JPWO2023210154A1 - - Google Patents
Info
- Publication number
- JPWO2023210154A1 JPWO2023210154A1 JP2024517871A JP2024517871A JPWO2023210154A1 JP WO2023210154 A1 JPWO2023210154 A1 JP WO2023210154A1 JP 2024517871 A JP2024517871 A JP 2024517871A JP 2024517871 A JP2024517871 A JP 2024517871A JP WO2023210154 A1 JPWO2023210154 A1 JP WO2023210154A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0691—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of objects while moving
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
- G01B21/045—Correction of measurements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/0002—Arrangements for supporting, fixing or guiding the measuring instrument or the object to be measured
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/8901—Optical details; Scanning details
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
- G01B2210/40—Caliper-like sensors
- G01B2210/46—Caliper-like sensors with one or more detectors on a single side of the object to be measured and with a transmitter on the other side
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
- G01B2210/50—Using chromatic effects to achieve wavelength-dependent depth resolution
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Textile Engineering (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022073083 | 2022-04-27 | ||
| JP2022073083 | 2022-04-27 | ||
| PCT/JP2023/007633 WO2023210154A1 (ja) | 2022-04-27 | 2023-03-01 | 厚み分布計測装置および厚み分布計測方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2023210154A1 true JPWO2023210154A1 (https=) | 2023-11-02 |
| JPWO2023210154A5 JPWO2023210154A5 (https=) | 2025-01-16 |
| JP7849465B2 JP7849465B2 (ja) | 2026-04-21 |
Family
ID=88518443
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024517871A Active JP7849465B2 (ja) | 2022-04-27 | 2023-03-01 | 厚み分布計測装置および厚み分布計測方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US20250244123A1 (https=) |
| EP (1) | EP4477990A4 (https=) |
| JP (1) | JP7849465B2 (https=) |
| KR (1) | KR20250006133A (https=) |
| CN (1) | CN119156517A (https=) |
| TW (1) | TW202409513A (https=) |
| WO (1) | WO2023210154A1 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN119915190B (zh) * | 2025-04-02 | 2025-07-29 | 成都沃特塞恩电子技术有限公司 | 晶体生长厚度实时在线测量方法、装置、设备及介质 |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000241125A (ja) * | 1999-02-19 | 2000-09-08 | Nippon Electro Sensari Device Kk | 寸法測定装置 |
| JP2004219108A (ja) * | 2003-01-09 | 2004-08-05 | Dainippon Printing Co Ltd | 着色膜の膜厚ムラ検査方法及び装置 |
| WO2009090871A1 (ja) * | 2008-01-15 | 2009-07-23 | Saki Corporation | 被検査体の検査装置 |
| JP2013190224A (ja) * | 2012-03-12 | 2013-09-26 | Konica Minolta Inc | 厚さ測定装置及び厚さ測定方法 |
| WO2016199683A1 (ja) * | 2015-06-11 | 2016-12-15 | 住友化学株式会社 | 目付量測定方法、積層フィルム製造方法、及び目付量測定装置 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6290637B2 (ja) * | 2014-01-30 | 2018-03-07 | 浜松ホトニクス株式会社 | 膜厚計測方法及び膜厚計測装置 |
| JP6579863B2 (ja) | 2015-08-27 | 2019-09-25 | キヤノン・コンポーネンツ株式会社 | 読取装置および透過光源ユニット |
| JP2020170973A (ja) | 2019-04-04 | 2020-10-15 | キヤノン・コンポーネンツ株式会社 | センサユニット、読取装置、画像形成装置及び判定装置 |
-
2023
- 2023-03-01 KR KR1020247038019A patent/KR20250006133A/ko active Pending
- 2023-03-01 US US18/854,197 patent/US20250244123A1/en active Pending
- 2023-03-01 WO PCT/JP2023/007633 patent/WO2023210154A1/ja not_active Ceased
- 2023-03-01 CN CN202380036244.2A patent/CN119156517A/zh active Pending
- 2023-03-01 JP JP2024517871A patent/JP7849465B2/ja active Active
- 2023-03-01 EP EP23795902.8A patent/EP4477990A4/en active Pending
- 2023-03-13 TW TW112109122A patent/TW202409513A/zh unknown
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000241125A (ja) * | 1999-02-19 | 2000-09-08 | Nippon Electro Sensari Device Kk | 寸法測定装置 |
| JP2004219108A (ja) * | 2003-01-09 | 2004-08-05 | Dainippon Printing Co Ltd | 着色膜の膜厚ムラ検査方法及び装置 |
| WO2009090871A1 (ja) * | 2008-01-15 | 2009-07-23 | Saki Corporation | 被検査体の検査装置 |
| JP2013190224A (ja) * | 2012-03-12 | 2013-09-26 | Konica Minolta Inc | 厚さ測定装置及び厚さ測定方法 |
| WO2016199683A1 (ja) * | 2015-06-11 | 2016-12-15 | 住友化学株式会社 | 目付量測定方法、積層フィルム製造方法、及び目付量測定装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| EP4477990A1 (en) | 2024-12-18 |
| JP7849465B2 (ja) | 2026-04-21 |
| TW202409513A (zh) | 2024-03-01 |
| CN119156517A (zh) | 2024-12-17 |
| EP4477990A4 (en) | 2026-02-11 |
| US20250244123A1 (en) | 2025-07-31 |
| WO2023210154A1 (ja) | 2023-11-02 |
| KR20250006133A (ko) | 2025-01-10 |
Similar Documents
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