CN1877132A - Vacuum air-discharging system - Google Patents
Vacuum air-discharging system Download PDFInfo
- Publication number
- CN1877132A CN1877132A CNA2006100741822A CN200610074182A CN1877132A CN 1877132 A CN1877132 A CN 1877132A CN A2006100741822 A CNA2006100741822 A CN A2006100741822A CN 200610074182 A CN200610074182 A CN 200610074182A CN 1877132 A CN1877132 A CN 1877132A
- Authority
- CN
- China
- Prior art keywords
- mentioned
- vacuum pump
- vacuum
- rotor
- pair
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007599 discharging Methods 0.000 title 1
- 238000005086 pumping Methods 0.000 claims abstract description 82
- 239000000498 cooling water Substances 0.000 claims description 52
- 238000007789 sealing Methods 0.000 claims description 21
- 230000001360 synchronised effect Effects 0.000 claims description 12
- 239000007789 gas Substances 0.000 description 38
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 37
- 229910052757 nitrogen Inorganic materials 0.000 description 19
- 238000004519 manufacturing process Methods 0.000 description 10
- 238000000034 method Methods 0.000 description 6
- 239000004973 liquid crystal related substance Substances 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- 239000002699 waste material Substances 0.000 description 5
- 238000011144 upstream manufacturing Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000008676 import Effects 0.000 description 2
- 239000000314 lubricant Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 150000002829 nitrogen Chemical class 0.000 description 1
- 238000010791 quenching Methods 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 238000004781 supercooling Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/0092—Removing solid or liquid contaminants from the gas under pumping, e.g. by filtering or deposition; Purging; Scrubbing; Cleaning
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D9/00—Priming; Preventing vapour lock
- F04D9/04—Priming; Preventing vapour lock using priming pumps; using booster pumps to prevent vapour-lock
- F04D9/044—Means for rendering the priming pump inoperative
- F04D9/048—Means for rendering the priming pump inoperative the means being outlet pressure sensors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Control Of Positive-Displacement Pumps (AREA)
Abstract
The invention provides the vacuum-pumping system. The vacuum-pumping system (10) has vacuum pump (20), (30), and pressure sensing device (50). The vacuum pump (20), (30) have two rotors, motor, timing gear, and bootstrap driver (26), (36). The vacuum-pumping system (10) has control section (60), the pressure sensing device (50) detects the pressure, and the bootstrap driver (26), (36) controls the rotating speed of rotors.
Description
Technical field
The present invention relates to vacuum pumping system, specially refer in semiconductor fabrication process or liquid crystal manufacturing process etc., use with the vacuum pumping system of vacuum chamber exhaust as vacuum.
Background technique
At present, in semiconductor fabrication process or liquid crystal manufacturing process etc., using the vacuum pumping system of vacuum chamber exhaust as vacuum.In this vacuum pumping system, the specified running in situation onrelevant ground of vacuum pump and semiconductor fabrication process or liquid crystal manufacturing process etc.Yet after continuing the specified running of vacuum pump with treatment state onrelevant ground, the gas flow of carrying along with vacuum pump (gas load) increases, and the load on the vacuum pump increases.Therefore, the efficient that exists vacuum pumping system reduce, the problem of the lost of life of vacuum pump.
And, in vacuum pumping system, vacuum pump is cooled off by cooling water, still, this cooling water also with treatment state onrelevant ground always with a certain amount of vacuum pump that is fed into.Therefore, exist at load hour cooling water and be supplied to a lot of problem of amount, cooling water waste more than needing.
In addition, according to the kind of the processing gas that imports to vacuum pump inside, exist the situation of the secondary resultant of reaction at the inner solid state of vacuum pump.Owing to existing this to react bearing or the interior danger of shortening the life-span of vacuum pump of lubricant oil that secondary resultant is blended into pump rotor, so be used to prevent to react the nitrogen (shaft sealing gas) that secondary resultant is sneaked in the bearing part importing of vacuum pump.
In existing vacuum pumping system, import a certain amount of shaft sealing gas with treatment state onrelevant ground always, yet then influence ultimate pressure of a pump when zero load, so exist the situation of the shaft sealing gas flow of having to reduce importing if pour a large amount of shaft sealing gases into.But,, then exist the secondary resultant of reaction and be blended into the problem that the bearing of pump rotor or lubricant oil, vacuum pump stop if the shaft sealing gas flow reduces.
