CN1288434C - 平行机械装置及检查装置 - Google Patents

平行机械装置及检查装置 Download PDF

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Publication number
CN1288434C
CN1288434C CNB008132992A CN00813299A CN1288434C CN 1288434 C CN1288434 C CN 1288434C CN B008132992 A CNB008132992 A CN B008132992A CN 00813299 A CN00813299 A CN 00813299A CN 1288434 C CN1288434 C CN 1288434C
Authority
CN
China
Prior art keywords
direct
actuator
acting
mentioned
acting actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB008132992A
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English (en)
Chinese (zh)
Other versions
CN1376265A (zh
Inventor
冈田尚史
中原尚寿
高桥一
木场博之
广濑和也
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd
Publication of CN1376265A publication Critical patent/CN1376265A/zh
Application granted granted Critical
Publication of CN1288434C publication Critical patent/CN1288434C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H21/00—Gearings comprising primarily only links or levers, with or without slides
    • F16H21/46—Gearings comprising primarily only links or levers, with or without slides with movements in three dimensions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J17/00—Joints
    • B25J17/02—Wrist joints
    • B25J17/0258—Two-dimensional joints
    • B25J17/0266—Two-dimensional joints comprising more than two actuating or connecting rods
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/62—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides
    • B23Q1/621—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides a single sliding pair followed perpendicularly by a single sliding pair
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Robotics (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Transmission Devices (AREA)
CNB008132992A 1999-09-22 2000-09-21 平行机械装置及检查装置 Expired - Fee Related CN1288434C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP268763/99 1999-09-22
JP26876399 1999-09-22

Publications (2)

Publication Number Publication Date
CN1376265A CN1376265A (zh) 2002-10-23
CN1288434C true CN1288434C (zh) 2006-12-06

Family

ID=17462984

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB008132992A Expired - Fee Related CN1288434C (zh) 1999-09-22 2000-09-21 平行机械装置及检查装置

Country Status (5)

Country Link
JP (1) JP3635572B2 (ja)
KR (1) KR100432359B1 (ja)
CN (1) CN1288434C (ja)
TW (1) TW455684B (ja)
WO (1) WO2001022069A1 (ja)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI264532B (en) * 2001-11-05 2006-10-21 Olympus Corp Substrate inspection device
CN103954626B (zh) * 2014-04-17 2016-07-13 来安县新元机电设备设计有限公司 手机屏幕裂纹检测仪
CN104440875B (zh) * 2014-11-06 2016-04-06 河南理工大学 工作空间可调的三自由度并联机构及其调整方法
CN105150199B (zh) * 2015-10-27 2017-02-01 河南理工大学 结构可调的三自由度并联机构
CN105252524B (zh) * 2015-11-25 2017-01-25 河南理工大学 带加强柱的三自由度并联机构
CN105606614A (zh) * 2016-01-27 2016-05-25 太仓井林机械科技有限公司 一种外观检测设备

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0559219U (ja) * 1992-01-21 1993-08-06 テクノエイト株式会社 基板検査装置
US5752834A (en) * 1995-11-27 1998-05-19 Ling; Shou Hung Motion/force simulators with six or three degrees of freedom
ES2174138T3 (es) * 1996-02-07 2002-11-01 Vdw Ev Dispositivo para el movimiento de un cuerpo en el espacio.
JPH10110799A (ja) * 1996-10-02 1998-04-28 Hitachi Ltd モーションベース
JP4166340B2 (ja) * 1997-09-24 2008-10-15 オリンパス株式会社 基板検査装置

Also Published As

Publication number Publication date
CN1376265A (zh) 2002-10-23
KR100432359B1 (ko) 2004-05-20
WO2001022069A1 (fr) 2001-03-29
JP3635572B2 (ja) 2005-04-06
TW455684B (en) 2001-09-21
KR20020035875A (ko) 2002-05-15

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C06 Publication
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GR01 Patent grant
C17 Cessation of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20061206

Termination date: 20091021