TW531436B - Method and apparatus for cleaning exhaust gas and dust collector used for its apparatus - Google Patents

Method and apparatus for cleaning exhaust gas and dust collector used for its apparatus Download PDF

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Publication number
TW531436B
TW531436B TW091114749A TW91114749A TW531436B TW 531436 B TW531436 B TW 531436B TW 091114749 A TW091114749 A TW 091114749A TW 91114749 A TW91114749 A TW 91114749A TW 531436 B TW531436 B TW 531436B
Authority
TW
Taiwan
Prior art keywords
exhaust gas
dust
dust removal
combustion
gas
Prior art date
Application number
TW091114749A
Other languages
English (en)
Chinese (zh)
Inventor
Masahiko Aiko
Kazuyuki Hayashi
Toshiaki Tsuchimoto
Hiroaki Sawada
Akio Nakagawa
Original Assignee
Matsushita Electric Ind Co Ltd
Matsushita Environmental & Air
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Ind Co Ltd, Matsushita Environmental & Air filed Critical Matsushita Electric Ind Co Ltd
Application granted granted Critical
Publication of TW531436B publication Critical patent/TW531436B/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
    • F23G7/065—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J2217/00—Intercepting solids
    • F23J2217/10—Intercepting solids by filters
    • F23J2217/101—Baghouse type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J2217/00—Intercepting solids
    • F23J2217/50—Intercepting solids by cleaning fluids (washers or scrubbers)

Landscapes

  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Treating Waste Gases (AREA)
  • Incineration Of Waste (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
  • Chimneys And Flues (AREA)
TW091114749A 2001-07-03 2002-07-03 Method and apparatus for cleaning exhaust gas and dust collector used for its apparatus TW531436B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001202478A JP4772223B2 (ja) 2001-07-03 2001-07-03 排ガス除害装置及び方法

Publications (1)

Publication Number Publication Date
TW531436B true TW531436B (en) 2003-05-11

Family

ID=19039277

Family Applications (1)

Application Number Title Priority Date Filing Date
TW091114749A TW531436B (en) 2001-07-03 2002-07-03 Method and apparatus for cleaning exhaust gas and dust collector used for its apparatus

Country Status (5)

Country Link
JP (1) JP4772223B2 (ja)
KR (1) KR100821414B1 (ja)
CN (1) CN1283343C (ja)
TW (1) TW531436B (ja)
WO (1) WO2003004133A1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI457168B (zh) * 2008-09-08 2014-10-21 Taiyo Nippon Sanso Corp 排氣處理方法及處理裝置
CN112970095A (zh) * 2019-01-25 2021-06-15 株式会社东芝 处理装置及处理方法

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4583880B2 (ja) * 2004-11-01 2010-11-17 パナソニック株式会社 排ガスの処理方法および処理装置
JPWO2009125457A1 (ja) * 2008-04-11 2011-07-28 カンケンテクノ株式会社 シラン系ガス及びフッ素系ガス含有排ガスの処理方法及び該方法を用いた排ガス処理装置
CN103386234B (zh) * 2013-07-11 2015-02-18 江西稀有稀土金属钨业集团有限公司 一种除尘清洁小车定位装置及其定位方法
CN103727548B (zh) * 2013-12-14 2016-06-08 蚌埠玻璃工业设计研究院 一种apcvd在线低辐射镀膜废气处理装置
JP6552206B2 (ja) * 2015-02-02 2019-07-31 東京エレクトロン株式会社 排気管無害化方法及び成膜装置
KR200484882Y1 (ko) 2016-02-03 2017-11-02 한봉숙 합성수지 시트 부착형 전등커버
CN105910118A (zh) * 2016-06-12 2016-08-31 福建南方路面机械有限公司 沥青热再生烟气处理系统及处理方法
CN108816044A (zh) * 2018-07-12 2018-11-16 庄五 一种尾气治理环保设备
CN108837633A (zh) * 2018-08-31 2018-11-20 江苏久朗高科技股份有限公司 一种在线玻璃镀膜尾气膜法高温处理系统及工艺
CN113446609A (zh) * 2021-07-05 2021-09-28 北京京仪自动化装备技术股份有限公司 用于处理半导体制程中产生的清洁气体的系统及方法、装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08323138A (ja) * 1995-05-30 1996-12-10 Hitachi Ltd 半導体製造装置
JP3486022B2 (ja) * 1995-10-16 2004-01-13 ジャパン・エア・ガシズ株式会社 排ガス処理装置
JPH1066816A (ja) * 1996-06-21 1998-03-10 Japan Pionics Co Ltd ダストの除去装置及び除去方法
EP0813897A3 (en) * 1996-06-21 1998-06-24 Japan Pionics Co., Ltd. Dust removing apparatus and dust removing method
JPH1024207A (ja) * 1996-07-11 1998-01-27 Seiko Epson Corp 半導体用ガス除害装置
JPH1163368A (ja) * 1997-08-14 1999-03-05 Nippon Sanso Kk 配管内の粉体付着防止構造及び粉体処理装置
JP2000160344A (ja) * 1998-11-29 2000-06-13 Hoya Corp Ｃｖｄ装置、ｃｖｄ装置内の有害物質除去装置及び除去方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI457168B (zh) * 2008-09-08 2014-10-21 Taiyo Nippon Sanso Corp 排氣處理方法及處理裝置
CN112970095A (zh) * 2019-01-25 2021-06-15 株式会社东芝 处理装置及处理方法
TWI741485B (zh) * 2019-01-25 2021-10-01 日商東芝股份有限公司 處理裝置及處理方法
CN112970095B (zh) * 2019-01-25 2024-05-03 株式会社东芝 处理装置及处理方法

Also Published As

Publication number Publication date
KR20040013096A (ko) 2004-02-11
CN1582195A (zh) 2005-02-16
CN1283343C (zh) 2006-11-08
JP2003021315A (ja) 2003-01-24
WO2003004133A1 (fr) 2003-01-16
KR100821414B1 (ko) 2008-04-10
JP4772223B2 (ja) 2011-09-14

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