KR100205838B1 - 반도체 집적회로의 시험 방법 및 장치 - Google Patents

반도체 집적회로의 시험 방법 및 장치 Download PDF

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Publication number
KR100205838B1
KR100205838B1 KR1019960033541A KR19960033541A KR100205838B1 KR 100205838 B1 KR100205838 B1 KR 100205838B1 KR 1019960033541 A KR1019960033541 A KR 1019960033541A KR 19960033541 A KR19960033541 A KR 19960033541A KR 100205838 B1 KR100205838 B1 KR 100205838B1
Authority
KR
South Korea
Prior art keywords
test
integrated circuit
power supply
semiconductor integrated
current
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1019960033541A
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English (en)
Korean (ko)
Other versions
KR970011885A (ko
Inventor
마사유기 에히로
Original Assignee
쓰지 하루오
샤프 가부시끼가이샤
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Publication date
Application filed by 쓰지 하루오, 샤프 가부시끼가이샤 filed Critical 쓰지 하루오
Publication of KR970011885A publication Critical patent/KR970011885A/ko
Application granted granted Critical
Publication of KR100205838B1 publication Critical patent/KR100205838B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/3183—Generation of test inputs, e.g. test vectors, patterns or sequences
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/30—Marginal testing, e.g. by varying supply voltage
    • G01R31/3004—Current or voltage test
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R29/00—Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
    • G01R29/02—Measuring characteristics of individual pulses, e.g. deviation from pulse flatness, rise time or duration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/319—Tester hardware, i.e. output processing circuits
    • G01R31/31917—Stimuli generation or application of test patterns to the device under test [DUT]
    • G01R31/31924—Voltage or current aspects, e.g. driver, receiver
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
KR1019960033541A 1995-08-14 1996-08-13 반도체 집적회로의 시험 방법 및 장치 Expired - Fee Related KR100205838B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP95-207101 1995-08-14
JP20710195A JP3233559B2 (ja) 1995-08-14 1995-08-14 半導体集積回路のテスト方法および装置

Publications (2)

Publication Number Publication Date
KR970011885A KR970011885A (ko) 1997-03-27
KR100205838B1 true KR100205838B1 (ko) 1999-07-01

Family

ID=16534222

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960033541A Expired - Fee Related KR100205838B1 (ko) 1995-08-14 1996-08-13 반도체 집적회로의 시험 방법 및 장치

Country Status (4)

Country Link
US (1) US5760599A (enExample)
JP (1) JP3233559B2 (enExample)
KR (1) KR100205838B1 (enExample)
TW (1) TW299399B (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100499849B1 (ko) * 2000-04-06 2005-07-08 가부시키가이샤 어드밴티스트 반도체 테스트 시스템용 전원 전류 측정 유닛

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US5867033A (en) * 1996-05-24 1999-02-02 Lsi Logic Corporation Circuit for testing the operation of a semiconductor device
US5955890A (en) * 1997-10-31 1999-09-21 Credence Systems Corporation Backmatch resistor structure for an integrated circuit tester
JP3392029B2 (ja) * 1997-12-12 2003-03-31 株式会社アドバンテスト Ｉｃテスタの電圧印加電流測定回路
JPH11237454A (ja) * 1998-02-20 1999-08-31 Advantest Corp 半導体試験装置
US6590405B2 (en) 1999-04-21 2003-07-08 Advantest, Corp CMOS integrated circuit and timing signal generator using same
JP2001091568A (ja) * 1999-09-17 2001-04-06 Advantest Corp 半導体集積回路の試験装置及び試験方法
US6339338B1 (en) * 2000-01-18 2002-01-15 Formfactor, Inc. Apparatus for reducing power supply noise in an integrated circuit
US7342405B2 (en) 2000-01-18 2008-03-11 Formfactor, Inc. Apparatus for reducing power supply noise in an integrated circuit
US6657455B2 (en) * 2000-01-18 2003-12-02 Formfactor, Inc. Predictive, adaptive power supply for an integrated circuit under test
US6281699B1 (en) * 2000-03-15 2001-08-28 Teradyne, Inc. Detector with common mode comparator for automatic test equipment
JP4174167B2 (ja) 2000-04-04 2008-10-29 株式会社アドバンテスト 半導体集積回路の故障解析方法および故障解析装置
US6677744B1 (en) * 2000-04-13 2004-01-13 Formfactor, Inc. System for measuring signal path resistance for an integrated circuit tester interconnect structure
JP2001296335A (ja) * 2000-04-14 2001-10-26 Nec Corp 半導体装置の検査方法及び検査装置
JP3595503B2 (ja) * 2000-12-05 2004-12-02 Ｎｅｃマイクロシステム株式会社 半導体集積回路及びその試験方法
JP2002318265A (ja) * 2001-04-24 2002-10-31 Hitachi Ltd 半導体集積回路及び半導体集積回路のテスト方法
JP3983123B2 (ja) * 2002-07-11 2007-09-26 シャープ株式会社 半導体検査装置及び半導体検査方法
JP4211326B2 (ja) * 2002-08-28 2009-01-21 ヤマハ株式会社 半導体検査方法及び装置
US7317324B2 (en) * 2003-11-04 2008-01-08 Canon Kabushiki Kaisha Semiconductor integrated circuit testing device and method
JP2005172549A (ja) * 2003-12-10 2005-06-30 Matsushita Electric Ind Co Ltd 半導体集積回路の検証方法及びテストパターンの作成方法
JP4447414B2 (ja) * 2004-09-17 2010-04-07 富士通マイクロエレクトロニクス株式会社 半導体デバイスの試験方法及び試験装置
JP4815141B2 (ja) * 2005-03-29 2011-11-16 富士通株式会社 回路異常動作検出システム
JP2007120991A (ja) * 2005-10-25 2007-05-17 Sharp Corp テストパターンの検出率算出方法、コンピュータプログラム及びテストパターンの検出率算出装置
JP4690887B2 (ja) * 2005-12-28 2011-06-01 株式会社アドバンテスト 電力増幅回路および試験装置
WO2009066764A1 (ja) * 2007-11-21 2009-05-28 Nec Corporation 半導体集積回路装置及びそのテスト方法
WO2010029597A1 (ja) * 2008-09-10 2010-03-18 株式会社アドバンテスト 試験装置および回路システム
US8860817B2 (en) 2011-07-25 2014-10-14 Aptina Imaging Corporation Imaging systems with verification circuitry for monitoring standby leakage current levels
KR102282192B1 (ko) * 2015-07-23 2021-07-27 삼성전자 주식회사 미스매치 검출 및 보상 회로를 갖는 반도체 장치
US11353496B2 (en) * 2019-05-08 2022-06-07 Hamilton Sundstrand Corporation Frequency-based built-in-test for discrete outputs

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Publication number Priority date Publication date Assignee Title
US4100532A (en) * 1976-11-19 1978-07-11 Hewlett-Packard Company Digital pattern triggering circuit
US4131848A (en) * 1976-12-03 1978-12-26 Gulf & Western Industries, Inc. Digital loop detector with automatic tuning
JPS57192876A (en) * 1981-05-22 1982-11-27 Advantest Corp Measuring device for average frequency
US4648104A (en) * 1983-09-27 1987-03-03 Nippon Seiki Corporation Pulse counting and pulse rate indicating device responsive to abrupt pulse rate change to accurately indicate current rate
JPS6170777U (enExample) * 1984-10-15 1986-05-14
US4953095A (en) * 1986-09-30 1990-08-28 Nissan Motor Co., Ltd. Apparatus and method for measuring the frequency of a pulse signal
NL8900050A (nl) * 1989-01-10 1990-08-01 Philips Nv Inrichting voor het meten van een ruststroom van een geintegreerde monolitische digitale schakeling, geintegreerde monolitische digitale schakeling voorzien van een dergelijke inrichting en testapparaat voorzien van een dergelijke inrichting.
US5321354A (en) * 1990-07-23 1994-06-14 Seiko Epson Corporation Method for inspecting semiconductor devices
JPH05273298A (ja) * 1992-03-25 1993-10-22 Sharp Corp 半導体集積回路装置及びそのテスト方法
US5325054A (en) * 1992-07-07 1994-06-28 Texas Instruments Incorporated Method and system for screening reliability of semiconductor circuits
JPH0658981A (ja) * 1992-08-05 1994-03-04 Sanyo Electric Co Ltd Ｃｍｏｓ集積回路の電流検出回路

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100499849B1 (ko) * 2000-04-06 2005-07-08 가부시키가이샤 어드밴티스트 반도체 테스트 시스템용 전원 전류 측정 유닛

Also Published As

Publication number Publication date
TW299399B (enExample) 1997-03-01
JPH0954140A (ja) 1997-02-25
KR970011885A (ko) 1997-03-27
JP3233559B2 (ja) 2001-11-26
US5760599A (en) 1998-06-02

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