，可接 動II H内#右# # α 用在萬用托盤移載單元的移 動靶HJ内e又有使4用托盤暫 構成。 了付钺的萬用托盤待機區域的 •根據此構成，在用來收容處理完畢工件的萬用乾般尚 -未裝滿時，可使該萬用托盤、 ·- 機，並且，在有要處理不^/在萬用托盤待機區域待 指令時，可使先進：件的中斷加町叩〇 待機，再者丁、 托釭暫時在萬用托盤待機區域 從萬用托般伴二。至萬用托盤保持單元的萬用托盤或 攸禹用托盤保持單元回收的葸 人 區域待機，± 4用托2暫時在萬用托盤待機 匕Α传钺而调整供應時序或回收時序。 上述構成的裝置中，可接用 設有用以進行處理用托盤之供庫^於處理用托盤移送單元 回收單元的構成。 〜或回收的處理用托盤供應 用托:：構成，在設有複數個處理區域時，可藉由處理 ί:::ί 區域，可回收該部分的處理用托盤。 及檢查處理用托盤時可容易取出。 持單==Γ ’可採用以下構成：由萬用托盤保 移載機槿< 保持單元、及工件移載單元形成工件 複數個。’而且此工件移載機構是朝左右方向排列並設有 二:成及:::::萬_盤保持單元、處㈣ 件私載早兀所構成的複數個工件移載 η 318739 200821596 機構，因此可更進-步在短時間内，並且連續進行工件的 轉移’且可縮短整體之工件處理所需的時間，並 產性提升。 【實施方式】 •以下，針對本發明之最佳實施形態，參照所附圖面加 以說明。 此工件搬運裝置是如第i圖所示，具備：朝左右方向 Y排列的兩個移載區域M、A2;與兩個移載區KA1、A2 的後方相鄰而配置的處理用托盤移送區域A3;與處理用托 盤移送區域A3的後方相鄰而配置的處理區域A4;與移載 區域A1的前方相鄰而配置的萬用托盤供應區域與移 載區域A2的前方相鄰而配置的萬用托盤回收區域A6;以 及配置在萬用托盤供應區域A5與萬用托盤回收區域^之 間，使萬用托盤待機的萬用托盤待機區域A?等。 在此，萬用托盤Π是用來搬運未處理的工件或是處理 =辛的工件者’而且如第4圖所示，具備以預定間距排列 成方陣狀的複數個收容部Tla。而且，萬用托#Ti包含有： =來收容未處理工件的未處理用的萬用托盤τι;用來收容 處理完畢工件的處理完畢用的萬用托盤τι;以及未收容有 =件的空的萬用托盤T1。又，處理完畢用的萬用托盤τι 二含有：用來收容滿足預定檢查的工件的良品用萬用托盤 ，以及未滿足預定檢查的瑕疵品用萬用牦盤τι。 另一方面，處理用托盤T2是用來對於處理區域“將 未处理工件或處理完畢工件搬入及搬出者，而且如第4圖 318739 12 200821596 -所示’具備以不同於萬用托盤η之預定間距排列成方陣狀 的複數個收容部T2a。 在移載區域m、A2是如第i圖至第3圖所示，設有. 用來保持可收容工件的萬用把盤可朝左右方向 .的萬用托盤保持單元10;與萬用托盤保持單元1〇相鄰而 -，列在别後方向X的後方，用來保持將工件搬人及搬出於 處理區域Α4的處理用托盤Τ2而可朝左右方向”多動的處 .;里用托盤保持單元20;為了在萬用托盤鳩 Τ2之間轉移工件而可朝前後方向X及上下方向Ζ移動的工 件移載單元30。 夕料工 而且’由此萬用托盤保持單元1G、處理用托盤保持單 2 及工件移載單元30構成工件移載機構，此工件_ 2機構在移載區域心2分別朝左右方向¥排列而設 萬用把盤保持單元10是如第i圖、第3圖至第 不，由以下構件等所形成··形成大致矩形輪廓，並且 保持複數個（在此為三個）萬用托盤T1的平台I〗·將 2 口 11支持成可朝左右方向Y自由移動的導執12 ;使平 ϋ ii朝左右方向γ移動的驅動機構13;使平△ 一—方一滑二 、〜在此’驅動機構13可使用由步進馬達或飼服馬達 V π杯，leadscrew)、以及設在平台u而螺合在滾珠 318739 13 200821596 .螺桿（baU screw)的螺帽所構成的移送螺桿機構等。驅動 機構^5係與驅動機構13同樣地可使用由步進馬達或飼服 寺可進打位置控制的驅動源、可藉由驅動源驅動旋轉 3滾珠螺桿（導螺桿）以及設在滑動件14而螺合在滚珠螺 ‘杯的螺帽所構成的移送螺桿機構、或是油壓式或空 •伸縮致動器等。 勺 亦即’在保持在萬用托盤保持單元 Γ持在處理用托盤保持單元心— :工件時，平台n係由驅動機構i3朝左右方向 間距驅動，使用來收容作為移載對 = 工件的收容部Ha在左右方向γ定位於工件 ==的 的正下方。 仵私載早兀30 而在萬用托盤Π之供應或回收時 動機構15朝前後方向X驅動，而在藉由工二驅 :仃：件之轉移的後方位置、與供應或 ：0 的W方位置之間移動。 2 Τ1 圈所處理:托盤保持單元20是如第1圖、第3圖至第6 ，所不’由以下構件等形成··形成大致矩形 弟6 ，、上面保持處理用托盤Τ2的平台21;將平=且在 朝左右方向Υ自由移動的導執22;使平口 21支持成可 移動的驅動機構23 ;以及使平么 工右方向γ 升降機構24。 D 月上下方向z移動的 在此，驅動機構23可使用由步進 進行位置控制的驅動源、可藉動^馬達等可 勒肄駆動旋轉的滾珠螺 318739 】4 200821596 桿（導螺桿）、以及設在平台21而螺合在滾珠螺桿的螺帽所 構成的移送螺桿機構等。升降機構24可使用可將平台21 疋位在上下方向Z之所希望南度的油壓式或空壓式的 致動器等。 ''' - 亦即’在保持在萬用托盤保持單元10的萬用牦盤丁卜 與保持在處則托盤保持單元2G的處判托盤π之間移 載工件時，平台21是由驅動機構23朝左右方向γ '間距驅動，使用來收容作為移載對 ' 工件㈣容部在左右方a ν〜 ㈣所要私载的 的正下方。 右方向Υ疋位於工件移載單元30 Τ2二t處/Γ把盤移送單元4°承接交付處理用托盤 Τ2之德茲士 Γ 早凡4〇保持好處理用托盤 其脫離，另一方面，從處理»預定高度而使 托盤Τ2時，本德、*、卢柿用托现私达早兀40承接處理用 田後述處理用把盤移送單 丁2定位於預定位置 吏处理用托盤 至預定後糟由升降機構24使平台21上 頂疋回度而加以保持（承接）。 开 工件移载單元3〇是如 冗圖所示，在移载區域a ^弟圖、第7Α圖至第 設有兩個，而且是由在矛勿別朝左右方向Y排列而 X伸長的引導機構3】夕:域…A2的上方朝前後方向 方向X自由移動且朝上下方J導機構31支持成可朝前後 設在升降機構32 。2升降的升降機構32、以及 成。 ’下…保持工件的保持頭33等所形 318739 15 200821596 - 在此，引導機構31可使用由-面朝前後方向X引導升 降機構32 -面使其移動的步進馬達或伺服馬達等可進行 =置㈣的驅動源'藉由驅動源驅動旋轉的滾珠螺桿（導螺 桿）、以及設在升降機構32而螺合在滾珠螺桿的螺帽所構 .成的移送螺桿機構等，升降機構32可使用由步進馬達或祠 ' -服馬達等可進行位置控制的驅動源、藉由驅動源駆動旋轉 的滾珠螺桿（導螺桿）、以及設在升降機構32内而螺合在滾 ，珠螺桿的螺帽所構成的移送螺桿機構、或是油壓式或空壓 式的伸縮致動器等，保持頭33可使用用來吸附工件的吸 墊或是從兩側握持工件的握持片等。 亦即，在萬用托盤T1與處理用托盤T2之間進行工 =移時，升降機構32是藉由引導機構31使其朝前後方 ς適當移動而定位在財位置，並且在該位置下降而由 頭33保持1件，之後再度上升1後藉由引導機構 γ立二所，移載的處理用托盤Τ2或萬用把盤η之收容 # T2a、Tla的正上方，祐曰力吁 收容部T2a、Tla。 在錢置下降而將工件收容在 拓二上所述，將未處理工件從萬用牦盤T1轉移至處理用 時”或是在處理區域A4將完成預定之處理的處理 芈 攸处理用托盤T2轉移至萬用托盤T1時，萬用拓 盤保持單元1 〇及處理 σ — 容間距士 早 會配合預定的收 、田也朝左右方向Y移動，然後定位在預定的取出200821596 IX. Description of the invention: [Technical field of the invention] 曰 The present invention relates to a counter-disc and a workpiece of a 7-piece workpiece for holding a semiconductor wafer such as a ❿ coffee, and other electronic parts. Applying two straight to the workpiece:: Timing 'transfers the workpiece between the special processing trays that accommodate the working cows at intervals different from the universal tray, or transports and positions the universal seven-disc and processing trays. Workpiece handling device. [Prior Art] In order to apply various processes such as tests or inspections to jade articles such as semiconductor wafers, the workpiece is transported by the workpiece in a plurality of processing steps, and is a universal tray that can accommodate a plurality of workpieces at the same time. Also, the plurality of workpieces are accommodated in the state of the universal tray, and the Wei order is transported to various processing steps, and after each processing step: : one by one or after collecting a plurality of pieces, the utility model is taken out from the universal tray. After the pre-processing, and returning to the universal tray (4) to the next processing step, in the processing steps of the predetermined processing such as test, inspection, etc., the most appropriate processing can be performed, and the workpiece is transferred. To handle the processing of the special processing trays with different trays, such as the storage pitch, and return the processed workpieces to the universal tray and transport them to the next processing. This special processing tray is different from the universal tray. The accommodation pitch of the accommodation pitch (interval) is formed by accommodating a plurality of workpieces and holding them. Therefore, the work of the transfer worker 318739 5 200821596 will occur between the universal tray and the processing tray. As described above, the conventional workpiece transport device that transfers between the universal tray and the processing tray is known to transfer from the universal tray to the two loading portions of the processing tray. Use the two unloading parts of the pallet, the workpieces, the spacing of the pieces or the spacing of the columns (pitch), the workpiece handling of the variable mechanism, or the spacing of the columns. (10) For example, Japanese special coffee - setting 2: 褒 Γ 调整 Γ Γ Γ Γ Γ Γ Γ Γ Γ Γ Γ Γ Γ Γ Γ Γ Γ Γ 在 在 在 在 : : : : : : : : : : 在 在 在 在 在 在 在 在 在 在 调整 调整The high-speed change action requires the time-varying mechanism to become complicated, and the function is &1, and once it is OK, it is really changed to the desired interval (there is indeed a variable machine set, and the female, the first Because of the increase, the size and weight of the fish and the loading part and the unloading part are increased. On the occasion of the event, the workpiece is kept in the wrong condition. In addition, when handling small parts, It is very important to stop the martial arts, but if the 杲 的 精确 精确 精确 精确 精确 太 太 太 太 太 如果 如果 如果 如果 如果 如果 如果 如果 如果 如果 如果 如果 如果 如果 如果 如果 如果 如果 如果 如果 如果 如果 如果 如果 如果 如果 如果 如果 如果 如果And the accuracy of the stop position of the placement is deteriorated, and the error of the placement is incorrect. 研 The mistake of the removal of the production order or the type of the placement can be made by the researcher, and the purpose is to provide - a simplified simplification, Sensitive and holistic devices of various institutions 318739 6 2008215 96 - Miniaturization, space saving of the installation area, shortening of the time required for the transfer of workpieces, etc., and effective testing, inspection, measurement, processing, assembly, etc. for semiconductor wafers, substrates, and other electronic components. The present invention relates to a workpiece transporting apparatus which can improve the productivity. [Configuration] The configuration of the workpiece transporting apparatus of the present invention for achieving the above object includes a universal tray for holding a workpiece and can be The j-purpose tray holding unit is moved in the left-right direction; adjacent to the universal tray holding unit and arranged in the rear of the front-rear direction, and the processing tray for holding the workpiece into and out of the processing area, and moving in the left-right direction For the processing, the workpiece transfer unit can be moved in the front-rear direction and the vertical direction in order to transfer the workpiece between the universal tray and the processing tray. According