TW422974B - Optical information recording medium - Google Patents

Optical information recording medium Download PDF

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Publication number
TW422974B
TW422974B TW087106386A TW87106386A TW422974B TW 422974 B TW422974 B TW 422974B TW 087106386 A TW087106386 A TW 087106386A TW 87106386 A TW87106386 A TW 87106386A TW 422974 B TW422974 B TW 422974B
Authority
TW
Taiwan
Prior art keywords
glass
recording medium
weight
substrate
information recording
Prior art date
Application number
TW087106386A
Other languages
English (en)
Inventor
Hiroki Yamamoto
Takashi Naito
Takashi Namekawa
Yasutaka Suzuki
Ken Takahashi
Original Assignee
Hitachi Ltd
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Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Application granted granted Critical
Publication of TW422974B publication Critical patent/TW422974B/zh

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Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/2403—Layers; Shape, structure or physical properties thereof
    • G11B7/24065—Layers assisting in recording or reproduction below the optical diffraction limit, e.g. non-linear optical layers or structures
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00—Glass compositions
    • C03C3/04—Glass compositions containing silica
    • C03C3/062—Glass compositions containing silica with less than 40% silica by weight
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00—Glass compositions
    • C03C3/04—Glass compositions containing silica
    • C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
    • C03C3/078—Glass compositions containing silica with 40% to 90% silica, by weight containing an oxide of a divalent metal, e.g. an oxide of zinc
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00—Glass compositions
    • C03C3/04—Glass compositions containing silica
    • C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
    • C03C3/083—Glass compositions containing silica with 40% to 90% silica, by weight containing aluminium oxide or an iron compound
    • C03C3/085—Glass compositions containing silica with 40% to 90% silica, by weight containing aluminium oxide or an iron compound containing an oxide of a divalent metal
