CN1167497C - 现场处理废气流的装置和方法 - Google Patents

现场处理废气流的装置和方法 Download PDF

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Publication number
CN1167497C
CN1167497C CNB998161152A CN99816115A CN1167497C CN 1167497 C CN1167497 C CN 1167497C CN B998161152 A CNB998161152 A CN B998161152A CN 99816115 A CN99816115 A CN 99816115A CN 1167497 C CN1167497 C CN 1167497C
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China
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gas
washing
flow
air
composition
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Expired - Fee Related
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CNB998161152A
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English (en)
Chinese (zh)
Other versions
CN1367713A (zh
Inventor
乔斯・I・阿尔诺
乔斯·I·阿尔诺
R・霍尔斯特
马克·R·霍尔斯特
伊
萨姆·伊
・D・斯威尼
约瑟夫·D·斯威尼
洛里里
杰夫·洛里里
德塞夫
贾森·德塞夫
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Advanced Technology Materials Inc
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Advanced Technology Materials Inc
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Filing date
Publication date
Priority claimed from US09/212,107 external-priority patent/US6759018B1/en
Application filed by Advanced Technology Materials Inc filed Critical Advanced Technology Materials Inc
Publication of CN1367713A publication Critical patent/CN1367713A/zh
Application granted granted Critical
Publication of CN1167497C publication Critical patent/CN1167497C/zh
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/77—Liquid phase processes
    • B01D53/78—Liquid phase processes with gas-liquid contact
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D19/00—Degasification of liquids
    • B01D19/02—Foam dispersion or prevention
    • B01D19/04—Foam dispersion or prevention by addition of chemical substances
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/14—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by absorption
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • B01D53/70—Organic halogen compounds
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23M—CASINGS, LININGS, WALLS OR DOORS SPECIALLY ADAPTED FOR COMBUSTION CHAMBERS, e.g. FIREBRIDGES; DEVICES FOR DEFLECTING AIR, FLAMES OR COMBUSTION PRODUCTS IN COMBUSTION CHAMBERS; SAFETY ARRANGEMENTS SPECIALLY ADAPTED FOR COMBUSTION APPARATUS; DETAILS OF COMBUSTION CHAMBERS, NOT OTHERWISE PROVIDED FOR
    • F23M5/00—Casings; Linings; Walls
    • F23M5/08—Cooling thereof; Tube walls
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G2209/00—Specific waste
    • F23G2209/14—Gaseous waste or fumes
    • F23G2209/142—Halogen gases, e.g. silane
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Toxicology (AREA)
  • Dispersion Chemistry (AREA)
  • Combustion & Propulsion (AREA)
  • Treating Waste Gases (AREA)
  • Gas Separation By Absorption (AREA)
  • Separation Of Suspended Particles By Flocculating Agents (AREA)
  • Water Treatment By Electricity Or Magnetism (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Chemical Vapour Deposition (AREA)
  • Drying Of Semiconductors (AREA)
CNB998161152A 1998-12-15 1999-12-15 现场处理废气流的装置和方法 Expired - Fee Related CN1167497C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/212,107 US6759018B1 (en) 1997-05-16 1998-12-15 Method for point-of-use treatment of effluent gas streams
US09/212,107 1998-12-15

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CNA2004100716728A Division CN1565710A (zh) 1998-12-15 1999-12-15 现场处理废气流的装置和方法

Publications (2)

Publication Number Publication Date
CN1367713A CN1367713A (zh) 2002-09-04
CN1167497C true CN1167497C (zh) 2004-09-22

Family

ID=22789590

Family Applications (2)

Application Number Title Priority Date Filing Date
CNB998161152A Expired - Fee Related CN1167497C (zh) 1998-12-15 1999-12-15 现场处理废气流的装置和方法
CNA2004100716728A Pending CN1565710A (zh) 1998-12-15 1999-12-15 现场处理废气流的装置和方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
CNA2004100716728A Pending CN1565710A (zh) 1998-12-15 1999-12-15 现场处理废气流的装置和方法

