TW492891B - A scrubbing system and method for point-of-use treatment of effluent gas streams using an aqueous medium and/or gas/liquid contacting article - Google Patents

A scrubbing system and method for point-of-use treatment of effluent gas streams using an aqueous medium and/or gas/liquid contacting article Download PDF

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Publication number
TW492891B
TW492891B TW088122031A TW88122031A TW492891B TW 492891 B TW492891 B TW 492891B TW 088122031 A TW088122031 A TW 088122031A TW 88122031 A TW88122031 A TW 88122031A TW 492891 B TW492891 B TW 492891B
Authority
TW
Taiwan
Prior art keywords
gas
scrubbing
water
liquid
exhaust gas
Prior art date
Application number
TW088122031A
Other languages
English (en)
Chinese (zh)
Inventor
Jose I Arno
Mark Holst
Sam Yee
Joseph D Sweeney
Jeff Lorelli
Original Assignee
Atmi Ecosys Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/212,107 external-priority patent/US6759018B1/en
Application filed by Atmi Ecosys Corp filed Critical Atmi Ecosys Corp
Application granted granted Critical
Publication of TW492891B publication Critical patent/TW492891B/zh

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/77—Liquid phase processes
    • B01D53/78—Liquid phase processes with gas-liquid contact
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D19/00—Degasification of liquids
    • B01D19/02—Foam dispersion or prevention
    • B01D19/04—Foam dispersion or prevention by addition of chemical substances
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/14—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by absorption
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • B01D53/70—Organic halogen compounds
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23M—CASINGS, LININGS, WALLS OR DOORS SPECIALLY ADAPTED FOR COMBUSTION CHAMBERS, e.g. FIREBRIDGES; DEVICES FOR DEFLECTING AIR, FLAMES OR COMBUSTION PRODUCTS IN COMBUSTION CHAMBERS; SAFETY ARRANGEMENTS SPECIALLY ADAPTED FOR COMBUSTION APPARATUS; DETAILS OF COMBUSTION CHAMBERS, NOT OTHERWISE PROVIDED FOR
    • F23M5/00—Casings; Linings; Walls
    • F23M5/08—Cooling thereof; Tube walls
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G2209/00—Specific waste
    • F23G2209/14—Gaseous waste or fumes
    • F23G2209/142—Halogen gases, e.g. silane
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Combustion & Propulsion (AREA)
  • Toxicology (AREA)
  • Dispersion Chemistry (AREA)
  • Treating Waste Gases (AREA)
  • Gas Separation By Absorption (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Chemical Vapour Deposition (AREA)
  • Drying Of Semiconductors (AREA)
  • Separation Of Suspended Particles By Flocculating Agents (AREA)
  • Water Treatment By Electricity Or Magnetism (AREA)
TW088122031A 1998-12-15 1999-12-15 A scrubbing system and method for point-of-use treatment of effluent gas streams using an aqueous medium and/or gas/liquid contacting article TW492891B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/212,107 US6759018B1 (en) 1997-05-16 1998-12-15 Method for point-of-use treatment of effluent gas streams

Publications (1)

Publication Number Publication Date
TW492891B true TW492891B (en) 2002-07-01

Family

ID=22789590

Family Applications (1)

Application Number Title Priority Date Filing Date
TW088122031A TW492891B (en) 1998-12-15 1999-12-15 A scrubbing system and method for point-of-use treatment of effluent gas streams using an aqueous medium and/or gas/liquid contacting article

Country Status (7)

Country Link
EP (1) EP1146958A4 (ja)
JP (1) JP2002539912A (ja)
KR (1) KR100481256B1 (ja)
CN (2) CN1167497C (ja)
AU (1) AU2188900A (ja)
TW (1) TW492891B (ja)
WO (1) WO2000035573A1 (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI457166B (zh) * 2005-03-22 2014-10-21 Edwards Ltd 收集裝置
TWI719107B (zh) * 2016-01-13 2021-02-21 日商東京威力科創股份有限公司 基板處理方法、基板處理裝置及基板處理系統
TWI803538B (zh) * 2017-11-22 2023-06-01 南韓商Ｃｓｋ股份有限公司 氣體處理裝置
TWI847455B (zh) * 2022-06-29 2024-07-01 大陸商江蘇魯汶儀器股份有限公司 一種晶圓表面貴金屬元素的富集方法及分析方法