to this configuration, the unprocessed workpiece is used. When the tray is transferred to the processing tray, or the processed workpiece that has completed the predetermined processing in the processing area is transferred from the processing tray When the tray is used, the universal tray holding unit and the processing tray holding unit are appropriately moved in the left-right direction in accordance with the predetermined storage pitch, and then positioned in the predetermined take-out position and the storage position, and the component transfer unit is turned forward and backward. The workpiece is moved between the universal tray and the processing tray, and the workpiece is moved in the vertical direction to take out the workpiece or to accommodate the workpiece, and the workpiece is transferred between the universal tray and the processing tray. The tray holding unit and the processing tray are appropriately moved in the left-right direction as early as possible, so that the workpiece as the object to be taken out and stored is often located below the workpiece transfer unit in the left-right direction, and the workpiece transfer unit is moved up and down and before and after. The workpiece is moved in the direction of movement, and the workpiece can be moved at a high speed by 318739 7 200821596, and the speed of the transfer operation can be increased. In addition, since the universal tray holding unit, the processing tray holding unit, and the work: the transfer is early, a moving mechanism that moves only in one direction in the plane (the left-right direction Y or the rearward direction X) is used. When using the pallet and the processing of the pallet, the mechanical error will become smaller, and the stop position and the -: degree will increase. As a result, even a small workpiece can be correctly taken out and loaded. In the above-described configuration, it is possible to adopt a configuration in which the processing tray for transferring the processing tray is placed between the processing tray holding unit trays, and the processing tray is transported 7C earlier. According to this configuration, since the processing tray is transferred between the processing tray holding unit and the processing area by the processing transfer tray 7G, it can be smoothly transferred to the processing step after the workpiece transfer step, and The finished workpiece is smoothly returned to the processing tray holding unit, and when the processing area is located at a plurality of parts, the processing tray can be transferred between the appropriately selected processing area and the processing tray holding unit. ^ = In the device, the following configuration can be used. · The workpiece transfer unit is set up in multiples, and the universal tray is kept. (4) The workpiece is removed. The plurality of universal trays are included to accommodate the unused field Tian & The universal tray and the universal tray that can accommodate the processed workpiece. = According to this, in the case of having, for example, two king pieces shifting units, σ is carried out by a workpiece transfer unit, and the unprocessed universal tray is used for unprocessed workpieces. Transfer the blank to the processing tray with the white 'universal carrier', and transfer the processed workpiece to the universal tray for processing by using the 318739 8 200821596 transfer unit. That is, since the transfer of the unprocessed workpiece and the transfer of the processed member can be simultaneously performed, the time required for the overall transfer can be shortened compared to the shape of the individual transfer. In the apparatus configured as described above, the processing area may include an inspection area for performing predetermined inspection on the workpiece, and the universal tray for processing includes a good universal tray for accommodating a guard that satisfies the predetermined inspection, and The 瑕 收容 收容 收容 收容 收容 收容 收容 收容 收容 收容 ' 对于 对于 对于 对于 对于 对于 对于 对于 对于 对于 对于 对于 对于 对于 对于 对于 对于 对于 对于 对于 对于 对于 对于 对于 对于 对于 对于 对于 对于 对于 对于 对于 对于 对于 对于 对于 对于 对于Hold the unit, and transfer the good: processing (4) to the good multi-purpose tray by the workpiece transfer unit, and transfer the workpiece of the product: == to the universal tray for the fatigue. As described above, the inspected workpiece can be efficiently classified into a good product, and the overall steps can be simplified. In the device of the tenth configuration, the following configuration can be adopted: universal use == by The rearward position of the workpiece transfer unit for the transfer of the workpiece = should be moved or moved back and forth between the front position of the universal tray: = 'Before the front and rear of the universal tray holding unit, the workpiece should be accommodated A universal tray and an empty universal tray supply unit that does not contain a workpiece, a universal tray recovery unit for recycling and holding a tray, and a universal tray between the universal and the universal tray holding unit And universal tray holding sheet 318739 9 200821596 .=Universal tray transfer unit transfer universal tray between universal trays when the universal tray holding unit moves to the front position; support; = use tray transfer unit, from The universal tray supply unit keeps the universal tray containing the workpiece or empty: to 2, and from the universal tray holding unit, the red ship is used to recover the early 7G recovery. 'You can efficiently supply and recycle tens of thousands of pallets in a series of continuous operations. In the above-mentioned device, a universal pallet transfer unit can be used to hold multiple versatile trays. According to this configuration, it can be transferred by a universal pallet: a solid universal pallet (for example, a universal pallet containing unprocessed workpieces: an empty universal pallet with workpieces), and is moving Loading position of the container: the operation of the tray and the acceptance of the receiving capacity: The supply and recovery of the universal disk are efficiently carried out. In the further step unit, the following components can be used: universal tray The shore-recovery unit is arranged in the left-right direction, and the method of moving in the left-right direction and the up-and-down direction is as follows: According to this configuration, since one of the trays is in the left-right direction, i:: When the universal supply is moved in the other direction in the left-right direction to enter the universal tray, the movable stroke (stroke length) can be shortened by the surface--the surface of the device 3J8739 】0 200821596 is refined. Can be accessed In the moving target HJ of the universal pallet transfer unit, there is a temporary tray for the four-purpose pallet. The standby area of the universal pallet is used according to this configuration. The versatile dry storage of the finished workpiece - when not full, can make the universal tray, the machine, and, when there is to be processed / in the standby area of the universal pallet to be commanded, can be advanced: The interruption of the piece is added to the waiting of the town, and the other is temporarily in the standby area of the universal pallet from the universal tray. To the universal tray of the universal tray holding unit or the tray holding unit. The human area is on standby, and the supply timing or the recovery timing is adjusted by the standby tray 2 in the standby tray for a while. The above-mentioned device can be used for processing the tray for processing. The structure of the tray transfer unit recovery unit. ~ or recycled processing tray supply With::, when there are multiple processing areas, you can recycle the processing tray of this part by processing the ί:::ί area. And it can be easily taken out when inspecting the processing tray. The order ==Γ ' can be configured as follows: the carrier is held by the universal pallet 槿 < The holding unit and the workpiece transfer unit form a plurality of workpieces. 