Country Status (7)

Country Link
EP (1) EP1146958A4 (ja)
JP (1) JP2002539912A (ja)
KR (1) KR100481256B1 (ja)
CN (2) CN1167497C (ja)
AU (1) AU2188900A (ja)
TW (1) TW492891B (ja)
WO (1) WO2000035573A1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101394922B (zh) * 2006-03-16 2012-06-27 约翰森·马瑟公开有限公司 除去氧气
CN108290113A (zh) * 2015-12-01 2018-07-17 昭和电工株式会社 含有氟元素的废气的处理方法

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6491884B1 (en) 1999-11-26 2002-12-10 Advanced Technology Materials, Inc. In-situ air oxidation treatment of MOCVD process effluent
US20030083980A1 (en) * 2001-08-31 2003-05-01 Tsukasa Satake Greenhouse effect gas emission index monitoring and converting system
GB0505674D0 (en) * 2005-03-22 2005-04-27 Boc Group Plc Trap device
JP2010540212A (ja) * 2007-09-20 2010-12-24 アプライド マテリアルズ インコーポレイテッド 電子デバイス製造廃液を周囲空気により除害するための装置及び方法
CN101939079B (zh) * 2008-02-05 2013-06-12 应用材料公司 用于处理来自制程的可燃性废气的系统及方法
KR100945520B1 (ko) 2008-03-12 2010-03-09 엔텍이앤씨 주식회사 악취 가스 제거 방법
CN101816904B (zh) * 2010-05-19 2012-05-09 马铭傈 用于防止及清理罐内磷酸渣沉淀的可移动空气搅拌系统
WO2012035000A1 (en) * 2010-09-15 2012-03-22 Solvay Sa Method for the removal of f2 and/or of2 from a gas
NO336115B1 (no) * 2011-07-05 2015-05-18 Aker Engineering & Technology Fremgangsmåte for fanging av sur gass og anvendelse av en polypropylensammensetning for fremstilling av et tårn for fanging av sur gass
US9259683B2 (en) 2014-01-22 2016-02-16 Micron Technology, Inc. Methods and apparatus for treating fluorinated greenhouse gases in gas streams
CN105067062B (zh) * 2015-07-16 2017-12-12 国乐忠 一种复合肥防结油精确计量系统及方法
JPWO2017094417A1 (ja) * 2015-12-01 2018-09-20 昭和電工株式会社 フッ素元素を含有する排ガスの処理方法
CN105537207B (zh) * 2015-12-11 2018-09-25 上海交通大学 一种高温用石英管的清洗方法
JP6854611B2 (ja) * 2016-01-13 2021-04-07 東京エレクトロン株式会社 基板処理方法、基板処理装置及び基板処理システム
CN106098525B (zh) * 2016-07-06 2018-01-30 武汉华星光电技术有限公司 干蚀刻设备
CN106178876A (zh) * 2016-08-12 2016-12-07 东方日升新能源股份有限公司 工业化处理含氮废气的装置和方法
CN106512664A (zh) * 2016-12-15 2017-03-22 江苏诺斯特拉环保科技有限公司 一种聚氯化铝废气吸收塔
KR102362761B1 (ko) * 2017-11-22 2022-02-15 씨에스케이(주) 가스 처리 장치
CN109011983B (zh) * 2018-08-24 2020-09-18 郑州釜鼎热能技术有限公司 一种磁性液体净化污染气体的除尘脱污装置
CN109289477A (zh) * 2018-10-25 2019-02-01 南京博酝化工科技有限公司 一种处理化学废气的喷淋装置
CN110038409B (zh) * 2019-04-30 2021-06-01 无锡市道格环保科技有限公司 一种联合脱硫脱硝装置及工艺
WO2020236927A1 (en) * 2019-05-20 2020-11-26 Buckman Laboratories International, Inc. Optimization of wet scrubber process flows through online measurement and control of gases entrained in the scrubber liquid
CN112875822B (zh) * 2020-12-30 2022-11-01 江西楚杭环保科技有限公司 一种用于垃圾填埋场一体化除臭和污水处理装置
CN113797953B (zh) * 2021-09-29 2023-07-04 广州珠矶科技有限公司 一种用于地下水有机污染修复的纳米催化剂的制备及其使用方法
CN114082731B (zh) * 2021-11-17 2022-08-23 苏州金宏气体股份有限公司 一种电子级正硅酸乙酯返回钢瓶的处理方法及装置

