TW200632124A - Heated substrate support and method of fabricating same - Google Patents
Heated substrate support and method of fabricating sameInfo
- Publication number
- TW200632124A TW200632124A TW094128097A TW94128097A TW200632124A TW 200632124 A TW200632124 A TW 200632124A TW 094128097 A TW094128097 A TW 094128097A TW 94128097 A TW94128097 A TW 94128097A TW 200632124 A TW200632124 A TW 200632124A
- Authority
- TW
- Taiwan
- Prior art keywords
- substrate support
- heated substrate
- fabricating same
- heat sink
- groove
- Prior art date
Links
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Vapour Deposition (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
Abstract
A method and apparatus for forming a substrate support is provided herein. In one embodiment, the substrate support includes a body having a support surface and at least one groove. A heater element surrounded with a malleable heat sink is disposed in the groove. The heat sink may be comprised of one or more parts. A cap is disposed in the groove above the heat sink and has an upper surface disposed substantially flush with the support surface.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/965,601 US20060075970A1 (en) | 2004-10-13 | 2004-10-13 | Heated substrate support and method of fabricating same |
US11/115,575 US7674338B2 (en) | 2004-10-13 | 2005-04-26 | Heated substrate support and method of fabricating same |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200632124A true TW200632124A (en) | 2006-09-16 |
TWI289610B TWI289610B (en) | 2007-11-11 |
Family
ID=36380726
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW94128097A TWI289610B (en) | 2004-10-13 | 2005-08-17 | Heated substrate support and method of fabricating same |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP4817791B2 (en) |
KR (1) | KR20060052233A (en) |
TW (1) | TWI289610B (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009535801A (en) * | 2006-04-28 | 2009-10-01 | ダンスン エレクトロン カンパニー リミテッド | Manufacturing method of susceptor and susceptor manufactured by this method |
KR20210090279A (en) * | 2018-12-07 | 2021-07-19 | 어플라이드 머티어리얼스, 인코포레이티드 | Components, methods of manufacturing components, and methods of cleaning components |
JP2023166746A (en) * | 2022-05-10 | 2023-11-22 | 東京エレクトロン株式会社 | Heating device and substrate processing apparatus |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2222192A (en) * | 1938-10-12 | 1940-11-19 | Westinghouse Electric & Mfg Co | Flatiron |
US2389588A (en) * | 1942-10-29 | 1945-11-27 | Westinghouse Electric Corp | Heating apparatus |
US2541118A (en) * | 1945-04-11 | 1951-02-13 | Birtman Electric Co | Resistance element for electric irons |
US5104459A (en) * | 1989-11-28 | 1992-04-14 | Atlantic Richfield Company | Method of forming aluminum alloy sheet |
US5844205A (en) * | 1996-04-19 | 1998-12-01 | Applied Komatsu Technology, Inc. | Heated substrate support structure |
JP3345852B2 (en) * | 1998-06-18 | 2002-11-18 | 古河電気工業株式会社 | Base holder for semiconductor manufacturing apparatus and method of manufacturing the same |
US6376815B1 (en) * | 1998-01-12 | 2002-04-23 | Furukawa Electric Co., Ltd. | Highly gas tight substrate holder and method of manufacturing the same |
JP2000243542A (en) * | 1999-02-24 | 2000-09-08 | Nhk Spring Co Ltd | Heater unit and manufacture thereof |
US6897411B2 (en) * | 2002-02-11 | 2005-05-24 | Applied Materials, Inc. | Heated substrate support |
US7154070B2 (en) * | 2004-10-08 | 2006-12-26 | Furukawa-Sky Aluminum Corp. | Heater plate and a method for manufacturing the heater plate |
-
2005
- 2005-08-17 TW TW94128097A patent/TWI289610B/en not_active IP Right Cessation
- 2005-10-11 JP JP2005296615A patent/JP4817791B2/en not_active Expired - Fee Related
- 2005-10-12 KR KR1020050096102A patent/KR20060052233A/en not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
JP4817791B2 (en) | 2011-11-16 |
KR20060052233A (en) | 2006-05-19 |
TWI289610B (en) | 2007-11-11 |
JP2006111973A (en) | 2006-04-27 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |