TW287313B - - Google Patents
Info
- Publication number
- TW287313B TW287313B TW085101152A TW85101152A TW287313B TW 287313 B TW287313 B TW 287313B TW 085101152 A TW085101152 A TW 085101152A TW 85101152 A TW85101152 A TW 85101152A TW 287313 B TW287313 B TW 287313B
- Authority
- TW
- Taiwan
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C13/00—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C13/00—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
- G11C13/0002—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements
- G11C13/0021—Auxiliary circuits
- G11C13/0069—Writing or programming circuits or methods
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C17/00—Read-only memories programmable only once; Semi-permanent stores, e.g. manually-replaceable information cards
- G11C17/08—Read-only memories programmable only once; Semi-permanent stores, e.g. manually-replaceable information cards using semiconductor devices, e.g. bipolar elements
- G11C17/10—Read-only memories programmable only once; Semi-permanent stores, e.g. manually-replaceable information cards using semiconductor devices, e.g. bipolar elements in which contents are determined during manufacturing by a predetermined arrangement of coupling elements, e.g. mask-programmable ROM
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/10—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration
- H01L27/101—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration including resistors or capacitors only
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B63/00—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices
- H10B63/30—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices comprising selection components having three or more electrodes, e.g. transistors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B63/00—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices
- H10B63/80—Arrangements comprising multiple bistable or multi-stable switching components of the same type on a plane parallel to the substrate, e.g. cross-point arrays
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/011—Manufacture or treatment of multistable switching devices
- H10N70/021—Formation of switching materials, e.g. deposition of layers
- H10N70/023—Formation of switching materials, e.g. deposition of layers by chemical vapor deposition, e.g. MOCVD, ALD
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/011—Manufacture or treatment of multistable switching devices
- H10N70/061—Shaping switching materials
- H10N70/066—Shaping switching materials by filling of openings, e.g. damascene method
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/20—Multistable switching devices, e.g. memristors
- H10N70/24—Multistable switching devices, e.g. memristors based on migration or redistribution of ionic species, e.g. anions, vacancies
- H10N70/245—Multistable switching devices, e.g. memristors based on migration or redistribution of ionic species, e.g. anions, vacancies the species being metal cations, e.g. programmable metallization cells
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/821—Device geometry
- H10N70/826—Device geometry adapted for essentially vertical current flow, e.g. sandwich or pillar type devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/821—Device geometry
- H10N70/828—Current flow limiting means within the switching material region, e.g. constrictions
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/881—Switching materials
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C13/00—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
- G11C13/0002—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements
- G11C13/0021—Auxiliary circuits