    • C03C3/087—Glass compositions containing silica with 40% to 90% silica, by weight containing aluminium oxide or an iron compound containing an oxide of a divalent metal containing calcium oxide, e.g. common sheet or container glass
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
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    • C03C3/00—Glass compositions
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    • C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
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    • C—CHEMISTRY; METALLURGY
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  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
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422974 A7 B7 經濟部中央標準局貝工消费合作社印製 五、發明説明（1 ) (發明所屬之技術領域） 本發明係關於一種資訊記錄媒體，尤其是，關於一種 以高記錄密度可讀出或寫入，且對於重複之記錄再生動作 具有高可靠性的光資訊記錄媒體。 (以往之技術） 作爲光資訊記錄媒體，有碟片（CD)，影碟（LD )等廣泛普及，在最近，實用化具有CD之7倍記錄密度 數位影碟（DVD)被實用化。該DVD係除了在基板直 接寫入讀出資訊的讀出專用的ROM(DVD—ROM) 之外，也進行開發可重寫之記錄再生媒體，而作爲電腦用 之RAM(DVD—RAM)也被檢討其實用性》 在DVD，藉由使用比CD等所使用之雷射（波長約 8 0 0 nm)短波長之6 5 0 nm的雷射光以達成高密度 記錄化，惟爲了處理電腦圖表等之大容量資訊•必須達成 其1 . 5〜2倍的高記錄密度化，爲了達成該目的，再進 行短波長之綠〜藍色半導體雷射（波長5 2 0〜4 1 0 n m )之開發。 作爲另一高記錄密度化技術，有超解像膜。該超解像 膜係形成在記錄媒體下面的薄膜，介經縮小化透過該膜之 入射光的射束點，可達成高記錄密度化。 超解像效果之一機構，係吸收飽和現象，乃超解像度 係透過具有該吸收飽和量以上之強度的光，而其以下之強 度的光被吸收的利用非線形光學特性的現象，固被利用於 請k, Μ 讀 背 面 之 注 項. 再 填 寫 本 頁 本紙張尺度適用中國國家標準（CNS)A4規格（210X297公釐> -4- *«422974 A7 B7 五、發明説明（2 ) 讀寫之雷射束之空間性強度係呈高斯分布，因此*介經射 束通過超解像膜，低強之底寬部分係藉由超解像膜被吸收 ，而光透過中心部分之高強度部分。因此可縮小透過後之 射束徑。 現在，作爲此種超解像膜，眾知有如日本特開平8 -96412號公報的酞花青（Phthalocyanive)系的有機薄 膜或硫硒碲（Colcogenide)，或化合物半導體微粒子等· 其他，眾知以相同有機材料，有將日本特開平6 - 1 6 2 5 6 4公報記載的熱變色材料，或日本特開平6_ 2 6 7 0 7 8號公報記載的彩色照相材料被使用作爲超解 像膜的嘗試。 婧 先 閲 讀 背 面 之 注- 項. 再 填 寫 本 頁 經濟部中央標準局員工消费合作社印製 (發明欲解決之課題） 但是*在如上述之材料中，在可靠性，生產性等上分 別有問題》亦即*有機薄膜係在記錄或讀出，因電子束之 能密度會在局部極高•因此，重複實行記錄或再生動作時 ，有逐漸劣化膜的顧慮。所以•如電腦用之R AM等，在 如頻繁地實行記錄再生的嚴酷之使用環境下難得到充分之 記錄再生動作的保證期間。 又1由於硫硒碲係化學上不安定，因此難得到較久之 保證期間》又，在化學物半導體微粒子係製作過程較難。 本發明之目的係在於提供一種可保證充分久之重複記 錄再生動作*且生產性良好又具有超解像效果之超解像膜 的光記錄媒體》 本紙張尺度適用中国國家標隼（CNS ) A4規格（210X29?公釐） -5- 經濟部中央標準局貝工消费合作社印製 422974 A7 _______B7五、發明説明（3 ) (解決課題所用之手段） 爲了解決上述課題，本發明之第1項發明的光資訊記 錄媒體係具備：形成有記錄資訊之記錄層的基板，及設於 該基板上的非線形地變化被照射之光強度分布與透過之光 強度分布的玻璃者。 