Summary of the invention
The present invention, in view of above-mentioned prior art problems point, purpose is to provide a kind of vacuum pumping system that turns round and can improve the efficient of vacuum pump system under the state that is suitable for most treatment state.
According to the 1st scheme of the present invention, provide a kind of make vacuum pump with the rotational speed running that is suitable for most treatment state, not only can improve the efficient of vacuum pump system but also can prolong the vacuum pumping system of service life of vacuum pump.This vacuum pumping system has at least 1 vacuum pump and is arranged at the pressure transducer of the vacuum area in the above-mentioned vacuum pump vent systems.Above-mentioned vacuum pump have conveying gas a pair of rotor, make above-mentioned a pair of rotor rotation motor, make the driver of the synchronous timing gear of above-mentioned a pair of rotor, the above-mentioned motor rotational speed of control.Above-mentioned vacuum pumping system also has control device, according to the pressure that is detected by above-mentioned pressure transducer, controls the rotational speed of above-mentioned rotor at least via the driver of above-mentioned 1 vacuum pump.
Above-mentioned at least 1 vacuum pump preferably is made of higher level's vacuum pump and back level vacuum pump, and above-mentioned control device is preferably according to the rotational speed of being controlled the rotor of above-mentioned higher level's pump by the pressure of above-mentioned pressure transducer detection.And above-mentioned control device preferably when the pressure that is detected by above-mentioned pressure transducer becomes bigger than predetermined value, reduces the rotational speed of above-mentioned rotor.
According to the 2nd scheme of the present invention, provide a kind of cooling water is supplied to vacuum pump, can improve the efficient of vacuum pumping system and do not waste the vacuum pumping system of cooling water with the flow of suitable treatment state.This vacuum pumping system has at least 1 vacuum pump, be arranged at the pressure transducer of the vacuum area in the above-mentioned vacuum pumping system, cooling water is supplied to the cooling water system of above-mentioned at least 1 vacuum pump.Above-mentioned vacuum pump have conveying gas a pair of rotor, make above-mentioned a pair of rotor rotation motor, make the synchronous timing gear of above-mentioned a pair of rotor.Above-mentioned vacuum pumping system also has control device, and the pressure according to being detected by above-mentioned pressure transducer comes control flows to cross the flow of the cooling water of above-mentioned cooling water system.Above-mentioned control device preferably when the pressure that is detected by above-mentioned pressure transducer becomes bigger than predetermined value, increases the flow of the cooling water that flows through above-mentioned cooling water system.
According to the 3rd scheme of the present invention, provide a kind of shaft sealing gas is supplied to vacuum pump, can improve the efficient of vacuum pumping system and prevents to react the vacuum pumping system that secondary resultant is blended into the bearing part of vacuum pump with the flow of suitable treatment state.This vacuum pumping system has at least 1 vacuum pump, be arranged at the pressure transducer of the vacuum area in the above-mentioned vacuum pumping system, shaft sealing gas is supplied to the gas system of above-mentioned at least 1 vacuum pump.Above-mentioned vacuum pump have conveying gas a pair of rotor, make above-mentioned a pair of rotor rotation motor, make above-mentioned one the synchronous timing gear of rotor.Above-mentioned vacuum pumping system also has control device, according to by the detected pressure of above-mentioned pressure transducer, comes control flows to cross the flow of the shaft sealing gas of above-mentioned gas system.Above-mentioned control device preferably when the pressure that is detected by above-mentioned pressure transducer becomes bigger than predetermined value, increases the flow of the shaft sealing gas that flows through the above-mentioned gas system.
According to the 4th scheme of the present invention, provide a kind of make vacuum pump with the rotational speed running of the most suitable treatment state, can improve the efficient of vacuum pumping system and prolong the vacuum pumping system in the life-span of vacuum pump.This vacuum pumping system has at least 1 vacuum pump.Above-mentioned vacuum pump have conveying gas a pair of rotor, make above-mentioned a pair of rotor rotation motor, make the driver of the rotational speed of the synchronous timing gear of above-mentioned a pair of rotor, the above-mentioned motor of control.Above-mentioned vacuum pumping system also has control device, according to the signal of the treatment state of the vacuum chamber that is connected with above-mentioned at least 1 vacuum pump of expression, controls the rotational speed of above-mentioned rotor at least via the driver of above-mentioned 1 vacuum pump.
According to the 5th scheme of the present invention, provide a kind of cooling water is supplied to vacuum pump, can improve the efficient of vacuum pumping system and do not waste the vacuum pumping system of cooling water with the flow of suitable treatment state.This vacuum pumping system has at least 1 vacuum pump, cooling water is supplied to the cooling water system of above-mentioned at least 1 vacuum pump.Above-mentioned vacuum pump have conveying gas a pair of rotor, make above-mentioned a pair of rotor rotation motor, make the synchronous timing gear of above-mentioned a pair of rotor.Above-mentioned vacuum pumping system also has control device, and the signal according to the treatment state of the vacuum chamber that is connected with above-mentioned at least 1 vacuum pump of expression comes control flows to cross the flow of the cooling water of above-mentioned cooling water system.
According to the 6th scheme of the present invention, provide a kind of shaft sealing gas is supplied to vacuum pump, can improve the efficient of vacuum pumping system and prevents to react the vacuum pumping system that secondary resultant is blended into the bearing part of vacuum pump with the flow of suitable treatment state.This vacuum pumping system has at least 1 vacuum pump, shaft sealing gas is supplied to the gas system of above-mentioned at least 1 vacuum pump.Above-mentioned vacuum pump have conveying gas a pair of rotor, make above-mentioned a pair of rotor rotation motor, make the synchronous timing gear of above-mentioned a pair of rotor.Above-mentioned vacuum pumping system also has control device, and the signal according to the treatment state of the vacuum chamber that is connected with above-mentioned at least 1 vacuum pump of expression comes control flows to cross the flow of the shaft sealing gas of above-mentioned gas system.
The effect of invention
According to the of the present invention the 1st and the 4th scheme, detect the pressure of vacuum area in the vacuum pumping system by pressure transducer, according to detected pressure or according to the signal of representing treatment state, the rotational speed of the rotor of may command vacuum pump, therefore, the rotational speed of vacuum pump can be adjusted into the speed of suitable treatment state.So, can improve the efficient of vacuum pumping system, prolong the life-span of vacuum pump.
According to the of the present invention the 2nd and the 5th scheme, detect the pressure of vacuum area in the vacuum pumping system by pressure transducer, according to detected pressure or according to the signal of representing treatment state, may command supplies to the flow of the cooling water of vacuum pump, thus, the flow that supplies to the cooling water of vacuum pump can be adjusted into the amount of suitable treatment state.So, can improve the efficient of vacuum pumping system, do not waste cooling water.
According to the of the present invention the 3rd and the 6th scheme, detect the pressure of vacuum area in the vacuum pumping system by pressure transducer, according to detected pressure or according to the signal of representing treatment state, may command supplies to the flow of the shaft sealing gas of vacuum pump, therefore, the flow that supplies to the shaft sealing gas of vacuum pump can be adjusted into the amount of suitable treatment state.So, can improve the efficient of vacuum pumping system, and not influence ultimate pressure of a pump when zero load, prevent to react the bearing part that secondary resultant is blended into vacuum pump.
Description of drawings
Fig. 1 is the ideograph of the vacuum pumping system of expression the 1st example of the present invention.
Fig. 2 is the figure of the variation of the rotational speed of expression the 1st example of the present invention.
Fig. 3 is the ideograph of the vacuum pumping system of expression the 2nd example of the present invention.
Fig. 4 is the ideograph of the vacuum pumping system of expression the 3rd example of the present invention.
Fig. 5 is the ideograph of the vacuum pumping system of expression the 4th example of the present invention.
Fig. 6 is the ideograph of the vacuum pumping system of expression the 5th example of the present invention.
Fig. 7 is the ideograph of the vacuum pumping system of expression the 6th example of the present invention.
Fig. 8 is the ideograph of the vacuum pumping system of expression the 7th example of the present invention.
Embodiment
Describe the example of vacuum pumping system of the present invention in detail to Fig. 8 below with reference to Fig. 1.In addition, in Fig. 8, for same or suitable constituting component, the repetitive description thereof will be omitted to pay same label at Fig. 1.
Fig. 1 is the ideograph of the vacuum pumping system 10 of expression the 1st example of the present invention.As shown in Figure 1, this vacuum pumping system 10 is vacuum chamber 12 exhausts that will use in semiconductor fabrication process or liquid crystal manufacturing process etc. the systems as vacuum, comprising: 2 vacuum pumps 20,30; The connecting tube 40 that connects preevacuation pump 20 and back level vacuum pump 30; Detect the pressure transducer 50 of connecting tube 40 internal pressures; The control device 60 of control vacuum pump 20,30.Pressure transducer 50 detects as the gas pressure in the connecting tube 40 of vacuum area, and the signal of detected force value is sent to control device 60.About the installation of pressure transducer 50, so long as that vacuum area is installed in is passable everywhere.For example, pressure transducer can be installed between vacuum chamber 12 and the preevacuation pump 20.