'And this workpiece transfer mechanism is arranged in the left-right direction and is provided with two: Cheng and ::::: 10,000 _ disk holding unit, at (4) pieces of private load 兀 兀 工件 工件 318 318 318 318739 200821596 Therefore, it is possible to further advance the transfer of the workpiece in a short time and continuously reduce the time required for the overall workpiece processing, and the productivity is improved. [Embodiment] Hereinafter, the best mode for carrying out the invention will be described with reference to the accompanying drawings. The workpiece transfer device includes two transfer regions M and A2 arranged in the left-right direction Y, and a processing tray transfer region disposed adjacent to the rear of the two transfer regions KA1 and A2 as shown in FIG. A3; a processing area A4 disposed adjacent to the rear of the processing tray transfer area A3; and a 10,000 tray arranging area adjacent to the front of the transfer area A1 adjacent to the front of the transfer area A2 The tray recovery area A6; and the universal tray standby area A which is placed between the universal tray supply area A5 and the universal tray collection area ^ to make the universal tray stand by. Here, the universal tray Π is for transporting an unprocessed workpiece or a workpiece of sin □ and as shown in Fig. 4, a plurality of accommodating portions T1a which are arranged in a square shape at a predetermined pitch are provided. Further, the universal use #Ti includes: = an unprocessed universal tray τι for accommodating unprocessed workpieces; a versatile tray for handling the processed workpieces; τι; Universal tray T1. Further, the versatile tray τι 2 for processing is contained in a versatile tray for accommodating a workpiece that satisfies a predetermined inspection, and a versatile tray for tampering that does not satisfy a predetermined inspection. On the other hand, the processing tray T2 is used to carry the unprocessed workpiece or the processed workpiece into and out of the processing area, and as shown in FIG. 4, 318, 739, 2008, 2008, 596, 'has a predetermined difference from the universal tray η. The plurality of accommodating portions T2a are arranged in a square array. The transfer regions m and A2 are provided as shown in the first to third figures. The universal disk for holding the workpiece can be oriented in the left-right direction. The universal tray holding unit 10 is adjacent to the universal tray holding unit 1A, and is disposed behind the rear direction X to hold the processing tray Τ2 for moving the workpiece and moving it out of the processing area Α4. The tray holding unit 20 is used in the left-right direction; the tray holding unit 20 is used in the middle; and the workpiece transfer unit 30 is movable in the front-rear direction X and the up-and-down direction in order to transfer the workpiece between the universal trays 2. In the evening, the workpiece pallet holding unit 1G, the processing tray holding unit 2, and the workpiece transfer unit 30 constitute a workpiece transfer mechanism, and the workpiece_2 mechanism is arranged in the left-right direction ¥ in the transfer region core 2, respectively. The universal disk holding unit 10 is formed by the following members or the like as shown in Fig. i, Fig. 3 to Fig. 3, and forms a substantially rectangular outline, and holds a plurality of (here, three) universal trays T1. Platform I 〗 The two ports 11 support a guide 12 that can move freely in the left-right direction Y; the drive mechanism 13 that moves the flat ii in the left-right direction γ; the flat △ one-square one slides two, ~ here The drive mechanism 13 can use a transfer screw mechanism or the like which is constituted by a stepping motor or a feeding motor V π cup, leadscrew, and a nut provided on the platform u and screwed to the ball 318739 13 200821596 . Similarly to the drive mechanism 13, the drive mechanism 5 can use a drive source controlled by a stepping motor or a feeding platform, a rotary 3 ball screw (lead screw) driven by a drive source, and a slider 14 The screw mechanism is a screw mechanism formed by a nut of a ball screw 'cup, or a hydraulic or air-type telescopic actuator. The spoon is also 'when the universal tray holding unit is held in the processing tray holding unit core-: workpiece, the platform n is driven by the driving mechanism i3 in the left-right direction, and is used for housing as a transfer pair = workpiece. The portion Ha is positioned directly below the workpiece == in the left-right direction γ.仵 仵 兀 而 而 而 而 而 而 而 而 而 而 而 而 而 而 而 而 而 而 而 而 而 而 而 在 在 在 在 在 在 在 在 在 动 动 动 动 动 动 动 动 动 动 动 动 动 动 动 动Move between square positions. 2 所 1 lap processing: the tray holding unit 20 is formed by the following members, etc. as shown in Fig. 1 and Figs. 3 to 6, and forms a substantially rectangular brother 6 and a platform 21 on which the processing tray 2 is held; The guide 22 that is flat = and free to move in the left-right direction; the flat opening 21 is supported as a movable drive mechanism 23; and the right-hand right direction γ lift mechanism 24 is provided. Here, the drive mechanism 23 can use a drive source that is positionally controlled by stepping, a ball screw 318739 that can be rotated by a motor, etc. 4 200821596 rod (lead screw), and A transfer screw mechanism or the like which is provided on the platform 21 and screwed to the nut of the ball screw. The elevating mechanism 24 can use a hydraulic or pneumatic actuator that can clamp the platform 21 to a desired south degree in the vertical direction Z. ''' - that is, 'the platform 21 is driven by the drive mechanism when the workpiece is held between the universal tray holding unit 10 and the tray π held at the tray holding unit 2G. 23 γ' pitch drive in the left-right direction, used to accommodate the transfer as the 'workpiece (four) capacity is directly below the left and right sides a ν ~ (four). The right direction Υ疋 is located at the workpiece transfer unit 30 Τ 2 2 t / Γ 盘 移 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 When processing the tray to the height of the tray, the tray is Τ2, and the Bund, *, and the persimmons are used to handle the processing. The processing is used to transfer the trays to the predetermined position. The lift mechanism 24 holds (receives) the top of the platform 21 on the top. The workpiece transfer unit 3 is opened as shown in the redundancy diagram, and is provided in the transfer area a, the 7th to the second, and is guided by the X-extension in the spears not arranged in the left-right direction Y. Mechanism 3: The upper side of the field A2 is freely moved in the front-rear direction X and supported by the upper and lower J guide mechanisms 31 so as to be able to be provided to the elevating mechanism 32 in the front and rear. 2 lifting and lowering mechanism 32, and into. 