JP4193147B2 - 光学的情報記録媒体及びその製造方法 - Google Patents
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- JP4193147B2 JP4193147B2 JP2005283680A JP2005283680A JP4193147B2 JP 4193147 B2 JP4193147 B2 JP 4193147B2 JP 2005283680 A JP2005283680 A JP 2005283680A JP 2005283680 A JP2005283680 A JP 2005283680A JP 4193147 B2 JP4193147 B2 JP 4193147B2
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- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
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- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
- G11B7/242—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
- G11B7/243—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
- G11B2007/24302—Metals or metalloids
- G11B2007/24312—Metals or metalloids group 14 elements (e.g. Si, Ge, Sn)
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- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
- G11B7/242—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
- G11B7/243—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
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- G11B2007/24314—Metals or metalloids group 15 elements (e.g. Sb, Bi)
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- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
- G11B7/242—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
- G11B7/243—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
- G11B2007/24302—Metals or metalloids
- G11B2007/24316—Metals or metalloids group 16 elements (i.e. chalcogenides, Se, Te)
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- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
- G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
- G11B7/257—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers
- G11B2007/25705—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials
- G11B2007/25706—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials containing transition metal elements (Zn, Fe, Co, Ni, Pt)
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
- G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
- G11B7/257—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers
- G11B2007/25705—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials
- G11B2007/2571—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials containing group 14 elements except carbon (Si, Ge, Sn, Pb)
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
- G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
- G11B7/257—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers
- G11B2007/25705—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials
- G11B2007/25713—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials containing nitrogen
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
- G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
- G11B7/257—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers
- G11B2007/25705—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials
- G11B2007/25715—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials containing oxygen
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
- G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
- G11B7/258—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of reflective layers
- G11B7/2585—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of reflective layers based on aluminium
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- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Optical Record Carriers And Manufacture Thereof (AREA)
- Manufacturing Optical Record Carriers (AREA)
Description
前記酸窒化物誘電体層が、Siを主成分とし、Hf、Mn、Fe、Nb、Mo、Al、W及びAgからなる群から選択された少なくとも1種の元素が添加されたSi系酸窒化物を含むことを特徴とする。
前記反射層は、外部から照射されて前記基板、前記酸窒化物誘電体層、前記情報記録層及び前記誘電体層を透過した光を、前記情報記録層に向けて反射し、
前記第1の誘電体層の屈折率が前記酸窒化物誘電体層の屈折率よりも大きく、前記第2の誘電体層の屈折率が前記酸窒化物誘電体層の屈折率よりも大きいとする構成を採用することも出来る。なお、各誘電体層や反射層などはそれぞれ、1層で構成することも、或いは、複数層で構成することも出来る。
前記反射層は、外部から照射されて前記透明シート、前記酸窒化物誘電体層、前記情報記録層及び前記第1の誘電体層を透過した光を前記情報記録層に向けて反射し、
前記第2の誘電体層の屈折率が前記酸窒化物誘電体層の屈折率よりも大きく、前記第3の誘電体層の屈折率が前記酸窒化物誘電体層の屈折率よりも大きいとする構成を採用することも出来る。この場合にも、各誘電体層や反射層などはそれぞれ、1層で構成することも、或いは、複数層で構成することも出来る。
11:透明基板
12:第1誘電体層(ZnS−SiO2膜)
13:酸窒化物誘電体層(酸窒化膜)
14:第2誘電体層(ZnS−SiO2膜)
15:第1界面層(GeN膜)
16:情報記録層(Ge2Sb2Te5膜)
17:第2界面層(GeN膜)
18:第3誘電体層(ZnS−SiO2膜)
19:反射層(AlTi膜)
20:光ディスク
21:基板
22:反射層(AlTi膜)
23:第1誘電体層(ZnS−SiO2膜)
24:第1界面層(GeN膜)
25:情報記録層(Ge2Sb2Te5膜)
26:第2界面層(GeN膜)
27:第2誘電体層(ZnS−SiO2膜)
28:酸窒化物誘電体層(酸窒化膜)
29:第3誘電体層(ZnS−SiO2膜)
30:透明フィルム
Claims (11)
- 基板と、該基板上に形成された酸窒化物誘電体層及び情報記録層とを有する光学的情報記録媒体において、
前記酸窒化物誘電体層が、Siを主成分とし、Mn、Fe、Nb、Mo、及び、Wからなる群から選択された少なくとも1種の元素が添加されたSi系酸窒化物を含むことを特徴とする光学的情報記録媒体。 - 前記Si系酸窒化物が、39〜67.5原子%の酸素を含有することを特徴とする、請求項1に記載の光学的情報記録媒体。
- 前記酸窒化物誘電体層の屈折率が1.43〜1.8の範囲であることを特徴とする、請求項1に記載の光学的情報記録媒体。
- 前記Si系酸窒化物は、前記元素を、0.2〜10原子%含有することを特徴とする、請求項1に記載の光学的情報記録媒体。
- 前記基板が透明基板であり、該透明基板上に、第1の誘電体層と、前記酸窒化物誘電体層と、第2の誘電体層と、前記情報記録層と、第3の誘電体層と、反射層とがこの順に積層されており、
前記反射層は、外部から照射されて前記基板、前記酸窒化物誘電体層、前記情報記録層及び前記誘電体層を透過した光を、前記情報記録層に向けて反射し、
前記第1の誘電体層の屈折率が前記酸窒化物誘電体層の屈折率よりも大きく、前記第2の誘電体層の屈折率が前記酸窒化物誘電体層の屈折率よりも大きいことを特徴とする、請求項1に記載の光学的情報記録媒体。 - 前記基板上に、反射層と、第1の誘電体層と、前記情報記録層と、第2の誘電体層と、前記酸窒化物誘電体層と、第3の誘電体層と、透明シートとがこの順に積層されており、
前記反射層は、外部から照射されて前記透明シート、前記酸窒化物誘電体層、前記情報記録層及び前記第1の誘電体層を透過した光を前記情報記録層に向けて反射し、
前記第2の誘電体層の屈折率が前記酸窒化物誘電体層の屈折率よりも大きく、前記第3の誘電体層の屈折率が前記酸窒化物誘電体層の屈折率よりも大きいことを特徴とする、請求項1に記載の光学的情報記録媒体。 - アルゴン(Ar)、酸素(O2)及び窒素(N2)を含有する混合ガスの雰囲気下で、反応性スパッタリングによって基板上に酸窒化物誘電体層を形成する工程と、情報記録層を形成する工程とを有し、
前記反応性スパッタリングは、Siを主成分とし、Mn、Fe、Nb、Mo、及び、Wからなる群から選択された少なくとも1種の元素が添加されたターゲットを使用することを特徴とする光学的情報記録媒体の製造方法。 - 前記混合ガスの組成は、(Ar、O2、N2)体積%の表記で、(90、9、1)体積%と、(80、12、8)体積%と、(70、12、18)体積%と、(70、2、28)体積%と、(80、3、17)体積%と、(90、7、3)体積%とで囲まれた六角形とその内部の領域により示される組成であることを特徴とする、請求項7に記載の光学的情報記録媒体の製造方法。
- 前記Siを主成分とするターゲットは、Mn、Fe、Nb、Mo、及び、Wからなる群から選択された少なくとも1種の元素が、1〜26.7原子%添加されていることを特徴とする、請求項7又は8に記載の光学的情報記録媒体の製造方法。
- 透明基板上に積層を形成する工程であって、第1誘電体層を形成する工程と、アルゴン、酸素及び窒素を含有する混合ガスの雰囲気下で、反応性スパッタリングにより酸窒化物誘電体層を形成する工程と、第2誘電体層を形成する工程と、情報記録層を形成する工程と、第3誘電体層を形成する工程と、反射層を形成する工程とを順次に含む工程を有し、
前記反応性スパッタリングが、Siを主成分とし、Mn、Fe、Nb、Mo、及び、Wからなる群から選択された少なくとも1種の元素が添加されたターゲットを使用することを特徴とする光学的情報記録媒体の製造方法。 - 基板上に積層を形成する工程であって、反射層を形成する工程と、第1の誘電体層を形成する工程と、情報記録層を形成する工程と、第2誘電体層を形成する工程と、アルゴンガス、酸素ガス及び窒素ガスを含有する混合ガスの雰囲気下で、反応性スパッタリングにより酸窒化物誘電体層を形成する工程と、第3誘電体層を形成する工程と、透明シートを配設する工程とを順次に含む工程を有し、
前記反応性スパッタリングが、Siを主成分とし、Mn、Fe、Nb、Mo、及び、Wからなる群から選択された少なくとも1種の元素が添加されたターゲットを使用することを特徴とする光学的情報記録媒体の製造方法。
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JP2005283680A JP4193147B2 (ja) | 2005-09-29 | 2005-09-29 | 光学的情報記録媒体及びその製造方法 |
TW095135971A TW200729199A (en) | 2005-09-29 | 2006-09-28 | Phase-change optical disk |
US11/528,594 US20070072404A1 (en) | 2005-09-29 | 2006-09-28 | Phase-change optical disk |
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JP2000090491A (ja) * | 1998-09-14 | 2000-03-31 | Toshiba Corp | 相変化光記録媒体 |
US6449239B1 (en) * | 1998-11-25 | 2002-09-10 | Matsushita Electric Industrial Co., Ltd. | Optical information recording medium with thermal diffusion layer |
US6576967B1 (en) * | 2000-09-18 | 2003-06-10 | Motorola, Inc. | Semiconductor structure and process for forming a metal oxy-nitride dielectric layer |
SE0300056D0 (sv) * | 2003-01-14 | 2003-01-14 | Morph A | New glass material |
JP2005025910A (ja) * | 2003-06-13 | 2005-01-27 | Nec Corp | 光学的情報記録媒体及びその製造方法 |
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