TW376429B - Turbo vacuum pump and operation method therefor - Google Patents

Turbo vacuum pump and operation method therefor

Info

Publication number
TW376429B
TW376429B TW086112401A TW86112401A TW376429B TW 376429 B TW376429 B TW 376429B TW 086112401 A TW086112401 A TW 086112401A TW 86112401 A TW86112401 A TW 86112401A TW 376429 B TW376429 B TW 376429B
Authority
TW
Taiwan
Prior art keywords
pump
vacuum pump
turbo vacuum
rotors
reaction products
Prior art date
Application number
TW086112401A
Other languages
English (en)
Inventor
Seiji Sakagami
Takashi Nagaoka
Masahiro Mase
Chiaki Urano
Shinji Koyano
Original Assignee
Hitachi Ltd
Boc Edwards Japan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Boc Edwards Japan Ltd filed Critical Hitachi Ltd
Application granted granted Critical
Publication of TW376429B publication Critical patent/TW376429B/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/001—Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/70—Suction grids; Strainers; Dust separation; Cleaning
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2260/00—Function
    • F05D2260/60—Fluid transfer
    • F05D2260/607—Preventing clogging or obstruction of flow paths by dirt, dust, or foreign particles
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2260/00—Function
    • F05D2260/85—Starting
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
    • Y02T50/00—Aeronautics or air transport
    • Y02T50/60—Efficient propulsion technologies, e.g. for aircraft

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Control Of Positive-Displacement Air Blowers (AREA)
TW086112401A 1996-08-30 1997-08-28 Turbo vacuum pump and operation method therefor TW376429B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22971196A JP3550465B2 (ja) 1996-08-30 1996-08-30 ターボ真空ポンプ及びその運転方法

Publications (1)

Publication Number Publication Date
TW376429B true TW376429B (en) 1999-12-11

Family

ID=16896509

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086112401A TW376429B (en) 1996-08-30 1997-08-28 Turbo vacuum pump and operation method therefor

Country Status (4)

Country Link
US (1) US5961291A (zh)
JP (1) JP3550465B2 (zh)
KR (1) KR100230827B1 (zh)
TW (1) TW376429B (zh)

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* Cited by examiner, † Cited by third party
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TWI657853B (zh) * 2016-09-09 2019-05-01 大陸商中微半導體設備（上海）股份有限公司 排氣系統、防止塵粒回流的裝置及方法

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DE19930952A1 (de) * 1999-07-05 2001-01-11 Pfeiffer Vacuum Gmbh Vakuumpumpe
JP2001086704A (ja) * 1999-09-13 2001-03-30 Ebara Corp モータ一体構造の磁気軸受装置
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JP2003129991A (ja) * 2001-10-24 2003-05-08 Boc Edwards Technologies Ltd 分子ポンプ
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JP2003254285A (ja) * 2002-02-28 2003-09-10 Boc Edwards Technologies Ltd ポンプ装置
CN1675469A (zh) * 2002-08-20 2005-09-28 株式会社荏原制作所 真空泵及其起动方法
JP3967245B2 (ja) * 2002-09-30 2007-08-29 株式会社東芝 回転機の寿命予測方法及び回転機を有する製造装置
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US8540493B2 (en) 2003-12-08 2013-09-24 Sta-Rite Industries, Llc Pump control system and method
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US7874808B2 (en) 2004-08-26 2011-01-25 Pentair Water Pool And Spa, Inc. Variable speed pumping system and method
US8480373B2 (en) 2004-08-26 2013-07-09 Pentair Water Pool And Spa, Inc. Filter loading
US8019479B2 (en) 2004-08-26 2011-09-13 Pentair Water Pool And Spa, Inc. Control algorithm of variable speed pumping system
US8602745B2 (en) 2004-08-26 2013-12-10 Pentair Water Pool And Spa, Inc. Anti-entrapment and anti-dead head function
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US8823294B2 (en) 2007-06-27 2014-09-02 Brooks Automation, Inc. Commutation of an electromagnetic propulsion and guidance system
US7834618B2 (en) 2007-06-27 2010-11-16 Brooks Automation, Inc. Position sensor system
US8659205B2 (en) * 2007-06-27 2014-02-25 Brooks Automation, Inc. Motor stator with lift capability and reduced cogging characteristics
JP5663304B2 (ja) 2007-06-27 2015-02-04 ブルックス オートメーション インコーポレイテッド 多次元位置センサ
US8283813B2 (en) 2007-06-27 2012-10-09 Brooks Automation, Inc. Robot drive with magnetic spindle bearings
KR20100056468A (ko) 2007-07-17 2010-05-27 브룩스 오토메이션 인코퍼레이티드 챔버 벽들에 일체화된 모터들을 갖는 기판 처리 장치
DE102008031994B4 (de) * 2008-04-29 2011-07-07 Siemens Aktiengesellschaft, 80333 Fluidenergiemaschine
EP3418570B1 (en) 2008-10-06 2020-01-22 Pentair Water Pool and Spa, Inc. Method of operating a safety vacuum release system
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US11149737B2 (en) 2010-05-21 2021-10-19 Edwards Japan Limited Deposition detection device for exhaust pump and exhaust pump having the same
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JP5067454B2 (ja) * 2010-07-26 2012-11-07 ダイキン工業株式会社 圧縮機および空気調和機
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JP6077286B2 (ja) * 2012-11-30 2017-02-08 エドワーズ株式会社 電磁回転装置及び該電磁回転装置を備えた真空ポンプ
US11579072B2 (en) 2013-03-15 2023-02-14 Particles Plus, Inc. Personal air quality monitoring system
US10983040B2 (en) 2013-03-15 2021-04-20 Particles Plus, Inc. Particle counter with integrated bootloader
US12044611B2 (en) 2013-03-15 2024-07-23 Particles Plus, Inc. Particle counter with integrated bootloader
US10352844B2 (en) 2013-03-15 2019-07-16 Particles Plus, Inc. Multiple particle sensors in a particle counter
US9677990B2 (en) 2014-04-30 2017-06-13 Particles Plus, Inc. Particle counter with advanced features
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DE102013219766A1 (de) * 2013-09-30 2015-04-16 Siemens Aktiengesellschaft Anstreifdichtung und Dichtungsanordnung
JP6394229B2 (ja) * 2014-09-24 2018-09-26 株式会社島津製作所 ターボ分子ポンプ
JP6313249B2 (ja) * 2015-03-09 2018-04-18 株式会社東芝 処理システムの運転方法
JP6391171B2 (ja) * 2015-09-07 2018-09-19 東芝メモリ株式会社 半導体製造システムおよびその運転方法
JP6705169B2 (ja) * 2015-12-28 2020-06-03 株式会社島津製作所 監視装置および監視プログラム
DE102018108827B3 (de) * 2018-04-13 2019-05-29 Trumpf Schweiz Ag Verfahren zur Steuerung von zumindest einem Radialgebläse in einer Kälteanlage sowie Radialgebläse
JP7019513B2 (ja) * 2018-06-05 2022-02-15 株式会社荏原製作所 制御装置、制御システム、制御方法、プログラム及び機械学習装置
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Publication number Priority date Publication date Assignee Title
TWI657853B (zh) * 2016-09-09 2019-05-01 大陸商中微半導體設備（上海）股份有限公司 排氣系統、防止塵粒回流的裝置及方法

Also Published As

Publication number Publication date
KR100230827B1 (ko) 1999-11-15
US5961291A (en) 1999-10-05
KR19980019130A (ko) 1998-06-05
JP3550465B2 (ja) 2004-08-04
JPH1073088A (ja) 1998-03-17

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