TW299399B - - Google Patents
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- Publication number
- TW299399B TW299399B TW085109397A TW85109397A TW299399B TW 299399 B TW299399 B TW 299399B TW 085109397 A TW085109397 A TW 085109397A TW 85109397 A TW85109397 A TW 85109397A TW 299399 B TW299399 B TW 299399B
- Authority
- TW
- Taiwan
- Prior art keywords
- power supply
- test
- supply current
- state
- semiconductor integrated
- Prior art date
Links
- 238000012360 testing method Methods 0.000 claims description 105
- 238000001514 detection method Methods 0.000 claims description 36
- 239000004065 semiconductor Substances 0.000 claims description 28
- 230000007704 transition Effects 0.000 claims description 28
- 230000008859 change Effects 0.000 claims description 19
- 238000001228 spectrum Methods 0.000 claims description 9
- 238000010998 test method Methods 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 4
- 238000006243 chemical reaction Methods 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 14
- 230000007547 defect Effects 0.000 description 11
- 230000000875 corresponding effect Effects 0.000 description 8
- 238000005259 measurement Methods 0.000 description 8
- 238000005516 engineering process Methods 0.000 description 7
- 230000003068 static effect Effects 0.000 description 7
- 230000015654 memory Effects 0.000 description 4
- 230000002079 cooperative effect Effects 0.000 description 3
- 230000002950 deficient Effects 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 238000011990 functional testing Methods 0.000 description 3
- 230000005856 abnormality Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 230000001788 irregular Effects 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/317—Testing of digital circuits
- G01R31/3181—Functional testing
- G01R31/3183—Generation of test inputs, e.g. test vectors, patterns or sequences
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/30—Marginal testing, e.g. by varying supply voltage
- G01R31/3004—Current or voltage test
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R29/00—Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
- G01R29/02—Measuring characteristics of individual pulses, e.g. deviation from pulse flatness, rise time or duration
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/317—Testing of digital circuits
- G01R31/3181—Functional testing
- G01R31/319—Tester hardware, i.e. output processing circuits
- G01R31/31917—Stimuli generation or application of test patterns to the device under test [DUT]
- G01R31/31924—Voltage or current aspects, e.g. driver, receiver
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- General Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Tests Of Electronic Circuits (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20710195A JP3233559B2 (ja) | 1995-08-14 | 1995-08-14 | 半導体集積回路のテスト方法および装置 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW299399B true TW299399B (enExample) | 1997-03-01 |
Family
ID=16534222
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW085109397A TW299399B (enExample) | 1995-08-14 | 1996-08-03 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US5760599A (enExample) |
| JP (1) | JP3233559B2 (enExample) |
| KR (1) | KR100205838B1 (enExample) |
| TW (1) | TW299399B (enExample) |
Families Citing this family (29)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5867033A (en) * | 1996-05-24 | 1999-02-02 | Lsi Logic Corporation | Circuit for testing the operation of a semiconductor device |
| US5955890A (en) * | 1997-10-31 | 1999-09-21 | Credence Systems Corporation | Backmatch resistor structure for an integrated circuit tester |
| JP3392029B2 (ja) * | 1997-12-12 | 2003-03-31 | 株式会社アドバンテスト | Icテスタの電圧印加電流測定回路 |
| JPH11237454A (ja) * | 1998-02-20 | 1999-08-31 | Advantest Corp | 半導体試験装置 |
| US6590405B2 (en) | 1999-04-21 | 2003-07-08 | Advantest, Corp | CMOS integrated circuit and timing signal generator using same |
| JP2001091568A (ja) * | 1999-09-17 | 2001-04-06 | Advantest Corp | 半導体集積回路の試験装置及び試験方法 |
| US6339338B1 (en) * | 2000-01-18 | 2002-01-15 | Formfactor, Inc. | Apparatus for reducing power supply noise in an integrated circuit |
| US7342405B2 (en) | 2000-01-18 | 2008-03-11 | Formfactor, Inc. | Apparatus for reducing power supply noise in an integrated circuit |
