TW200643311A - Vacuum exhaust system - Google Patents

Vacuum exhaust system

Info

Publication number
TW200643311A
TW200643311A TW095107150A TW95107150A TW200643311A TW 200643311 A TW200643311 A TW 200643311A TW 095107150 A TW095107150 A TW 095107150A TW 95107150 A TW95107150 A TW 95107150A TW 200643311 A TW200643311 A TW 200643311A
Authority
TW
Taiwan
Prior art keywords
exhaust system
vacuum
vacuum exhaust
rotors
pair
Prior art date
Application number
TW095107150A
Other languages
Chinese (zh)
Other versions
TWI373565B (en
Inventor
Keiji Tanaka
Tetsuro Sugiura
Koichi Kagawa
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Publication of TW200643311A publication Critical patent/TW200643311A/en
Application granted granted Critical
Publication of TWI373565B publication Critical patent/TWI373565B/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0092—Removing solid or liquid contaminants from the gas under pumping, e.g. by filtering or deposition; Purging; Scrubbing; Cleaning
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D9/00—Priming; Preventing vapour lock
    • F04D9/04—Priming; Preventing vapour lock using priming pumps; using booster pumps to prevent vapour-lock
    • F04D9/044—Means for rendering the priming pump inoperative
    • F04D9/048—Means for rendering the priming pump inoperative the means being outlet pressure sensors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Control Of Positive-Displacement Pumps (AREA)

Abstract

This invention provides a vacuum exhaust system capable of operating in a condition most optimum for the process conditions, to enhance the efficiency of the vacuum exhaust system. The vacuum exhaust system 10 is provided with vacuum pumps 20, 30, and a pressure sensor 50 disposed in a vacuum zone of the vacuum exhaust system 10. Each one of vacuum pumps 20, 30 includes a pair of rotors for delivering a gas, an electric motor for rotating the pair of rotors, a timing gear for synchronizing the pair of rotors, and a driver 26, or 36 for controlling the rotation speed of the electric motor. The vacuum exhaust system 10 is further provided with a control unit 60 for controlling the rotation speed of the rotors through the driver 26 or 36 of the vacuum pump 20 or 30.
TW095107150A 2005-06-07 2006-03-03 Vacuum exhaust system TWI373565B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005167508A JP2006342688A (en) 2005-06-07 2005-06-07 Evacuation system

Publications (2)

Publication Number Publication Date
TW200643311A true TW200643311A (en) 2006-12-16
TWI373565B TWI373565B (en) 2012-10-01

Family

ID=37509656

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095107150A TWI373565B (en) 2005-06-07 2006-03-03 Vacuum exhaust system

Country Status (4)

Country Link
JP (1) JP2006342688A (en)
KR (1) KR101243891B1 (en)
CN (1) CN1877132B (en)
TW (1) TWI373565B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI640687B (en) * 2012-05-02 2018-11-11 愛德華有限公司 Method and apparatus for warming up a vacuum pump arrangement

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE112012001192B4 (en) * 2011-03-11 2016-12-15 Ulvac Kiko, Inc. Vacuum pump, vacuum pumping device and method of operating a vacuum pump
JP6375631B2 (en) * 2014-02-05 2018-08-22 株式会社島津製作所 Turbo molecular pump
CN104295519A (en) * 2014-10-17 2015-01-21 陕西科技大学 Control device, water ring vacuum pump and control method thereof
CN107215580A (en) * 2016-03-22 2017-09-29 中国石油化工股份有限公司 External floating roof tank sealing ring is monitored and protection device
FR3054005B1 (en) * 2016-07-13 2018-08-24 Pfeiffer Vacuum METHOD OF PRESSURE DESCENT IN A LOADING AND UNLOADING SAS AND ASSOCIATED PUMP GROUP
CN106268518A (en) * 2016-08-24 2017-01-04 佛山市思博睿科技有限公司 A kind of multipath gas switching supply and the constant vacuum response system of total air demand
CN108412740A (en) * 2018-03-16 2018-08-17 东莞市基富真空设备有限公司 A kind of the vacuum supply system and its control method of low energy consumption
TW202035873A (en) * 2019-03-29 2020-10-01 亞台富士精機股份有限公司 Control method and vacuum system
CN115339045B (en) * 2022-08-25 2023-10-13 合肥通富微电子有限公司 Plastic packaging method

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100189981B1 (en) * 1995-11-21 1999-06-01 윤종용 Apparatus for fabricating semiconductor device with vacuum system
JPH1182347A (en) * 1997-09-02 1999-03-26 Ebara Corp Method of operating vacuum pump
JP3856661B2 (en) * 2001-06-06 2006-12-13 株式会社荏原製作所 Vacuum pump
JP2003343472A (en) * 2002-05-24 2003-12-03 Teijin Seiki Co Ltd Shaft sealing structure of vacuum pump
JP2004068637A (en) * 2002-08-02 2004-03-04 Seiko Epson Corp Exhausting device and method
CN100400881C (en) * 2002-08-23 2008-07-09 株式会社丰田自动织机 Axle sealing structure for vacuum pump
JP4218756B2 (en) * 2003-10-17 2009-02-04 株式会社荏原製作所 Vacuum exhaust device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI640687B (en) * 2012-05-02 2018-11-11 愛德華有限公司 Method and apparatus for warming up a vacuum pump arrangement

Also Published As

Publication number Publication date
JP2006342688A (en) 2006-12-21
CN1877132A (en) 2006-12-13
TWI373565B (en) 2012-10-01
KR101243891B1 (en) 2013-03-20
KR20060127789A (en) 2006-12-13
CN1877132B (en) 2010-11-17

Similar Documents

Publication Publication Date Title
TW200643311A (en) Vacuum exhaust system
IL196192A0 (en) Aircraft
TW200643309A (en) Method of operating a pumping system
WO2008073329A3 (en) Priming protection
NO20054621D0 (en) Centrifugal compressor and motor unit
WO2010061168A3 (en) Valve-controlled downhole motor
ATE470075T1 (en) SUBMERSIBLE PUMP UNIT
MX2009008091A (en) Ring motor.
TW200632216A (en) Dual horizontal scroll machine
WO2008078774A1 (en) Water pump
GB2367332B (en) Improvements in multi-stage screw compressor drive arrangements
WO2010083991A3 (en) Method for operating a load
WO2011128502A3 (en) Liquid ring pump and method for operating a liquid ring pump
EP1347154A3 (en) Valve lift control for internal combustion engine
WO2010017795A3 (en) Pump unit
EP1398506A3 (en) Hermetic multistage vacuum pump
WO2011029654A3 (en) Method for the operation of an electric machine, and driving device
IN2012DN01412A (en)
WO2006056309A8 (en) Circulation pump and method for production of a circulation pump
PL2343254T3 (en) Drum motor
WO2006096796A3 (en) Torque drive mechanism for gas compressor
DE102004044297A1 (en) Rotating piston machine has electric motor installed in motor casing with rotor mounted on one side in motor casing and on other side in machine casing co-axially with driven component of machine's rotor
AU2003274697A1 (en) Rotary machine having two rotors
AU2003230211A1 (en) Oil and vacuum pumps group for a motor vehicle engine
DE10344309A1 (en) Delivery pump, especially for liquid coolant for combustion engine, has effective transport volume bounded by transport wheel, transport elements that can be varied with engine parameters, e.g. temperature, speed, to change delivery rate