'Bottom... Holds the holding head 33 of the workpiece, etc. 318739 15 200821596 - Here, the guiding mechanism 31 can be performed by using a stepping motor or a servo motor that guides the lifting mechanism 32 from the front side to the front and rear direction X. = (four) drive source 'by the drive source to drive the rotating ball screw (lead screw), and the lifting mechanism 32 is screwed into the ball screw nut structure of the transfer screw mechanism, etc., the lifting mechanism 32 can A drive source that can be position-controlled by a stepping motor or a motor, a ball screw (lead screw) that is rotated by a drive source, and a screw that is placed in the lift mechanism 32 are screwed into the roll, and the bead screw A transfer screw mechanism composed of a nut, or a hydraulic or air pressure type telescopic actuator, etc., the holding head 33 can use a suction pad for sucking a workpiece or a holding piece for holding a workpiece from both sides. . That is, when the work shift is performed between the universal tray T1 and the processing tray T2, the elevating mechanism 32 is positioned at the front and rear by the guide mechanism 31 to be positioned at the forcible position, and is lowered at the position. One piece is held by the head 33, and then risen by one more time, and then the guide mechanism γ stands two, and the transfer tray Τ2 or the universal tray η is placed directly above the T2a and Tla. T2a, Tla. The process of storing the unprocessed workpiece from the universal pan T1 to the processing time when the money is lowered and the workpiece is placed on the top, or the processing for completing the predetermined process in the processing area A4, the processing tray T2 When transferring to the universal tray T1, the universal tray holding unit 1 and the processing σ - the spacing will be moved with the predetermined receipt and field, and moved in the left and right direction Y, and then positioned in the predetermined removal.
㈣，收谷位置，而且工件移載單元30會朝前後方向X 夕，在萬用托盤T1與處理用托盤T2之間搬運工件，並 318739 16 200821596 S'^下:：Z移動而取出工件或收容工件，而可在萬用 =二=㈣盤T2之間轉移工件。如上所述，由於 方向；：=凡1〇及處理用托盤保持單元20會朝左右 右方Λ γ ^ ，使作為取出或收容對象的工件經常在左 朝Γ於工件移載單元3G的下方，而且卫件移載單 ' ” / 方向z及前後方向χ移動而轉移工件，所以(4), the position of the valley, and the workpiece transfer unit 30 will move the workpiece between the universal tray T1 and the processing tray T2 in the forward and backward direction X, and 318739 16 200821596 S'^::Z moves to take out the workpiece or The workpiece is accommodated, and the workpiece can be transferred between the universal = two = (four) disk T2. As described above, since the direction;:=1〇 and the processing tray holding unit 20 will be 朝γ to the right and left, the workpiece to be taken out or housed is often placed on the left side below the workpiece transfer unit 3G, Moreover, the guard transfer sheet ' ′ / direction z and the front and rear direction χ move to transfer the workpiece, so
從托盤ΤΙ、T2之收灾邱T1 什所U .面内移動，因此可使:件二出：工件只會在xz 單元2〇、及工件/截Λ 曰幻0、處理用托盤保持 内之-方向(左右方白、0:於疋知用各自只會朝平面 構，因此機械誤差^或，^了方：^移動的一個移動機 果，在萬用托 生可防止工件之取出或收容時的保持失誤： 收谷失决的發生，且可正確地轉移工件。 ::’由於在移载區域…仏分別朝左右方 而§又有兩個工件移载單元30,因此在萬用托盤 == 來!容未處理工件的未處理用的萬用托二 由一：处理凡畢：件的處理完畢用的萬用托盤Π時，可藉 #固工件移載早元3〇將未處理工件從未處理用的萬用 轉移至處理用托盤T2，同時藉由另一個工 ^萬2處理完畢工件從處理用托盤Τ2轉移至處理完畢 處理S 。亦即’可同時進行未處理工件之轉移及 (凡工件之轉移，因此比起個別進行轉移的情形，可 318739 17 200821596 縮短整體進行轉移所需的時間。 在處理用托盤移送區 ^ 配置有處理用托盤移送單元':疋如弟1圖、弟3圖所示， 處理用托盤移送 疋如第以圖、第犯圖、第9 41 纟以下構件等所形成：朝左右方向Y伸長的導軌 其e可在導執41上自由移動的可動基座42; 1立在可動 =42而叹置的升降機構43;藉由升降機構α而朝上下 燼2升卜的升降構彳44 ;設在升降構件44上的旋轉機 :;設在旋轉機構45上的架台46;設在咖 广框4 7 ;設在架“ 6上的滑動機構* 8 ; 處理用托盤Τ2的握持構件49。 木$至持 在此V動基座42是藉由内建的驅動機構而沿著導執 ，左右方向γ移動’使所保持的處理用托盤Τ2或未保 =處理用托盤Τ2的架台^位在移載區域㈣移載區 5 再者，在處理區域Α4包含複數個處理區域時則定 位在對應的處理區域。 升降機構43是為了使處理用托盤了2位於所希望的高 :而將升降構件44定位在上下方向ζ的所希望高度的機 ”可使用油壓式或空壓式的伸縮致動器、移送螺桿機構 寺。旋轉機構45是為了調整處理用托盤了2在水平面（χγ :)内之方向而使其旋轉的機構，可使用馬達及歯輪機構 寺。一對導框47是用來保持處理用托盤Τ2，並且從兩侧 夾入而加以限制而使其定位。滑動機構48是為了進行處理 用托盤Τ2之交付及接收，而可滑動（伸長）至移載區域μ、 318739 18 200821596 A2(處理用托盤保持單元2〇)的區域或是處理區域a4的區 域。握持構件49是與滑動機構48 —體移動而握持並保持 處理用托盤T2的緣部。 亦即，由於此處理用托盤移送單元4 〇是在處理用托盤 保持單元20與處理區域A4之間移送處理用托盤T2，因此 可在工件的轉移步驟之後順利轉移至處理步驟，且可使處 理完畢工件順利返回處理用托盤保持單元2〇。此外，在處 理區域A4位於複數個部位時，可在適當選擇的處理區域與 免里用托盤保持單元2 〇之間順利移送處理用托盤η。 —在處理區域A4 ’朝左右方向γ排列而設有作為對於收 谷在處理用托盤T2的工件施以預定檢查的複數個處理區 域的t查區域Α4,、Α4，，。在檢查區域Α4,、Α4,，，如果工件 為半導體晶#，料配£絲進行其導通檢查或動作檢查 等的各種檢查單元。 在萬用托盤供應區域Α5是如第1圖至第3圖所示，配 置有複數個（在此為三個）萬用托盤供應單元5〇。 萬用托盤供應單元50是如® 10Α圖至# i〇c圖所示， 由:下構件等所形成：萬用托盤Τ1載置用的平台51;使 千台51朝上下方向2升降的升降機構52;以及具有在上 =i、應位置以夾住萬用托盤η之方式加以保持的保持 片53a的保持機構53。 =，在萬用托盤供應單元50為了搬入萬用托盤T卜 Γ。取下古而的平台51的上方朝水平方向拉入有輸送帶 318739 19 200821596 =，升降機構52是使平台51適當升降而定位在預 1、^位置’該位置例如為將萬用托盤τι供應至後述萬 用托盤移載單亓sn & “王俊述萬 應待機位置、^'Λ f微下降的供 .退避位置等，可:Π肖微下降並且為了搬入而退避的 肩機構等。：=厂=空厂堅式的伸縮致動器、移送 51及升降機槿π : 保持片咖保持藉由平台 ^ 而定位於供應位置的萬用托盤Τ1，而可 二下降(保持在平台51的萬用托盤η中最上 &的4用托盤τι之脫離）。 搬入:二=二:!退避位置的狀態下’由輸送帶c 會保持萬用托盤‘=升降機構52會動作，平台” 定位於供應位置。、’升，俾使最上段的萬用托盤Τ1 機位置而待機。 4用托盤T1的狀態下降至供應待 =托盤T1時，升降機構52會動作，平台5=: 應位ί$的萬用托盤T1中最上段的萬用托盤於： 1而且平構Λ3會㈣並保持最上段的萬用托盤 下降至供應待機位曰置而;Γ持有其餘萬用托盤τι的狀態 成位置而待機。在萬用托盤供應單元50合反 318739 20 200821596 覆上述動作。 在此萬用托盤供應區域A ^ 留一 飞A5配置有三個萬用托盤供應 心因此是例如由兩個萬用托盤供應單元5〇供應收 理工件的萬用托盤T1，—個萬用乾盤 -萬用托盤丁！而構成 件而供應未收容有工件的空的 此^ ’萬用㈣供應單元5()可依處理而增減 增加到三^上，另_：“ 7將4用托盤供應單元50 ,,^ 方面，在工件的替換處理減少或是 萬用托盤供應單元50故障時， A5切離，而減少萬用杯^ 一 两㈣“、應&域 萬用托盤供應單元5〇的台數。在此，萬 用托盤供應單元5〇的捭请可分土㈤- 禹 進行。 ）曰減了依未圖示的開關等的指示來 在萬用托盤回收區域A6是如第1圖至第3圖 置有數個(在此為四個)萬用托盤回收單元60。From the tray ΤΙ, T2 to the disaster, Qiu T1, U. In the plane, so that: the second out: the workpiece will only be in the xz unit 2 〇, and the workpiece / paraplegic 曰 0 0, processing tray remains - Direction (left and right white, 0: 疋 用 用 用 各自 各自 各自 各自 各自 各自 各自 机械 机械 机械 机械 机械 机械 机械 机械 机械 机械 机械 机械 机械 机械 机械 机械 机械 机械 机械 机械 机械 机械 机械 机械 机械 机械 机械 机械 机械 机械 机械 机械 机械 机械The maintenance error: the occurrence of the valley failure and the correct transfer of the workpiece. :: 'Because there are two workpiece transfer units 30 in the transfer area... 朝 respectively to the left and right, so in the universal tray = = Come on! Unprocessed universal versatile for unprocessed workpieces: one for processing: When the versatile pallet for processing of the parts is finished, you can use the #solid workpiece to transfer the early 3 〇 unprocessed workpiece The unused utility is transferred to the processing tray T2, and the workpiece is transferred from the processing tray Τ2 to the processed processing S by another processing. That is, the transfer of the unprocessed workpiece can be simultaneously performed. (Where the transfer of the workpiece is made, it is 318739 17 200 compared to the case of individual transfer. 821596 Shorten the time required for the overall transfer. In the processing tray transfer area ^ Configure the processing tray transfer unit': 疋如弟1图,弟三图, processing tray transfer such as the first picture, the first crime The figure, the ninth and the fourth members are formed by: a guide rail that is elongated in the left-right direction Y, a movable base 42 that can e move freely on the guide 41; 1 a lifting mechanism 43 that stands at the movable = 42 and sighs; a lifting mechanism 44 that is lifted up and down by the lifting mechanism α; a rotating machine provided on the lifting member 44; a frame 46 provided on the rotating mechanism 45; Sliding mechanism 6 on 6; Handling member 49 for processing tray 。 2. Wood 至 to hold the V-moving pedestal 42 along the guide by the built-in driving mechanism, moving in the left-right direction γ The holding tray Τ2 or the turret of the processing tray Τ2 is held in the transfer area (4) transfer area 5. Further, when the processing area Α4 includes a plurality of processing areas, it is positioned in the corresponding processing area. 43 is for the processing tray 2 to be at a desired height: the lifting member 44 is positioned at The machine of the desired height in the up-and-down direction can be used as a hydraulic or air-pressure type telescopic actuator or a transfer screw mechanism. The rotation mechanism 45 is for adjusting the direction of the processing tray 2 in the horizontal plane (χγ:). For the mechanism for rotating the motor, the motor and the wheel mechanism can be used. The pair of guide frames 47 are for holding the processing tray 2 and are restrained from being positioned by being sandwiched from both sides. The sliding mechanism 48 is for performing The processing tray Τ2 is delivered and received, and is slidable (elongated) to the area of the transfer area μ, 318739 18 200821596 A2 (processing tray holding unit 2 〇) or the area of the processing area a4. The grip member 49 is an edge portion that is moved integrally with the slide mechanism 48 to hold and hold the processing tray T2. That is, since the processing