| US6657455B2 (en) * | 2000-01-18 | 2003-12-02 | Formfactor, Inc. | Predictive, adaptive power supply for an integrated circuit under test |
| US6281699B1 (en) * | 2000-03-15 | 2001-08-28 | Teradyne, Inc. | Detector with common mode comparator for automatic test equipment |
| JP4174167B2 (ja) | 2000-04-04 | 2008-10-29 | 株式会社アドバンテスト | 半導体集積回路の故障解析方法および故障解析装置 |
| US6445208B1 (en) | 2000-04-06 | 2002-09-03 | Advantest Corp. | Power source current measurement unit for semiconductor test system |
| US6677744B1 (en) * | 2000-04-13 | 2004-01-13 | Formfactor, Inc. | System for measuring signal path resistance for an integrated circuit tester interconnect structure |
| JP2001296335A (ja) * | 2000-04-14 | 2001-10-26 | Nec Corp | 半導体装置の検査方法及び検査装置 |
| JP3595503B2 (ja) * | 2000-12-05 | 2004-12-02 | Necマイクロシステム株式会社 | 半導体集積回路及びその試験方法 |
| JP2002318265A (ja) * | 2001-04-24 | 2002-10-31 | Hitachi Ltd | 半導体集積回路及び半導体集積回路のテスト方法 |
| JP3983123B2 (ja) * | 2002-07-11 | 2007-09-26 | シャープ株式会社 | 半導体検査装置及び半導体検査方法 |
| JP4211326B2 (ja) * | 2002-08-28 | 2009-01-21 | ヤマハ株式会社 | 半導体検査方法及び装置 |
| US7317324B2 (en) * | 2003-11-04 | 2008-01-08 | Canon Kabushiki Kaisha | Semiconductor integrated circuit testing device and method |
| JP2005172549A (ja) * | 2003-12-10 | 2005-06-30 | Matsushita Electric Ind Co Ltd | 半導体集積回路の検証方法及びテストパターンの作成方法 |
| JP4447414B2 (ja) * | 2004-09-17 | 2010-04-07 | 富士通マイクロエレクトロニクス株式会社 | 半導体デバイスの試験方法及び試験装置 |
| JP4815141B2 (ja) * | 2005-03-29 | 2011-11-16 | 富士通株式会社 | 回路異常動作検出システム |
| JP2007120991A (ja) * | 2005-10-25 | 2007-05-17 | Sharp Corp | テストパターンの検出率算出方法、コンピュータプログラム及びテストパターンの検出率算出装置 |
| JP4690887B2 (ja) * | 2005-12-28 | 2011-06-01 | 株式会社アドバンテスト | 電力増幅回路および試験装置 |
| WO2009066764A1 (ja) * | 2007-11-21 | 2009-05-28 | Nec Corporation | 半導体集積回路装置及びそのテスト方法 |
| WO2010029597A1 (ja) * | 2008-09-10 | 2010-03-18 | 株式会社アドバンテスト | 試験装置および回路システム |
| US8860817B2 (en) | 2011-07-25 | 2014-10-14 | Aptina Imaging Corporation | Imaging systems with verification circuitry for monitoring standby leakage current levels |
| KR102282192B1 (ko) * | 2015-07-23 | 2021-07-27 | 삼성전자 주식회사 | 미스매치 검출 및 보상 회로를 갖는 반도체 장치 |
| US11353496B2 (en) * | 2019-05-08 | 2022-06-07 | Hamilton Sundstrand Corporation | Frequency-based built-in-test for discrete outputs |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4100532A (en) * | 1976-11-19 | 1978-07-11 | Hewlett-Packard Company | Digital pattern triggering circuit |
| US4131848A (en) * | 1976-12-03 | 1978-12-26 | Gulf & Western Industries, Inc. | Digital loop detector with automatic tuning |
| JPS57192876A (en) * | 1981-05-22 | 1982-11-27 | Advantest Corp | Measuring device for average frequency |
| US4648104A (en) * | 1983-09-27 | 1987-03-03 | Nippon Seiki Corporation | Pulse counting and pulse rate indicating device responsive to abrupt pulse rate change to accurately indicate current rate |
| JPS6170777U (enExample) * | 1984-10-15 | 1986-05-14 | ||
| US4953095A (en) * | 1986-09-30 | 1990-08-28 | Nissan Motor Co., Ltd. | Apparatus and method for measuring the frequency of a pulse signal |
| NL8900050A (nl) * | 1989-01-10 | 1990-08-01 | Philips Nv | Inrichting voor het meten van een ruststroom van een geintegreerde monolitische digitale schakeling, geintegreerde monolitische digitale schakeling voorzien van een dergelijke inrichting en testapparaat voorzien van een dergelijke inrichting. |
| US5321354A (en) * | 1990-07-23 | 1994-06-14 | Seiko Epson Corporation | Method for inspecting semiconductor devices |
| JPH05273298A (ja) * | 1992-03-25 | 1993-10-22 | Sharp Corp | 半導体集積回路装置及びそのテスト方法 |
| US5325054A (en) * | 1992-07-07 | 1994-06-28 | Texas Instruments Incorporated | Method and system for screening reliability of semiconductor circuits |
| JPH0658981A (ja) * | 1992-08-05 | 1994-03-04 | Sanyo Electric Co Ltd | Cmos集積回路の電流検出回路 |
-
1995
- 1995-08-14 JP JP20710195A patent/JP3233559B2/ja not_active Expired - Fee Related
-
1996
- 1996-08-03 TW TW085109397A patent/TW299399B/zh not_active IP Right Cessation
- 1996-08-06 US US08/689,263 patent/US5760599A/en not_active Expired - Lifetime
- 1996-08-13 KR KR1019960033541A patent/KR100205838B1/ko not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0954140A (ja) | 1997-02-25 |
| KR970011885A (ko) | 1997-03-27 |
| JP3233559B2 (ja) | 2001-11-26 |
| US5760599A (en) | 1998-06-02 |
| KR100205838B1 (ko) | 1999-07-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |