JP7849465B2 - 厚み分布計測装置および厚み分布計測方法 - Google Patents

厚み分布計測装置および厚み分布計測方法

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Publication number
JP7849465B2
JP7849465B2 JP2024517871A JP2024517871A JP7849465B2 JP 7849465 B2 JP7849465 B2 JP 7849465B2 JP 2024517871 A JP2024517871 A JP 2024517871A JP 2024517871 A JP2024517871 A JP 2024517871A JP 7849465 B2 JP7849465 B2 JP 7849465B2
Authority
JP
Japan
Prior art keywords
light
thickness
unit
thickness distribution
image sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2024517871A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2023210154A1 (https=
JPWO2023210154A5 (https=
Inventor
邦彦 土屋
徹 松本
哲也 高
賢一 大塚
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hamamatsu Photonics KK
Original Assignee
Hamamatsu Photonics KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hamamatsu Photonics KK filed Critical Hamamatsu Photonics KK
Publication of JPWO2023210154A1 publication Critical patent/JPWO2023210154A1/ja
Publication of JPWO2023210154A5 publication Critical patent/JPWO2023210154A5/ja
Application granted granted Critical
Publication of JP7849465B2 publication Critical patent/JP7849465B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0691—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of objects while moving
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/045—Correction of measurements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0002—Arrangements for supporting, fixing or guiding the measuring instrument or the object to be measured
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
    • G01B2210/40—Caliper-like sensors
    • G01B2210/46—Caliper-like sensors with one or more detectors on a single side of the object to be measured and with a transmitter on the other side
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
    • G01B2210/50—Using chromatic effects to achieve wavelength-dependent depth resolution

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Textile Engineering (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2024517871A 2022-04-27 2023-03-01 厚み分布計測装置および厚み分布計測方法 Active JP7849465B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2022073083 2022-04-27
JP2022073083 2022-04-27
PCT/JP2023/007633 WO2023210154A1 (ja) 2022-04-27 2023-03-01 厚み分布計測装置および厚み分布計測方法

Publications (3)

Publication Number Publication Date
JPWO2023210154A1 JPWO2023210154A1 (https=) 2023-11-02
JPWO2023210154A5 JPWO2023210154A5 (https=) 2025-01-16
JP7849465B2 true JP7849465B2 (ja) 2026-04-21

Family

ID=88518443

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024517871A Active JP7849465B2 (ja) 2022-04-27 2023-03-01 厚み分布計測装置および厚み分布計測方法

Country Status (7)

Country Link
US (1) US20250244123A1 (https=)
EP (1) EP4477990A4 (https=)
JP (1) JP7849465B2 (https=)
KR (1) KR20250006133A (https=)
CN (1) CN119156517A (https=)
TW (1) TW202409513A (https=)
WO (1) WO2023210154A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN119915190B (zh) * 2025-04-02 2025-07-29 成都沃特塞恩电子技术有限公司 晶体生长厚度实时在线测量方法、装置、设备及介质

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000241125A (ja) 1999-02-19 2000-09-08 Nippon Electro Sensari Device Kk 寸法測定装置
JP2004219108A (ja) 2003-01-09 2004-08-05 Dainippon Printing Co Ltd 着色膜の膜厚ムラ検査方法及び装置
WO2009090871A1 (ja) 2008-01-15 2009-07-23 Saki Corporation 被検査体の検査装置
JP2013190224A (ja) 2012-03-12 2013-09-26 Konica Minolta Inc 厚さ測定装置及び厚さ測定方法
WO2016199683A1 (ja) 2015-06-11 2016-12-15 住友化学株式会社 目付量測定方法、積層フィルム製造方法、及び目付量測定装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6290637B2 (ja) * 2014-01-30 2018-03-07 浜松ホトニクス株式会社 膜厚計測方法及び膜厚計測装置
JP6579863B2 (ja) 2015-08-27 2019-09-25 キヤノン・コンポーネンツ株式会社 読取装置および透過光源ユニット
JP2020170973A (ja) 2019-04-04 2020-10-15 キヤノン・コンポーネンツ株式会社 センサユニット、読取装置、画像形成装置及び判定装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000241125A (ja) 1999-02-19 2000-09-08 Nippon Electro Sensari Device Kk 寸法測定装置
JP2004219108A (ja) 2003-01-09 2004-08-05 Dainippon Printing Co Ltd 着色膜の膜厚ムラ検査方法及び装置
WO2009090871A1 (ja) 2008-01-15 2009-07-23 Saki Corporation 被検査体の検査装置
JP2013190224A (ja) 2012-03-12 2013-09-26 Konica Minolta Inc 厚さ測定装置及び厚さ測定方法
WO2016199683A1 (ja) 2015-06-11 2016-12-15 住友化学株式会社 目付量測定方法、積層フィルム製造方法、及び目付量測定装置

Also Published As

Publication number Publication date
JPWO2023210154A1 (https=) 2023-11-02
EP4477990A1 (en) 2024-12-18
TW202409513A (zh) 2024-03-01
CN119156517A (zh) 2024-12-17
EP4477990A4 (en) 2026-02-11
US20250244123A1 (en) 2025-07-31
WO2023210154A1 (ja) 2023-11-02
KR20250006133A (ko) 2025-01-10

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