tray transfer unit 4 transfers the processing tray T2 between the processing tray holding unit 20 and the processing area A4, it can be smoothly transferred to the processing step after the workpiece transfer step, and the processing can be performed. The finished workpiece is smoothly returned to the processing tray holding unit 2〇. Further, when the processing area A4 is located at a plurality of locations, the processing tray η can be smoothly transferred between the appropriately selected processing area and the free tray holding unit 2A. - The processing area A4' is arranged in the left-right direction γ, and the t-check area Α4, Α4, which is a plurality of processing areas for performing predetermined inspection on the workpiece of the processing tray T2, is provided. In the inspection area Α4, Α4,, if the workpiece is a semiconductor crystal #, the material is subjected to various inspection units such as conduction inspection or operation inspection. In the universal tray supply area Α5, as shown in Figs. 1 to 3, a plurality of (here, three) versatile tray supply units 5 are disposed. The versatile tray supply unit 50 is formed by a lower member or the like as shown in the figure of Fig. 10: a platform 51 for mounting a universal tray Τ1, and a lifting and lowering of the plurality of trays 51 in the up and down direction 2 The mechanism 52; and the holding mechanism 53 having the holding piece 53a held at the upper position and at the position of the universal tray η. =, in the universal tray supply unit 50, in order to carry into the universal tray T. The upper part of the platform 51 is removed and pulled in the horizontal direction. The conveyor belt 318739 19 200821596 =, the lifting mechanism 52 is to position the platform 51 appropriately and to be positioned at the position of the pre-1, ^ position, for example, to supply the universal tray τι To the following, the universal pallet transfer unit 亓n & "Wang Junshu's standby position, ^'Λ f micro-drop supply, retraction position, etc., can be: a shoulder mechanism that is slightly lowered and retracted for loading. Factory = empty factory-type telescopic actuator, transfer 51 and lift 槿 π: Keep the tablet maintained by the platform ^ in the supply position of the universal pallet Τ1, and can be lowered (maintained on the platform 51 for universal use) The uppermost & 4 of the tray η is separated by the tray τι.) Loading: 2 = 2: In the state of the retracted position, 'the conveyor belt c will hold the universal tray' = the lifting mechanism 52 will operate, and the platform will be located at the supply position. , 'L', let the top multi-purpose tray Τ 1 machine position and stand by. 4 When the state of the tray T1 is lowered to the supply waiting = tray T1, the lifting mechanism 52 will operate, and the platform 5 =: the uppermost universal tray of the universal tray T1 of the position ί$ is: 1 and the flat structure 会 3 will (4) And keeping the uppermost universal tray down to the supply standby position; and holding the remaining multi-purpose tray τι in a position to stand by. The universal tray supply unit 50 is reversed 318739 20 200821596. In this universal tray supply area A ^ leave one fly A5 is configured with three universal tray supply cores, thus for example, a universal tray T1 for supplying the processed workpieces by two universal tray supply units 5, a universal dry tray - Universal tray Ding! And the omnipotent (four) supply unit 5() which supplies the vacant part without supplying the workpiece can be increased or decreased according to the processing to be added to the three s, and the other _: "7 will be used for the tray supply unit 50, ^ On the other hand, when the replacement processing of the workpiece is reduced or the universal tray supply unit 50 is faulty, the A5 is cut away, and the number of the universal cups is reduced by one or two (four) ", and the number of the universal tray supply units 5". Here, the request for the universal tray supply unit 5〇 can be divided into soil (5)-禹. The instruction of the switch or the like (not shown) is reduced. In the universal tray collection area A6, a plurality of (here, four) universal tray collecting units 60 are provided as shown in Figs. 1 to 3 .
萬用托盤回收單元6〇是如第1〇A :用托盤供應單元50相同的構成，並且 疋、Λ下構件寺所形成：萬用托盤T1載置用的平台61 ; 使平D 61朝上下方向2升降的升降機構62;呈 的回收位置以夾住萬用托盤T1之方式加 的 63a的保持機構63。 于〕保持片 托二且在t萬用扼盤回收單元6〇,為了搬出重疊的萬用 向拉入有輸送帶C。 置朝水平方 318739 2】 200821596 在此，升降機構62是使平台61適當升降而定位在預 1的高度位置，該位置例如為將萬用托盤T1從後述萬用托 盤移載單元80回收的回收位置、比回收位置稍微下降的回 收待機位置、比輸送帶c下降並且為了搬出而退避的退避 -位置等’可使用油壓式或空壓式的伸縮致動器 •機構等。保持機構63是以保持片63a保持藉由平台6 = 升：機構62而定位於回收位置的萬用托盤T1，而可實現 U:上升(保持在平台61的萬用托盤τι中最上段的 萬用托盤T1之接合）。 亦即，當後述萬用托盤移載單元8〇使萬用托般T1 ;;於回收位置時，握持機構⑻會接收而保持該萬:托盤 疊的機中構心:=，平台61會上升並且使重 收位置的萬用托"T 用托盤T1接合在保持於回 6“㈣狀態 加以保持，同時解除藉由握持機構 接著，升降機構62會動作，平台61會以 托盤n的狀態下降至回收待機位置而待機。、、 -交=持:=T1再度從後述萬用托盤移載單元 用托盤丁卜並曰,平台61會上升而保持所握持的萬 61會再伴^除藉由握持機構63的握持狀態，平台 置而待m ,用托盤T1的狀態下降至回收待機位 接用把盤回收單元6〇中會反覆上述動作。 田用托盤τι重疊至預定數量時，平台6會下 318739 22 200821596 =至=置，並將所保持的萬用托盤T!交給輸送帶c， 輸运▼(：會搬出萬用托盤T1。 Τ :此萬用托盤回收區域Α6配置有四個萬用托盤回收 早兀60，因此是例如由兩個萬用托盤回 -容有處理完畢工件中毅預定檢查的良品回收收 11’由其他兩個萬用托盤回收單元60回收收容有用2盤 工件中未滿足預定檢查的瑕疵品 ：：理元畢 忐。0·从^ 1干的萬用托盤Τ1而構 成。此外，萬用托盤回收單元60亦 稱 的操作可依未圖示的開關等的指示來=理㈣減’增減 置有盤待機區域Α7是如第1圖及第2圖所示，配 置有載置平台70。 …載置平台7G是在左右方向，配置在萬用托盤供庫 IS Μ個與Ϊ用托盤回收單元6〇之間，且可載置複數個(在 此為二個）萬用托盤Τ1而使其待機。 如讀述，藉由設置萬用托盤待機區域八7，在用來收 :处理疋畢工件(良品或瑕疵品工件)的萬用托盤η尚未 件裝滿時’可將該萬用托盤τι暫時載置於載置平： ^而使其待機。另外’在有要處理不同種類之工件的頓 Γ寺時，可使先進行的萬用托盤了 1暫時載置於載置平台 而使其待機，再者，將供應至萬用托盤保持單元^的 =用托盤tu從萬用托盤保持單元1G回收的萬用托㈣ 白時載置於載置平台7〇而使其待機，並且調整供應時序或 回收時序。 在萬用托盤供應區域A5、萬用托盤待機區域A7、萬用 318739 23 200821596 •托盤回收區域A6是如第1圖及第2圖所示，配置 托盤T1朝上下方向Z另产士十二v 配置有使萬用 元80。 I右方向¥移動的萬用托盤移载單 萬用托盤移載單元8〇是如第11A圖至弟 _ ‘由用來使萬用牦盤供庫卩衿Α ς访 圖所不’ 應£域A5、萬用托盤待機區域A7、万 收，域A6之上方朝左右方向γ 81、沿者導框8 ]朝+ 士 +丄” 工右方向γ移動的滑動機 在滑動機構82而朝上7#&αα 饨構82、保持 广“個升其= 來保持萬用托盤了1的保持片^的保持機㈣等所开有用 在此，滑動機構δ2是使升降機構δ3沿著導框以成動 至左右方向Υ的所希望位置者，可使私動 伸縮致動器、移送# _ ^ / i式或二壓式的 杯機構等。升降機構83是使保持機椹 屋式夕的移的所希望位置者’可使用油麼式或空 其=從=:，構η 乃料a攸兩側夾住萬用托盤Τ1。The versatile tray recovery unit 6 is the same as the first tray A: the tray supply unit 50, and is formed by the cymbal and the squatting member temple: the platform 61 for mounting the universal tray T1; The elevating mechanism 62 that moves up and down in the direction 2; the holding position 63 of the 63a that is added to the multi-purpose tray T1 in the recovery position. In the case of holding the tray 2 and the tray recovery unit 6 is used, the conveyor belt C is pulled in order to carry out the overlapping universal use. Horizontally positioned 318739 2] 200821596 Here, the elevating mechanism 62 is positioned such that the platform 61 is appropriately raised and lowered and positioned at a predetermined height, which is, for example, a recovery of the universal tray T1 from the multi-purpose tray transfer unit 80 described later. A hydraulic or air-pressure type telescopic actuator/mechanism or the like can be used for the position, the recovery standby position which is slightly lower than the recovery position, the retraction-position which is lower than the conveyor belt c, and which is retracted for carrying out. The holding mechanism 63 is a universal tray T1 in which the holding piece 63a is held at the recovery position by the platform 6 = liter: mechanism 62, and U: ascending (maintained in the uppermost section of the universal tray τ1 of the platform 61) Engaged with the tray T1). That is, when the universal tray transfer unit 8 is described later, the universal tray T1 is used; in the recovery position, the holding mechanism (8) receives and maintains the 10,000: tray stacking machine center: =, the platform 61 will The lifter and the retractable position of the universal tray&T;T are engaged with the tray T1 and held in the back state of "6" to be held while being released by the gripping mechanism. Then, the lifting mechanism 62 is actuated, and the platform 61 is in the tray n. The state is lowered to the recovery standby position and is on standby. -, -========================================================================================= Except for the grip state of the grip mechanism 63, the platform is set to wait for m, and the state of the tray T1 is lowered to the recovery standby position. The disc recovery unit 6 is reversed. The field tray τι is overlapped to a predetermined number. When the platform 6 will be 318739 22 200821596 = to = set, and the retained universal tray T! is delivered to the conveyor belt c, transport ▼ (: will move out of the universal tray T1. Τ: this universal pallet recycling area Α6 is equipped with four universal pallets to recover early 60, so it is for example, by two universal The reel-receiving product that has been processed and finished in the workpiece is scheduled to be inspected. 11' is recovered by the other two universal pallet recycling units 60. The defective product that does not meet the predetermined inspection in the two-disc workpiece is: The configuration of the universal tray Τ1 is also provided by the versatile tray Τ1. The operation of the versatile tray recovery unit 60 can be determined by the instruction of a switch or the like (not shown). As shown in Fig. 1 and Fig. 2, the mounting platform 70 is disposed. The mounting platform 7G is disposed between the universal tray storage unit IS and the storage tray collecting unit 6 in the left-right direction. A plurality of (here, two) universal pallets Τ1 can be placed and placed in standby. As explained, by setting the standby area of the universal pallet 八7, it is used for receiving: processing the workpiece (good or defective) When the universal tray η of the workpiece) is not full, 'the universal tray τι can be temporarily placed on the mounting level: ^ and it is made to stand by. In addition, 'When there is a temple to handle different kinds of workpieces, The first universal tray 1 can be temporarily placed on the mounting platform to stand by. The universal tray (four) that is supplied to the universal tray holding unit ^ from the universal tray holding unit 1G is placed on the mounting platform 7 白 and is placed on standby, and the supply timing or recycling is adjusted. Timing. In the universal tray supply area A5, the universal tray standby area A7, the universal 318739 23 200821596 • The tray recovery area A6 is as shown in Fig. 1 and Fig. 2, and the tray T1 is placed in the up and down direction Z. The second v configuration has a universal unit 80. I move the universal tray to move the universal tray to transfer the single-purpose tray transfer unit 8〇 as shown in Figure 11A to the younger _ 'used to make the universal tray available for storage. ς ς 图 所 应 域 域 域 域 域 域 域 域 域 域 域 域 域 域 域 域 域 域 域 域 域 域 域 域 域 域 域 域 域 域 域 域 域 域 域 域 域 域 域 域 域 域 域 域 域 域 域 域 域 域The sliding machine is used in the sliding mechanism 82, and the holding mechanism (four) which holds the holding piece of the universal tray 1 in the upward direction of the 7#&αα structure 82, and the sliding mechanism is used here. Δ2 is a desired position for causing the lifting mechanism δ3 to move along the guide frame to the left and right direction, and the private movement can be extended. Retract actuator, transfer # _ ^ / i type or two-pressure cup mechanism. The elevating mechanism 83 is a desired position for moving the holder in the house. The oil can be used or the air is empty. = = =, the structure η is a.
亦即，將萬用托般T1 p m 1 A 萬用托盤保持單元二二 2供應單元50移載至 單元10移載至萬用把： 托盤T1從萬用托盤保持 從萬用托盤供岸單元5::收早兀6°時、使萬用托盤T1 時、使萬用托盤萬用托般伴持=枝，7待機 盤待機區域们寺機時，保10暫時在萬用把That is, the universal tray T1 pm 1 A universal tray holding unit 22 storage unit 50 is transferred to the unit 10 for transfer to the universal handle: the tray T1 is held from the universal tray from the universal tray supply unit 5 :: When it is 6° early, when the tray T1 is used, and the universal tray is used for the general purpose, the stick is used, and when the standby unit is in the standby area, the 10 is temporarily used in the universal machine.
機構84保持萬用托"€ 4移載單元80會利用保持 干符萬用托盤T而上升，並且在移動至，右方& v 的預定位置之後下降 I牙夕動至左右方向Y …、臭在所要移載的位置中解除保持 318739 24 200821596 機構84而移载萬用托盤T1。 如上所述，由於萬用托盤移載單元8〇會在γζ面内朝 左右方向Υ及上下方向ζ移動而使萬用托盤η移動，因此 可使供應萬用托盤T1的移動行程（行程長度）或回收的移 動订耘（仃路長度）縮短，因此可使裝置精緻化。 而且帛用托盤供應單元5〇中的萬用托盤T1的取 =、萬^托盤保持單元1()中的載置位置（平台n移動至 ::口：： Γ立置)、萬用托盤回收單元60中的萬用托盤τι 二=:置、以及使萬用托盤T1暫時待機的待機平台70 中的待機位置係排列在左右方向Μ大致直線上。 構是置萬移載單元8°在平面内移動的晴 可因=朝左右方向〜動的-個移動機構即 為n 私動機構的機械誤差。因此，可使萬用托 盤移载單元80高精確 J便4用托 用托盤τι從預定：詈ίΓ 預定位置’且可將萬 預定位置 置取出，並且確實地载置於所要移載的 先，由=:上述工件搬運裝置的整體動作加以說明，首 先由4用托盤供應單元5 托盤Τ!及未收容有工件；收:有未處理工件的萬用 车夕番ησ 工9萬用托盤Τ 1時，麄用紅Μ 移载早元8〇會保持這 τ 4用托盔 至前方位置然後移載至已移動 刀钽罝的萬用托盤保持單元1〇。 接著，萬用托盤保持單元 ^ 7030進行移載的後方位置。而且曰：至稭由工件移載單 20係保持著收容有在前牛-卢 處理用托盤保持單元 有在_處理完畢之工件的處理用托 3】8739 200821596 接著，一個工件移載單元3Q合 處理區域A4處理完畢的工件M 5用托盤T2將在 一個工件=件轉移至萬用托盤Π，同時另 们工件私载早兀30會將未處理 .至處理用托盤Τ2。 件攸萬用托盤Τ1轉移 . 在此，將處理完畢工件轉移至黛田^ ^ -察的良品會被分類在良品^ 』T1時’滿足檢 瑕疵品會被分類在瑕瘀n m 而未滿足;k查的 絲瑕U相托盤τι而被收容。 在上述移载動作中，由 用乾財m/ 托盤保持單元1G及處理 用托盤保持早兀20是配合各個預定 方向Y適當移動，使作為取出 接而朝左右 V 30 3〇會朝上下方向z及前後方向以多動 件私载早兀 Γ速移動，且可達成轉移動作的高速化。 用托Γ二，移t單元30結束未處理工件的轉移時，處理 现私k早兀40會將處理用托盤保持單元 用托盤T2移送至處理F上的處理 Α4”）。 處理£域^(檢查區域Α4,或檢查區域 ，，者’在處理區域Α4結束預定的檢查時理 移送單元4 0會俘拉用氺+ 托Jot το 曰保持用來收容處理完畢工件的處理 72而移送至處理用保持單元2〇。 瘥 由工件移载單元3G將處理完畢工件移載 Τ1時，葸用杠妒奴4士 口。— 戰主萬用托盤 托凰保持早兀10會移動至前方位置， 盤移載單元80會保持扯 萬用托 保持D亥萬用托盤T1，然後移载至萬用托 318739 26 200821596 盤回收單元60。 萬用托盤回收單元60係在收容有處理完畢工件的萬 用托盤η只要重4至駭量時，這些萬用托㈣就會經 由輸送帶C被搬出。 • 在此’未由處理完畢工件裝滿的萬用托盤T1亦可在交 萬用托盤回收單元6〇之前，使其暫時在萬用托盤待機區 j A7待機，然後再度移送至萬用托盤保持單元丨〇上，在 完全由工件裝滿之後再移送至萬用托盤回收單元6〇。 此外’在有進行不同種類工件之處理的中斷指令時， 會將其他處理用托盤了2供應至處理用托盤保持單元別 於萬用托盤保持單元10上的既存萬用把盤 對::二盤待機區域Α7待機。接著，會將收容有 :應於“之種類的工件的萬用牦盤T1或是未收容有工 件的新的空的萬用托#T1供應至萬用托盤保持單元10 i已==樣的移載及處理。另外’亦可僅使用來收 如的ί用托盤T1在待機區域A7待機。 尚未”广用來收谷處理完畢工件的萬用托盤T1 二未衣柄’可使該萬用托盤T1暫時在萬用托盤待 A 7待機，而在有處理 、σ或 、隹> 2 錢理不同種類工件之中斷指令時，可使弈 進仃的萬用托盤Τ1暫蚌扁笪田k # /士， 便光 ^ 皙π在禺用托盤待機區域A7待機，再 從萬用托盤保持2 = 10的萬用托盤^或是 早兀1 0回收的萬用托盤τ】 盐待機區域A7待機，而哨敕徂+ 萬用托 戍而凋整供應時序或回收時序。 再者，在上述工件搬運裝置中，由於由萬用托盤保持 3]8739 27 200821596 •早：1〇、處理托盤保持單元20、及兩個工件… 所構成的工件移载機構是朝乂 私载早凡30 因此可在更短的時間 工 向Y排列而設有兩個， 體之工件處理所需的二，工件的轉移，且可縮短整 .^，抽祕 且可使生產性提升。 而且 根據上述構成，者π + .在兩個工件移载機構分別會:生時’ .件移載機構的未完成之羞田4；^’就會將保持在-個工 、 成之萬用托盤Τ1移藝$黑_ Jr， 载機構，而將工件收 一個工件移 降了你i A 6 (轉私）至一個萬用托盤τι。此栌 "為收谷對象的一個萬用托盤”以外 ：’ 1會使其暫時移動至待機區域Α7。 /、萬用托 收容=:的; ，未完成二用及用來收一 前方位置。 會移動至供應或回收萬用托盤丁！的 接著，萬用托盤移载單元80合 個萬用托盤保持單元10之 θ Λ谷保持在一 盤丁1，秋德f哉 又'此口口工件的未完成之萬用托 1然㈣载至待機區域A7(載置平台7())。 然後’萬用托盤移載單元8〇會取 —個萬用托盤保持單幻〇 呆持在另 盤τι，然後移載至牛未完成之萬用托 义々少戟王個萬用托盤俾牲 (保持有用來收容瑕疲品牛二成 、載置位置 置)。因此，在-個萬用托用托盤T1的位 I保持早7L 10將會保持兩個用 3J8739 28 200821596 來收容良品工件的去$ & 用托盤保持單幻G與工件移载單^；；1·’1^此—個萬 工件從—個萬 觀早7^ 30的連動動作，可使 .收容部Tla。接著〆另夕到另一個萬用托盤T1之空的 .裝滿時，便結:此 ' =的_在未完成之萬:二任未_'=: ，凡王裝滿時、或是在已沒有作為 由工件 此轉移6成士 , 、夕、子象的工件時完成。 裝滿的萬用托心移動至前 ，=0:使由工件 80會將此萬用托般T1 萬用托盤移載單元 托盤T1私载至萬用把盤回收單元60。 工件==來收容使其在待機區待機之瑕症品 仟的禾几成之萬用托盤T1會由 待機區域”取出，s托】移载早元8〇從 ίο的截番乂 载另一個萬用托盤保持單元 、托盤Τ1的位置）。卜，户ρ良口口工件的未完成之萬用 將合彳 在另一個萬用托盤保持單元】〇 的未完成之萬用托盤 方位置，另另2萬用托盤保持單元10會移動至後 一 猎由此另一個4用托盤保持單元10與工件 70的連動動作，可使工件從一個萬用托般Ή ^ 早 一個萬用托般Tly〜"萬用托盤Ti轉移到另 移卜工Α ^收谷部仏。之後的動作由於盥_ 私良…牛的情形相同，因此省略其說明。 4 木中载置在各個萬用托盤保持單元1〇，並藉由 318739 29 200821596 ^ —、私载早元30的連動動作來進一 使未完成之萬用托盤τι形成一個，仃工件的轉移，可 ，且可有效率地進行處 理 此外，在此是使並非處理對 ‘至待機區域A7而使其待機的情形把盤η暫時移動 •法，由於萬用托盤移载單元δ0 :亚不限定於此方 、此亦可取代待機區域义7，而由一 ^呆持機構84,因 ，並非處理對象的萬用托盤η 以寺機構84暫時保持 用待機區域Α7，而是大 用、=幾°另外，藉由不使 而動作，例如在—個移載區域丄 裝滿的未完成之良品用萬用托盤T1彼此畢工件 移载區域A2則進行$ i ώ _ 軺私，在另一個 瑕疵品用萬用完畢工件褒滿的未完成之 故屁口口用萬用托盤T1彼此之轉移 取《 個萬用托盤T1的時門，曰叮古 鈿紐將工件轉移至— 第】…Γ 有效率地進行處理。 平面圖此圖實:二r:之工件㈣^ 托盤移送單元4/進^’如弟12圖所示’設有對於處理用 用托#供鹿進仃處理用托盤τ2之供應或回收的處理 用托盤供應回收單元90。 』处埋 僅供庫所1旦可措由處理用托盤供應回收單元90 理區：二處理用托盤T2。而且，在有要中止的處 收”八/域从或檢查區域Α4”）的情況下，可以僅回 ====2勢娜卿處理用托 318739 30 200821596 如上所述，根據本發明之工件搬運裝置，可達成構造 之簡化、各機構之精緻化、整個裝置之小型化、設置面積 之省工間& ι件之轉移所需的時間之縮短化等，而且對 於半導體晶片、基板、及其他電子零件等工件可有效率地 •施以試驗、檢查、測定、加工、組裳等各種處理，且可使 -生產性提升。 [產業上的利用可能性] 如上所述，本發明之工件搬運裝置只要是在對於工件 把以各種處理時’必須在萬用托盤T1與處理用托盤丁2之 間進行工件之轉移的領域，半導體製造的領域自不待古， 在〉飞車或是其零件的生產線、電子機器或是其零 線、其他機械或電子零件相關等領域也相當有用。產 【圖式簡單說明】 圖。