TWI289610B - Heated substrate support and method of fabricating same - Google Patents

Heated substrate support and method of fabricating same Download PDF

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Publication number
TWI289610B
TWI289610B TW94128097A TW94128097A TWI289610B TW I289610 B TWI289610 B TW I289610B TW 94128097 A TW94128097 A TW 94128097A TW 94128097 A TW94128097 A TW 94128097A TW I289610 B TWI289610 B TW I289610B
Authority
TW
Taiwan
Prior art keywords
trench
heat sink
substrate support
groove
aluminum
Prior art date
Application number
TW94128097A
Other languages
English (en)
Chinese (zh)
Other versions
TW200632124A (en
Inventor
Rolf A Guenther
Curtis B Hammill
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/965,601 external-priority patent/US20060075970A1/en
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of TW200632124A publication Critical patent/TW200632124A/zh
Application granted granted Critical
Publication of TWI289610B publication Critical patent/TWI289610B/zh

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Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Vapour Deposition (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
TW94128097A 2004-10-13 2005-08-17 Heated substrate support and method of fabricating same TWI289610B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/965,601 US20060075970A1 (en) 2004-10-13 2004-10-13 Heated substrate support and method of fabricating same
US11/115,575 US7674338B2 (en) 2004-10-13 2005-04-26 Heated substrate support and method of fabricating same

Publications (2)

Publication Number Publication Date
TW200632124A TW200632124A (en) 2006-09-16
TWI289610B true TWI289610B (en) 2007-11-11

Family

ID=36380726

Family Applications (1)

Application Number Title Priority Date Filing Date
TW94128097A TWI289610B (en) 2004-10-13 2005-08-17 Heated substrate support and method of fabricating same

Country Status (3)

Country Link
JP (1) JP4817791B2 (ja)
KR (1) KR20060052233A (ja)
TW (1) TWI289610B (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20200185202A1 (en) * 2018-12-07 2020-06-11 Applied Materials, Inc. Component, Method Of Manufacturing The Component, And Method Of Cleaning The Component

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009535801A (ja) * 2006-04-28 2009-10-01 ダンスン エレクトロン カンパニー リミテッド サセプタの製造方法、及び、この方法によって製造されたサセプタ
JP2023166746A (ja) * 2022-05-10 2023-11-22 東京エレクトロン株式会社 加熱装置及び基板処理装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2222192A (en) * 1938-10-12 1940-11-19 Westinghouse Electric & Mfg Co Flatiron
US2389588A (en) * 1942-10-29 1945-11-27 Westinghouse Electric Corp Heating apparatus
US2541118A (en) * 1945-04-11 1951-02-13 Birtman Electric Co Resistance element for electric irons
US5104459A (en) * 1989-11-28 1992-04-14 Atlantic Richfield Company Method of forming aluminum alloy sheet
US5844205A (en) * 1996-04-19 1998-12-01 Applied Komatsu Technology, Inc. Heated substrate support structure
US6376815B1 (en) * 1998-01-12 2002-04-23 Furukawa Electric Co., Ltd. Highly gas tight substrate holder and method of manufacturing the same
JP3345852B2 (ja) * 1998-06-18 2002-11-18 古河電気工業株式会社 半導体製造装置の基盤ホルダー及びその製造方法
JP2000243542A (ja) * 1999-02-24 2000-09-08 Nhk Spring Co Ltd ヒータユニット及びその製造方法
US6897411B2 (en) * 2002-02-11 2005-05-24 Applied Materials, Inc. Heated substrate support
US7154070B2 (en) * 2004-10-08 2006-12-26 Furukawa-Sky Aluminum Corp. Heater plate and a method for manufacturing the heater plate

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20200185202A1 (en) * 2018-12-07 2020-06-11 Applied Materials, Inc. Component, Method Of Manufacturing The Component, And Method Of Cleaning The Component
US11694879B2 (en) * 2018-12-07 2023-07-04 Applied Materials, Inc. Component, method of manufacturing the component, and method of cleaning the component

Also Published As

Publication number Publication date
JP4817791B2 (ja) 2011-11-16
TW200632124A (en) 2006-09-16
KR20060052233A (ko) 2006-05-19
JP2006111973A (ja) 2006-04-27

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MM4A Annulment or lapse of patent due to non-payment of fees