TW362250B - Process for recovering substrates - Google Patents
Process for recovering substratesInfo
- Publication number
- TW362250B TW362250B TW085112212A TW85112212A TW362250B TW 362250 B TW362250 B TW 362250B TW 085112212 A TW085112212 A TW 085112212A TW 85112212 A TW85112212 A TW 85112212A TW 362250 B TW362250 B TW 362250B
- Authority
- TW
- Taiwan
- Prior art keywords
- wafer
- microns
- abrasive
- abrasive slurry
- fractures
- Prior art date
Links
- 238000000034 method Methods 0.000 title abstract 2
- 239000000758 substrate Substances 0.000 title abstract 2
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 abstract 3
- 239000000463 material Substances 0.000 abstract 3
- 239000002002 slurry Substances 0.000 abstract 3
- 208000013201 Stress fracture Diseases 0.000 abstract 2
- 239000002344 surface layer Substances 0.000 abstract 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 1
- 239000003929 acidic solution Substances 0.000 abstract 1
- 238000003486 chemical etching Methods 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 230000001939 inductive effect Effects 0.000 abstract 1
- 238000010330 laser marking Methods 0.000 abstract 1
- 229920000620 organic polymer Polymers 0.000 abstract 1
- 239000002245 particle Substances 0.000 abstract 1
- 229920002635 polyurethane Polymers 0.000 abstract 1
- 239000004814 polyurethane Substances 0.000 abstract 1
- 238000004064 recycling Methods 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
- 239000000243 solution Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02002—Preparing wafers
- H01L21/02005—Preparing bulk and homogeneous wafers
- H01L21/02032—Preparing bulk and homogeneous wafers by reclaiming or re-processing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B21/00—Machines or devices using grinding or polishing belts; Accessories therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
- B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
- B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
- B24B9/065—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of thin, brittle parts, e.g. semiconductors, wafers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02079—Cleaning for reclaiming
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Manufacture Of Macromolecular Shaped Articles (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/538,265 US5855735A (en) | 1995-10-03 | 1995-10-03 | Process for recovering substrates |
Publications (1)
Publication Number | Publication Date |
---|---|
TW362250B true TW362250B (en) | 1999-06-21 |
Family
ID=24146177
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW085112212A TW362250B (en) | 1995-10-03 | 1996-10-03 | Process for recovering substrates |
Country Status (7)
Country | Link |
---|---|
US (1) | US5855735A (zh) |
EP (1) | EP0774776B1 (zh) |
JP (1) | JP3247301B2 (zh) |
KR (1) | KR100236991B1 (zh) |
DE (1) | DE69627613T2 (zh) |
MY (1) | MY115213A (zh) |
TW (1) | TW362250B (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI386984B (zh) * | 2004-12-23 | 2013-02-21 | Lam Res Corp | 藉酸性溶液進行矽電極組件表面去污作用 |
CN111725053A (zh) * | 2020-06-30 | 2020-09-29 | 芜湖启迪半导体有限公司 | 碳化硅晶圆腐蚀的保护方法 |
Families Citing this family (59)
Publication number | Priority date | Publication date | Assignee | Title |
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EP1564796A1 (en) * | 1997-12-09 | 2005-08-17 | Shin-Etsu Handotai Company Limited | Semiconductor wafer processing method and semiconductor wafers produced by the same |
SG71903A1 (en) * | 1998-01-30 | 2000-04-18 | Canon Kk | Process of reclamation of soi substrate and reproduced substrate |
JP3500063B2 (ja) * | 1998-04-23 | 2004-02-23 | 信越半導体株式会社 | 剥離ウエーハを再利用する方法および再利用に供されるシリコンウエーハ |