第i圖是本發明之工件搬運裝置之一實施形態的平面 :2圖是第1圖之工件搬運裝置的正面圖。 f 3圖是第！圖之工件搬運裴置的側面圖。 弟4圖是構成第！圖之工件搬運裝置之 托盤保持單元及處理用托盤保持單元的平面圖。刀的萬用 第5圖是構成第】圖之工件_裝置之__部分 托痛持單元及處理用托盤保持單元的正面圖。 弟6圖是構成第1圖之工件搬運裝置之 托盤保持單元及處理用托盤保持單元的側面圖口。刀、用 第7A圖、第7B圖及第7C圖分別是構成^圖之工件 318739 31 200821596 搬運裝置之-部A的工件移載單 面圖。 元的平面圖 、侧面圖及正 第8A圖及第8β圖分 邱八]疋構成弟1圃您工件搬運裝置 用托盤私达早兀的平面 第9圖熹赭士铉，向. 面圖 之 件搬運裝置之—部分的處理 第9圖是構成第 用托盤移送單元的側面圖 第10A圖、第1 〇β圖及 工件搬運穿：置之 ~刀1疋構成第1圖之 Γ 置之—部分的萬用托盤供應單it及萬用杯般πThe mechanism 84 maintains the universal tray " 4 shifting unit 80 will rise by using the retaining dry multi-purpose tray T, and after moving to the right position of the right & v, the I move to the left and right direction Y ... The odor is unloaded in the position to be transferred, and the universal tray T1 is transferred by releasing the 318739 24 200821596 mechanism 84. As described above, since the universal tray transfer unit 8〇 moves in the γζ plane in the left-right direction and the up-and-down direction 而 to move the versatile tray η, the movement stroke (stroke length) of the universal tray T1 can be supplied. Or the recycled mobile order (the length of the road) is shortened, so the device can be refined. Moreover, the loading position of the universal tray T1 in the tray supply unit 5, the loading position in the tray holding unit 1 (the platform n is moved to:: port:: standing), and the universal tray is recovered. The universal tray τι2 in the unit 60 is set to and the standby position in the standby platform 70 in which the universal tray T1 is temporarily placed is arranged in a substantially straight line in the left-right direction. The structure is a shift of 8° in the plane of the 10,000-shifting unit. The moving mechanism is the mechanical error of the n-transport mechanism. Therefore, the universal tray transfer unit 80 can be made highly accurate, and the tray τι can be used to reserve the predetermined position: and the predetermined position can be taken out, and is surely placed on the first to be transferred. The following is a description of the overall operation of the above-described workpiece transfer device. First, the tray supply unit 5 is used for the tray supply unit 5, and the workpiece is not stored. The utility model includes: a bicycle with an unprocessed workpiece, an hourly ησ, a 90,000-purpose tray Τ 1 When the Μ Μ Μ 早 早 早 早 早 〇 τ τ τ τ τ τ τ τ τ τ τ τ τ τ τ τ τ τ τ τ τ τ τ τ τ τ τ τ τ τ τ Next, the universal tray holding unit ^ 7030 performs the rear position of the transfer. Furthermore, 曰: to the straw, the workpiece transfer unit 20 is held, and the processing tray for holding the workpiece in the front ox-lu processing tray holding unit is stored. 8739 200821596 Next, a workpiece transfer unit 3Q is combined. The workpiece M 5 processed in the processing area A4 is transferred to the universal tray 用 by the tray T2, and the other workpieces are not processed until the processing tray Τ2. The 攸 攸 Τ 转移 转移 转移 转移 . . . . . . 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ k Check the silk U-shaped tray τι and be contained. In the above-described transfer operation, the use of the dry m/tray holding unit 1G and the processing tray to hold the early squat 20 is appropriately moved in accordance with each predetermined direction Y, so that the left and right V 30 3 〇 will be moved up and down in the z direction. In the front-rear direction, the multi-moving member moves at an early speed and moves at an early speed, and the speed of the shifting operation can be achieved. When the shifting unit 30 ends the transfer of the unprocessed workpiece by the palletizing unit 30, the processing of the palletizing unit 40 transfers the processing tray holding unit tray T2 to the processing 处理4") on the processing F. In the inspection area Α4, or the inspection area, the person who has finished the predetermined inspection in the processing area Α4, the transfer unit 40 will hold the 氺+ 托Jot το 曰 and hold the processing 72 for accommodating the processed workpiece and transfer it to the processing. Hold unit 2〇 瘥 When the workpiece transfer unit 3G transfers the processed workpiece to Τ1, the 妒 妒 4 4 4 4 。 。 。 — — — — — — 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 The loading unit 80 will hold the D-purpose tray T1 and then transfer it to the universal tray 318739 26 200821596. The tray recovery unit 60 is used in the universal tray containing the processed workpiece. When the weight is 4 to 骇, these universal trays (4) are carried out via the conveyor belt C. • The 'universal pallet T1' which is not filled with the processed workpiece can also be used before the universal pallet recovery unit 6 Make it temporarily on the universal tray The machine area j A7 stands by, then transfers it to the universal tray holding unit ,, and then transfers it to the universal tray recovery unit 6 完全 after it is completely filled by the workpiece. In addition, 'there are interrupt instructions for processing different types of workpieces. At the same time, the other processing trays 2 are supplied to the existing multi-purpose tray pair of the processing tray holding unit other than the universal tray holding unit 10: the second tray standby area Α7 stands by. Next, it will contain: The universal tray T1 of the "type of workpiece or the new empty universal tray #T1 that does not contain the workpiece is supplied to the universal tray holding unit 10 i == sample transfer and processing. It can be used only in the tray T1 for receiving and waiting in the standby area A7. The "universal tray T1 and the second handle" that are not used for the processing of the finished workpiece can temporarily hold the universal tray T1 in the universal tray. A 7 stands by, and when there is a processing, σ or 隹 2 钱 理 理 理 不同 不同 仃 仃 仃 仃 仃 万 万 万 万 万 万 万 万 万 万 万 万 万 万 万 万 万 万 万 万 万 万 万 万 万 万 万 万 万 万 万 万π Standby in the standby area A7 of the pallet, and then protect from the universal pallet Hold the 2 = 10 universal tray ^ or the multi-purpose tray that was recovered as early as 10 τ] The salt standby area A7 stands by, while the whistle + 10,000 squats and the supply timing or recovery timing is neglected. In the above-mentioned workpiece handling device, since the workpiece pallet is held by the universal tray 3] 8739 27 200821596 • early: 1〇, the processing tray holding unit 20, and the two workpieces... It can be arranged in a shorter time to the Y direction and is provided with two, the workpiece required for the processing of the workpiece, the transfer of the workpiece, and the shortening of the whole, can be simplified and the productivity can be improved. π + . In the two workpiece transfer mechanisms will be: when the birth of '. The unloaded shame of the piece transfer mechanism 4; ^ ' will remain in the - a work, into the universal tray Τ 1 transfer art $ Black _ Jr, the carrier, and the workpiece is taken down by a workpiece, you i A 6 (transfer) to a universal tray τι. This 栌" is a universal tray for the receiving object": '1 will temporarily move it to the standby area Α7. /, universal storage containment =:;, unfinished dual use and used to receive a front position Then, it will move to supply or recycle the universal tray D! Next, the universal tray transfer unit 80 and the universal tray holding unit 10 θ Λ谷 remain in a plate D1, Qiu De f哉 and this mouth The unfinished universal pallet of the workpiece is loaded (4) to the standby area A7 (the mounting platform 7()). Then the 'universal pallet transfer unit 8〇 will take a multi-purpose tray to keep the single illusion and stay in another The tray τι, then transferred to the unfinished tycoon of the cow, the 々 々 个 个 个 个 个 个 个 个 个 个 个 个 个 个 个 个 个 个 个 个 个 个 个 个 个 个 个 个 个 个 个 个 个 个 个 个 个 个The position I of the tray T1 is kept 7L early. 