In preevacuation pump 20, during drive motor stator 22, a pair of rotor keeps shell 21 inner faces and rotor very little gap each other, contactlessly to opposite spin.Along with the rotation of a pair of rotor, the gas of suction side is enclosed within rotor and 21 on shell and is transported to the connecting tube 40 of exhaust end.
Back level vacuum pump 30 comprises: the shell 31 of accommodating a pair of rotor; Accommodate the motor stator 32 of the motor that makes the rotor rotation; Accommodate and make a pair of rotor gear cap 33 of the timing gear of rotation synchronously; Be arranged at the side cover 35 between shell 31 and the gear cap 33; The driver 36 of the rotational speed of control motor stator 32.The signal that driver 36 receives from control device 60 makes motor with predetermined rotational speed rotation.
In the level vacuum pump 30 of back, during drive motor stator 32, a pair of rotor keeps shell 31 inner faces and rotor very little gap each other, contactlessly to opposite spin.Along with the rotation of a pair of rotor, the gas in the connecting tube 40 of suction side is enclosed within rotor and 31 on shell and is transported to exhaust end.
Here, when the gas flow (gas load) of vacuum pump 20,30 conveyings increased, the load of vacuum pump 20,30 also increased, and the gas pressures in the connecting tube 40 also rise.So, in this example, by the gas pressure in the pressure transducer 50 detection connecting tubes 40, surpassed when detected force value under the situation of predetermined set value, sent instruction (signal) and make preevacuation pump 20 and/or the rotational speed decline of back level vacuum pump 30 to driver 26 and/or driver 36 from control device 60.Thus, the load of the vacuum pump under the situation that the gas flow of conveying is big 20,30 is alleviated.
And,, can hold the treatment state of vacuum chamber 12 according to by pressure transducer 50 detected force value.For example, according to pressure transducer 50 detected force value, can detect the semiconductor fabrication process of vacuum chamber 12 or stopping and beginning of liquid crystal manufacturing process.So, also can hold the treatment state of vacuum chambers 12 by the detected force value of pressure transducer 50, the rotational speed of control preevacuation pump 20 and/or back level vacuum pump 30 is to obtain the rotational speed of suitable this treatment state.
For example, when processing stops, shown in Fig. 2 (a), can then reduce the rotational speed of back level vacuum pump 30 earlier with the rotational speed reduction of preevacuation pump 20.And, when handling beginning, shown in Fig. 2 (b), can then improve the rotational speed of preevacuation pump 20 earlier with the rotational speed raising of back level vacuum pump 30.The exhaust performance influence of 30 pairs of vacuum pumping systems 10 of back level vacuum pump is very big.For example, after reducing rotational speed, improve once again under the state of rotational speed, owing to heating value does not sharply increase, thereby can not change the rotational speed of back grade vacuum pump 30, and will keep necessarily by rotor and the gap between the shell 31 that thermal expansion causes.And when considering the countermeasure for the secondary resultant of reaction, the rotational speed that can make level vacuum pump 30 in back for holding temperature is for certain.
Fig. 3 is the ideograph of the vacuum pumping system 110 of expression the 2nd example of the present invention.As shown in Figure 3, this vacuum pumping system 110 on the basis of the structure of the 1st example, also has the cooling water system 170 that cooling water is supplied to preevacuation pump 20 and back level vacuum pump 30.This cooling water system 170, make cooling water from motor stator 32, the rotor final level portion 131 of shell 31, the gear cap 33 of introducing port 171 by back level vacuum pump 30, again behind the gear cap 23 by preevacuation pump 20, the motor stator 22, discharge from outlet 172, to cool off back level vacuum pump 30 and preevacuation pump 20.
Upstream side at the back level vacuum pump 30 of cooling water system 170 is provided with common pipeline 173 and increment pipeline 174.Usually the flow of the cooling water that flows in the pipeline 173 for example is 1 liter of a per minute, and the flow of the cooling water that flows in increment pipeline 174 for example is 5 liters of per minutes.Solenoid valve 175 is set on increment pipeline 174.
