KR100413646B1 - 온도검출소자 - Google Patents

온도검출소자 Download PDF

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Publication number
KR100413646B1
KR100413646B1 KR10-2001-0003707A KR20010003707A KR100413646B1 KR 100413646 B1 KR100413646 B1 KR 100413646B1 KR 20010003707 A KR20010003707 A KR 20010003707A KR 100413646 B1 KR100413646 B1 KR 100413646B1
Authority
KR
South Korea
Prior art keywords
temperature
workpiece
silicon wafer
wafer
furnace
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
KR10-2001-0003707A
Other languages
English (en)
Korean (ko)
Other versions
KR20010078070A (ko
Inventor
스즈키요시히로
나카네히토시
오카사토시
야구치고스케
Original Assignee
오쿠라 덴키 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 오쿠라 덴키 가부시키가이샤 filed Critical 오쿠라 덴키 가부시키가이샤
Publication of KR20010078070A publication Critical patent/KR20010078070A/ko
Application granted granted Critical
Publication of KR100413646B1 publication Critical patent/KR100413646B1/ko
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K13/00—Thermometers specially adapted for specific purposes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
KR10-2001-0003707A 2000-01-28 2001-01-26 온도검출소자 Expired - Lifetime KR100413646B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP20977 2000-01-28
JP2000020977A JP2001208616A (ja) 2000-01-28 2000-01-28 温度検出素子

Publications (2)

Publication Number Publication Date
KR20010078070A KR20010078070A (ko) 2001-08-20
KR100413646B1 true KR100413646B1 (ko) 2003-12-31

Family

ID=18547446

Family Applications (1)

Application Number Title Priority Date Filing Date
KR10-2001-0003707A Expired - Lifetime KR100413646B1 (ko) 2000-01-28 2001-01-26 온도검출소자

Country Status (4)

Country Link
US (1) US20010022803A1 (https=)
JP (1) JP2001208616A (https=)
KR (1) KR100413646B1 (https=)
TW (1) TW486564B (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030231698A1 (en) * 2002-03-29 2003-12-18 Takatomo Yamaguchi Apparatus and method for fabricating a semiconductor device and a heat treatment apparatus
JP2014211922A (ja) * 2011-08-29 2014-11-13 三洋電機株式会社 光ピックアップ装置および温度検出装置
JP5451793B2 (ja) * 2012-02-10 2014-03-26 東京エレクトロン株式会社 温度センサ及び熱処理装置
JP5644007B2 (ja) 2012-02-10 2014-12-24 東京エレクトロン株式会社 温度センサ及び熱処理装置
CN104568196B (zh) * 2015-01-04 2019-06-11 安徽蓝德仪表有限公司 一种铂铑热电偶
DE102018102600A1 (de) * 2018-02-06 2019-08-08 Tdk Electronics Ag Temperatursensor

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2605297B2 (ja) * 1987-09-04 1997-04-30 株式会社村田製作所 白金温度センサおよびその製造方法
JPH0563054A (ja) * 1991-08-29 1993-03-12 Nippon Steel Corp ウエハ温度測定方法及び装置
JPH07273057A (ja) * 1994-03-30 1995-10-20 Kokusai Electric Co Ltd 半導体製造装置
JPH08285699A (ja) * 1995-04-14 1996-11-01 Matsushita Electric Ind Co Ltd 加熱容器内温度センサ

Also Published As

Publication number Publication date
JP2001208616A (ja) 2001-08-03
KR20010078070A (ko) 2001-08-20
TW486564B (en) 2002-05-11
US20010022803A1 (en) 2001-09-20

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