10 will hold two 3J8739 28 200821596 to accommodate the good workpieces. The pallet is used to keep the single magic G and the workpiece transfer sheet ^;1·'1^ The tens of thousands of workpieces can be moved from the tens of thousands of mornings and 7^30. The accommodating part Tla. Then another eve to another universal tray T1 Empty. When it is full, it will be closed: this '= _ in the unfinished 10,000: two are not _'=:, when the king is full, or there is no transfer of 6% of the work by the workpiece, The workpiece of the eve and the child image is completed. The filled universal susceptor moves to the front, =0: so that the workpiece 80 will use the universal T1 universal tray transfer unit tray T1 to the universal disk. Recycling unit 60. Workpiece == To accommodate the sputum in the standby area, the versatile tray T1 will be taken out from the standby area, and the sotto will be transferred from the ίο Load another universal tray holding unit and the position of the tray Τ1).卜, the unfinished utility of the household ρ 口 mouth workpiece will be merged in the other uni-purpose tray holding unit 〇 未 〇 未 未 未 未 未 未 未 , , , , , , , , , , 另 另 另 另 另The hunting operation of the other 4 tray holding unit 10 and the workpiece 70 enables the workpiece to be transferred from a universal tray to a universal tray Tly~" universal tray Ti to another transfer worker Α ^Receive the valley. Since the subsequent operations are the same in the case of 盥_私良...the cow, the description thereof is omitted. 4 The wood is placed in each of the universal tray holding units 1〇, and by the interlocking action of 318739 29 200821596 ^ -, private morning 30, the unfinished universal tray τι is formed one by one, and the workpiece is transferred, In addition, the processing can be performed efficiently. In addition, in this case, the disk n is temporarily moved without the processing of the pair to the standby area A7. Since the universal tray transfer unit δ0: is not limited to In this case, the standby area can be replaced by the standby area, and the multi-purpose tray η which is not the processing object temporarily holds the standby area Α7 with the temple mechanism 84, but is used for a large amount, = several degrees. In addition, by not operating, for example, in the unloaded good multi-purpose tray T1 that is filled in one transfer area, the workpiece transfer area A2 is compared with the workpiece transfer area A2, and another product is made. The unfinished butt mouth of the finished workpiece is transferred to each other with the universal tray T1 to take the "door of the universal tray T1, and the old workpiece is transferred to the -...] Γ efficient Processing. The plan is as follows: the workpiece of the second r: the workpiece (four) ^ the tray transfer unit 4 / enter ^ ' as shown in the figure of the 12th 'provided for the treatment of the use of the support for the supply of deer 仃 processing tray τ2 supply or recycling The tray is supplied with a recycling unit 90. 』 处 仅供 仅供 仅供 仅供 仅供 仅供 仅供 仅供 仅供 仅供 仅供 仅供 处理 处理 处理 处理 处理 处理 处理 处理 处理 处理 处理 处理 处理 处理 处理Moreover, in the case where there is a charge to be suspended "eight/domain from or inspection area Α4"), it is possible to only return ====2 奈娜卿处理托 318739 30 200821596 As described above, the workpiece according to the present invention The transportation device can achieve simplification of the structure, refinement of each mechanism, miniaturization of the entire device, shortening of the time required for the transfer of the installation area, and the transfer of the time, and the semiconductor wafer, the substrate, and Other workpieces such as electronic parts can be efficiently applied to various processes such as testing, inspection, measurement, processing, and assembly, and the productivity can be improved. [Industrial Applicability] As described above, the workpiece transporting apparatus of the present invention is required to transfer the workpiece between the universal tray T1 and the processing tray 2 when various processing is performed on the workpiece. The field of semiconductor manufacturing is not uncommon, and it is also very useful in the fields of flying cars or their parts production lines, electronic machines or their neutrals, other mechanical or electronic parts. Production [Simple diagram of the diagram] Figure. Fig. i is a plan view showing an embodiment of the workpiece conveying device of the present invention. Fig. 2 is a front elevational view of the workpiece conveying device of Fig. 1. f 3 is the first! A side view of the workpiece handling device of the drawing. Brother 4 is the composition of the first! A plan view of the tray holding unit and the processing tray holding unit of the workpiece handling device of the drawing. The versatile figure of the knives Fig. 5 is a front view showing the __ portion of the __ portion of the workpiece _ the apparatus of the first drawing and the processing tray holding unit. Fig. 6 is a side view of the tray holding unit and the processing tray holding unit constituting the workpiece conveying device of Fig. 1. The knives, the 7A, 7B, and 7C are the workpieces of the 318739 31 200821596, respectively, of the workpiece transfer part of the handling device. The floor plan, side view, and the 8th and 8th figure of the yuan are divided into the 8th and 8th. The 疋 疋 圃 圃 圃 工件 工件 工件 工件 工件 工件 工件 工件 工件 工件 工件 工件 工件 工件 工件 工件 工件 工件 工件 工件 工件 工件 工件 工件 工件 工件 工件 工件 工件 工件 工件 工件Part of the handling of the conveying device Fig. 9 is a side view of the first tray transfer unit, Fig. 10A, the first 〇β diagram, and the workpiece transporting: the setting of the knife 1 疋 constitutes the first figure - part Universal tray for single and universal cups π
收早7C的側面圖、正面圖及平面圖。 I 第11Α圖、帛ι1β圖及第nc圖分 工件搬運裝置之—部分的萬 _冓成弟1圖之 面圖及平面圖。 ❹托4載早几的側面圖、正 平面二 12圖是本發明之工件搬運裝置之其他實施形態的 主要元件符號說明】 10 萬用托盤保持單元 12 導執 14 滑動件 20 處理用托盤保持單 22 導軌 24 升降機構 31 引導機構 33 保持頭 41 導軌 11 平台 13 驅動機構 15 驅動機構 21 平台 23 驅動機構 30 工件移載單元 32 升降機構 40 處理用托盤移送單元 42 可動基座 318739 200821596 43 升降機構 44 升降構件 45 旋轉機構 46 架台 47 導框 48 滑動機構 49 握持構件 50 萬用托盤供應單元 51 平台 52 升降機構 53 保持機構 53a 保持片 60 萬用托盤回收單元 61 平台 62 升降機構 63 保持機構 63a 保持片 70 載置平台 80 萬用托盤移載單元 81 導框 82 滑動機構 83 升降機構 84 保持機構 84a 保持片 90 處理用托盤供應回收單元 A1 移載區域 A2 移载區域 A3 處理用把盤移送區域 Α4 處理區域 A4， 仏查區域 Α4” k查區域 A5 萬用托盤供應區域 Α6 萬用托盤回收區域 A7 萬用托盤待機區域 C 輪送帶 ΤΙ 萬用牦盤 Tla 收容部 Τ2 處理用托盤 T2a 收容部 Λ Ο 318739Side view, front view and plan view of 7C. I The 11th drawing, the 帛ι1β drawing, and the ncth drawing are divided into a part and a plan view of the part of the workpiece handling device. The side view and the front plan view of the workpiece transfer device of the present invention are the main components and symbols. The 10 million tray holding unit 12 guide 14 the slider 20 the processing tray holding sheet 22 Guide rail 24 Lifting mechanism 31 Guide mechanism 33 Holding head 41 Guide rail 11 Platform 13 Drive mechanism 15 Drive mechanism 21 Platform 23 Drive mechanism 30 Workpiece transfer unit 32 Lifting mechanism 40 Processing tray transfer unit 42 Movable base 318739 200821596 43 Lifting mechanism 44 Lifting member 45 Rotating mechanism 46 Rack 47 Guide frame 48 Sliding mechanism 49 Grip member 50 Universal tray supply unit 51 Platform 52 Lifting mechanism 53 Holding mechanism 53a Holding sheet 60 Universal tray recovery unit 61 Platform 62 Lifting mechanism 63 Holding mechanism 63a Hold Sheet 70 Mounting platform 80 Universal pallet transfer unit 81 Guide frame 82 Slide mechanism 83 Lifting mechanism 84 Holding mechanism 84a Holding sheet 90 Processing tray supply recovery unit A1 Transfer area A2 Transfer area A3 Processing tray transfer area Α 4 Processing area A4, inspection area Domain Α4” kCheck area A5 Universal pallet supply area Α6 Universal pallet recycling area A7 Universal pallet standby area C Wheel belt ΤΙ Universal pallet Tla accommodating section Τ2 Processing tray T2a accommodating section Λ 318 318739