TW371703B - Magnetic conveying apparatus, dynamic transmission of the magnetic conveying apparatus and the rotary driving mechanism - Google Patents

Magnetic conveying apparatus, dynamic transmission of the magnetic conveying apparatus and the rotary driving mechanism

Info

Publication number
TW371703B
TW371703B TW086111525A TW86111525A TW371703B TW 371703 B TW371703 B TW 371703B TW 086111525 A TW086111525 A TW 086111525A TW 86111525 A TW86111525 A TW 86111525A TW 371703 B TW371703 B TW 371703B
Authority
TW
Taiwan
Prior art keywords
conveying apparatus
magnetic
driving
magnetic conveying
cells
Prior art date
Application number
TW086111525A
Other languages
English (en)
Inventor
Yoshiro Hasegawa
Naoyuki Suzuki
Tomoaki Abe
Original Assignee
Anelva Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anelva Corp filed Critical Anelva Corp
Application granted granted Critical
Publication of TW371703B publication Critical patent/TW371703B/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H19/00—Gearings comprising essentially only toothed gears or friction members and not capable of conveying indefinitely-continuing rotary motion
    • F16H19/02—Gearings comprising essentially only toothed gears or friction members and not capable of conveying indefinitely-continuing rotary motion for interconverting rotary or oscillating motion and reciprocating motion
    • F16H19/04—Gearings comprising essentially only toothed gears or friction members and not capable of conveying indefinitely-continuing rotary motion for interconverting rotary or oscillating motion and reciprocating motion comprising a rack
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67709—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using magnetic elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G35/00—Mechanical conveyors not otherwise provided for
    • B65G35/06—Mechanical conveyors not otherwise provided for comprising a load-carrier moving along a path, e.g. a closed path, and adapted to be engaged by any one of a series of traction elements spaced along the path
    • B65G35/063—Mechanical conveyors not otherwise provided for comprising a load-carrier moving along a path, e.g. a closed path, and adapted to be engaged by any one of a series of traction elements spaced along the path the traction element being a rotating bar or tube
    • B65G35/066—Mechanical conveyors not otherwise provided for comprising a load-carrier moving along a path, e.g. a closed path, and adapted to be engaged by any one of a series of traction elements spaced along the path the traction element being a rotating bar or tube the bar or the tube being provided with a helical or annular channel
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G54/00—Non-mechanical conveyors not otherwise provided for
    • B65G54/02—Non-mechanical conveyors not otherwise provided for electrostatic, electric, or magnetic
    • B65G54/025—Non-mechanical conveyors not otherwise provided for electrostatic, electric, or magnetic the load being magnetically coupled with a piston-like driver moved within a tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/6776—Continuous loading and unloading into and out of a processing chamber, e.g. transporting belts within processing chambers
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K49/00—Dynamo-electric clutches; Dynamo-electric brakes
    • H02K49/10—Dynamo-electric clutches; Dynamo-electric brakes of the permanent-magnet type
    • H02K49/102—Magnetic gearings, i.e. assembly of gears, linear or rotary, by which motion is magnetically transferred without physical contact
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/06—Means for converting reciprocating motion into rotary motion or vice versa

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Transmission Devices (AREA)
  • Reciprocating Conveyors (AREA)
TW086111525A 1996-08-13 1997-08-12 Magnetic conveying apparatus, dynamic transmission of the magnetic conveying apparatus and the rotary driving mechanism TW371703B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23134496 1996-08-13

Publications (1)

Publication Number Publication Date
TW371703B true TW371703B (en) 1999-10-11

Family

ID=16922167

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086111525A TW371703B (en) 1996-08-13 1997-08-12 Magnetic conveying apparatus, dynamic transmission of the magnetic conveying apparatus and the rotary driving mechanism

Country Status (3)

Country Link
US (1) US5881649A (zh)
KR (1) KR100256488B1 (zh)
TW (1) TW371703B (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI494519B (zh) * 2012-12-24 2015-08-01 Hon Hai Prec Ind Co Ltd 傳動機構