In this example, by held the treatment state of vacuum chamber 12 by pressure transducer 50 detected force value, the cooling water that will flow through cooling water system 170 is adjusted into the flow of suitable treatment state.That is,, open the solenoid valve 175 of increment pipeline 174, flow through the amount of the cooling water of cooling water system 170 with increase surpassing under the situation of predetermined set value by pressure transducer 50 detected force value.Like this, the amount that flows through the cooling water of cooling water system 170 can be adjusted into the amount of suitable treatment state, so can not waste cooling water, the cooling vacuum pump 20,30 effectively.
And, solenoid valve 176 also can be set near introducing port 171 replace this common pipeline 173 and increment pipeline 174, adjust the full flow of cooling water system 170 by the switching of this solenoid valve 176.In addition, pressure transducer 177 also can be set on the connecting tube 13 that connects preevacuation pump 20 and vacuum chamber 12 replace being arranged at pressure transducer 50 on the connecting tube 40, the amount of coming the cooling water of control flows supercooling washing logical 170 according to these pressure transducer 177 detected force value.
Here, because the final level portion 131 of the rotor of shell 31 is barometric pressure one side, heating value increases.So, in this example, make cooling water system 170 by the final level portion 131 of the rotor of shell 31, by the final level portion 131 of water quench rotor.Yet, if the final level portion 131 of undue cooled rotor, exist the gas solid state and adhere to danger on the shell 31.Thus, in this example, in the final level portion 131 of rotor, temperature transducer 132 is set, measures the temperature of the final level portion 131 of rotor, make the final level portion of rotor keep suitable high temperature.In addition, as shown in Figure 3, the cooling water system 170 of the upstream side of the final level portion 131 of rotor is provided with three-way valve 178, and the bypass tube 179 in the downstream side that is connected in the final level portion 131 of rotor is installed on this three-way valve 178.
Fig. 4 is the ideograph of the vacuum pumping system 210 of expression the 3rd example of the present invention.As shown in Figure 4, this vacuum pumping system 210 on the basis of the structure of the 1st example, also has the nitrogen system 270 that the nitrogen as shaft sealing gas is supplied to preevacuation pump 20 and back level vacuum pump 30.This nitrogen system 270, nitrogen is supplied to shaft sealing 231a, side cover 35 shell 31 of the 1st side cover the 24, the 2nd side cover 25, back level vacuum pump 30 of preevacuation pump 20 respectively from introducing port 271, prevent to react the bearing part that secondary resultant is blended into preevacuation pump 20 and back level vacuum pump 30.
In addition,, thereby flow into the flow of the nitrogen of preevacuation pump 20 by increment pipeline 274a because preevacuation pump 20 reduces the ultimate pressure of the vacuum chamber of upstreams, littler than the flow of the nitrogen that flow into back level vacuum pump 30 by increment pipeline 274b.And, on the supply unit of the preevacuation pump 20 of nitrogen system 270 and back level vacuum pump 30, solenoid valve (for example, shown in the label 276,277) is set respectively, can control the amount of the nitrogen that supplies to each one respectively.
Fig. 5 is the ideograph of the vacuum pumping system 310 of expression the 4th example of the present invention.As shown in Figure 5, this vacuum pumping system 310, in the vacuum pumping system 10 of the 1st example shown in Figure 1, the working pressure sensor 50, but the external input signal 370 that will represent treatment state is input to control device 60, adjusts the rotational speed of preevacuation pump 20 and back level vacuum pump 30 according to this external input signal 370.About other characteristics, identical with above-mentioned the 1st example.
Fig. 6 is the ideograph of the vacuum pumping system 410 of expression the 5th example of the present invention.As shown in Figure 6, this vacuum pumping system 410, in the vacuum pumping system 110 of the 2nd example that Fig. 3 represents, the working pressure sensor 50, but the external input signal 370 that will represent treatment state is input to control device 60, adjusts the flow of the cooling water that supplies to preevacuation pump 20 and back level vacuum pump 30 according to this external input signal 370.About other characteristics, identical with above-mentioned the 2nd example.
Fig. 7 is the ideograph of the vacuum pumping system 510 of expression the 6th example of the present invention.As shown in Figure 7, this vacuum pumping system 510, in the vacuum pumping system 210 of the 3rd example that Fig. 4 represents, the working pressure sensor 50, but the external input signal 370 that will represent treatment state is input to control device 60, adjusts the flow of the nitrogen that supplies to preevacuation pump 20 and back level vacuum pump 30 according to this external input signal 370.About other characteristics, identical with above-mentioned the 3rd example.
Fig. 8 is the ideograph of the vacuum pumping system 610 of expression the 7th example of the present invention.This vacuum pumping system 610 is for having made up the system of above-mentioned the 1st to the 6th example.In this case, according to by pressure transducer 50 detected force value, can adjust the rotational speed of preevacuation pump 20 and back level vacuum pump 30, supply to the flow of the cooling water of preevacuation pump 20 and back level vacuum pump 30, and the flow that supplies to the nitrogen of preevacuation pump 20 and back level vacuum pump 30, perhaps, the external input signal 370 of expression treatment state is input to control device 60, adjusts the rotational speed of preevacuation pump 20 and back level vacuum pump 30 according to this external input signal 370, supply to the flow of the cooling water of preevacuation pump 20 and back level vacuum pump 30, and the flow that supplies to the nitrogen of preevacuation pump 20 and back level vacuum pump 30.
Here, external input signal 370 is handled the signal that stops and beginning for expression, and the checkout value of specific pressure sensor 50 is represented the information of treatment state more rightly.So, under the situation that can use external input signal 370, need not working pressure sensor 50.And, if can with handle stop or begin be input to control device 60 as external input signal 370 in actual treatment before the time, then can after preevacuation pump 20 and a back level vacuum pump 30 are placed optimal state, make processing stop or beginning.
To here examples more of the present invention being illustrated, still self-evident, the present invention is not limited to above-mentioned example, can implement in the various example in the thought range of its technology.
Claims (10)
1, a kind of vacuum pumping system is characterized in that having:
At least 1 vacuum pump, this vacuum pump possess conveying gas a pair of rotor, make above-mentioned a pair of rotor rotation motor, make the driver of the rotational speed of the synchronous timing gear of above-mentioned a pair of rotor, the above-mentioned motor of control;
Pressure transducer is set at the vacuum area in the above-mentioned vacuum pumping system; And
Control device according to the pressure that is detected by above-mentioned pressure transducer, is controlled the rotational speed of above-mentioned rotor at least via the driver of above-mentioned 1 vacuum pump.
2, vacuum pumping system as claimed in claim 1 is characterized in that:
Above-mentioned at least 1 vacuum pump is made of preevacuation pump and back level vacuum pump,
Above-mentioned control device is controlled the rotational speed of the rotor of above-mentioned fore pump according to the pressure that is detected by above-mentioned pressure transducer.
3, claim 1 or 2 described vacuum pumping systems is characterized in that:
Above-mentioned control device when the pressure that is detected by above-mentioned pressure transducer becomes bigger than predetermined value, reduces the rotational speed of above-mentioned rotor.
4, a kind of vacuum pumping system is characterized in that having:
At least 1 vacuum pump, this vacuum pump possess conveying gas a pair of rotor, make above-mentioned a pair of rotor rotation motor, make the synchronous timing gear of above-mentioned a pair of rotor;
Pressure transducer is set at the vacuum area in the above-mentioned vacuum pumping system;
Cooling water system supplies to above-mentioned at least 1 vacuum pump with cooling water; And
Control device, the pressure according to being detected by above-mentioned pressure transducer comes control flows to cross the flow of the cooling water of above-mentioned cooling water system.
5, vacuum pumping system as claimed in claim 4 is characterized in that:
Above-mentioned control device when the pressure that is detected by above-mentioned pressure transducer becomes bigger than predetermined value, increases the flow of the cooling water that flows through above-mentioned cooling water system.
6, a kind of vacuum pumping system is characterized in that having:
At least 1 vacuum pump, this vacuum pump possess conveying gas a pair of rotor, make above-mentioned a pair of rotor rotation motor, make the synchronous timing gear of above-mentioned a pair of rotor;
Pressure transducer is set at the vacuum area in the above-mentioned vacuum pumping system;
Gas system supplies to above-mentioned at least 1 vacuum pump with shaft sealing gas; And
Control device, the pressure according to being detected by above-mentioned pressure transducer comes control flows to cross the flow of the shaft sealing gas of above-mentioned gas system.
7, vacuum pumping system as claimed in claim 6 is characterized in that:
Above-mentioned control device when the pressure that is detected by above-mentioned pressure transducer becomes bigger than predetermined value, increases the flow of the shaft sealing gas that flows through the above-mentioned gas system.
