TW373236B - Method for making interconnect for low temperature chip attachment - Google Patents
Method for making interconnect for low temperature chip attachmentInfo
- Publication number
- TW373236B TW373236B TW086114112A TW86114112A TW373236B TW 373236 B TW373236 B TW 373236B TW 086114112 A TW086114112 A TW 086114112A TW 86114112 A TW86114112 A TW 86114112A TW 373236 B TW373236 B TW 373236B
- Authority
- TW
- Taiwan
- Prior art keywords
- mold
- interconnect material
- solder
- aligned
- electronic device
- Prior art date
Links
- 238000000034 method Methods 0.000 title abstract 3
- 229910000679 solder Inorganic materials 0.000 abstract 6
- 239000000463 material Substances 0.000 abstract 4
- 238000002844 melting Methods 0.000 abstract 4
- 230000008018 melting Effects 0.000 abstract 4
- 238000000151 deposition Methods 0.000 abstract 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 1
- 229910045601 alloy Inorganic materials 0.000 abstract 1
- 239000000956 alloy Substances 0.000 abstract 1
- 230000009977 dual effect Effects 0.000 abstract 1
- 230000000694 effects Effects 0.000 abstract 1
- 239000000203 mixture Substances 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
Classifications
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- H—ELECTRICITY
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- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/60—Attaching or detaching leads or other conductive members, to be used for carrying current to or from the device in operation
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- H05K3/341—Surface mounted components
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- H05K3/3436—Leadless components having an array of bottom contacts, e.g. pad grid array or ball grid array components
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Wire Bonding (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/710,992 US6127735A (en) | 1996-09-25 | 1996-09-25 | Interconnect for low temperature chip attachment |
Publications (1)
Publication Number | Publication Date |
---|---|
TW373236B true TW373236B (en) | 1999-11-01 |
Family
ID=24856347
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW086114112A TW373236B (en) | 1996-09-25 | 1997-10-09 | Method for making interconnect for low temperature chip attachment |
Country Status (4)
Country | Link |
---|---|
US (2) | US6127735A (zh) |
JP (1) | JPH10107066A (zh) |
KR (1) | KR100267874B1 (zh) |
TW (1) | TW373236B (zh) |
Families Citing this family (41)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6307160B1 (en) * | 1998-10-29 | 2001-10-23 | Agilent Technologies, Inc. | High-strength solder interconnect for copper/electroless nickel/immersion gold metallization solder pad and method |
SG92685A1 (en) * | 1999-03-10 | 2002-11-19 | Towa Corp | Method of coating semiconductor wafer with resin and mold used therefor |
CA2313551A1 (en) | 1999-10-21 | 2001-04-21 | International Business Machines Corporation | Wafer integrated rigid support ring |
US6656765B1 (en) * | 2000-02-02 | 2003-12-02 | Amkor Technology, Inc. | Fabricating very thin chip size semiconductor packages |
JP2002261190A (ja) * | 2001-02-28 | 2002-09-13 | Sony Corp | 半導体装置、その製造方法及び電子機器 |
US6674647B2 (en) * | 2002-01-07 | 2004-01-06 | International Business Machines Corporation | Low or no-force bump flattening structure and method |
TWI245402B (en) | 2002-01-07 | 2005-12-11 | Megic Corp | Rod soldering structure and manufacturing process thereof |
US6798667B2 (en) * | 2002-08-23 | 2004-09-28 | Ati Technologies, Inc. | Solder ball collapse control apparatus and method thereof |
US20040065933A1 (en) * | 2002-10-08 | 2004-04-08 | Foong Chee Seng | Flip chip optical and imaging sensor device |
US7105931B2 (en) * | 2003-01-07 | 2006-09-12 | Abbas Ismail Attarwala | Electronic package and method |
DE10320337A1 (de) * | 2003-05-06 | 2004-08-26 | Infineon Technologies Ag | Halbleiterwafer mit Kontaktsäulen für Flip-Chip-Kontakte und Verfahren zu seiner Herstellung |
KR100659527B1 (ko) * | 2003-10-22 | 2006-12-20 | 삼성전자주식회사 | 3차원 범프 하부 금속층을 갖는 플립 칩 본딩용 반도체칩과 그 실장 구조 |
US7575955B2 (en) * | 2004-01-06 | 2009-08-18 | Ismat Corporation | Method for making electronic packages |
US20060043603A1 (en) * | 2004-08-31 | 2006-03-02 | Lsi Logic Corporation | Low temperature PB-free processing for semiconductor devices |
US7273806B2 (en) * | 2004-12-09 | 2007-09-25 | International Business Machines Corporation | Forming of high aspect ratio conductive structure using injection molded solder |
TWI237364B (en) * | 2004-12-14 | 2005-08-01 | Advanced Semiconductor Eng | Flip chip package with anti-floating mechanism |
KR100690245B1 (ko) * | 2005-04-06 | 2007-03-12 | 삼성전자주식회사 | 저융점 솔더를 이용한 솔더 접합 방법 및 이를 이용한 볼그리드 어레이 패키지의 수리 방법 |