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EP1306769A3 (en) * 2001-08-31 2003-05-21 Horiba, Ltd. System for determining a greenhouse effect gas emission index
GB0605232D0 (en) * 2006-03-16 2006-04-26 Johnson Matthey Plc Oxygen removal
KR20100072274A (ko) * 2007-09-20 2010-06-30 어플라이드 머티어리얼스, 인코포레이티드 전자 장치 제조 폐기물의 대기 공기 정화를 위한 방법 및 장치
KR101581673B1 (ko) * 2008-02-05 2015-12-31 어플라이드 머티어리얼스, 인코포레이티드 제조 프로세스들로부터의 가연성 폐기물 가스들을 처리하기 위한 시스템 및 방법
KR100945520B1 (ko) 2008-03-12 2010-03-09 엔텍이앤씨 주식회사 악취 가스 제거 방법
CN101816904B (zh) * 2010-05-19 2012-05-09 马铭傈 用于防止及清理罐内磷酸渣沉淀的可移动空气搅拌系统
CN103180029A (zh) * 2010-09-15 2013-06-26 索尔维公司 从气体中去除f2和/或of2的方法
NO336115B1 (no) * 2011-07-05 2015-05-18 Aker Engineering & Technology Fremgangsmåte for fanging av sur gass og anvendelse av en polypropylensammensetning for fremstilling av et tårn for fanging av sur gass
US9259683B2 (en) 2014-01-22 2016-02-16 Micron Technology, Inc. Methods and apparatus for treating fluorinated greenhouse gases in gas streams
CN105067062B (zh) * 2015-07-16 2017-12-12 国乐忠 一种复合肥防结油精确计量系统及方法
US20210162341A1 (en) * 2015-12-01 2021-06-03 Showa Denko K. K. Method for treating exhaust gas containing elemental fluorine
WO2017094418A1 (ja) * 2015-12-01 2017-06-08 昭和電工株式会社 フッ素元素を含有する排ガスの処理方法
CN105537207B (zh) * 2015-12-11 2018-09-25 上海交通大学 一种高温用石英管的清洗方法
CN106098525B (zh) * 2016-07-06 2018-01-30 武汉华星光电技术有限公司 干蚀刻设备
CN106178876A (zh) * 2016-08-12 2016-12-07 东方日升新能源股份有限公司 工业化处理含氮废气的装置和方法
CN106512664A (zh) * 2016-12-15 2017-03-22 江苏诺斯特拉环保科技有限公司 一种聚氯化铝废气吸收塔
CN109011983B (zh) * 2018-08-24 2020-09-18 郑州釜鼎热能技术有限公司 一种磁性液体净化污染气体的除尘脱污装置
CN109289477A (zh) * 2018-10-25 2019-02-01 南京博酝化工科技有限公司 一种处理化学废气的喷淋装置
CN110038409B (zh) * 2019-04-30 2021-06-01 无锡市道格环保科技有限公司 一种联合脱硫脱硝装置及工艺
WO2020236927A1 (en) * 2019-05-20 2020-11-26 Buckman Laboratories International, Inc. Optimization of wet scrubber process flows through online measurement and control of gases entrained in the scrubber liquid
CN112875822B (zh) * 2020-12-30 2022-11-01 江西楚杭环保科技有限公司 一种用于垃圾填埋场一体化除臭和污水处理装置
CN113797953B (zh) * 2021-09-29 2023-07-04 广州珠矶科技有限公司 一种用于地下水有机污染修复的纳米催化剂的制备及其使用方法
CN114082731B (zh) * 2021-11-17 2022-08-23 苏州金宏气体股份有限公司 一种电子级正硅酸乙酯返回钢瓶的处理方法及装置

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EP0954366A4 (en) * 1996-12-31 2001-06-20 Atmi Ecosys Corp INPUT STRUCTURES FOR INTRODUCING A GAS STREAM CONTAINING SOLID MATERIALS AND / OR PRODUCING PARTICULATE SOLID MATERIALS IN A GAS TREATMENT SYSTEM
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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI457166B (zh) * 2005-03-22 2014-10-21 Edwards Ltd 收集裝置
TWI719107B (zh) * 2016-01-13 2021-02-21 日商東京威力科創股份有限公司 基板處理方法、基板處理裝置及基板處理系統
TWI803538B (zh) * 2017-11-22 2023-06-01 南韓商Ｃｓｋ股份有限公司 氣體處理裝置
TWI847455B (zh) * 2022-06-29 2024-07-01 大陸商江蘇魯汶儀器股份有限公司 一種晶圓表面貴金屬元素的富集方法及分析方法

Also Published As

Publication number Publication date
KR20010093838A (ko) 2001-10-29
CN1367713A (zh) 2002-09-04
KR100481256B1 (ko) 2005-04-11
JP2002539912A (ja) 2002-11-26
CN1565710A (zh) 2005-01-19
CN1167497C (zh) 2004-09-22
WO2000035573A1 (en) 2000-06-22
AU2188900A (en) 2000-07-03
EP1146958A1 (en) 2001-10-24
EP1146958A4 (en) 2006-06-21

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