TW521346B - Gas injector and etching apparatus having the same - Google Patents

Gas injector and etching apparatus having the same Download PDF

Info

Publication number
TW521346B
TW521346B TW090127342A TW90127342A TW521346B TW 521346 B TW521346 B TW 521346B TW 090127342 A TW090127342 A TW 090127342A TW 90127342 A TW90127342 A TW 90127342A TW 521346 B TW521346 B TW 521346B
Authority
TW
Taiwan
Prior art keywords
holes
length
diameter
gas
cylinder
Prior art date
Application number
TW090127342A
Other languages
English (en)
Chinese (zh)
Inventor
Doo-Won Lee
Tae-Ryong Kim
No-Hyun Huh
Chang-Won Choi
Byeung-Wook Choi
Original Assignee
Samsung Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd
Application granted granted Critical
Publication of TW521346B publication Critical patent/TW521346B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45563—Gas nozzles
    • C23C16/45565—Shower nozzles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Metallurgy (AREA)
  • Analytical Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Drying Of Semiconductors (AREA)
TW090127342A 2001-01-11 2001-11-02 Gas injector and etching apparatus having the same TW521346B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR10-2001-0001635A KR100413145B1 (ko) 2001-01-11 2001-01-11 가스 인젝터 및 이를 갖는 식각 장치

Publications (1)

Publication Number Publication Date
TW521346B true TW521346B (en) 2003-02-21

Family

ID=19704526

Family Applications (1)

Application Number Title Priority Date Filing Date
TW090127342A TW521346B (en) 2001-01-11 2001-11-02 Gas injector and etching apparatus having the same

Country Status (7)

Country Link
US (1) US20020088545A1 (ja)
JP (1) JP4105871B2 (ja)
KR (1) KR100413145B1 (ja)
CN (1) CN1207761C (ja)
DE (1) DE10200279B4 (ja)
GB (1) GB2374454B (ja)
TW (1) TW521346B (ja)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100445635B1 (ko) * 2002-03-04 2004-08-25 삼성전자주식회사 웨이퍼 제조용 가스분배판
US20050103267A1 (en) * 2003-11-14 2005-05-19 Hur Gwang H. Flat panel display manufacturing apparatus
KR100599037B1 (ko) * 2004-08-04 2006-07-12 삼성전자주식회사 이온 소스 및 이를 갖는 이온 주입 장치
KR100782369B1 (ko) * 2004-11-11 2007-12-07 삼성전자주식회사 반도체 제조장치
US8298336B2 (en) * 2005-04-01 2012-10-30 Lam Research Corporation High strip rate downstream chamber
CN100416756C (zh) * 2005-12-05 2008-09-03 北京北方微电子基地设备工艺研究中心有限责任公司 等离子体刻蚀装置
US20080156264A1 (en) * 2006-12-27 2008-07-03 Novellus Systems, Inc. Plasma Generator Apparatus
US20100101728A1 (en) * 2007-03-29 2010-04-29 Tokyo Electron Limited Plasma process apparatus
US7744720B2 (en) * 2007-12-06 2010-06-29 Tokyo Electron Limited Suppressor of hollow cathode discharge in a shower head fluid distribution system
US8137463B2 (en) * 2007-12-19 2012-03-20 Applied Materials, Inc. Dual zone gas injection nozzle
KR101204614B1 (ko) * 2008-02-20 2012-11-23 도쿄엘렉트론가부시키가이샤 가스 공급 장치, 성막 장치, 및 성막 방법
US8409459B2 (en) * 2008-02-28 2013-04-02 Tokyo Electron Limited Hollow cathode device and method for using the device to control the uniformity of a plasma process
JP5223377B2 (ja) * 2008-02-29 2013-06-26 東京エレクトロン株式会社 プラズマ処理装置用の電極、プラズマ処理装置及びプラズマ処理方法
US8110068B2 (en) * 2008-03-20 2012-02-07 Novellus Systems, Inc. Gas flow distribution receptacles, plasma generator systems, and methods for performing plasma stripping processes
US9591738B2 (en) * 2008-04-03 2017-03-07 Novellus Systems, Inc. Plasma generator systems and methods of forming plasma
US8916022B1 (en) 2008-09-12 2014-12-23 Novellus Systems, Inc. Plasma generator systems and methods of forming plasma
TW201130401A (en) * 2009-11-23 2011-09-01 Jusung Eng Co Ltd Apparatus for processing substrate
TWI539517B (zh) * 2010-02-12 2016-06-21 應用材料股份有限公司 使用於處理腔室之套件及使用用於氣流改良之套件之處理腔室
US10658161B2 (en) 2010-10-15 2020-05-19 Applied Materials, Inc. Method and apparatus for reducing particle defects in plasma etch chambers
US9941100B2 (en) 2011-12-16 2018-04-10 Taiwan Semiconductor Manufacturing Company, Ltd. Adjustable nozzle for plasma deposition and a method of controlling the adjustable nozzle
JP6046752B2 (ja) * 2013-01-30 2016-12-21 京セラ株式会社 ガスノズルおよびこれを用いたプラズマ装置
US9536710B2 (en) * 2013-02-25 2017-01-03 Applied Materials, Inc. Tunable gas delivery assembly with internal diffuser and angular injection
US10465288B2 (en) * 2014-08-15 2019-11-05 Applied Materials, Inc. Nozzle for uniform plasma processing
KR102553629B1 (ko) * 2016-06-17 2023-07-11 삼성전자주식회사 플라즈마 처리 장치
US11139149B2 (en) * 2017-11-29 2021-10-05 Taiwan Semiconductor Manufacturing Co., Ltd. Gas injector
CN111613508A (zh) * 2019-02-25 2020-09-01 北京北方华创微电子装备有限公司 进气装置及反应腔室
US20220384145A1 (en) * 2019-10-24 2022-12-01 Lam Research Corporation Semiconductor equipment module fabrication with additive manufacturing

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56152973A (en) * 1980-04-30 1981-11-26 Tokuda Seisakusho Ltd Sputter etching device
JPH01275762A (ja) * 1988-04-28 1989-11-06 Kyocera Corp 成膜装置
US5074456A (en) * 1990-09-18 1991-12-24 Lam Research Corporation Composite electrode for plasma processes
JPH0967685A (ja) * 1995-08-25 1997-03-11 Souzou Kagaku:Kk プラズマエッチング用平行平板電極
US6004875A (en) * 1995-11-15 1999-12-21 Micron Technology, Inc. Etch stop for use in etching of silicon oxide
US6013155A (en) * 1996-06-28 2000-01-11 Lam Research Corporation Gas injection system for plasma processing
US5976261A (en) * 1996-07-11 1999-11-02 Cvc Products, Inc. Multi-zone gas injection apparatus and method for microelectronics manufacturing equipment
US5781693A (en) * 1996-07-24 1998-07-14 Applied Materials, Inc. Gas introduction showerhead for an RTP chamber with upper and lower transparent plates and gas flow therebetween
JPH10172962A (ja) * 1996-12-10 1998-06-26 Oki Electric Ind Co Ltd 半導体装置の製造方法
JPH1126435A (ja) * 1997-07-03 1999-01-29 Hitachi Chem Co Ltd プラズマエッチング用電極
US6161500A (en) * 1997-09-30 2000-12-19 Tokyo Electron Limited Apparatus and method for preventing the premature mixture of reactant gases in CVD and PECVD reactions
US6106625A (en) * 1997-12-02 2000-08-22 Applied Materials, Inc. Reactor useful for chemical vapor deposition of titanium nitride
JPH11274087A (ja) * 1998-03-25 1999-10-08 Toshiba Corp シャワープレート
JP2000049138A (ja) * 1998-07-28 2000-02-18 Hitachi Chem Co Ltd 平行平板型プラズマ処理装置及びこれに用いられる電極板
CA2277394C (en) * 1998-09-09 2003-10-21 Saint-Gobain Industrial Ceramics, Inc. Plasma jet chemical vapor deposition system having a plurality of distribution heads
JP3572211B2 (ja) * 1998-12-28 2004-09-29 京セラ株式会社 半導体製造装置用ガス導入ノズル
US6230651B1 (en) * 1998-12-30 2001-05-15 Lam Research Corporation Gas injection system for plasma processing
JP3965258B2 (ja) * 1999-04-30 2007-08-29 日本碍子株式会社 半導体製造装置用のセラミックス製ガス供給構造
EP1879213B1 (en) * 1999-05-26 2012-03-14 Tokyo Electron Limited Plasma processing apparatus

Also Published As

Publication number Publication date
KR20020060509A (ko) 2002-07-18
KR100413145B1 (ko) 2003-12-31
US20020088545A1 (en) 2002-07-11
CN1207761C (zh) 2005-06-22
DE10200279B4 (de) 2006-08-17
JP4105871B2 (ja) 2008-06-25
JP2002252204A (ja) 2002-09-06
DE10200279A1 (de) 2002-07-25
CN1365138A (zh) 2002-08-21
GB2374454B (en) 2003-09-17
GB2374454A (en) 2002-10-16
GB0200342D0 (en) 2002-02-20

Similar Documents

Publication Publication Date Title
TW521346B (en) Gas injector and etching apparatus having the same
JP5566982B2 (ja) プラズマ処理装置
TW454228B (en) Method and apparatus for plasma treatment
TW516123B (en) Stepped upper electrode for plasma processing uniformity
TW520405B (en) Methods for etching a trench in a silicon layer
TWI270937B (en) Dry etching method
TW201139729A (en) Method and device for layer deposition
TW586155B (en) Dry etching method and apparatus
EP1390964A4 (en) DIPOL-ION SOURCE
JPWO2009013941A1 (ja) 基板吸着装置及びその製造方法
TW201232694A (en) Polar regions for electrostatic de-chucking with lift pins
TW405149B (en) Etching method
JPH03271200A (ja) ダイヤモンド薄膜のエッチング方法
TW201522205A (zh) 蝕刻方法
CN101471257A (zh) 等离子体蚀刻方法、等离子体蚀刻装置和控制程序
JP4180706B2 (ja) 物質・材料プロセッシング方法
JP4146773B2 (ja) プラズマ処理方法及び装置
JP4781106B2 (ja) シリコンエッチング方法及び装置並びにエッチングシリコン体
TWI240328B (en) Pretreatment process of substrate in micro-nano imprinting technology
JP2009224517A (ja) プラズマ処理方法およびプラズマ処理装置
TW200400585A (en) Apparatus for manufacturing semiconductor device
KR100500433B1 (ko) 전압배열형 전극을 이용한 표면처리용 대기압 플라즈마장치
Okumura et al. Fine pattern etching of silicon substrates using atmospheric line-shaped microplasma source
CN207517641U (zh) 蚀刻设备
JPH04142734A (ja) 微細加工装置及び方法

Legal Events

Date Code Title Description
GD4A Issue of patent certificate for granted invention patent
MM4A Annulment or lapse of patent due to non-payment of fees