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US6213704B1 (en) 1998-05-20 2001-04-10 Applied Komatsu Technology, Inc. Method and apparatus for substrate transfer and processing
US6215897B1 (en) 1998-05-20 2001-04-10 Applied Komatsu Technology, Inc. Automated substrate processing system
US6206176B1 (en) * 1998-05-20 2001-03-27 Applied Komatsu Technology, Inc. Substrate transfer shuttle having a magnetic drive
US6517303B1 (en) 1998-05-20 2003-02-11 Applied Komatsu Technology, Inc. Substrate transfer shuttle
JP3702665B2 (ja) * 1998-09-07 2005-10-05 株式会社村田製作所 搬送装置
US6298685B1 (en) 1999-11-03 2001-10-09 Applied Materials, Inc. Consecutive deposition system
US6460369B2 (en) * 1999-11-03 2002-10-08 Applied Materials, Inc. Consecutive deposition system
US20030183490A1 (en) * 2000-05-09 2003-10-02 Friedrich Eschenweck Longitudinal conveyor
JP2002068476A (ja) 2000-08-29 2002-03-08 Anelva Corp 磁気搬送装置
NL1020633C2 (nl) * 2002-05-21 2003-11-24 Otb Group Bv Samenstel voor het behandelen van substraten.
US6935828B2 (en) * 2002-07-17 2005-08-30 Transfer Engineering And Manufacturing, Inc. Wafer load lock and magnetically coupled linear delivery system
US8960099B2 (en) * 2002-07-22 2015-02-24 Brooks Automation, Inc Substrate processing apparatus
US7959395B2 (en) 2002-07-22 2011-06-14 Brooks Automation, Inc. Substrate processing apparatus
US7988398B2 (en) 2002-07-22 2011-08-02 Brooks Automation, Inc. Linear substrate transport apparatus
JP2004209783A (ja) * 2002-12-27 2004-07-29 Aoki Technical Laboratory Inc 電動式射出ユニット
JP2007537606A (ja) 2004-05-14 2007-12-20 ザ・ビーオーシー・グループ・インコーポレーテッド 低圧環境で物品を処理するための装置及び方法
US7611124B2 (en) * 2004-12-22 2009-11-03 Tokyo Electron Limited Vacuum processing apparatus
KR100790557B1 (ko) * 2006-06-23 2008-01-02 세메스 주식회사 선입선출을 하는 버퍼 시스템
US7770714B2 (en) * 2007-08-27 2010-08-10 Canon Anelva Corporation Transfer apparatus
WO2009085840A2 (en) * 2007-12-28 2009-07-09 Lam Research Corporation Wafer carrier drive apparatus and method for operating the same
KR100959765B1 (ko) * 2008-09-02 2010-05-28 (주)에스티아이 자석을 이용한 평판 디스플레이 글래스용 처리 장치
US8317934B2 (en) * 2009-05-13 2012-11-27 Lam Research Corporation Multi-stage substrate cleaning method and apparatus
US8101054B2 (en) * 2009-05-28 2012-01-24 Wd Media, Inc. Magnetic particle trapper for a disk sputtering system
JP2011047515A (ja) * 2009-07-28 2011-03-10 Canon Anelva Corp 駆動装置及び真空処理装置
US8602706B2 (en) * 2009-08-17 2013-12-10 Brooks Automation, Inc. Substrate processing apparatus
US9837294B2 (en) * 2011-09-16 2017-12-05 Persimmon Technologies Corporation Wafer transport system
US9694990B2 (en) * 2012-06-14 2017-07-04 Evatec Ag Transport and handing-over arrangement for disc-shaped substrates, vacuum treatment installation and method for manufacture treated substrates
JP6368499B2 (ja) * 2014-02-12 2018-08-01 あおい精機株式会社 搬送装置
DE102014107654A1 (de) * 2014-05-30 2015-12-03 Weiss Gmbh Antriebseinheit
JP6616954B2 (ja) * 2015-03-31 2019-12-04 あおい精機株式会社 搬送装置
DE102015005458A1 (de) * 2015-04-30 2016-11-03 Khs Corpoplast Gmbh Vorrichtung zum Füllen und Verschließen von Behältern
CN105151803B (zh) * 2015-09-24 2018-03-27 Abb瑞士股份有限公司 输送装置及其传输系统
US9862006B2 (en) 2015-12-29 2018-01-09 Solarcity Corporation Systems for levitating a metallic tray
CA3021872C (en) 2016-05-04 2023-08-29 Mallinckrodt Nuclear Medicine Llc Conveyance system for operation in radioactive environment
US20190195285A1 (en) * 2016-08-03 2019-06-27 Azbil Corporation Transfer apparatus
CN106428751B (zh) * 2016-08-26 2018-09-07 江苏天元中科生物技术有限公司 食品包装机输送装置及方法
CN206157224U (zh) * 2016-11-24 2017-05-10 合肥京东方显示技术有限公司 一种真空加热装置
CN110035965B (zh) * 2016-12-27 2021-03-02 Abb瑞士股份有限公司 输送系统
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US10968055B2 (en) 2017-09-13 2021-04-06 Laitram, L.L.C. Monorail tray conveyor with passive guide rails
US10807803B2 (en) 2018-01-31 2020-10-20 Laitram, L.L.C. Hygienic low-friction magnetic tray and conveyor
US10654660B2 (en) * 2018-01-31 2020-05-19 Laitram, L.L.C. Hygienic magnetic tray and conveyor
EP4324082A1 (en) * 2021-04-14 2024-02-21 Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V. Magnetically coupled drive arrangement
GB2616886A (en) * 2022-03-24 2023-09-27 Edwards Vacuum Llc Motion converting device
CN115072259B (zh) * 2022-07-25 2022-11-01 烟台淳钧工业科技有限公司 一种磁力浮动机构及采用该机构的对中装置

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI494519B (zh) * 2012-12-24 2015-08-01 Hon Hai Prec Ind Co Ltd 傳動機構

Also Published As

Publication number Publication date
KR100256488B1 (ko) 2000-08-01
US5881649A (en) 1999-03-16
KR19980018504A (ko) 1998-06-05

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