TW416104B (en) * | 1998-08-28 | 2000-12-21 | Kobe Steel Ltd | Method for reclaiming wafer substrate and polishing solution composition for reclaiming wafer substrate |
US6586835B1 (en) * | 1998-08-31 | 2003-07-01 | Micron Technology, Inc. | Compact system module with built-in thermoelectric cooling |
US6281042B1 (en) * | 1998-08-31 | 2001-08-28 | Micron Technology, Inc. | Structure and method for a high performance electronic packaging assembly |
US6219237B1 (en) | 1998-08-31 | 2001-04-17 | Micron Technology, Inc. | Structure and method for an electronic assembly |
US6392296B1 (en) | 1998-08-31 | 2002-05-21 | Micron Technology, Inc. | Silicon interposer with optical connections |
JP2000349264A (ja) * | 1998-12-04 | 2000-12-15 | Canon Inc | 半導体ウエハの製造方法、使用方法および利用方法 |
US6255852B1 (en) | 1999-02-09 | 2001-07-03 | Micron Technology, Inc. | Current mode signal interconnects and CMOS amplifier |
JP2000260738A (ja) * | 1999-03-10 | 2000-09-22 | Hitachi Ltd | 半導体基板の研削加工方法ならびに半導体装置および半導体装置の製造方法 |
US6338805B1 (en) * | 1999-07-14 | 2002-01-15 | Memc Electronic Materials, Inc. | Process for fabricating semiconductor wafers with external gettering |
US7554829B2 (en) * | 1999-07-30 | 2009-06-30 | Micron Technology, Inc. | Transmission lines for CMOS integrated circuits |
US6180527B1 (en) * | 1999-08-09 | 2001-01-30 | Micron Technology, Inc. | Method and apparatus for thinning article, and article |
US6267649B1 (en) | 1999-08-23 | 2001-07-31 | Industrial Technology Research Institute | Edge and bevel CMP of copper wafer |
US6685539B1 (en) * | 1999-08-24 | 2004-02-03 | Ricoh Company, Ltd. | Processing tool, method of producing tool, processing method and processing apparatus |
KR100323496B1 (ko) * | 1999-12-31 | 2002-02-06 | 윤배원 | 반도체 웨이퍼의 재생 장치 및 방법 |
JP4602504B2 (ja) * | 2000-02-07 | 2010-12-22 | 富士通セミコンダクター株式会社 | 再生シリコンウエハの製造方法及び再生シリコンウエハを用いて半導体装置を製造する方法 |
US6514423B1 (en) * | 2000-02-22 | 2003-02-04 | Memc Electronic Materials, Inc. | Method for wafer processing |
DE10010820C1 (de) | 2000-02-29 | 2001-09-13 | Infineon Technologies Ag | Verfahren zur Regenerierung von Halbleiterscheiben |
US20010039101A1 (en) * | 2000-04-13 | 2001-11-08 | Wacker Siltronic Gesellschaft Fur Halbleitermaterialien Ag | Method for converting a reclaim wafer into a semiconductor wafer |
US6384415B1 (en) * | 2000-06-20 | 2002-05-07 | Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.) | Method of evaluating quality of silicon wafer and method of reclaiming the water |
KR20030021183A (ko) * | 2000-06-30 | 2003-03-12 | 엠이엠씨 일렉트로닉 머티리얼즈 인코포레이티드 | 실리콘 웨이퍼 에칭 공정 |
US6406923B1 (en) * | 2000-07-31 | 2002-06-18 | Kobe Precision Inc. | Process for reclaiming wafer substrates |
GB2368971B (en) * | 2000-11-11 | 2005-01-05 | Pure Wafer Ltd | Process for Reclaimimg Wafer Substrates |
US7008874B2 (en) * | 2000-12-19 | 2006-03-07 | Memc Electronics Materials, Inc. | Process for reclaiming semiconductor wafers and reclaimed wafers |
US6672943B2 (en) | 2001-01-26 | 2004-01-06 | Wafer Solutions, Inc. | Eccentric abrasive wheel for wafer processing |
US6632012B2 (en) | 2001-03-30 | 2003-10-14 | Wafer Solutions, Inc. | Mixing manifold for multiple inlet chemistry fluids |
US6547647B2 (en) * | 2001-04-03 | 2003-04-15 | Macronix International Co., Ltd. | Method of wafer reclaim |
DE10132504C1 (de) * | 2001-07-05 | 2002-10-10 | Wacker Siltronic Halbleitermat | Verfahren zur beidseitigen Material abtragenden Bearbeitung von Halbleiterscheiben und seine Verwendung |
DE10137113A1 (de) * | 2001-07-30 | 2003-02-27 | Infineon Technologies Ag | Verfahren zum Regenerieren von Halbleiterscheiben |
KR100420205B1 (ko) * | 2001-09-10 | 2004-03-04 | 주식회사 하이닉스반도체 | 웨이퍼 제조 방법 |
