TW299399B - - Google Patents

Download PDF

Info

Publication number
TW299399B
TW299399B TW085109397A TW85109397A TW299399B TW 299399 B TW299399 B TW 299399B TW 085109397 A TW085109397 A TW 085109397A TW 85109397 A TW85109397 A TW 85109397A TW 299399 B TW299399 B TW 299399B
Authority
TW
Taiwan
Prior art keywords
power supply
test
supply current
state
semiconductor integrated
Prior art date
Application number
TW085109397A
Other languages
English (en)
Chinese (zh)
Original Assignee
Sharp Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Kk filed Critical Sharp Kk
Application granted granted Critical
Publication of TW299399B publication Critical patent/TW299399B/zh

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317Testing of digital circuits
    • G01R31/3181Functional testing
    • G01R31/3183Generation of test inputs, e.g. test vectors, patterns or sequences
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/30Marginal testing, e.g. by varying supply voltage
    • G01R31/3004Current or voltage test
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R29/00Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
    • G01R29/02Measuring characteristics of individual pulses, e.g. deviation from pulse flatness, rise time or duration
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26Testing of individual semiconductor devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317Testing of digital circuits
    • G01R31/3181Functional testing
    • G01R31/319Tester hardware, i.e. output processing circuits
    • G01R31/31917Stimuli generation or application of test patterns to the device under test [DUT]
    • G01R31/31924Voltage or current aspects, e.g. driver, receiver
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
TW085109397A 1995-08-14 1996-08-03 TW299399B (enExample)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20710195A JP3233559B2 (ja) 1995-08-14 1995-08-14 半導体集積回路のテスト方法および装置

Publications (1)

Publication Number Publication Date
TW299399B true TW299399B (enExample) 1997-03-01

Family

ID=16534222

Family Applications (1)

Application Number Title Priority Date Filing Date
TW085109397A TW299399B (enExample) 1995-08-14 1996-08-03

Country Status (4)

Country Link
US (1) US5760599A (enExample)
JP (1) JP3233559B2 (enExample)
KR (1) KR100205838B1 (enExample)
TW (1) TW299399B (enExample)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5867033A (en) * 1996-05-24 1999-02-02 Lsi Logic Corporation Circuit for testing the operation of a semiconductor device
US5955890A (en) * 1997-10-31 1999-09-21 Credence Systems Corporation Backmatch resistor structure for an integrated circuit tester
JP3392029B2 (ja) * 1997-12-12 2003-03-31 株式会社アドバンテスト Icテスタの電圧印加電流測定回路
JPH11237454A (ja) * 1998-02-20 1999-08-31 Advantest Corp 半導体試験装置
US6590405B2 (en) 1999-04-21 2003-07-08 Advantest, Corp CMOS integrated circuit and timing signal generator using same
JP2001091568A (ja) * 1999-09-17 2001-04-06 Advantest Corp 半導体集積回路の試験装置及び試験方法
US6339338B1 (en) * 2000-01-18 2002-01-15 Formfactor, Inc. Apparatus for reducing power supply noise in an integrated circuit
US7342405B2 (en) 2000-01-18 2008-03-11 Formfactor, Inc. Apparatus for reducing power supply noise in an integrated circuit
US6657455B2 (en) * 2000-01-18 2003-12-02 Formfactor, Inc. Predictive, adaptive power supply for an integrated circuit under test
US6281699B1 (en) * 2000-03-15 2001-08-28 Teradyne, Inc. Detector with common mode comparator for automatic test equipment
JP4174167B2 (ja) 2000-04-04 2008-10-29 株式会社アドバンテスト 半導体集積回路の故障解析方法および故障解析装置
US6445208B1 (en) 2000-04-06 2002-09-03 Advantest Corp. Power source current measurement unit for semiconductor test system
US6677744B1 (en) * 2000-04-13 2004-01-13 Formfactor, Inc. System for measuring signal path resistance for an integrated circuit tester interconnect structure
JP2001296335A (ja) * 2000-04-14 2001-10-26 Nec Corp 半導体装置の検査方法及び検査装置
JP3595503B2 (ja) * 2000-12-05 2004-12-02 Necマイクロシステム株式会社 半導体集積回路及びその試験方法
JP2002318265A (ja) * 2001-04-24 2002-10-31 Hitachi Ltd 半導体集積回路及び半導体集積回路のテスト方法
JP3983123B2 (ja) * 2002-07-11 2007-09-26 シャープ株式会社 半導体検査装置及び半導体検査方法
JP4211326B2 (ja) * 2002-08-28 2009-01-21 ヤマハ株式会社 半導体検査方法及び装置
US7317324B2 (en) * 2003-11-04 2008-01-08 Canon Kabushiki Kaisha Semiconductor integrated circuit testing device and method
JP2005172549A (ja) * 2003-12-10 2005-06-30 Matsushita Electric Ind Co Ltd 半導体集積回路の検証方法及びテストパターンの作成方法
JP4447414B2 (ja) * 2004-09-17 2010-04-07 富士通マイクロエレクトロニクス株式会社 半導体デバイスの試験方法及び試験装置
JP4815141B2 (ja) * 2005-03-29 2011-11-16 富士通株式会社 回路異常動作検出システム
JP2007120991A (ja) * 2005-10-25 2007-05-17 Sharp Corp テストパターンの検出率算出方法、コンピュータプログラム及びテストパターンの検出率算出装置
JP4690887B2 (ja) * 2005-12-28 2011-06-01 株式会社アドバンテスト 電力増幅回路および試験装置
WO2009066764A1 (ja) * 2007-11-21 2009-05-28 Nec Corporation 半導体集積回路装置及びそのテスト方法
WO2010029597A1 (ja) * 2008-09-10 2010-03-18 株式会社アドバンテスト 試験装置および回路システム
US8860817B2 (en) 2011-07-25 2014-10-14 Aptina Imaging Corporation Imaging systems with verification circuitry for monitoring standby leakage current levels
KR102282192B1 (ko) * 2015-07-23 2021-07-27 삼성전자 주식회사 미스매치 검출 및 보상 회로를 갖는 반도체 장치
US11353496B2 (en) * 2019-05-08 2022-06-07 Hamilton Sundstrand Corporation Frequency-based built-in-test for discrete outputs

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4100532A (en) * 1976-11-19 1978-07-11 Hewlett-Packard Company Digital pattern triggering circuit
US4131848A (en) * 1976-12-03 1978-12-26 Gulf & Western Industries, Inc. Digital loop detector with automatic tuning
JPS57192876A (en) * 1981-05-22 1982-11-27 Advantest Corp Measuring device for average frequency
US4648104A (en) * 1983-09-27 1987-03-03 Nippon Seiki Corporation Pulse counting and pulse rate indicating device responsive to abrupt pulse rate change to accurately indicate current rate
JPS6170777U (enExample) * 1984-10-15 1986-05-14
US4953095A (en) * 1986-09-30 1990-08-28 Nissan Motor Co., Ltd. Apparatus and method for measuring the frequency of a pulse signal
NL8900050A (nl) * 1989-01-10 1990-08-01 Philips Nv Inrichting voor het meten van een ruststroom van een geintegreerde monolitische digitale schakeling, geintegreerde monolitische digitale schakeling voorzien van een dergelijke inrichting en testapparaat voorzien van een dergelijke inrichting.
US5321354A (en) * 1990-07-23 1994-06-14 Seiko Epson Corporation Method for inspecting semiconductor devices
JPH05273298A (ja) * 1992-03-25 1993-10-22 Sharp Corp 半導体集積回路装置及びそのテスト方法
US5325054A (en) * 1992-07-07 1994-06-28 Texas Instruments Incorporated Method and system for screening reliability of semiconductor circuits
JPH0658981A (ja) * 1992-08-05 1994-03-04 Sanyo Electric Co Ltd Cmos集積回路の電流検出回路

Also Published As

Publication number Publication date
JPH0954140A (ja) 1997-02-25
KR970011885A (ko) 1997-03-27
JP3233559B2 (ja) 2001-11-26
US5760599A (en) 1998-06-02
KR100205838B1 (ko) 1999-07-01

Similar Documents

Publication Publication Date Title
TW299399B (enExample)
TW500926B (en) Failure analysis method and apparatus for semiconductor integrated circuit
US6584589B1 (en) Self-testing of magneto-resistive memory arrays
US6586921B1 (en) Method and circuit for testing DC parameters of circuit input and output nodes
US6008664A (en) Parametric test system and method
JP2002277503A (ja) 半導体集積回路装置
JPH03501889A (ja) 集積回路要素の欠陥を検出する方法および装置
JP2725615B2 (ja) 集積回路試験装置
JP2001091568A (ja) 半導体集積回路の試験装置及び試験方法
US6031386A (en) Apparatus and method for defect testing of integrated circuits
JPS60142532A (ja) 故障セルの電気的診断方法
Kruseman et al. The future of delta I/sub DDQ/testing
Hirase et al. Scan chain diagnosis using IDDQ current measurement
US6327218B1 (en) Integrated circuit time delay measurement apparatus
DE19706534A1 (de) Halbleitereinrichtung, die in der Lage ist eine eingestellte Anschlußzusatzfunktion extern und schnell zu identifizieren, und ein Verfahren zur Identifizierung einer internen Funktion einer Halbleitereinrichtung
Shashaani et al. A DFT technique for high performance circuit testing
Jandhyala et al. Design-for-test analysis of a buffered sdram dimm
Yang et al. A method for detecting interconnect DSM defects in systems on chip
JPH04213849A (ja) 半導体装置及びその初期不良検出方法
Hirase et al. The effect of fault detection by IDDQ measurement for CMOS VLSIs
JP3148576B2 (ja) 半導体集積回路のテスト回路及びテスト方法
Hirase et al. The effect of CMOS VLSI IDDq measurement on defect level
JP3489742B2 (ja) 半導体集積回路およびそのテスト方法
JP2800507B2 (ja) 診断装置および診断方法
Alorda et al. Chardin: an off-chip transient current monitor with digital interface for production testing

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees