TWI265618B - Semiconductor device and method for manufacturing same - Google Patents

Semiconductor device and method for manufacturing same

Info

Publication number
TWI265618B
TWI265618B TW094110888A TW94110888A TWI265618B TW I265618 B TWI265618 B TW I265618B TW 094110888 A TW094110888 A TW 094110888A TW 94110888 A TW94110888 A TW 94110888A TW I265618 B TWI265618 B TW I265618B
Authority
TW
Taiwan
Prior art keywords
connection section
semiconductor device
protrusion electrode
insulating resin
manufacturing same
Prior art date
Application number
TW094110888A
Other languages
English (en)
Other versions
TW200605305A (en
Inventor
Toshiharu Seko
Original Assignee
Sharp Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Kk filed Critical Sharp Kk
Publication of TW200605305A publication Critical patent/TW200605305A/zh
Application granted granted Critical
Publication of TWI265618B publication Critical patent/TWI265618B/zh

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    • H01L24/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
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    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
    • H01L21/563—Encapsulation of active face of flip-chip device, e.g. underfilling or underencapsulation of flip-chip, encapsulation preform on chip or mounting substrate
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    • H01L2224/8119—Arrangement of the bump connectors prior to mounting
    • H01L2224/81191—Arrangement of the bump connectors prior to mounting wherein the bump connectors are disposed only on the semiconductor or solid-state body
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    • H01L2224/818—Bonding techniques
    • H01L2224/81801—Soldering or alloying
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    • H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/83009—Pre-treatment of the layer connector or the bonding area
    • H01L2224/83051—Forming additional members, e.g. dam structures
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    • H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/831—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector the layer connector being supplied to the parts to be connected in the bonding apparatus
    • H01L2224/83102—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector the layer connector being supplied to the parts to be connected in the bonding apparatus using surface energy, e.g. capillary forces
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    • H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/8319—Arrangement of the layer connectors prior to mounting
    • H01L2224/83192—Arrangement of the layer connectors prior to mounting wherein the layer connectors are disposed only on another item or body to be connected to the semiconductor or solid-state body
    • H—ELECTRICITY
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    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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    • H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/838—Bonding techniques
    • H01L2224/8384—Sintering
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    • H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/838—Bonding techniques
    • H01L2224/8385—Bonding techniques using a polymer adhesive, e.g. an adhesive based on silicone, epoxy, polyimide, polyester
    • H01L2224/83851—Bonding techniques using a polymer adhesive, e.g. an adhesive based on silicone, epoxy, polyimide, polyester being an anisotropic conductive adhesive
    • H—ELECTRICITY
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    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/91—Methods for connecting semiconductor or solid state bodies including different methods provided for in two or more of groups H01L2224/80 - H01L2224/90
    • H01L2224/92—Specific sequence of method steps
    • H01L2224/921—Connecting a surface with connectors of different types
    • H01L2224/9212—Sequential connecting processes
    • H01L2224/92122—Sequential connecting processes the first connecting process involving a bump connector
    • H01L2224/92125—Sequential connecting processes the first connecting process involving a bump connector the second connecting process involving a layer connector
    • H—ELECTRICITY
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    • H01L2924/01—Chemical elements
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    • H01L2924/0105—Tin [Sn]
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    • H01L2924/01—Chemical elements
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    • H01L2924/013—Alloys
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    • H01L2924/06—Polymers
    • H01L2924/078—Adhesive characteristics other than chemical
    • H01L2924/0781—Adhesive characteristics other than chemical being an ohmic electrical conductor

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  • Engineering & Computer Science (AREA)
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  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Geometry (AREA)
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TW094110888A 2004-04-08 2005-04-06 Semiconductor device and method for manufacturing same TWI265618B (en)

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JP5076315B2 (ja) * 2005-12-26 2012-11-21 富士ゼロックス株式会社 配線基板及びフリップチップ実装構造
CN100463158C (zh) * 2006-08-21 2009-02-18 南茂科技股份有限公司 薄膜覆晶封装构造及其多层电路卷带结构
JP5018155B2 (ja) * 2007-03-16 2012-09-05 富士通セミコンダクター株式会社 配線基板、電子部品の実装構造、及び半導体装置
KR100837281B1 (ko) * 2007-05-23 2008-06-11 삼성전자주식회사 반도체 소자 패키지 및 그 제조 방법
JP2012119368A (ja) * 2010-11-29 2012-06-21 Elpida Memory Inc 半導体装置の製造方法
KR102215881B1 (ko) * 2014-02-17 2021-02-17 삼성디스플레이 주식회사 테이프 패키지 및 이를 포함하는 표시 장치
JP6507374B2 (ja) * 2016-04-21 2019-05-08 パナソニックＩｐマネジメント株式会社 部品圧着装置及び部品圧着方法

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