KR100756099B1 - 플랫 공작물을 가공하기 위한 장치 및 방법 - Google Patents

플랫 공작물을 가공하기 위한 장치 및 방법 Download PDF

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Publication number
KR100756099B1
KR100756099B1 KR1020017005533A KR20017005533A KR100756099B1 KR 100756099 B1 KR100756099 B1 KR 100756099B1 KR 1020017005533 A KR1020017005533 A KR 1020017005533A KR 20017005533 A KR20017005533 A KR 20017005533A KR 100756099 B1 KR100756099 B1 KR 100756099B1
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South Korea
Prior art keywords
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illumination
image
substrate
preferred
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Expired - Fee Related
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KR1020017005533A
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English (en)
Korean (ko)
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KR20010082284A (ko
Inventor
도론 아이델만
데이비드 피쉬
아미르 노이
아브라함 그로스
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오르보테크 엘티디.
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J17/00—Gas-filled discharge tubes with solid cathode
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N2021/9513—Liquid crystal panels
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing, Inspecting, Measuring Of Stereoscopic Televisions And Televisions (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Liquid Crystal (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
KR1020017005533A 1998-11-02 1999-11-02 플랫 공작물을 가공하기 위한 장치 및 방법 Expired - Fee Related KR100756099B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IL12686698A IL126866A (en) 1998-11-02 1998-11-02 Apparatus and method for fabricating flat workpieces
IL126866 1998-11-02

Publications (2)

Publication Number Publication Date
KR20010082284A KR20010082284A (ko) 2001-08-29
KR100756099B1 true KR100756099B1 (ko) 2007-09-05

Family

ID=11072091

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020017005533A Expired - Fee Related KR100756099B1 (ko) 1998-11-02 1999-11-02 플랫 공작물을 가공하기 위한 장치 및 방법

Country Status (7)

Country Link
US (1) US6822734B1 (enExample)
JP (1) JP2002529758A (enExample)
KR (1) KR100756099B1 (enExample)
AU (1) AU6487199A (enExample)
IL (1) IL126866A (enExample)
TW (1) TW548405B (enExample)
WO (1) WO2000026645A2 (enExample)

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DE10319543B4 (de) * 2003-04-30 2011-03-03 Byk-Gardner Gmbh Vorrichtung und Verfahren zur Bestimmung von Oberflächeneigenschaften
US7355692B2 (en) 2004-03-05 2008-04-08 Orbotech Ltd System and method for inspecting electrical circuits utilizing reflective and fluorescent imagery
WO2006012551A1 (en) * 2004-07-23 2006-02-02 Nextech Solutions, Inc. Large substrate flat panel inspection system
US7999994B2 (en) 2005-02-23 2011-08-16 Pixtronix, Inc. Display apparatus and methods for manufacture thereof
US9261694B2 (en) 2005-02-23 2016-02-16 Pixtronix, Inc. Display apparatus and methods for manufacture thereof
US20070205969A1 (en) 2005-02-23 2007-09-06 Pixtronix, Incorporated Direct-view MEMS display devices and methods for generating images thereon
US8519945B2 (en) 2006-01-06 2013-08-27 Pixtronix, Inc. Circuits for controlling display apparatus
US9229222B2 (en) 2005-02-23 2016-01-05 Pixtronix, Inc. Alignment methods in fluid-filled MEMS displays
US7616368B2 (en) 2005-02-23 2009-11-10 Pixtronix, Inc. Light concentrating reflective display methods and apparatus
US8159428B2 (en) 2005-02-23 2012-04-17 Pixtronix, Inc. Display methods and apparatus
US9082353B2 (en) 2010-01-05 2015-07-14 Pixtronix, Inc. Circuits for controlling display apparatus
US9158106B2 (en) 2005-02-23 2015-10-13 Pixtronix, Inc. Display methods and apparatus
US8310442B2 (en) 2005-02-23 2012-11-13 Pixtronix, Inc. Circuits for controlling display apparatus
US8482496B2 (en) 2006-01-06 2013-07-09 Pixtronix, Inc. Circuits for controlling MEMS display apparatus on a transparent substrate
KR20060102171A (ko) * 2005-03-23 2006-09-27 삼성전자주식회사 화상 검사 장치, 상기 장치를 이용한 패널 검사 방법
JP2007088518A (ja) * 2005-09-16 2007-04-05 Nec Corp 無線通信システム
US7391510B2 (en) * 2006-01-26 2008-06-24 Orbotech Ltd System and method for inspecting patterned devices having microscopic conductors
JP2007220890A (ja) * 2006-02-16 2007-08-30 Toshiba Corp 塗布現像処理装置における基板周縁処理方法
US8526096B2 (en) 2006-02-23 2013-09-03 Pixtronix, Inc. Mechanical light modulators with stressed beams
US7567344B2 (en) * 2006-05-12 2009-07-28 Corning Incorporated Apparatus and method for characterizing defects in a transparent substrate
US9176318B2 (en) 2007-05-18 2015-11-03 Pixtronix, Inc. Methods for manufacturing fluid-filled MEMS displays
US8169679B2 (en) 2008-10-27 2012-05-01 Pixtronix, Inc. MEMS anchors
SG163442A1 (en) 2009-01-13 2010-08-30 Semiconductor Technologies & Instruments System and method for inspecting a wafer
TW201124661A (en) * 2010-01-06 2011-07-16 Masterwork Automodules Technology Corp Ltd Line illuminating device.
US9035673B2 (en) 2010-01-25 2015-05-19 Palo Alto Research Center Incorporated Method of in-process intralayer yield detection, interlayer shunt detection and correction
BR112012019383A2 (pt) 2010-02-02 2017-09-12 Pixtronix Inc Circuitos para controlar aparelho de exibição
CN102834763B (zh) 2010-02-02 2015-07-22 皮克斯特罗尼克斯公司 用于制造填充冷密封流体的显示装置的方法
SG11201407341TA (en) * 2012-05-09 2014-12-30 Seagate Technology Llc Surface features mapping
US9212900B2 (en) * 2012-08-11 2015-12-15 Seagate Technology Llc Surface features characterization
US9297751B2 (en) 2012-10-05 2016-03-29 Seagate Technology Llc Chemical characterization of surface features
US9297759B2 (en) 2012-10-05 2016-03-29 Seagate Technology Llc Classification of surface features using fluorescence
CN103728314B (zh) * 2012-10-16 2017-01-04 希捷科技有限公司 区分原生表面特征与外来表面特征的方法
US9377394B2 (en) * 2012-10-16 2016-06-28 Seagate Technology Llc Distinguishing foreign surface features from native surface features
US9217714B2 (en) 2012-12-06 2015-12-22 Seagate Technology Llc Reflective surfaces for surface features of an article
US9134552B2 (en) 2013-03-13 2015-09-15 Pixtronix, Inc. Display apparatus with narrow gap electrostatic actuators
US9217715B2 (en) 2013-05-30 2015-12-22 Seagate Technology Llc Apparatuses and methods for magnetic features of articles
US9201019B2 (en) 2013-05-30 2015-12-01 Seagate Technology Llc Article edge inspection
US9513215B2 (en) 2013-05-30 2016-12-06 Seagate Technology Llc Surface features by azimuthal angle
US9274064B2 (en) 2013-05-30 2016-03-01 Seagate Technology Llc Surface feature manager
CN103995000B (zh) * 2014-05-15 2017-01-11 京东方科技集团股份有限公司 一种显示基板的检查装置及检查系统
US10042324B2 (en) * 2015-06-30 2018-08-07 Synaptics Incorporated Optical fingerprint imaging using holography
EP3710813B1 (en) 2017-11-13 2023-09-20 Illumina, Inc. System and method for large sample analysis of thin film
JP6709206B2 (ja) * 2017-11-30 2020-06-10 株式会社Ｓｕｂａｒｕ 製造補助装置
JP7161159B2 (ja) * 2019-06-11 2022-10-26 株式会社岩佐画工舎 映像情報収集装置

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US5333052A (en) * 1990-11-27 1994-07-26 Orbotech Ltd. Method and apparatus for automatic optical inspection
US5344365A (en) * 1993-09-14 1994-09-06 Sematech, Inc. Integrated building and conveying structure for manufacturing under ultraclean conditions
EP0672933A1 (en) * 1994-03-14 1995-09-20 Orbotech Ltd Apparatus and method for display panel inspection
US5562383A (en) * 1993-04-13 1996-10-08 Tokyo Electron Kabushiki Kaisha Treatment apparatus
WO1998020327A1 (en) * 1996-11-04 1998-05-14 Kla-Tencor Corporation Automated inspection system with bright field and dark field illumination

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US5586058A (en) 1990-12-04 1996-12-17 Orbot Instruments Ltd. Apparatus and method for inspection of a patterned object by comparison thereof to a reference
JP3258821B2 (ja) * 1994-06-02 2002-02-18 三菱電機株式会社 微小異物の位置決め方法、分析方法、これに用いる分析装置およびこれを用いた半導体素子もしくは液晶表示素子の製法
US5640237A (en) 1995-08-29 1997-06-17 Kla Instruments Corporation Method and apparatus for detecting non-uniformities in reflective surafaces
JP4166340B2 (ja) 1997-09-24 2008-10-15 オリンパス株式会社 基板検査装置
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Patent Citations (5)

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Publication number Priority date Publication date Assignee Title
US5333052A (en) * 1990-11-27 1994-07-26 Orbotech Ltd. Method and apparatus for automatic optical inspection
US5562383A (en) * 1993-04-13 1996-10-08 Tokyo Electron Kabushiki Kaisha Treatment apparatus
US5344365A (en) * 1993-09-14 1994-09-06 Sematech, Inc. Integrated building and conveying structure for manufacturing under ultraclean conditions
EP0672933A1 (en) * 1994-03-14 1995-09-20 Orbotech Ltd Apparatus and method for display panel inspection
WO1998020327A1 (en) * 1996-11-04 1998-05-14 Kla-Tencor Corporation Automated inspection system with bright field and dark field illumination

Also Published As

Publication number Publication date
WO2000026645A3 (en) 2000-08-10
US6822734B1 (en) 2004-11-23
TW548405B (en) 2003-08-21
IL126866A (en) 2003-02-12
KR20010082284A (ko) 2001-08-29
IL126866A0 (en) 1999-09-22
AU6487199A (en) 2000-05-22
JP2002529758A (ja) 2002-09-10
WO2000026645A2 (en) 2000-05-11

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