TW200643311A - Vacuum exhaust system - Google Patents
Vacuum exhaust systemInfo
- Publication number
- TW200643311A TW200643311A TW095107150A TW95107150A TW200643311A TW 200643311 A TW200643311 A TW 200643311A TW 095107150 A TW095107150 A TW 095107150A TW 95107150 A TW95107150 A TW 95107150A TW 200643311 A TW200643311 A TW 200643311A
- Authority
- TW
- Taiwan
- Prior art keywords
- exhaust system
- vacuum
- vacuum exhaust
- rotors
- pair
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/0092—Removing solid or liquid contaminants from the gas under pumping, e.g. by filtering or deposition; Purging; Scrubbing; Cleaning
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D9/00—Priming; Preventing vapour lock
- F04D9/04—Priming; Preventing vapour lock using priming pumps; using booster pumps to prevent vapour-lock
- F04D9/044—Means for rendering the priming pump inoperative
- F04D9/048—Means for rendering the priming pump inoperative the means being outlet pressure sensors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Control Of Positive-Displacement Pumps (AREA)
Abstract
This invention provides a vacuum exhaust system capable of operating in a condition most optimum for the process conditions, to enhance the efficiency of the vacuum exhaust system. The vacuum exhaust system 10 is provided with vacuum pumps 20, 30, and a pressure sensor 50 disposed in a vacuum zone of the vacuum exhaust system 10. Each one of vacuum pumps 20, 30 includes a pair of rotors for delivering a gas, an electric motor for rotating the pair of rotors, a timing gear for synchronizing the pair of rotors, and a driver 26, or 36 for controlling the rotation speed of the electric motor. The vacuum exhaust system 10 is further provided with a control unit 60 for controlling the rotation speed of the rotors through the driver 26 or 36 of the vacuum pump 20 or 30.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005167508A JP2006342688A (en) | 2005-06-07 | 2005-06-07 | Evacuation system |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200643311A true TW200643311A (en) | 2006-12-16 |
TWI373565B TWI373565B (en) | 2012-10-01 |
Family
ID=37509656
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095107150A TWI373565B (en) | 2005-06-07 | 2006-03-03 | Vacuum exhaust system |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP2006342688A (en) |
KR (1) | KR101243891B1 (en) |
CN (1) | CN1877132B (en) |
TW (1) | TWI373565B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI640687B (en) * | 2012-05-02 | 2018-11-11 | 愛德華有限公司 | Method and apparatus for warming up a vacuum pump arrangement |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20130343912A1 (en) * | 2011-03-11 | 2013-12-26 | Ulvac Kiko, Inc. | Vacuum pump, vacuum exhaust device, and method of operating vacuum pump |
JP6375631B2 (en) * | 2014-02-05 | 2018-08-22 | 株式会社島津製作所 | Turbo molecular pump |
CN104295519A (en) * | 2014-10-17 | 2015-01-21 | 陕西科技大学 | Control device, water ring vacuum pump and control method thereof |
CN107215580A (en) * | 2016-03-22 | 2017-09-29 | 中国石油化工股份有限公司 | External floating roof tank sealing ring is monitored and protection device |
FR3054005B1 (en) * | 2016-07-13 | 2018-08-24 | Pfeiffer Vacuum | METHOD OF PRESSURE DESCENT IN A LOADING AND UNLOADING SAS AND ASSOCIATED PUMP GROUP |
CN106268518A (en) * | 2016-08-24 | 2017-01-04 | 佛山市思博睿科技有限公司 | A kind of multipath gas switching supply and the constant vacuum response system of total air demand |
CN108412740A (en) * | 2018-03-16 | 2018-08-17 | 东莞市基富真空设备有限公司 | A kind of the vacuum supply system and its control method of low energy consumption |
TW202035873A (en) * | 2019-03-29 | 2020-10-01 | 亞台富士精機股份有限公司 | Control method and vacuum system |
CN115339045B (en) * | 2022-08-25 | 2023-10-13 | 合肥通富微电子有限公司 | Plastic packaging method |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100189981B1 (en) * | 1995-11-21 | 1999-06-01 | 윤종용 | Apparatus for fabricating semiconductor device with vacuum system |
JPH1182347A (en) * | 1997-09-02 | 1999-03-26 | Ebara Corp | Method of operating vacuum pump |
JP3856661B2 (en) * | 2001-06-06 | 2006-12-13 | 株式会社荏原製作所 | Vacuum pump |
JP2003343472A (en) * | 2002-05-24 | 2003-12-03 | Teijin Seiki Co Ltd | Shaft sealing structure of vacuum pump |
JP2004068637A (en) * | 2002-08-02 | 2004-03-04 | Seiko Epson Corp | Exhausting device and method |
CN100400881C (en) * | 2002-08-23 | 2008-07-09 | 株式会社丰田自动织机 | Axle sealing structure for vacuum pump |
JP4218756B2 (en) * | 2003-10-17 | 2009-02-04 | 株式会社荏原製作所 | Vacuum exhaust device |
-
2005
- 2005-06-07 JP JP2005167508A patent/JP2006342688A/en active Pending
-
2006
- 2006-03-03 TW TW095107150A patent/TWI373565B/en active
- 2006-04-07 CN CN2006100741822A patent/CN1877132B/en not_active Expired - Fee Related
- 2006-06-05 KR KR1020060050360A patent/KR101243891B1/en active IP Right Grant
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI640687B (en) * | 2012-05-02 | 2018-11-11 | 愛德華有限公司 | Method and apparatus for warming up a vacuum pump arrangement |
Also Published As
Publication number | Publication date |
---|---|
TWI373565B (en) | 2012-10-01 |
CN1877132A (en) | 2006-12-13 |
JP2006342688A (en) | 2006-12-21 |
CN1877132B (en) | 2010-11-17 |
KR20060127789A (en) | 2006-12-13 |
KR101243891B1 (en) | 2013-03-20 |
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