基板係能透過光者較佳，由玻璃等無機物所構成者， 成聚碳酸酯，聚對一酞酸乙二酯等之有機物所構成者等較 理想。在此，玻璃係非晶質化之固體氧化物，或以此爲主 成分的所有非晶質相。 設於基板上係指直接設置也可以，經由其他層，例如 保護層等設置也可以。 介經該上述構成，可提供一種大容量，又對於重複讀 出，寫入上劣化少的資訊記錄碟片》 在第1項發明中，記錄層係記錄資訊的位元圖案也可 以。所謂:位元圖案係介經將資訊設於基板表面的孔之配置 予以記錄者。在該記錄方法，係無法重寫被記錄之資訊， 惟若製作記錄資訊之基板的母模時，由於可容易地大量生 產相同之記錄基板，因此，使用在電影，音樂或電腦程式 的記錄β 又，第1項發明之記錄層，介經光能來記錄資訊者也 可以β介經光能來記錄資訊者，係藉由光照射使結晶形變 化之所謂相變化型之有機或無機物材料使用作爲記錄層的 資訊記錄基板。 本紙張尺Α適用中國國家楳準（CNS)A4规格（2丨ΟΧ297公釐） (請先《讀背面之注意事項再填寫本頁) 經濟部中央標準局貝工消費合作社印装 422974 ^ A7 B7五、發明説明（4 ) 本發明之第2項發明的資訊記錄媒體，其特徵爲：至 少具有基板，及記錄設於該基板上之資訊的記錄層，及 反射設於該記錄層上之光的反射膜， 該基板係對於被照射之光強度的增加使光透過率非線 形地增加的玻璃者。 依照上述構成•可提供一種大容量，又對於重複讀出 寫入較少劣化的反射型資訊記錄碟片》 第2項發明，係介經設於記錄膜下部之反射膜，來反 射入射光，以該反射光能讀取資訊之形式的資訊記錄基板 〇 第1或第2項發明之玻璃係含有過渡金屣元素，稀土 類金靥元素中之至少一種以上的玻瑪者。 上述過渡金屜元素，稀土類金屬元素係由T i ，V， Cr ，Mn，Fe，Co，Ni ，Nd，Ce，Pr， Sm，Eu，Tb，Ho，Er ，Fm中所選擇之至少一 種以上之元素者較理想。 上述過渡金屬元素，稀土類金屬元素係 玻璃爲膜時，對於整體玻璃以氧化物換算含有2 0重 量％以上，9 0重量％以下· 玻璃爲基板時，對於整體玻璃以氧化物換算含有 0 . 1重量％以上，29重量％以下較理想》 又，在第1項發明中，上述玻璃係以氧化物換算含有 Si〇2: 6 〜80 重量％，R2〇: 0 〜20 重量％(R =鹼金羼元素），.B2〇3:〇〜30重量％，c〇o: <請先閲讀背面之注意Ϋ項再填寫本頁) 訂 本紙張尺度適用中固國家標準（CNS > A4坑格（2丨0X297公釐） 422974 經濟部中央標车局負工消費合作杜印裝 A7 B7五、發明説明（5 ) 20〜90重量％較理想· 又，在第2項發明中•上述玻璃係將鈷氧化物以 (：〇0換算含有0.1〜2 9重量％之玻璃較理想。 本發明之第3項發明的資訊記錄媒體*係屬於具備： 形成有記錄資訊之記錄層的基板，及 設於該基板上，對於被照射之光強度的增加使光透過 率非線形地增加的超解像層的資訊記錄媒體•其特徵爲： 上述資訊記錄媒體之1 04次之重複記錄後的輸出保持 率爲9 0%以上者。 輸出保持率係照射光實行第1次之記錄，讀取該資訊 時之電氣訊號的強度作爲1 0 0% ·而經過1 04次記錄* 再生後之電氣訊號的強度被保持多少之數値。介經重複光 照射|超解像膜劣化時，則達到記錄層之雷射光的射束點 徑變大，結果會降低電氣輸出。亦即|盡量長期間地可維 持輸出保持率的超解像膜較理想。 又，··依照本發明之第4項發明的資訊記錄媒體，係屬 於具備：具有透光性的基板，及記錄設於該基板上之資訊 的記錄層的資訊記錄媒體，其特徵爲：上述資訊記錄媒體 係被記錄之訊號的頻率8MH z之輸出降低爲1 KH z的 輸出之一 3 0 dB以內，且1 〇4次重複記錄後之輸出保持 率爲9 0%以上者* 第8圖係表示有無本發明之超解像膜的記錄頻率與輸 出的關係者》有超解像膜者，由於到達記錄層之雷射光的 射束點徑被縮小，因此可成爲較高頻成分之記錄。表示可 {請先W請背面之注意事項再填寫本頁) 本紙张尺度速用中國國家標準（CNS )A4規格（210X297公釐） -8- 以2974〜A 422974 Α7 Β7 經濟部中央標準局員工消費合作社印製 五、發明説明（6 ) 記錄何種高頻成分的指標者爲上述構成所表示。 依照本發明之第5項發明，提供一種玻璃，其特激爲 :以氧化物換算含有S i 〇2 : 6〜80重量％，R2〇 : 〇〜20重量％ (R=鹼金屬元素），B2〇3 : 〜30 重量％，C〇0:20〜90重量％者》 上述玻璃係作爲具有超解像效果之膜，並不被限定於 光碟而可設在各種媒體上。例如•對於藉由照射雷射光來 激磁螢光體，使之發光的顯示裝置，介經將本發明之玻璃 膜設在螢光體表面，因可聚焦雷射光之射束點，可成爲更 精細之顯示。 依照本發明之第6項發明*提供一種玻璃薄膜，其特 徵爲：以CoO換算鈷氧化物含有0,1〜29重量％者 〇 玻璃膜時，若添加多量C 〇0,則因析出I透明消失 (devitrification)，因此限定C 〇 0添加量之上限。 (發明之實施形態） (實施例） 使用本發明之實施例加以詳細說明β在表1表示在本 發明被檢討之玻璃靶的組成· {請先Μ讀背面之注意事項再填弈本瓦) 本紙張尺度適用中國國家揉準（CNS)A4規格（210X297公釐）-9- B7 五、發明説明（7 ) 表1
No. i 粗成（重量％) 靶 膜質 S1O2 Na2〇 CaO MgO Al2〇3 C〇3〇4 CoO 種類 1 70.4 13.6 7.8 4.0 1.3 2.9 玻璃 〇 2 69.0 13.3 7.6 3.9 1,3 4.9 玻璃 〇 3 51.8 10.0 5.7 2.9 1.0 28.6 玻璃 〇 4 45.3 8.8 5.0 2.6 0.9 37.4 燒結 〇 5 29.0 5.6 3.2 1.6 0.6 60.0 燒結 〇 6 14.5 2.8 1.6 0.8 0.3 80.0 燒結 〇 7 5.9 1.4 0.5 0.2 0.1 91.9 燒結 X 8 . 100 燒結 X 9 51.8 10.0 5.7 2.9 1.0 . 28.6 玻璃 〇 10 29.0 5.6 3.2 1.6 0.6 60.0 燒結 〇 11 14.5 2.8 1.6 0.8 0.3 . 80.0 燒結 〇 12 5.9 1.4 0.5 0.2 0.1 舍 91.9 燒結 X 13 • _ • - 100 燒結 X (诗先聞讀背面之注意事項再填寫本瓦) 經濟部中央標準局員工消费合作社印裝 在表1中，在膜質之欄，由所得到之膜的透明性，均 質性等，可得到均質之膜時記入〇，而不是記入X。作爲 母玻璃使用鈉鈣系之玻璃，作爲遷移金臑使用在6 5 0 nm附近具有大吸收的C 〇氧化物。作爲C 〇氧化物原料 使用C〇3〇4中與CoO，No . 1至No . 7係碳酸鈉 玻璃與C〇3〇4所構成的靶。其中，因No . 1至No . 3係玻璃化》因此將玻璃塊作爲靶。在No·4至No. 本紙張尺度適用中國國家揉準（CNS)A4il格（210X297公釐） · 經濟部中央榡率局貝工消费合作社印製 422974 ^ A7 B7五、發明説明（8 ) 7係C 〇3〇4含有量較多，未玻璃化。因此，製作玻璃粉 末與C 〇 3〇4粉末之混合物的燒結體，作爲燒結靶。 又，No . 8係僅有C〇3〇4之比較例的燒結靶。 在No.9至No·13係作爲Co氧化物原料使用 CoO，此時，也由於在CoO含有量爲28.6重量％ 之No · 9成爲玻璃化，因此作爲玻璃耙。因在No . 10至No.12未成爲玻璃化，因此，作爲母玻璃原料 與CoO的燒結體靶。 又，No . 1 3係僅有CoO之比較例的燒結靶* 玻璃靶係秤量所定量之原料粉末之後，放入白金製坩 堝內，在電爐中加熱至約1 5 0 0TC，加以熔解。充分熔 解玻璃之後，在事先保溫在約4 0 0t之石墨工模流入玻 璃融液，經急冷後，再加熱成約6 0 0 °C後介經徐冷以實 行消除應力。硏磨加工背面埤得到靶用玻璃塊。 燒結靶係造粒所定量之原料粉末後，放進金屬模使之 成形。經脫脂後，在所定溫度施熱壓燒結而得到燒結體靶 。熱處理溫度係C 〇氧化物原料爲C 〇 3〇4時作爲9 0 0 °C •而 CoO 時作爲 1200 °C。 作爲以碟片形狀加以評價之前階段*製作表示於第2 圖的玻璃薄膜之預備檢討用試料並測定玻璃薄膜之基本物 性。在第2圖中，1係基板，2係玻璃薄膜。在本檢討中 ，作爲1之基板使用厚度0 . 55mm | 30mm方形的 碳酸鈉玻璃基板》 藉由薄膜X線衍射法評價生成之膜的構造時，可知不 {請先W讀背面之注意事項，再填寫本頁) 本紙張尺度適用中國國家#準（CNSM4規格（210X297公釐） . 422974 經濟部中央標準局貝工消費合作杜印製 A7 B7五、發明説明（9 ) 管靶爲玻璃或燒結體，所生成之膜係均爲非晶質，可知生 成玻璃膜· 在第3圖表示使用表示於表1的靶所成膜之玻鴒薄膜 的透過率的波長之依存性。透過率之測定係使用以單色器 成爲單色化白色光源所實行。在No . 1，係c〇3〇4含 有量太少，在3 0 0 nm幾乎沒有表示吸收之峰値•在 No . 2至No . 4係在5 0 0 nm〜7 0 0 n’m之領域 中雖稍少惟有表示依Co吸收的峰値•在No.3玻璃中 ’波長6 5 0~nm之透過率係約8 5%。 在No · 5，6薄膜中，表示雖透過率値充分低，惟 透過率係波長愈短愈小，介經漫射可減少透過率。又在 No . 7之玻璃及No . 8的C〇3〇4中，雖透過率低， 惟在濺射環境被還原，得到具金屬光澤之膜。因此，依反 射而減少透過率。 —方面，在以CoO作爲原料的No . 9至No . 1 1玻璃·中，在波長500nm至700nm附近可看到 表示依C 〇之吸收的峰値，透過率係隨著增加C 〇 0含有 量愈降低，而在No.11之含有80%CoO之薄膜中 *波長6 5 0 nm之透過率係成爲約5%。又在N 〇 . 12之CoO含有量有91 . 9重量％玻璃及No . 13 之CoOl00%之膜，係得到與No.8之情形同樣之 結果。 爲了解析第3圖中之透過率曲線之光譜的不相同，介 經X P S來解析C 0之價數及氧化物狀態•在第4圖表示 {诗先Μ讀背面之注意事項再填寫本頁) 訂 本紙張尺度適用中國國家標準（CNS) Α4規格（210X297公釐）-12- 422974 A7 B7 五、發明説明（1〇) {請先閲讀背曲之注意事項再填寫本頁)
