TW202409513A - 厚度分布計測裝置及厚度分布計測方法 - Google Patents

厚度分布計測裝置及厚度分布計測方法 Download PDF

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Publication number
TW202409513A
TW202409513A TW112109122A TW112109122A TW202409513A TW 202409513 A TW202409513 A TW 202409513A TW 112109122 A TW112109122 A TW 112109122A TW 112109122 A TW112109122 A TW 112109122A TW 202409513 A TW202409513 A TW 202409513A
Authority
TW
Taiwan
Prior art keywords
light
thickness
thickness distribution
image sensor
unit
Prior art date
Application number
TW112109122A
Other languages
English (en)
Chinese (zh)
Inventor
土屋邦彥
松本徹
高哲也
大塚賢一
Original Assignee
日商濱松赫德尼古斯股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商濱松赫德尼古斯股份有限公司 filed Critical 日商濱松赫德尼古斯股份有限公司
Publication of TW202409513A publication Critical patent/TW202409513A/zh

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0691—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of objects while moving
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/045—Correction of measurements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0002—Arrangements for supporting, fixing or guiding the measuring instrument or the object to be measured
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
    • G01B2210/40—Caliper-like sensors
    • G01B2210/46—Caliper-like sensors with one or more detectors on a single side of the object to be measured and with a transmitter on the other side
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
    • G01B2210/50—Using chromatic effects to achieve wavelength-dependent depth resolution

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Textile Engineering (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
TW112109122A 2022-04-27 2023-03-13 厚度分布計測裝置及厚度分布計測方法 TW202409513A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022-073083 2022-04-27
JP2022073083 2022-04-27

Publications (1)

Publication Number Publication Date
TW202409513A true TW202409513A (zh) 2024-03-01

Family

ID=88518443

Family Applications (1)

Application Number Title Priority Date Filing Date
TW112109122A TW202409513A (zh) 2022-04-27 2023-03-13 厚度分布計測裝置及厚度分布計測方法

Country Status (7)

Country Link
US (1) US20250244123A1 (https=)
EP (1) EP4477990A4 (https=)
JP (1) JP7849465B2 (https=)
KR (1) KR20250006133A (https=)
CN (1) CN119156517A (https=)
TW (1) TW202409513A (https=)
WO (1) WO2023210154A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN119915190B (zh) * 2025-04-02 2025-07-29 成都沃特塞恩电子技术有限公司 晶体生长厚度实时在线测量方法、装置、设备及介质

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000241125A (ja) * 1999-02-19 2000-09-08 Nippon Electro Sensari Device Kk 寸法測定装置
JP2004219108A (ja) 2003-01-09 2004-08-05 Dainippon Printing Co Ltd 着色膜の膜厚ムラ検査方法及び装置
JP2009168581A (ja) * 2008-01-15 2009-07-30 Saki Corp:Kk 被検査体の検査装置
JP5942494B2 (ja) * 2012-03-12 2016-06-29 コニカミノルタ株式会社 厚さ測定装置及び厚さ測定方法
JP6290637B2 (ja) * 2014-01-30 2018-03-07 浜松ホトニクス株式会社 膜厚計測方法及び膜厚計測装置
JP6592281B2 (ja) * 2015-06-11 2019-10-16 住友化学株式会社 目付量測定方法、積層フィルム製造方法、及び目付量測定装置
JP6579863B2 (ja) 2015-08-27 2019-09-25 キヤノン・コンポーネンツ株式会社 読取装置および透過光源ユニット
JP2020170973A (ja) 2019-04-04 2020-10-15 キヤノン・コンポーネンツ株式会社 センサユニット、読取装置、画像形成装置及び判定装置

Also Published As

Publication number Publication date
JPWO2023210154A1 (https=) 2023-11-02
EP4477990A1 (en) 2024-12-18
JP7849465B2 (ja) 2026-04-21
CN119156517A (zh) 2024-12-17
EP4477990A4 (en) 2026-02-11
US20250244123A1 (en) 2025-07-31
WO2023210154A1 (ja) 2023-11-02
KR20250006133A (ko) 2025-01-10

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