8, a kind of vacuum pumping system is characterized in that having:
At least 1 vacuum pump, this vacuum pump possess conveying gas a pair of rotor, make above-mentioned a pair of rotor rotation motor, make the driver of the rotational speed of the synchronous timing gear of above-mentioned a pair of rotor, the above-mentioned motor of control; And
Control device according to the signal of the treatment state in expression and the vacuum chamber that above-mentioned at least 1 vacuum pump is connected, is controlled the rotational speed of above-mentioned rotor at least via the driver of above-mentioned 1 vacuum pump.
9, a kind of vacuum pumping system is characterized in that having:
At least 1 vacuum pump, this vacuum pump possess conveying gas a pair of rotor, make above-mentioned a pair of rotor rotation motor, make the synchronous timing gear of above-mentioned a pair of rotor;
Cooling water system supplies to above-mentioned at least 1 vacuum pump with cooling water; And
Control device, the signal according to the treatment state in expression and the vacuum chamber that above-mentioned at least 1 vacuum pump is connected comes control flows to cross the flow of the cooling water of above-mentioned cooling water system.
10, a kind of vacuum pumping system is characterized in that having:
At least 1 vacuum pump, this vacuum pump possess conveying gas a pair of rotor, make above-mentioned a pair of rotor rotation motor, make the synchronous timing gear of above-mentioned a pair of rotor;
Gas system supplies to above-mentioned at least 1 vacuum pump with shaft sealing gas; And
Control device, the signal according to the treatment state in expression and the vacuum chamber that above-mentioned at least 1 vacuum pump is connected comes control flows to cross the flow of the shaft sealing gas of above-mentioned gas system.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005167508A JP2006342688A (en) | 2005-06-07 | 2005-06-07 | Evacuation system |
| JP167508/2005 | 2005-06-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1877132A true CN1877132A (en) | 2006-12-13 |
| CN1877132B CN1877132B (en) | 2010-11-17 |
Family
ID=37509656
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2006100741822A Expired - Fee Related CN1877132B (en) | 2005-06-07 | 2006-04-07 | Vacuum air-discharging system |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2006342688A (en) |
| KR (1) | KR101243891B1 (en) |
| CN (1) | CN1877132B (en) |
| TW (1) | TWI373565B (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103502650A (en) * | 2011-03-11 | 2014-01-08 | Ulvac机工株式会社 | Vacuum pump, vacuum exhaust device, and method for operating vacuum pump |
| CN104295519A (en) * | 2014-10-17 | 2015-01-21 | 陕西科技大学 | Control device, water ring vacuum pump and control method thereof |
| CN107215580A (en) * | 2016-03-22 | 2017-09-29 | 中国石油化工股份有限公司 | External floating roof tank sealing ring is monitored and protection device |
| CN108412740A (en) * | 2018-03-16 | 2018-08-17 | 东莞市基富真空设备有限公司 | A kind of the vacuum supply system and its control method of low energy consumption |
| CN109477485A (en) * | 2016-07-13 | 2019-03-15 | 普发真空公司 | For reducing the method and related pump unit of the pressure in loadlock |
| CN111749879A (en) * | 2019-03-29 | 2020-10-09 | 亚台富士精机股份有限公司 | Control method and vacuum system |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2501735B (en) * | 2012-05-02 | 2015-07-22 | Edwards Ltd | Method and apparatus for warming up a vacuum pump arrangement |
| JP6375631B2 (en) * | 2014-02-05 | 2018-08-22 | 株式会社島津製作所 | Turbo molecular pump |
| CN106268518A (en) * | 2016-08-24 | 2017-01-04 | 佛山市思博睿科技有限公司 | A kind of multipath gas switching supply and the constant vacuum response system of total air demand |
| CN115339045B (en) * | 2022-08-25 | 2023-10-13 | 合肥通富微电子有限公司 | Plastic packaging method |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100189981B1 (en) * | 1995-11-21 | 1999-06-01 | 윤종용 | Apparatus for fabricating semiconductor device with vacuum system |
| JPH1182347A (en) * | 1997-09-02 | 1999-03-26 | Ebara Corp | Method of operating vacuum pump |