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4005010A (en) * 1973-09-21 1977-01-25 Imperial Chemical Industries Limited Method of packing media in a tower or bed
DE2352039B2 (de) * 1973-10-17 1977-02-17 Metallgesellschaft AG, 6000 Frankfurt; Bayer AG, 5090 Leverkusen-Bayerwerk Verfahren zur trocknung von so tief 2 -haltigen gasen bzw. von luft zur verbrennung von schwefel
US4029576A (en) * 1976-02-23 1977-06-14 The Goodyear Tire & Rubber Company System for softening water
DE2740039A1 (de) * 1977-09-06 1979-03-15 Heinz Hoelter 2-stufen-gaswaescher
JPS60139313A (ja) * 1983-12-27 1985-07-24 Matsushita Electric Ind Co Ltd メタン発酵ガス水洗装置
US4555389A (en) * 1984-04-27 1985-11-26 Toyo Sanso Co., Ltd. Method of and apparatus for burning exhaust gases containing gaseous silane
JPS62136230A (ja) * 1985-12-10 1987-06-19 Showa Denko Kk ドライエツチング排ガスの処理方法
US5238665A (en) * 1991-06-10 1993-08-24 Beco Engineering Company Method for minimizing environmental release of toxic compounds in the incineration of wastes
DE69223288T2 (de) * 1991-07-09 1998-03-19 Inst Francais Du Petrole Destillations-Reaktor und seine Verwendung für Gleichgewichts-Reaktionen
US5683587A (en) * 1992-03-30 1997-11-04 Ferrara; Marcello Process for treating industrial wastes
US5480557A (en) * 1992-05-08 1996-01-02 Heisei Riken Kabushiki Kaisha Method for preventing adhesion of scales in service water or circulating industrial water by applying the magnetic field
US5405590A (en) * 1993-02-05 1995-04-11 Pedro Buarque de Macedo Off-gas scrubber system
US5522461A (en) * 1995-03-31 1996-06-04 Weatherford U.S., Inc. Mill valve
US5622682A (en) * 1994-04-06 1997-04-22 Atmi Ecosys Corporation Method for concentration and recovery of halocarbons from effluent gas streams
WO1997011914A1 (en) * 1995-09-27 1997-04-03 Technicat, Inc. Water treatment arrangement
US5846275A (en) * 1996-12-31 1998-12-08 Atmi Ecosys Corporation Clog-resistant entry structure for introducing a particulate solids-containing and/or solids-forming gas stream to a gas processing system
WO1998029178A1 (en) * 1996-12-31 1998-07-09 Atmi Ecosys Corporation Inlet structures for introducing a particulate solids-containing and/or solids-forming gas stream to a gas processing system
US20010009652A1 (en) * 1998-05-28 2001-07-26 Jose I. Arno Apparatus and method for point-of-use abatement of fluorocompounds

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101394922B (zh) * 2006-03-16 2012-06-27 约翰森·马瑟公开有限公司 除去氧气
CN108290113A (zh) * 2015-12-01 2018-07-17 昭和电工株式会社 含有氟元素的废气的处理方法

Also Published As

Publication number Publication date
AU2188900A (en) 2000-07-03
KR100481256B1 (ko) 2005-04-11
CN1565710A (zh) 2005-01-19
KR20010093838A (ko) 2001-10-29
WO2000035573A1 (en) 2000-06-22
JP2002539912A (ja) 2002-11-26
EP1146958A4 (en) 2006-06-21
EP1146958A1 (en) 2001-10-24
CN1367713A (zh) 2002-09-04
TW492891B (en) 2002-07-01

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