TW455684B - Parallel mechanism and test apparatus - Google Patents

Parallel mechanism and test apparatus Download PDF

Info

Publication number
TW455684B
TW455684B TW089119678A TW89119678A TW455684B TW 455684 B TW455684 B TW 455684B TW 089119678 A TW089119678 A TW 089119678A TW 89119678 A TW89119678 A TW 89119678A TW 455684 B TW455684 B TW 455684B
Authority
TW
Taiwan
Prior art keywords
actuator
substrate
actuators
along
guide rail
Prior art date
Application number
TW089119678A
Other languages
English (en)
Chinese (zh)
Inventor
Naobumi Okada
Naohisa Nakahara
Hajime Takahashi
Hiroyuki Kiba
Kazuya Hirose
Original Assignee
Olympus Optical Co
Hephaist Seiko Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co, Hephaist Seiko Co Ltd filed Critical Olympus Optical Co
Application granted granted Critical
Publication of TW455684B publication Critical patent/TW455684B/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H21/00—Gearings comprising primarily only links or levers, with or without slides
    • F16H21/46—Gearings comprising primarily only links or levers, with or without slides with movements in three dimensions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J17/00—Joints
    • B25J17/02—Wrist joints
    • B25J17/0258—Two-dimensional joints
    • B25J17/0266—Two-dimensional joints comprising more than two actuating or connecting rods
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/62—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides
    • B23Q1/621—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides a single sliding pair followed perpendicularly by a single sliding pair
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Robotics (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Transmission Devices (AREA)
TW089119678A 1999-09-22 2000-09-22 Parallel mechanism and test apparatus TW455684B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26876399 1999-09-22

Publications (1)

Publication Number Publication Date
TW455684B true TW455684B (en) 2001-09-21

Family

ID=17462984

Family Applications (1)

Application Number Title Priority Date Filing Date
TW089119678A TW455684B (en) 1999-09-22 2000-09-22 Parallel mechanism and test apparatus

Country Status (5)

Country Link
JP (1) JP3635572B2 (ja)
KR (1) KR100432359B1 (ja)
CN (1) CN1288434C (ja)
TW (1) TW455684B (ja)
WO (1) WO2001022069A1 (ja)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI264532B (en) * 2001-11-05 2006-10-21 Olympus Corp Substrate inspection device
CN103954626B (zh) * 2014-04-17 2016-07-13 来安县新元机电设备设计有限公司 手机屏幕裂纹检测仪
CN104440875B (zh) * 2014-11-06 2016-04-06 河南理工大学 工作空间可调的三自由度并联机构及其调整方法
CN105150199B (zh) * 2015-10-27 2017-02-01 河南理工大学 结构可调的三自由度并联机构
CN105252524B (zh) * 2015-11-25 2017-01-25 河南理工大学 带加强柱的三自由度并联机构
CN105606614A (zh) * 2016-01-27 2016-05-25 太仓井林机械科技有限公司 一种外观检测设备

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0559219U (ja) * 1992-01-21 1993-08-06 テクノエイト株式会社 基板検査装置
US5752834A (en) * 1995-11-27 1998-05-19 Ling; Shou Hung Motion/force simulators with six or three degrees of freedom
ES2174138T3 (es) * 1996-02-07 2002-11-01 Vdw Ev Dispositivo para el movimiento de un cuerpo en el espacio.
JPH10110799A (ja) * 1996-10-02 1998-04-28 Hitachi Ltd モーションベース
JP4166340B2 (ja) * 1997-09-24 2008-10-15 オリンパス株式会社 基板検査装置

Also Published As

Publication number Publication date
CN1288434C (zh) 2006-12-06
CN1376265A (zh) 2002-10-23
KR100432359B1 (ko) 2004-05-20
WO2001022069A1 (fr) 2001-03-29
JP3635572B2 (ja) 2005-04-06
KR20020035875A (ko) 2002-05-15

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