FR2830122B1 (fr) * | 2001-09-27 | 2006-01-21 | St Microelectronics Sa | Procede d'amincissement d'une plaquette de silicium |
US7101770B2 (en) * | 2002-01-30 | 2006-09-05 | Micron Technology, Inc. | Capacitive techniques to reduce noise in high speed interconnections |
JP2003243403A (ja) * | 2002-02-13 | 2003-08-29 | Mitsubishi Electric Corp | 半導体ウェハの再生方法 |
US7235457B2 (en) * | 2002-03-13 | 2007-06-26 | Micron Technology, Inc. | High permeability layered films to reduce noise in high speed interconnects |
US20050150877A1 (en) * | 2002-07-29 | 2005-07-14 | Sumitomo Precision Products Co., Ltd. | Method and device for laser beam processing of silicon substrate, and method and device for laser beam cutting of silicon wiring |
US6884634B2 (en) * | 2002-09-27 | 2005-04-26 | Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.) | Specifying method for Cu contamination processes and detecting method for Cu contamination during reclamation of silicon wafers, and reclamation method of silicon wafers |
US6761625B1 (en) | 2003-05-20 | 2004-07-13 | Intel Corporation | Reclaiming virgin test wafers |
US7699997B2 (en) * | 2003-10-03 | 2010-04-20 | Kobe Steel, Ltd. | Method of reclaiming silicon wafers |
US20050224094A1 (en) * | 2004-03-31 | 2005-10-13 | Davis Randall W | Apparatus and methods for isolating bioreactive materials on a microarray substrate surface |
US7094132B2 (en) * | 2004-06-24 | 2006-08-22 | Magnetic Abrasive Technologies, Inc. | Method of and apparatus for magnetic-abrasive machining of wafers |
US20060016786A1 (en) * | 2004-07-26 | 2006-01-26 | Bing-Yue Tsui | Method and apparatus for removing SiC or low k material film |
KR100575342B1 (ko) * | 2004-12-29 | 2006-05-02 | 동부일렉트로닉스 주식회사 | 웨이퍼의 리워크 방법 |
EP1946358A4 (en) * | 2005-11-09 | 2009-03-04 | Advanced Tech Materials | COMPOSITION AND METHOD FOR RECYCLING SEMICONDUCTOR WAFERS WITH LOW DIELECTRICITY CONSTANT MATERIALS |
US7682937B2 (en) * | 2005-11-25 | 2010-03-23 | Advanced Laser Separation International B.V. | Method of treating a substrate, method of processing a substrate using a laser beam, and arrangement |
KR20090076938A (ko) * | 2006-09-25 | 2009-07-13 | 어드밴스드 테크놀러지 머티리얼즈, 인코포레이티드 | 웨이퍼 재작업 적용을 위한 포토레지스트의 제거를 위한 조성물 및 방법 |
US20090242126A1 (en) | 2008-03-31 | 2009-10-01 | Memc Electronic Materials, Inc. | Edge etching apparatus for etching the edge of a silicon wafer |
US7749869B2 (en) * | 2008-08-05 | 2010-07-06 | International Business Machines Corporation | Crystalline silicon substrates with improved minority carrier lifetime including a method of annealing and removing SiOx precipitates and getterning sites |
US20100050939A1 (en) * | 2008-08-26 | 2010-03-04 | Promos Technologies Inc. | Method for determining the performance of implanting apparatus |
WO2010059556A1 (en) | 2008-11-19 | 2010-05-27 | Memc Electronic Materials, Inc. | Method and system for stripping the edge of a semiconductor wafer |
US8261730B2 (en) * | 2008-11-25 | 2012-09-11 | Cambridge Energy Resources Inc | In-situ wafer processing system and method |
CN105304485B (zh) | 2010-10-06 | 2019-02-12 | 恩特格里斯公司 | 选择性蚀刻金属氮化物的组合物及方法 |
US8853054B2 (en) | 2012-03-06 | 2014-10-07 | Sunedison Semiconductor Limited | Method of manufacturing silicon-on-insulator wafers |
TWI528580B (zh) | 2012-03-30 | 2016-04-01 | 聖戈班晶體探測器公司 | 形成獨立式半導體晶圓之方法 |
JP6124452B2 (ja) * | 2013-06-12 | 2017-05-10 | 信越化学工業株式会社 | タンタル酸リチウム結晶ウェーハの再生方法 |
KR101438437B1 (ko) | 2013-07-29 | 2014-09-17 | 화인클린 (주) | 사파이어 잉곳 재활용 방법 |
JP2017190279A (ja) * | 2016-04-15 | 2017-10-19 | 住友金属鉱山株式会社 | 非磁性ガーネット基板の製造方法 |
CN109290875B (zh) * | 2017-07-25 | 2021-06-22 | 北京通美晶体技术股份有限公司 | 背面有凹坑的磷化铟晶片、制法和制备其的腐蚀液 |
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US3559281A (en) * | 1968-11-27 | 1971-02-02 | Motorola Inc | Method of reclaiming processed semiconductior wafers |