| JP3856661B2 (en) * | 2001-06-06 | 2006-12-13 | 株式会社荏原製作所 | Vacuum pump |
| JP2003343472A (en) * | 2002-05-24 | 2003-12-03 | Teijin Seiki Co Ltd | Shaft sealing structure of vacuum pump |
| JP2004068637A (en) * | 2002-08-02 | 2004-03-04 | Seiko Epson Corp | Exhausting device and method |
| CN100400881C (en) * | 2002-08-23 | 2008-07-09 | 株式会社丰田自动织机 | Axle sealing structure for vacuum pump |
| JP4218756B2 (en) * | 2003-10-17 | 2009-02-04 | 株式会社荏原製作所 | Vacuum exhaust device |
-
2005
- 2005-06-07 JP JP2005167508A patent/JP2006342688A/en active Pending
-
2006
- 2006-03-03 TW TW095107150A patent/TWI373565B/en active
- 2006-04-07 CN CN2006100741822A patent/CN1877132B/en not_active Expired - Fee Related
- 2006-06-05 KR KR1020060050360A patent/KR101243891B1/en active IP Right Grant
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103502650A (en) * | 2011-03-11 | 2014-01-08 | Ulvac机工株式会社 | Vacuum pump, vacuum exhaust device, and method for operating vacuum pump |
| CN103502650B (en) * | 2011-03-11 | 2016-04-27 | Ulvac机工株式会社 | The method for controlling of operation of vacuum pump, vacuum pumping hardware and vacuum pump |
| CN104295519A (en) * | 2014-10-17 | 2015-01-21 | 陕西科技大学 | Control device, water ring vacuum pump and control method thereof |
| CN107215580A (en) * | 2016-03-22 | 2017-09-29 | 中国石油化工股份有限公司 | External floating roof tank sealing ring is monitored and protection device |
| CN109477485A (en) * | 2016-07-13 | 2019-03-15 | 普发真空公司 | For reducing the method and related pump unit of the pressure in loadlock |
| CN108412740A (en) * | 2018-03-16 | 2018-08-17 | 东莞市基富真空设备有限公司 | A kind of the vacuum supply system and its control method of low energy consumption |
| CN111749879A (en) * | 2019-03-29 | 2020-10-09 | 亚台富士精机股份有限公司 | Control method and vacuum system |
Also Published As
| Publication number | Publication date |
|---|---|
| KR101243891B1 (en) | 2013-03-20 |
| KR20060127789A (en) | 2006-12-13 |
| TW200643311A (en) | 2006-12-16 |
| JP2006342688A (en) | 2006-12-21 |
| CN1877132B (en) | 2010-11-17 |
| TWI373565B (en) | 2012-10-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN1877132A (en) | Vacuum air-discharging system | |
| CN102762867B (en) | There is dry vacuum pump and the blowing method of purge gas system | |
| CN102713287B (en) | Vacuum exhaust device and vacuum exhaust method, and substrate treatment device | |
| TW468003B (en) | Evacuating apparatus | |
| CN1675505A (en) | Cryogenic refrigerator | |
| JP4365059B2 (en) | Operation method of vacuum exhaust system | |
| CN111503059B (en) | Inlet airflow pulsation adjusting device of centrifugal compressor | |
| JP4180265B2 (en) | Operation method of vacuum exhaust system | |
| CN1641226A (en) | Ultra-high speed vacuum pump system with first stage turbofan and second stage turbomolecular pump | |
| KR101878088B1 (en) | Vacuum pump system | |
| JP3992176B2 (en) | Vacuum exhaust method and vacuum exhaust device | |
| CN102182680B (en) | Multi-stage speed changing screw pump | |
| CN1330226A (en) | Compressor station with water-jet compressor set | |
| CN1112649A (en) | A multistage vacuum pump | |
| JP2000110766A (en) | Oil cooled screw compressor | |
| CN214424700U (en) | Oil injection double-screw vacuum pump control system | |
| CN214533537U (en) | Vacuum system is used in production of high-end photovoltaic module | |
| JP3982673B2 (en) | Operation method of vacuum exhaust system | |
| CN214880526U (en) | Vacuum system for discharging sludge of anaerobic reactor | |
| CN1517557A (en) | Rotary compressor and refrigerant circulation system with rotaray compressor | |
| CN1270089C (en) | Dry-type spiral vacuum pump | |
| CN219509823U (en) | Sealing device for improving sealing performance of vacuum pump shaft | |
| CN1811181A (en) | Dry gas sealer for compressor with low inlet pressure and liquid-carrying medium | |
| CN217601310U (en) | A fan equipment and pollution abatement car for pollution abatement car | |
| CN218924994U (en) | Oil management ecosystem equipment purifying and oil yielding self-adaptive system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20101117 Termination date: 20170407 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |