TW486564B - Temperature-detecting element - Google Patents

Temperature-detecting element Download PDF

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Publication number
TW486564B
TW486564B TW090101301A TW90101301A TW486564B TW 486564 B TW486564 B TW 486564B TW 090101301 A TW090101301 A TW 090101301A TW 90101301 A TW90101301 A TW 90101301A TW 486564 B TW486564 B TW 486564B
Authority
TW
Taiwan
Prior art keywords
temperature
workpiece
small piece
wafer
temperature sensing
Prior art date
Application number
TW090101301A
Other languages
English (en)
Chinese (zh)
Inventor
Yoshihiro Suzuki
Hitoshi Nakane
Satoshi Oka
Kousuke Yaguchi
Original Assignee
Okura Denki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Okura Denki Co Ltd filed Critical Okura Denki Co Ltd
Application granted granted Critical
Publication of TW486564B publication Critical patent/TW486564B/zh

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K13/00—Thermometers specially adapted for specific purposes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
TW090101301A 2000-01-28 2001-01-19 Temperature-detecting element TW486564B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000020977A JP2001208616A (ja) 2000-01-28 2000-01-28 温度検出素子

Publications (1)

Publication Number Publication Date
TW486564B true TW486564B (en) 2002-05-11

Family

ID=18547446

Family Applications (1)

Application Number Title Priority Date Filing Date
TW090101301A TW486564B (en) 2000-01-28 2001-01-19 Temperature-detecting element

Country Status (4)

Country Link
US (1) US20010022803A1 (https=)
JP (1) JP2001208616A (https=)
KR (1) KR100413646B1 (https=)
TW (1) TW486564B (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104568196B (zh) * 2015-01-04 2019-06-11 安徽蓝德仪表有限公司 一种铂铑热电偶

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030231698A1 (en) * 2002-03-29 2003-12-18 Takatomo Yamaguchi Apparatus and method for fabricating a semiconductor device and a heat treatment apparatus
JP2014211922A (ja) * 2011-08-29 2014-11-13 三洋電機株式会社 光ピックアップ装置および温度検出装置
JP5451793B2 (ja) * 2012-02-10 2014-03-26 東京エレクトロン株式会社 温度センサ及び熱処理装置
JP5644007B2 (ja) 2012-02-10 2014-12-24 東京エレクトロン株式会社 温度センサ及び熱処理装置
DE102018102600A1 (de) * 2018-02-06 2019-08-08 Tdk Electronics Ag Temperatursensor

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2605297B2 (ja) * 1987-09-04 1997-04-30 株式会社村田製作所 白金温度センサおよびその製造方法
JPH0563054A (ja) * 1991-08-29 1993-03-12 Nippon Steel Corp ウエハ温度測定方法及び装置
JPH07273057A (ja) * 1994-03-30 1995-10-20 Kokusai Electric Co Ltd 半導体製造装置
JPH08285699A (ja) * 1995-04-14 1996-11-01 Matsushita Electric Ind Co Ltd 加熱容器内温度センサ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104568196B (zh) * 2015-01-04 2019-06-11 安徽蓝德仪表有限公司 一种铂铑热电偶

Also Published As

Publication number Publication date
JP2001208616A (ja) 2001-08-03
KR20010078070A (ko) 2001-08-20
US20010022803A1 (en) 2001-09-20
KR100413646B1 (ko) 2003-12-31

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