US3905162A (en) * | 1974-07-23 | 1975-09-16 | Silicon Material Inc | Method of preparing high yield semiconductor wafer |
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US4070444A (en) * | 1976-07-21 | 1978-01-24 | Motorola Inc. | Low cost, high volume silicon purification process |
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JPS54110783A (en) * | 1978-02-20 | 1979-08-30 | Hitachi Ltd | Semiconductor substrate and its manufacture |
US4676967A (en) * | 1978-08-23 | 1987-06-30 | Union Carbide Corporation | High purity silane and silicon production |
US4323422A (en) * | 1980-04-24 | 1982-04-06 | Calawa Arthur R | Method for preparing optically flat damage-free surfaces |
US4340574A (en) * | 1980-08-28 | 1982-07-20 | Union Carbide Corporation | Process for the production of ultrahigh purity silane with recycle from separation columns |
JPS5958827A (ja) * | 1982-09-28 | 1984-04-04 | Toshiba Corp | 半導体ウエ−ハ、半導体ウエ−ハの製造方法及び半導体ウエ−ハの製造装置 |
US4582560A (en) * | 1982-12-06 | 1986-04-15 | Sri International | In situ production of silicon crystals on substrate for use in solar cell construction |
US4944836A (en) * | 1985-10-28 | 1990-07-31 | International Business Machines Corporation | Chem-mech polishing method for producing coplanar metal/insulator films on a substrate |
US4869779A (en) * | 1987-07-27 | 1989-09-26 | Acheson Robert E | Hydroplane polishing device and method |
NL8802028A (nl) * | 1988-08-16 | 1990-03-16 | Philips Nv | Werkwijze voor het vervaardigen van een inrichting. |
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US5133829A (en) * | 1991-01-08 | 1992-07-28 | Sematech, Inc. | Single wafer regrowth of silicon |
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US5514245A (en) * | 1992-01-27 | 1996-05-07 | Micron Technology, Inc. | Method for chemical planarization (CMP) of a semiconductor wafer to provide a planar surface free of microscratches |
US5360509A (en) * | 1993-03-08 | 1994-11-01 | Gi Corporation | Low cost method of fabricating epitaxial semiconductor devices |
JP2910507B2 (ja) * | 1993-06-08 | 1999-06-23 | 信越半導体株式会社 | 半導体ウエーハの製造方法 |
US5622875A (en) * | 1994-05-06 | 1997-04-22 | Kobe Precision, Inc. | Method for reclaiming substrate from semiconductor wafers |
US5525191A (en) * | 1994-07-25 | 1996-06-11 | Motorola, Inc. | Process for polishing a semiconductor substrate |
-
1995
- 1995-10-03 US US08/538,265 patent/US5855735A/en not_active Expired - Fee Related
-
1996
- 1996-09-30 MY MYPI96004034A patent/MY115213A/en unknown
- 1996-10-02 EP EP96115840A patent/EP0774776B1/en not_active Expired - Lifetime
- 1996-10-02 DE DE69627613T patent/DE69627613T2/de not_active Expired - Fee Related
- 1996-10-03 JP JP26329696A patent/JP3247301B2/ja not_active Expired - Fee Related
- 1996-10-03 TW TW085112212A patent/TW362250B/zh active
- 1996-10-04 KR KR1019960043790A patent/KR100236991B1/ko not_active IP Right Cessation
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI386984B (zh) * | 2004-12-23 | 2013-02-21 | Lam Res Corp | 藉酸性溶液進行矽電極組件表面去污作用 |
CN111725053A (zh) * | 2020-06-30 | 2020-09-29 | 芜湖启迪半导体有限公司 | 碳化硅晶圆腐蚀的保护方法 |
CN111725053B (zh) * | 2020-06-30 | 2023-11-14 | 安徽长飞先进半导体有限公司 | 碳化硅晶圆腐蚀的保护方法 |
Also Published As
Publication number | Publication date |
---|---|
KR100236991B1 (ko) | 2000-01-15 |
EP0774776A2 (en) | 1997-05-21 |
US5855735A (en) | 1999-01-05 |
JP3247301B2 (ja) | 2002-01-15 |
EP0774776A3 (en) | 1998-03-25 |
KR970023619A (ko) | 1997-05-30 |
DE69627613T2 (de) | 2004-03-11 |
EP0774776B1 (en) | 2003-04-23 |
DE69627613D1 (de) | 2003-05-28 |
MY115213A (en) | 2003-04-30 |
JPH09171981A (ja) | 1997-06-30 |
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