No.3與No.5薄膜之C0之XPS光譜。在No. 3薄膜之光譜中，在7 8 6 e V附近存有所謂霣動峰値的 蜂値。此乃表示存在很多C02+。一方面，在No . 5薄 膜之光譜，並沒有該震動峰値。此乃表示爲C 03 +之共存 的C〇3〇4之氧化物狀態。所以，產生繞射，成爲如第3 圖的輪廓。 對於其他薄膜也同樣地調査，具有C 02 +之狀態者係 如No . 2，3，10，1 1所示成爲C0特有之吸收的 峰値，而存在C03 +者係如No . 5，6所示成爲配合繞 射之曲線。 在第5圖*表示從No . 2，3，10，11之薄膜 的透過率曲線，對於靶之CO離子含有量施以實驗的波長 6 5 0 n m的透過率，透過率係隨著C 〇 0含有量的增加 而減低，C 〇 0含有量爲6 0%時成爲約3 0% β 經濟部中央標準局員工消费合作杜印裝 以下，爲了評價產生之玻璃薄膜中之C 0含有量，介 經二次離‘子質量分析（S IMS)實行膜之組成分析。作 爲基板使用切出與靶組成相同玻璃者，而在其基板上濺射 同組成之薄膜•又，在本實施例•作爲靶組成使用No. 3以檢討》 將結果表示於第6圖•可知C Ο元素之含有量係薄膜 中之含有量比基板中多。又，在S i係薄膜中者較少。然 而，這些之變化量較小*很少有產生組成之大偏離的可能 性較少•由此可知膜組成係與靶組成大約相等》 由此*存在於玻璃薄膜中之C 0氧化物含有量•係以 本紙張尺度適用中國國家標準（CNS)A4規格（210X297公釐） .*|3- 422974 A7 B7 五、發明説明（11)
CoO之氧化物換算，爲4.5重量％以上85重量％以 下，以C〇3〇4換算爲4 . 9重量％以上9 1重量％以下 較理想。有CoO爲不足4,5重量％，膜厚300nm 時，無法得到充分吸收光。又，C 〇 0含有量超過8 5重 量％時，膜具有金靥光澤，透過率會降低· (實施例2 ) 以下，製作形成本玻璃之ROM碟片，來檢討超解像 效果。 在第15圖表示在本發明所使用之光記錄裝置的構成 圚。使用此種構成的光記錄裝置·試驗本發明之ROM碟 片之性能。其他實施例也使用同稱之裝置。 在第7圖表示製作之ROM碟片之剖面的槪略圖*在 第7圖中，1係聚碳酸酯基板，2係玻璃薄膜，5係 S i 〇3保護膜，4係A 1反射膜，6係具有資訊寫入之位 元。 ‘· ROM碟片係藉由以下之工程加以製作•首先，在光 阻劑上使用雷射形成具有資訊的凹坑圖案。然後，在N i 金屬模複製凹坑圖案•在該金屬模將聚碳酸酯藉由射出成 形形成基板。將1 6 0 nm之玻璃膜藉濺射形成在該基板 上，並形成S i 〇2保護膜1 40nm之後，形成1 〇〇 nmA 1反射膜*在本實施例中|作爲玻璃薄膜形成 No.11·又•作爲比較例•也製作未形成玻璃膜的 R Ο Μ碟片* (請先W讀背面之注意Ϋ項再填寫本瓦) 訂 經濟部中央樣準局貝工消f合作社印製 ·ί ϋ· 本紙張尺度適用中國國家揉準（CNS ) A4規格（2丨0X297公釐} .14- ^22974 ^ a7 B7 五、發明説明（12) 所製作之R 0M碟片之再生輸出強度的頻率依存性係 介經光譜分析器加以解析•將結果表示於第8圓。再生雷 射功率係4mW。可知形成No.11之玻璃薄膜時，較 未形成時，輸出電平在高頻成分爲止仍髙。在ROM碟片 上，由於信號之高頻成分係以更緻密之凹坑圖案所描繪， 而形成玻璃膜時•表示能讀取至更微細之凹坑圖案施行再 生輸出的情形•由此，形成玻璃膜時，可知能得到超解像 效果。 在表1中之其他玻璃膜檢討同樣之檢討，可確認在 No · 3至No · 6，No . 9至No . 11之玻琪膜得 到同稱之超解像效果· 經濟部中央標準局貝工消费合作社印製 (請先《讀背面之注意事項再填寫本頁) 以下，製作將在上述所檢討之玻璃薄膜形成在基板上 的RAM碟片，並評價其特性•在第1圔表示以本發明所 製作之RAM碟片之剖面圖的模式圖·在第1圖中，1係 聚碳酸酯基板，2係玻璃超解像膜》3係記錄膜，4係反 射膜，5·，5’係保護膜*在本發明，作爲1之聚碳酸酯 基板使用厚度0 · 6mm，直徑1 2 Omm之圓盤形狀者 。在其上面以濺射法成膜3 0 0 nm之玻璃膜•在其上面 成膜8 0 nm之Z nS-S i 〇2保護膜後，回稱以濺射法 成膜約2 0 nm之記錄膜的G e — S b — T e系相變化膜 。形成約9 0 nm之保護膜之後，再成膜約2 0 0 nm之 A 1 T i反射膜· 玻璃薄膜係藉由以下之方法加以成膜。亦即•作爲靶 ，製作厚5mm，直徑1 2 0mm之玻璃塊或燒結體，在 本紙張尺度適用中國Η家樣率（CNS)A4規鼻（ 210X297公釐） .15· 4 2 2 9 7 4 a? B7 五、發明説明（13) 背面使用真空用有機系黏接劑張貼C u製襯料板。濺射係 使用Ar氣體。功率係作爲20mV »濺射中，藉旋轉基 板均勻地成膜在基板中·在本實施例中，作爲玻璃膜使用 No.11·又，作爲比較例製作未形成玻璃膜的RAM 碟片。 在第9圖表示等間隔地製作等形狀之記錄標誌的 RAM碟片之對於其記錄標誌長度的再生輸出強度》讀出 之雷射功率係作爲2mW*可知再生輸出係形成No, 11之玻璃薄膜之實施例者與未形成之比較例相比較對於 標誌長度有變高之情形。