TW548405B - Apparatus and method for fabricating flat workpieces - Google Patents

Apparatus and method for fabricating flat workpieces Download PDF

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Publication number
TW548405B
TW548405B TW088122534A TW88122534A TW548405B TW 548405 B TW548405 B TW 548405B TW 088122534 A TW088122534 A TW 088122534A TW 88122534 A TW88122534 A TW 88122534A TW 548405 B TW548405 B TW 548405B
Authority
TW
Taiwan
Prior art keywords
patent application
scope
inspection
substrate
illumination
Prior art date
Application number
TW088122534A
Other languages
English (en)
Chinese (zh)
Inventor
Amir Noy
Doron Eidelman
Avi Gross
David Fisch
Original Assignee
Orbotech Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Orbotech Ltd filed Critical Orbotech Ltd
Application granted granted Critical
Publication of TW548405B publication Critical patent/TW548405B/zh

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J17/00—Gas-filled discharge tubes with solid cathode
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N2021/9513—Liquid crystal panels
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing, Inspecting, Measuring Of Stereoscopic Televisions And Televisions (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Liquid Crystal (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
TW088122534A 1998-11-02 1999-12-21 Apparatus and method for fabricating flat workpieces TW548405B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IL12686698A IL126866A (en) 1998-11-02 1998-11-02 Apparatus and method for fabricating flat workpieces
PCT/IL1999/000583 WO2000026645A2 (en) 1998-11-02 1999-11-02 Apparatus and method for fabricating flat workpieces

Publications (1)

Publication Number Publication Date
TW548405B true TW548405B (en) 2003-08-21

Family

ID=11072091

Family Applications (1)

Application Number Title Priority Date Filing Date
TW088122534A TW548405B (en) 1998-11-02 1999-12-21 Apparatus and method for fabricating flat workpieces

Country Status (7)

Country Link
US (1) US6822734B1 (enExample)
JP (1) JP2002529758A (enExample)
KR (1) KR100756099B1 (enExample)
AU (1) AU6487199A (enExample)
IL (1) IL126866A (enExample)
TW (1) TW548405B (enExample)
WO (1) WO2000026645A2 (enExample)

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US7355692B2 (en) 2004-03-05 2008-04-08 Orbotech Ltd System and method for inspecting electrical circuits utilizing reflective and fluorescent imagery
WO2006012551A1 (en) * 2004-07-23 2006-02-02 Nextech Solutions, Inc. Large substrate flat panel inspection system
US7999994B2 (en) 2005-02-23 2011-08-16 Pixtronix, Inc. Display apparatus and methods for manufacture thereof
US9261694B2 (en) 2005-02-23 2016-02-16 Pixtronix, Inc. Display apparatus and methods for manufacture thereof
US20070205969A1 (en) 2005-02-23 2007-09-06 Pixtronix, Incorporated Direct-view MEMS display devices and methods for generating images thereon
US8519945B2 (en) 2006-01-06 2013-08-27 Pixtronix, Inc. Circuits for controlling display apparatus
US9229222B2 (en) 2005-02-23 2016-01-05 Pixtronix, Inc. Alignment methods in fluid-filled MEMS displays
US7616368B2 (en) 2005-02-23 2009-11-10 Pixtronix, Inc. Light concentrating reflective display methods and apparatus
US8159428B2 (en) 2005-02-23 2012-04-17 Pixtronix, Inc. Display methods and apparatus
US9082353B2 (en) 2010-01-05 2015-07-14 Pixtronix, Inc. Circuits for controlling display apparatus
US9158106B2 (en) 2005-02-23 2015-10-13 Pixtronix, Inc. Display methods and apparatus
US8310442B2 (en) 2005-02-23 2012-11-13 Pixtronix, Inc. Circuits for controlling display apparatus
US8482496B2 (en) 2006-01-06 2013-07-09 Pixtronix, Inc. Circuits for controlling MEMS display apparatus on a transparent substrate
KR20060102171A (ko) * 2005-03-23 2006-09-27 삼성전자주식회사 화상 검사 장치, 상기 장치를 이용한 패널 검사 방법
JP2007088518A (ja) * 2005-09-16 2007-04-05 Nec Corp 無線通信システム
US7391510B2 (en) * 2006-01-26 2008-06-24 Orbotech Ltd System and method for inspecting patterned devices having microscopic conductors
JP2007220890A (ja) * 2006-02-16 2007-08-30 Toshiba Corp 塗布現像処理装置における基板周縁処理方法
US8526096B2 (en) 2006-02-23 2013-09-03 Pixtronix, Inc. Mechanical light modulators with stressed beams
US7567344B2 (en) * 2006-05-12 2009-07-28 Corning Incorporated Apparatus and method for characterizing defects in a transparent substrate
US9176318B2 (en) 2007-05-18 2015-11-03 Pixtronix, Inc. Methods for manufacturing fluid-filled MEMS displays
US8169679B2 (en) 2008-10-27 2012-05-01 Pixtronix, Inc. MEMS anchors
SG163442A1 (en) 2009-01-13 2010-08-30 Semiconductor Technologies & Instruments System and method for inspecting a wafer
TW201124661A (en) * 2010-01-06 2011-07-16 Masterwork Automodules Technology Corp Ltd Line illuminating device.
US9035673B2 (en) 2010-01-25 2015-05-19 Palo Alto Research Center Incorporated Method of in-process intralayer yield detection, interlayer shunt detection and correction
BR112012019383A2 (pt) 2010-02-02 2017-09-12 Pixtronix Inc Circuitos para controlar aparelho de exibição
CN102834763B (zh) 2010-02-02 2015-07-22 皮克斯特罗尼克斯公司 用于制造填充冷密封流体的显示装置的方法
SG11201407341TA (en) * 2012-05-09 2014-12-30 Seagate Technology Llc Surface features mapping
US9212900B2 (en) * 2012-08-11 2015-12-15 Seagate Technology Llc Surface features characterization
US9297751B2 (en) 2012-10-05 2016-03-29 Seagate Technology Llc Chemical characterization of surface features
US9297759B2 (en) 2012-10-05 2016-03-29 Seagate Technology Llc Classification of surface features using fluorescence
CN103728314B (zh) * 2012-10-16 2017-01-04 希捷科技有限公司 区分原生表面特征与外来表面特征的方法
US9377394B2 (en) * 2012-10-16 2016-06-28 Seagate Technology Llc Distinguishing foreign surface features from native surface features
US9217714B2 (en) 2012-12-06 2015-12-22 Seagate Technology Llc Reflective surfaces for surface features of an article
US9134552B2 (en) 2013-03-13 2015-09-15 Pixtronix, Inc. Display apparatus with narrow gap electrostatic actuators
US9217715B2 (en) 2013-05-30 2015-12-22 Seagate Technology Llc Apparatuses and methods for magnetic features of articles
US9201019B2 (en) 2013-05-30 2015-12-01 Seagate Technology Llc Article edge inspection
US9513215B2 (en) 2013-05-30 2016-12-06 Seagate Technology Llc Surface features by azimuthal angle
US9274064B2 (en) 2013-05-30 2016-03-01 Seagate Technology Llc Surface feature manager
CN103995000B (zh) * 2014-05-15 2017-01-11 京东方科技集团股份有限公司 一种显示基板的检查装置及检查系统
US10042324B2 (en) * 2015-06-30 2018-08-07 Synaptics Incorporated Optical fingerprint imaging using holography
EP3710813B1 (en) 2017-11-13 2023-09-20 Illumina, Inc. System and method for large sample analysis of thin film
JP6709206B2 (ja) * 2017-11-30 2020-06-10 株式会社Ｓｕｂａｒｕ 製造補助装置
JP7161159B2 (ja) * 2019-06-11 2022-10-26 株式会社岩佐画工舎 映像情報収集装置

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JP4591802B2 (ja) * 2000-09-13 2010-12-01 株式会社ニコン 表面検査装置および方法

Also Published As

Publication number Publication date
WO2000026645A3 (en) 2000-08-10
US6822734B1 (en) 2004-11-23
IL126866A (en) 2003-02-12
KR20010082284A (ko) 2001-08-29
KR100756099B1 (ko) 2007-09-05
IL126866A0 (en) 1999-09-22
AU6487199A (en) 2000-05-22
JP2002529758A (ja) 2002-09-10
WO2000026645A2 (en) 2000-05-11

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