- G11C13/0069—Writing or programming circuits or methods
- G11C2013/0073—Write using bi-directional cell biasing
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C2213/00—Indexing scheme relating to G11C13/00 for features not covered by this group
- G11C2213/30—Resistive cell, memory material aspects
- G11C2213/33—Material including silicon
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C2213/00—Indexing scheme relating to G11C13/00 for features not covered by this group
- G11C2213/50—Resistive cell structure aspects
- G11C2213/56—Structure including two electrodes, a memory active layer and a so called passive or source or reservoir layer which is NOT an electrode, wherein the passive or source or reservoir layer is a source of ions which migrate afterwards in the memory active layer to be only trapped there, to form conductive filaments there or to react with the material of the memory active layer in redox way
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C2213/00—Indexing scheme relating to G11C13/00 for features not covered by this group
- G11C2213/70—Resistive array aspects
- G11C2213/77—Array wherein the memory element being directly connected to the bit lines and word lines without any access device being used
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Semiconductor Memories (AREA)
- Mram Or Spin Memory Techniques (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3124895 | 1995-02-20 |
Publications (1)
Publication Number | Publication Date |
---|---|
TW287313B true TW287313B (zh) | 1996-10-01 |
Family
ID=12326077
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW085101152A TW287313B (zh) | 1995-02-20 | 1996-01-30 |
Country Status (5)
Country | Link |
---|---|
US (2) | US5621247A (zh) |
JP (1) | JPH08293585A (zh) |
KR (1) | KR100186919B1 (zh) |
CN (1) | CN1082249C (zh) |
TW (1) | TW287313B (zh) |
Families Citing this family (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08293523A (ja) * | 1995-02-21 | 1996-11-05 | Seiko Epson Corp | 半導体装置およびその製造方法 |
TW307048B (en) * | 1996-11-22 | 1997-06-01 | United Microelectronics Corp | High density read only memory structure and manufacturing method thereof |
US6268661B1 (en) * | 1999-08-31 | 2001-07-31 | Nec Corporation | Semiconductor device and method of its fabrication |
JPH10242422A (ja) | 1997-02-28 | 1998-09-11 | Toshiba Corp | 半導体記憶装置およびその製造方法 |
DE19815874C2 (de) * | 1998-04-08 | 2002-06-13 | Infineon Technologies Ag | ROM-Halbleiter-Speichervorrichtung mit Implantationsbereichen zur Einstellung eines Kontaktwiderstandes und Verfahren zu deren Herstellung |
JP2000216264A (ja) * | 1999-01-22 | 2000-08-04 | Mitsubishi Electric Corp | Cmos論理回路素子、半導体装置とその製造方法およびその製造方法において用いる半導体回路設計方法 |
KR100358569B1 (ko) * | 1999-12-28 | 2002-10-25 | 주식회사 하이닉스반도체 | 반도체소자의 금속배선 형성방법 |
AUPQ504300A0 (en) | 2000-01-11 | 2000-02-03 | Biorex Health Limited | Extraction of flavonoids |
JP2001257325A (ja) * | 2000-03-08 | 2001-09-21 | Nec Corp | 半導体記憶装置及びその製造方法 |
JP3837993B2 (ja) * | 2000-03-21 | 2006-10-25 | 日本電気株式会社 | 電子素子およびそれを用いた記録方法 |
DE10020128A1 (de) * | 2000-04-14 | 2001-10-18 | Infineon Technologies Ag | MRAM-Speicher |
US6693821B2 (en) * | 2001-06-28 | 2004-02-17 | Sharp Laboratories Of America, Inc. | Low cross-talk electrically programmable resistance cross point memory |
US6531371B2 (en) * | 2001-06-28 | 2003-03-11 | Sharp Laboratories Of America, Inc. | Electrically programmable resistance cross point memory |
AUPR602201A0 (en) * | 2001-06-29 | 2001-07-26 | Biorex Health Limited | Flavonoid concentrates |
JP4249992B2 (ja) * | 2002-12-04 | 2009-04-08 | シャープ株式会社 | 半導体記憶装置及びメモリセルの書き込み並びに消去方法 |
JP2004260101A (ja) * | 2003-02-27 | 2004-09-16 | Rohm Co Ltd | 半導体装置の製造方法 |
US7327448B2 (en) * | 2004-07-29 | 2008-02-05 | Optech Ventures Llc | Laser-ultrasonic detection of flip chip attachment defects |
CN101044624A (zh) * | 2004-10-22 | 2007-09-26 | 株式会社半导体能源研究所 | 半导体器件 |
US9734901B2 (en) * | 2004-10-29 | 2017-08-15 | Semiconductor Energy Laboratory Co., Ltd. | Display device with semiconductor memory cell |
KR20060081470A (ko) * | 2005-01-07 | 2006-07-13 | 삼성전자주식회사 | 박막트랜지스터 기판과 그 제조방법 |
US20090039335A1 (en) * | 2006-02-09 | 2009-02-12 | Motoyasu Terao | Semiconductor device and manufacturing method of the same |
EP1850378A3 (en) * | 2006-04-28 | 2013-08-07 | Semiconductor Energy Laboratory Co., Ltd. | Memory device and semicondutor device |
JP4344372B2 (ja) * | 2006-08-22 | 2009-10-14 | シャープ株式会社 | 半導体記憶装置及びその駆動方法 |
US8232175B2 (en) * | 2006-09-14 | 2012-07-31 | Spansion Llc | Damascene metal-insulator-metal (MIM) device with improved scaleability |
JP4373486B2 (ja) * | 2006-10-16 | 2009-11-25 | パナソニック株式会社 | 不揮発性記憶素子アレイおよびその製造方法 |
KR100911473B1 (ko) * | 2007-06-18 | 2009-08-11 | 삼성전자주식회사 | 상변화 메모리 유닛, 이의 제조 방법, 이를 포함하는상변화 메모리 장치 및 그 제조 방법 |
WO2010082928A1 (en) * | 2009-01-15 | 2010-07-22 | Hewlett-Packard Development Company, L.P. | Silicon-based memristive device |
JP2010245102A (ja) * | 2009-04-01 | 2010-10-28 | Sharp Corp | 半導体装置及びその製造方法 |
US8716688B2 (en) * | 2010-02-25 | 2014-05-06 | The University Of Kentucky Research Foundation | Electronic device incorporating memristor made from metallic nanowire |
KR101145331B1 (ko) * | 2010-07-15 | 2012-05-14 | 에스케이하이닉스 주식회사 | 저항 메모리 장치 |
US9312306B2 (en) * | 2013-09-03 | 2016-04-12 | Kabushiki Kaisha Toshiba | Nonvolatile memory device and method of manufacturing the same |
CN108899391A (zh) * | 2018-06-15 | 2018-11-27 | 西安微电子技术研究所 | 光电耦合器用红外线接收管遮蔽层的制作方法 |
CN113644193A (zh) * | 2021-06-29 | 2021-11-12 | 北京大学 | 阻变存储器件的制备方法、装置、电子设备和存储介质 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54121685A (en) * | 1978-03-14 | 1979-09-20 | Kyushu Nippon Electric | Ic and method of fabricating same |
US5075249A (en) * | 1988-04-04 | 1991-12-24 | Fujitsu Limited | Method of making a bic memory cell having contact openings with straight sidewalls and sharp-edge rims |
US4822753A (en) * | 1988-05-09 | 1989-04-18 | Motorola, Inc. | Method for making a w/tin contact |
US5177589A (en) * | 1990-01-29 | 1993-01-05 | Hitachi, Ltd. | Refractory metal thin film having a particular step coverage factor and ratio of surface roughness |
US5341328A (en) * | 1991-01-18 | 1994-08-23 | Energy Conversion Devices, Inc. | Electrically erasable memory elements having reduced switching current requirements and increased write/erase cycle life |
JP2533414B2 (ja) * | 1991-04-09 | 1996-09-11 | 三菱電機株式会社 | 半導体集積回路装置の配線接続構造およびその製造方法 |
JP2806660B2 (ja) * | 1991-10-30 | 1998-09-30 | シャープ株式会社 | 不揮発性記録装置 |
JP2859481B2 (ja) * | 1992-01-20 | 1999-02-17 | シャープ株式会社 | 不揮発性メモリ装置 |
KR950011643B1 (ko) * | 1992-04-17 | 1995-10-07 | 현대전자산업주식회사 | 반도체장치 및 그 제조방법 |
JPH0660684A (ja) * | 1992-08-07 | 1994-03-04 | Ricoh Co Ltd | リード・オンリ・メモリ装置 |
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1996
- 1996-01-30 TW TW085101152A patent/TW287313B/zh active
- 1996-02-06 JP JP8019560A patent/JPH08293585A/ja active Pending
- 1996-02-12 KR KR1019960003345A patent/KR100186919B1/ko not_active IP Right Cessation
- 1996-02-16 CN CN96102504A patent/CN1082249C/zh not_active Expired - Fee Related
- 1996-02-16 US US08/602,285 patent/US5621247A/en not_active Expired - Fee Related
- 1996-06-21 US US08/668,179 patent/US5714400A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US5714400A (en) | 1998-02-03 |
US5621247A (en) | 1997-04-15 |
CN1136222A (zh) | 1996-11-20 |
JPH08293585A (ja) | 1996-11-05 |
CN1082249C (zh) | 2002-04-03 |
KR960032685A (ko) | 1996-09-17 |
KR100186919B1 (ko) | 1999-04-15 |