由此，可知形成玻璃膜之情形* 對於更短之標誌長度可再生。由此，對於RAM碟片也可 確認超解像效果。 又，檢討表1中之所有玻璃薄膜時，可得到ROM碟 片時同樣之結果。 經濟部中央標準局貝工消费合作杜印製 (請先閱讀背面之注意事項再填寫本頁) 以下，調査以上之得到超解像效果時之反射光的空間 強度分佈‘。將形成玻璃膜並得到超解像效果時與未形成玻 璃膜時之射束之進行方向對於雷射光之強度分佈的模式圖 表示於第1 4圖。未形成玻璃膜時，空間分佈強度係形成 大約高斯分佈•而在形成玻璃膜時，可知射束分佈偏向進 行方向》同時，可知讀出所需之射束強度的射束徑Q係比 未成膜玻璃膜時較小。 由此，可知藉由如此地形成本實施例的玻璃膜。可變 化讀出之光強度或強度分佈。又，在此時可得超解像效果 本紙張尺度逍用中國國家標準（CNS > A4规格U10X297公釐） -16- 422974 ' at B7 五、發明説明（14) (實施例3 ) 以下，檢討對於重複再生之膜的劣化。評價係將重複 再生訊號光照射在所製作之RAM碟片*藉由檢測再生輸 出來實行。凹坑節距係0.作爲玻璃薄膜，使用 No.11 ，又，作爲比較例，選擇酞花青系有機薄膜， 實行同樣之檢討。 在第1 0圖，表示對於重複次數之輸出。在形成有機 材料系薄膜的碟片，可知從約1 0，0 0 0次之重複次數 逐漸地降低輸出。一方面，在形成本發明之玻璃薄膜的碟 片，藉由1 0 0，0 0 0次之重複也幾乎未見有降低輸出 。如上所述，可知本發明之光碟係藉由重複之再生也可保 持超解像效果。 又，作爲玻璃薄膜，即使使用表1中之其他玻璃膜中 在實施例2可得到超解像效果者時，對於重複再生也可得 到高安定'性。 經濟部中央標準局貝工消资合作社印装 (請先閱讀背面之注意事項再填寫本頁) (實施例4 ) 以下，檢討玻璃薄膜之組成•首先，注重於玻璃膜中 之CO氧化物的含有量，製作與實施例2同稱之RAM碟 片，調査對於C 0含有量之輸出的關係。將標誌長度係作 爲◦ . 3/zm。又，雷射功率係2mW ♦在第11圖表示 對於C 〇 0含有量之輸出。可知隨著C 〇 0含有量上昇， 輸出係增加，對於小標誌長度也可得到高輸出·亦即可知 本紙張尺度適用中國困家標準（CNS)A4規格（210X297公釐） -17 422974 Λ7 Β7 五、發明説明（15) 隨著C 〇 0含有量上昇，超解像效果變大•又，可知在 C 〇〇含有量爲20%以上時，输出爲5 dB以上，可處 理作爲訊號*但是在C ο Ο含有量爲不足2 0%，输出爲 不足5 d B，不可能處理作爲訊號。 又，製作表示於第7圖的ROM碟片，藉由光譜分析 器來評價對於高頻成分之输出，可知在C 〇 0含有量爲 2 0%以上，可讀取至較高頻成分，惟在C 〇 0含有量爲 不足2 0%，無法顯著地看到C 〇 0含有量之效果。 由上可知，ROM，RAM時，CoO含有量係均盼 望在2 0重量％以上。又，由實施例1之檢討C 〇 0含有 量係在9 1 %以下較理想》 經濟部中央標準局貝工消費合作社印製 <請先閱讀背面之注意事項再填寫本頁) 又，檢討含有於玻璃膜中之元素，母玻璃係鈉鈣玻璃 «在含有過渡金屬元素中之T i ，V，C r，Mn，Fe ，Co，Ni ，Cu及稀土類元素中之Nd，Ce，Pr ，Sm，Eu，Tb，Ho，Er ，Tm 中至少一元素的 氧化物的;玻璃，係在各該元素具有特有之吸收光譜，藉由 使用產生吸收之波長帶的雷射，可得到與實施例2同樣的 超解像效果· 由以上•介經使用含有過渡金屬氧化物，稀土類氧化 物中Ti ，V，Cr，Mn，Fe，Co，Ni ，Cu， Nd，Ce *Pr ，Sm’Eu，Tb，Ho，Er ，
Tm中至少一元素的玻璃薄膜，可得到具有超解像效果的 光碟。 以下，實行母玻璃組成之檢討•在以上之實施例，係 本纸張尺度適用中國國家標準（CNS ) A4规格（210X297公釐) ·18· A7 B7 經濟部中央標準局貝工消费合作社印製 五、發明説明（16) 使用鈉鈣玻璃，惟使用含有硼之硼矽酸玻璃也可得到同稱 之效果。但是，在S i 〇2含有量不足6重量％，則作爲玻 璃之安定性較低，藉由含有過渡金靥或稀土類元素之氧化 物成爲結晶化之情形。又·在超過8 0重量％時，則在玻 璃之構造中不容易含有上述氧化物，很難得到安定的玻璃 。由以上可知，S i 〇2含有量係6重量％以上重董％以上 較理想。 又，含有於玻璃中之鹼氧化物的含有量超過2 0重量 %時，財玻瑀之耐久性變低·很難得到安定之玻璃。因此 ，鹼氧化物之含有量係2 0重量％以下較理想。 又，玻璃中之硼氧化物的含有量係超過3 0重量％時 ，則在玻璃構造中不容易含有過渡金靥或稀土類元素之氧 化物，因而很難得到安定之玻璃因此*硼氧化物之含有 量係3 0重量％以下較理想。 上述必須成分之外》作爲用於安定化玻璃之成分含有 鹼土類氧，·化物或二氧化鋁•氧化锆等較理想* (實施例5 ) 以下，製作含有過渡金屬元素的玻璃基板並檢討超解 像效果。將所製作的RAM碟片之剖面表示於第1 2圖· 在第1 2圖中，1 2係玻璃基板，3係記錄膜* 4係反射 膜，5，5’係保護膜。基板厚度係0 . 6mm，在其上 面介經以光阻劑作爲掩蔽的反應性離子蝕刻施以磁軌•又 »在第1 3圓，表示使用同稱之基板所製作的ROM碟片 (请先閲讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家橾準（CNS ) A4規格（210X297公嫠） .-|9- 42^974 A7 B7 五、發明説明（17) 之剖面的橫式圖•在第1 3腼中，1 2係玻璃基板，4係 反射膜，6係其爲資訊寫入的記錄標誌*在本實施例，係 作爲玻璃基板之母玻璃使用鈉鈣玻璃，作爲過渡金屬氧化 物含有CoO，其含有量係變化至0 . 0 1〜30重量％ *使用與實施例2同稱之評價法來檢討超解像效果。 在表2表示所製作之玻璃基板之組成·玻璃化之可否 及超解像效果之良否。在玻璃化之可否，係未結晶化而成 爲玻璃時係作爲0，結晶化，透明消失時係作爲X。又| 在超解像效果之良否，係表示0 . 3 μιη之標誌長度及空 間長度的輸出。讀出之雷射波長爲6 8 0 nm。 請 先 閲 讀 背 面 之 注
I 經 濟 部 t 央 標 準 局 員 工 消 費 合 作 社 印 % 表2 No. 組成（重量％) 玻璃化 超解像效果 (輸出/dB) SiOi Na2〇 CaO MgO AhOj CaO 14 72.5 14.0 8.0 4.1 1.4 0.01 〇 5 15 72.5 14.0 8.0 4.1 1.4 0.05 〇 5 16 72.5" 14.0 8.0 4.1 1.4 0.10 〇 10 17 71.8 13.9 7.9 4.0 1.4 1.00 〇 16 18 65.9 12.7 7.3 3.7 1.3 9.1 〇 33 19 51.8 10.0 5.7 2.9 1.0 28.6 〇 41 20 50.7 9.8 5.6 2.9 1.0 30.0 X 21 66 9 B2〇3 g 1 5 10.0 〇 33 22 49 9 26 1 5 10 〇 35 23 43 9 32 1 5 10 X 本紙張尺度適用中國國家標準^郇卜斗洗格^⑴以耵公釐} -20- 經濟部中央標準局員工消費合作社印装 2974， A7 ____B7___ 五、發明説明（18) 在實施例No . 14〜19No . 21〜23，不會 產生結晶化或透明消失，可製作安定之玻璃β 一方面，在 Ν 〇 · 2 0之玻璃，係在玻璃流進後產生相分離’無法得 到安定之玻璃。由以上可知，含有於玻璃之C 〇 0量係 29%以下較理想·又，No.21〜23之玻璃係添加 B2〇3代替No·14〜19之玻璃的CaO者。 觀看再生輸出時，C 〇 0含有量爲0 . 1 0重量％以 上時可得到1 0 d B以上之輸出，並可讀出訊號。一方面 ，在0.05重量％以下時，則輸出小至5dB以下而無 法讀出。 由以上可知，CoO含有量係0 · 10重量？6以上， 2 9重量％以下較理想。該效果係，添加B 2 〇3代替 C a 0的玻璃也同稱。 (發明之’效果） 依照本發明，可提供一種大容量，又對於重複之讀出 *寫入較少劣化的資訊記錄碟片。本發明係介經依通常之 製造工程的製造，可提供一種大容童之光碟》 (圖式之簡單說明） 第1圖係表示以本發明所製作之R AM碟片之剖面的 模式圖。 第2圖係表示以本發明所製作之模擬樣品之剖面的模 本纸朱尺度適用中國國家標準（CNS ) A4規格（210X297公釐） .21 - (請先聞讀背兩之注意Ϋ項再填寫本頁 訂 經濟部中央標準局貝工消费合作社印製 4 2 2 9 7 4 - A7 ___B7五、發明説明（19) 式圖。 第3圖係表示以本發明所製作之玻璃薄膜之透過率的 波長依存性· 第4圖係表示以本發明所製作之玻璃薄膜之C 0的 X P S。 第5圖係表示對於C 〇 0含有量之6 8 0 nm的光透 過率。 第6圖係表示成膜在靶組成之玻璃基板上之玻璃薄膜 的 S I M S - 第7圖係表示以本發明所製作之ROM碟片之剖面的 模式圖。 第8圖係表示從第7圖之ROM碟片所得到之輸出的 讀出頻率依存性。 第9圖係表示對於從第1圖之RAM碟片所得到之記 錄標誌長度的輸出變化。 第1’0圖係表示對於從第1圖之RAM碟片所得到之 重複動作的輸出依存性* 第11圈保表示對於第1圖之RAM碟片之CoO含 有量的讀出输出之變化* 第12圖係表示以本發明所製作之RAM碟片之剖面 的模式圖》 第1 3圖係表示以本發明所製作之ROM碟片之剖面 的模式圖。 第1 4圖係表示形成本發明之玻璃膜時，及未形成時 本:紙張尺度適用中國國家標準（CNS ) A4規格（21〇Χ2ί>7公釐) 92- (請先聞讀背面之注意事項'再填寫本頁) 42^974 A7 B7 五、發明説明（2〇) 之雷射束徑的變化。 第15圖係表示使用本發明之光碟之裝置的構成圖 (記號之說明） 1 :基板，2 :玻璃薄膜， ，5，5 ’ ：保護膜，6 :凹坑 記錄膜，4 :反射膜 2:玻璃基板。 (請先閲讀背面之注意事項再填寫本頁) 經濟部中央標準局員工消费合作社印製 本紙張尺度適用中國國家標準（CNS)A4坑格（210X297公釐） .23-

Claims (1)

  1. 杈濟部智慧財彦局員消費合作社印製 4之2974 、 韻 Cg —一、 - ------D8 | 六、申請專利範圍 ' - 第871〇6386號專利申請案 中文申請專利範圍修正本 民國8 8年1 2月修正 _ 1 種光資訊記錄媒體’係屬於至少具備基板，及 广錄設於該基板上之資訊的記錄層，及設於該基板與該記 錄層之間的玻璃層，照射光並再生資訊的光資訊記錄媒體 ’其特徵爲： 該玻璃層係所照射之光的強度分佈與透過之光的強度 分佈呈非線形地變化的玻璃^ 2 .如申淸專利範圍第丄項所述之光資訊記錄媒體， 其中，上述記錄層爲記錄資訊的凹坑圖案者。 3 .如申請專利範圍第丨項所述之光資訊記錄媒體， 其中，上述記錄層爲介經光能來記錄資訊者。 4 . 一種光資訊記錄媒體，係屬於至少具備基板，及 記錄設於該基板上之資訊的記錄層，及反射設於該記錄層 上之光的反射膜；照射光並再生資訊的光資訊記錄媒體， 其特徵爲： 6亥蕋板係對於被照射之光強度的增加使光透過率非線 形地增加的玻璃。 5 .如申請專利範圍第1項或第4項所述之光資訊記 錄媒體’其中，上述玻璃係含有過渡金屬元素，稀土類金 屬元素中之至少一種以上的玻璃者。 6 ，如中請專利範圍第5項所述之光資訊記錄媒體， 其中，上述過渡金屬元素，稀土類金屬元素係由T i ， 本紙張尺度適用中國國家標準（CNS)A4規格（210x 297公釐） ! ' 裝---- ----訂---------'#— (請先閱讀背面之注意事項再填寫本頁) 422974 A8 B8 C8 D8 經濟部智慧財度局員工消費合作社印製 六、申請專利範圍 V'Cr 'Mii'Fe 'Co'Ni > N d C e · P r ，Sm，Eu’Tb，Ho，Er，Fm中所選擇之至少 種以上之元素者 7 如申請專利範圍第6項所述之光資訊記錄媒體， 其中，上述過渡金屬元素，稀土類金屬元素係 玻璃爲膜時’對於整體玻璃以氧化物換算含有2 0重 量％以上，9 0重量％以下。 玻璃爲基板時，對於整體玻璃以氧化物換算含有 〇 . 1重量％以上，2 9重量％以下者。 8 .如申請專利範圍第1項所述之光資訊記錄媒體， 其中，上述玻璃係以氧化物換算含有S 1 0 2 : 6〜8 0重 量％，R2〇 : 0〜20重量％ (R=鹼金屬元素）， B 2 0 3 ： 0〜30重量％，CoO: 20〜90重量％者 〇 9 .如申請專利範園第4項所述之光資訊記錄媒體> 其中，上述玻璃係將鈷氧化物以C 〇 〇換算含有〇 . 1〜 2 9重量％之玻璃者。 1 0 · —種資訊記錄媒體，係屬於具備： 形成有記錄資訊之記錄層的基板，及 設於該基板上，對於被照射之光強度的增加使光透過 率非線形地增加的超解像層的資訊記錄媒體，其特徴爲： 上述資訊記錄媒體之1 0 4次之重複記錄後的輸出保持 率爲9 0 %以上者。 1 1 · --種資訊記錄媒體’係屬於具備： (請先閲讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家榡準（CNS ) A4说格（2丨0X297公釐） -2 - 4229?4 μ ^ C8 Dg 六、申請專利範圍 基板，及 記錄設於該基板上之資訊的記錄層的資訊記錄媒體， 其特徵爲： 上述資訊記錄媒體係被記錄之訊號的頻率8 ΜΗ z之 輸出降低爲1 Κ Η z的輸出之一 3 0 d B以內，且1 〇 4次 重複記錄後之輸出保持率爲9 0 %以上者。 1 2 種玻璃，其特徵爲：以氧化物換算含有 Si_〇2: 6〜8 ◦重量％，R2〇:0〜20重量％(R =鹼金屬元素），B 2 0 3 : 0〜3 0重量％，C ◦〇： 20〜90重量％者。 1 3 . —種玻璃薄膜，其特徵爲：以C 〇 0換算鈷氣 化物含有0 , 1〜2 9重量％者。 (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -3-
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EP0884723A3 (en) 2001-02-28
CN1201976A (zh) 1998-12-16
US20040170842A1 (en) 2004-09-02
JPH10340482A (ja) 1998-12-22
CN1135541C (zh) 2004-01-21
US20040170797A1 (en) 2004-09-02
US6440517B1 (en) 2002-08-27
EP0884723B1 (en) 2003-11-19
EP1302939A3 (en) 2003-06-04
US20030008760A1 (en) 2003-01-09
US6177169B1 (en) 2001-01-23
EP1302939A2 (en) 2003-04-16
KR100551648B1 (ko) 2006-04-21
EP0884723A2 (en) 1998-12-16
US5985401A (en) 1999-11-16

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