US20060289607A1 (en) * | 2005-06-28 | 2006-12-28 | Buchwalter Stephen L | Composite solder transfer moldplate structure and method of making same |
JP4040644B2 (ja) * | 2005-07-28 | 2008-01-30 | シャープ株式会社 | 半田付け実装構造の製造方法および半田付け実装方法 |
US20070166875A1 (en) * | 2005-12-29 | 2007-07-19 | Intel Corporation | Method of forming a microelectronic package and microelectronic package formed according to the method |
KR100790978B1 (ko) * | 2006-01-24 | 2008-01-02 | 삼성전자주식회사 | 저온에서의 접합 방법, 및 이를 이용한 반도체 패키지 실장 방법 |
US7786588B2 (en) * | 2006-01-31 | 2010-08-31 | International Business Machines Corporation | Composite interconnect structure using injection molded solder technique |
US7713575B2 (en) * | 2006-03-31 | 2010-05-11 | International Business Machines Corporation | Method and apparatus for depositing coplanar microelectronic interconnectors using a compliant mold |
US7473580B2 (en) * | 2006-05-18 | 2009-01-06 | International Business Machines Corporation | Temporary chip attach using injection molded solder |
US20080179035A1 (en) * | 2007-01-25 | 2008-07-31 | International Business Machines Corporation | Flexible nozzle for injection molded solder |
US8088684B2 (en) * | 2007-02-05 | 2012-01-03 | Suss Microtec Ag | Apparatus and method for semiconductor wafer bumping via injection molded solder |
US20090039142A1 (en) * | 2007-08-06 | 2009-02-12 | Raschid Jose Bezama | Method for Forming a Solder Mold with Venting Channels and Method for Using the Same |
US8148255B2 (en) * | 2007-09-18 | 2012-04-03 | International Business Machines Corporation | Techniques for forming solder bump interconnects |
US20110079702A1 (en) | 2009-10-06 | 2011-04-07 | International Business Machines Corporation | Forming a protective layer on a mold and mold having a protective layer |
CN102280557A (zh) * | 2010-06-10 | 2011-12-14 | 连营科技股份有限公司 | 发光元件组立装置及其方法 |
US8561880B2 (en) * | 2012-02-11 | 2013-10-22 | International Business Machines Corporation | Forming metal preforms and metal balls |
US8875978B2 (en) | 2012-02-11 | 2014-11-04 | International Business Machines Corporation | Forming constant diameter spherical metal balls |
JP5955036B2 (ja) * | 2012-03-06 | 2016-07-20 | 株式会社タムラ製作所 | はんだバンプの形成方法 |
EP2688093B1 (en) | 2012-07-19 | 2018-07-18 | Technische Universität Ilmenau | Method of and apparatus for fluidic self-assembly of components on a substrate |
US8523046B1 (en) | 2012-10-18 | 2013-09-03 | International Business Machines Corporation | Forming an array of metal balls or shapes on a substrate |
US8920934B2 (en) * | 2013-03-29 | 2014-12-30 | Intel Corporation | Hybrid solder and filled paste in microelectronic packaging |
US9818717B2 (en) | 2016-02-24 | 2017-11-14 | International Business Machines Corporation | Enhanced cleaning for water-soluble flux soldering |
WO2017164848A1 (en) * | 2016-03-22 | 2017-09-28 | Intel Corporation | Void reduction in solder joints using off-eutectic solder |
CN108346952B (zh) * | 2018-01-25 | 2020-11-24 | 番禺得意精密电子工业有限公司 | 电连接器固持装置 |
DE102018114013A1 (de) | 2018-06-12 | 2019-12-12 | Osram Opto Semiconductors Gmbh | Verfahren zum fixieren eines halbleiterchips auf einer oberfläche, verfahren zur herstellung eines halbleiterbauelements und halbleiterbauelement |
DE102021103360A1 (de) * | 2021-02-05 | 2022-08-11 | Few Fahrzeugelektrik Werk Gmbh & Co. Kg | Verfahren zur Herstellung einer Vorverzinnungsanordnung und derartige Vorverzinnungsanordnung |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3512051A (en) * | 1965-12-29 | 1970-05-12 | Burroughs Corp | Contacts for a semiconductor device |
US4505029A (en) * | 1981-03-23 | 1985-03-19 | General Electric Company | Semiconductor device with built-up low resistance contact |
JPH0267731A (ja) * | 1988-09-02 | 1990-03-07 | Toshiba Corp | はんだバンプ形半導体装置とその製造方法 |
US5508561A (en) * | 1993-11-15 | 1996-04-16 | Nec Corporation | Apparatus for forming a double-bump structure used for flip-chip mounting |
US5611884A (en) * | 1995-12-11 | 1997-03-18 | Dow Corning Corporation | Flip chip silicone pressure sensitive conductive adhesive |
US5860585A (en) * | 1996-05-31 | 1999-01-19 | Motorola, Inc. | Substrate for transferring bumps and method of use |
-
1996
- 1996-09-25 US US08/710,992 patent/US6127735A/en not_active Expired - Lifetime
-
1997
- 1997-07-26 KR KR1019970035279A patent/KR100267874B1/ko not_active IP Right Cessation
- 1997-09-19 JP JP9255321A patent/JPH10107066A/ja active Pending
- 1997-10-09 TW TW086114112A patent/TW373236B/zh active
-
2000
- 2000-03-28 US US09/536,557 patent/US6340630B1/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
KR100267874B1 (ko) | 2000-10-16 |
US6127735A (en) | 2000-10-03 |
US6340630B1 (en) | 2002-01-22 |
KR19980024109A (ko) | 1998-07-06 |
JPH10107066A (ja) | 1998-04-24 |
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