TW202236308A - 接合用導電性組合物及使用其之接合構造以及其製造方法 - Google Patents

接合用導電性組合物及使用其之接合構造以及其製造方法 Download PDF

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Publication number
TW202236308A
TW202236308A TW110134565A TW110134565A TW202236308A TW 202236308 A TW202236308 A TW 202236308A TW 110134565 A TW110134565 A TW 110134565A TW 110134565 A TW110134565 A TW 110134565A TW 202236308 A TW202236308 A TW 202236308A
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Taiwan
Prior art keywords
copper
conductive composition
mass
carboxylic acid
bonding
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TW110134565A
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English (en)
Inventor
紺野哲
山内真一
穴井圭
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日商三井金屬鑛業股份有限公司
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Publication of TW202236308A publication Critical patent/TW202236308A/zh

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    • B22F1/00Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B22F1/05Metallic powder characterised by the size or surface area of the particles
    • B22F1/052Metallic powder characterised by the size or surface area of the particles characterised by a mixture of particles of different sizes or by the particle size distribution
    • BPERFORMING OPERATIONS; TRANSPORTING
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    • B22F1/00Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B22F1/05Metallic powder characterised by the size or surface area of the particles
    • B22F1/054Nanosized particles
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    • B22F7/06Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression of composite workpieces or articles from parts, e.g. to form tipped tools
    • B22F7/062Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression of composite workpieces or articles from parts, e.g. to form tipped tools involving the connection or repairing of preformed parts
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Abstract

本發明之接合用導電性組合物係將銅粉與羧酸混合而成。上述羧酸於其結構中具有分支碳鏈。銅粉包含第1銅粒子及第2銅粒子,上述第1銅粒子於藉由掃描式電子顯微鏡所測得之粒度分佈中,未達1 μm之區域之累積體積為50體積%之體積累積粒徑D 50為0.11 μm以上且未達1 μm,上述第2銅粒子於藉由掃描式電子顯微鏡所測得之粒度分佈中,1 μm以上之區域之累積體積為50體積%之體積累積粒徑D 50為1 μm以上10 μm以下。相對於上述銅粉100質量份,羧酸之含量為6質量份以上24質量份以下。

Description

接合用導電性組合物及使用其之接合構造以及其製造方法
本發明係關於一種接合用導電性組合物及使用其之接合構造以及其製造方法。
隨著電子機器之小型化及高性能化,於電子機器內之電子線路形成中,要求提高尺寸穩定性或導電性、與構件之接合強度等各種性能。
專利文獻1中,基於提高耐氧化性或燒結性、導電性等之目的,揭示有一種包含平均凝聚粒徑為0.5~20 μm之銅填料、平均凝聚粒徑為50~200 nm之銅奈米粒子、及脂肪族羧酸的導電性填料。
專利文獻2中,基於提高導體之生產性之目的,揭示有一種包含含銅粒子及脂肪酸,相對於含銅粒子100質量份,脂肪酸之含量為0.1質量份~5.8質量份之導體形成組合物。 先前技術文獻 專利文獻
專利文獻1:國際公開第2010/032841號說明書 專利文獻2:日本專利特開2017-204371號公報
專利文獻1及2中所揭示之組合物在燒結而用作導電體彼此之接合材料時,所得之接合層均不能充分地兼顧導電性及接合強度,有進一步改良之餘地。尤其是,專利文獻1及2中記載之技術於無加壓接合時之接合強度不充分。
因此,本發明係關於一種可同時表現出高導電性及高接合強度之接合用導電性組合物。
本發明係關於一種接合用導電性組合物,其係將銅粉與羧酸混合而成, 上述羧酸於其結構中具有分支碳鏈, 上述銅粉包含第1銅粒子及第2銅粒子,上述第1銅粒子於藉由掃描式電子顯微鏡所測得之粒度分佈中,未達1 μm之區域之累積體積為50體積%之體積累積粒徑D 50為0.11 μm以上且未達1 μm,上述第2銅粒子於藉由掃描式電子顯微鏡所測得之粒度分佈中,1 μm以上之區域之累積體積為50體積%之體積累積粒徑D 50為1 μm以上10 μm以下, 相對於上述銅粉100質量份,上述羧酸之含量為6質量份以上24質量份以下。
以下,基於本發明之較佳實施方式對本發明進行說明。本發明係關於一種用於將導電體等電子零件用材料彼此接合之組合物,即接合用導電性組合物。該導電性組合物係用於在無加壓下或加壓下將電子零件用材料彼此接合,較佳為適用於在無加壓下將材料彼此接合,該無加壓係除成為接合對象之材料之自身重量所致之力或大氣壓以外,不施加壓力。以下說明中,只要無特別說明,則將接合用導電性組合物簡稱為導電性組合物。
導電性組合物係將銅粉與羧酸混合而成之混合物。銅粉至少包含第1銅粒子及第2銅粒子兩種銅粒子。
第1銅粒子及第2銅粒子均包含銅元素,除不可避免之雜質外,不含有銅元素以外之其他元素。即,容許第1銅粒子及第2銅粒子各自獨立地不可避免地含有微量銅元素以外之其他元素,或者各銅粒子之表面不可避免地被微量氧化等而不可避免地含有微量氧元素。通常,各銅粒子中銅元素以外之其他元素之含量各自獨立地為5質量%以下。該等元素之含量可藉由例如ICP(Inductive Coupling Plasma,感應耦合電漿)發射光譜分析法或惰性氣體熔解-非分散型紅外線吸收法來測定。
導電性組合物中所含之銅粉較佳為於藉由掃描式電子顯微鏡所測得之體積基準之粒度分佈中,於粒徑為0.11 μm以上且未達1 μm之區域具有至少一個波峰,且於粒徑為1 μm以上10 μm以下之區域具有至少一個波峰。
詳細而言,構成銅粉之第1銅粒子及第2銅粒子之粒徑係於藉由掃描式電子顯微鏡測定導電性組合物中之銅粉所得之粒度分佈中,分為粒徑未達1 μm之區域及粒徑為1 μm以上之區域,根據各區域之累積體積為50體積%之體積累積粒徑D 50算出。 具體而言,相對於成為測定對象之導電性組合物,添加10倍等量(質量)之2-丙醇並充分地攪拌後,反覆進行僅去除上清液而留下固形物成分(濾餅)之洗淨操作。其次,將所得之濾餅於常溫下靜置並充分地乾燥後,藉由掃描式電子顯微鏡確認該乾燥物。
關於掃描式電子顯微鏡之確認,自倍率1000倍~10萬倍下之各粉末之掃描式電子顯微鏡圖像中隨機選擇觀察到粒子之輪廓的粒子,測定粒徑(投影面積圓相當徑),算出粒度分佈。其次,將所得之粒度分佈分為粒徑未達1 μm之區域及粒徑為1 μm以上之區域,根據粒徑未達1 μm之區域之粒度分佈來測定累積體積為50體積%之體積累積粒徑D 50,作為第1銅粒子之粒徑。又,根據粒徑為1 μm以上之區域之粒度分佈來測定累積體積為50體積%之體積累積粒徑D 50,作為第2銅粒子之粒徑。上述成為測定對象之粒子之粒徑係於未達1 μm及1 μm以上之各區域測定至少50處以上而算出。
就防止導電性組合物中第1銅粒子凝聚,使粒子分散性適宜之觀點而言,於藉由掃描式電子顯微鏡所測得之粒度分佈中,未達1 μm之區域之累積體積為50體積%之第1銅粒子之體積累積粒徑D 50較佳為0.11 μm以上。又,就提高導電性組合物之低溫燒結性之觀點而言,第1銅粒子之體積累積粒徑D 50較佳為未達1 μm,更佳為0.8 μm以下,進而較佳為0.6 μm以下,進而更佳為0.4 μm以下。
就於燒結導電性組合物時成為緻密之接合構造,容易提高接合強度之觀點而言,於藉由掃描式電子顯微鏡所測得之粒度分佈中,1 μm以上之區域之累積體積為50體積%之第2銅粒子之體積累積粒徑D 50較佳為1 μm以上。又,就提高將導電性組合物塗佈於電子零件用材料時之塗佈性之觀點而言,第2銅粒子之體積累積粒徑D 50較佳為10 μm以下,更佳為8 μm以下,進而較佳為6 μm以下。
第1銅粒子及第2銅粒子之各形狀並無特別限制,可各自獨立地採用例如球狀、片狀(鱗片狀)、多面體狀、樹枝狀(dendrite)、柱狀等各種形狀。就提高粒子之填充性,即便於無加壓下接合亦可充分地表現出接合強度之觀點而言,較佳為第1銅粒子及第2銅粒子均為球狀。
關於銅粒子是否為球狀,根據藉由上述粒徑之測定方法隨機選擇之各粒子之面積S與周長L算出圓度係數4πS/L 2,進而算出其算術平均值。當圓度係數之算術平均值為0.85以上時,定義銅粒子為球狀。
導電性組合物中第1銅粒子相對於第1銅粒子及第2銅粒子之合計質量之比率較佳為20質量%以上95質量%以下,更佳為25質量%以上90質量%以下,進而較佳為30質量%以上80質量%以下。 同樣地,第2銅粒子相對於第1銅粒子及第2銅粒子之合計質量之比率較佳為5質量%以上80質量%以下,更佳為10質量%以上75質量%以下,進而較佳為20質量%以上70質量%以下。 藉由成為此種調配比率,可提高粒子之填充性,即便於無加壓下接合亦可充分地表現出接合強度。
導電性組合物包含羧酸。羧酸係於1氣壓、20℃下為液體或固體之有機酸。藉由使導電性組合物中含有羧酸,可蝕刻構成銅粉之各銅粒子之表面,去除於粒子表面不可避免地形成之氧化物層或氫氧化物層,使金屬銅露出,使粒子表面活化。又,藉由源自銅粒子之銅與羧酸之化學反應所產生之羧酸銅可促進銅粒子彼此之燒結性。結果,燒結導電性組合物所得之接合層可充分地表現出金屬銅所具有之導電性,並且即便於無加壓下接合亦可充分地表現出接合強度。
作為導電性組合物中所含之羧酸,可例舉具有直鏈碳鏈或分支碳鏈(以下,亦將其簡稱為支鏈)之脂肪族或芳香族羧酸。 該等之中,導電性組合物中所含之羧酸較佳為支鏈脂肪族羧酸。藉此,因羧酸所具有之支鏈所引起之立體阻礙,銅粒子彼此可保持適度之距離,因此導電性組合物中之粒子之分散性提高,並且該組合物之印刷性亦提高。
作為導電性組合物中所含之羧酸,可例舉具有支鏈之一級羧酸、二級羧酸及三級羧酸,較佳為二級或三級羧酸,進而較佳為三級羧酸。 藉由使用此種羧酸,因羧酸之分子結構體積大而可適度地維持粒子彼此之分散性,可使導電性組合物之操作性良好。此外,可充分地提高導電性組合物之燒結性,容易地獲得同時具備高水準之導電性及其他構件彼此之接合強度的接合層。
又,羧酸可為一元,亦可為多元。又,羧酸可為飽和羧酸,亦可為不飽和羧酸。
關於導電性組合物中所含之羧酸,就提高操作性之觀點而言,碳數較佳為4以上18以下,更佳為5以上15以下,進而較佳為6以上13以下。
詳細而言,作為適合本發明之羧酸,例如可例舉:異丁酸、三甲基乙酸、2,2-甲基丁酸、異戊酸、異己酸、異庚酸、異辛酸、異壬酸、異癸酸、新癸酸、異十三酸、異十四酸、異棕櫚酸、異硬脂酸等支鏈脂肪族飽和單羧酸;甲基丙烯酸等支鏈脂肪族不飽和單羧酸;烏頭酸等不飽和三羧酸等中之一種以上。該等可單獨使用或組合使用。
羧酸較佳為使用於1氣壓、20℃下為液體者。藉由使用此種羧酸,即便不另外使用下述分散介質,羧酸本身亦作為分散介質發揮功能,因此能夠以高生產性獲得各銅粒子均勻地分散之導電性組合物。又,即便不使用可能會引起燒結後之孔隙之分散介質等其他揮發成分,亦可容易地使各銅粒子分散且維持該狀態,故可容易地獲得在提高導電性的同時兼顧其他構件彼此之高接合強度之接合層。 作為於1氣壓、20℃下為液體之羧酸,例如可例舉碳數為4以上18以下之支鏈脂肪族飽和單羧酸。
就兼具高水準之導電性與接合強度之觀點而言,進而較佳為於1氣壓、20℃下為液體之三級飽和脂肪族單羧酸。作為此種羧酸,可例舉2,2-二甲基丁酸、新癸酸,特佳為新癸酸。藉由將此種羧酸用於導電性組合物,即便於無加壓下接合亦可表現出更高之接合強度。
導電性組合物中之羧酸之含量相對於銅粉100質量份,較佳為6質量份以上24質量份以下,更佳為6質量份以上20質量份以下。藉由使羧酸含量處於該範圍內,可使導電性組合物中之粒子之分散性及該組合物之印刷性良好,並且可獲得製成接合構造時之高接合強度。當包含兩種以上之羧酸時,只要羧酸之含量之總量滿足上述範圍即可。
作為上述導電性組合物之形態,例如為導電性漿料、導電性油墨或導電膏。 當包含於1氣壓、20℃下為固體之羧酸作為羧酸時,就提高銅粒子及羧酸之均勻分散性,並且提高銅粒子彼此之分散性之觀點而言,較佳為進而含有分散介質。
作為可用於導電性組合物之分散介質,例如可例舉:水、醇、酮、酯、醚及烴、或黏合劑樹脂等。作為黏合劑樹脂,例如可例舉丙烯酸樹脂、環氧樹脂、聚酯樹脂、聚碳酸酯樹脂及纖維素樹脂等中之至少一種。 該等之中,較佳為丙二醇、乙二醇、己二醇、二乙二醇、1,3-丁二醇、1,4-丁二醇、二丙二醇、三丙二醇、萜品醇及二氫萜品醇等醇、以及乙基卡必醇及丁基卡必醇等醚中之至少一種。
當導電性組合物中進而含有分散介質時,導電性組合物中之分散介質之含量相對於銅粉100質量份,較佳為20質量份以下,更佳為15質量份以下,進而較佳為10質量份以下。藉由使分散介質之含量處於該範圍內,可於燒結導電性組合物時將孔隙抑制得較少,可提高製成接合構造時之填充性,提高接合強度。
為了提高導電性組合物之填充性而獲得緻密之接合層,或藉由高還原作用而防止燒結時銅粒子意外氧化,導電性組合物較佳為進而含有燒結助劑。燒結助劑可單獨使用,亦可組合複數種使用。
作為提高導電性組合物之填充性之燒結助劑,可例舉硼矽酸玻璃、硼矽酸鋇玻璃、硼矽酸鋅玻璃等無機材料等。 作為具有高還原作用之燒結助劑,可例舉聚乙二醇及聚丙二醇等聚醚。該等聚醚不包括在上述分散介質中。當使用上述有機高分子化合物中之聚乙二醇時,其數量平均分子量較佳為120以上400以下,進而較佳為180以上400以下。
當導電性組合物中進而含有燒結助劑時,導電性組合物中之燒結助劑之含量相對於銅粉100質量份,較佳為20質量份以下,更佳為15質量份以下,進而較佳為10質量份以下。當含有兩種以上燒結助劑時,只要燒結助劑之含量之總量滿足上述範圍即可。藉由使燒結助劑之含量處於該範圍內,可防止燒結導電性組合物時接合構造之接合強度降低。
上述各銅粒子可不進行特別之表面處理。或者,亦可在發揮本發明之效果之範圍內,對構成銅粉之各銅粒子藉由有機物或無機物實施被覆或表面處理。
其次,對導電性組合物之適宜製造方法進行說明。本製造方法具有下述步驟:於含有第1銅粒子、第2銅粒子及羧酸時,分別單獨製造第1銅粒子及第2銅粒子,然後,同時混合第1銅粒子、第2銅粒子及羧酸、以及視需要使用之分散介質及燒結助劑,或者將該等按照任意順序添加並混合。混合各原料時,可使用輥磨機等公知之混合裝置。
作為各銅粒子之製造方法,可採用濕式還原法、霧化法、電解還原法等各種方法。當使用濕式還原法或霧化法時,容易獲得球狀粒子。當使用電解還原法時,容易獲得樹枝狀或柱狀粒子。片狀粒子例如藉由對球狀粒子施加機械外力使之塑性變形而獲得。
就容易控制粒徑,同時容易獲得球狀粒子之觀點而言,第1銅粒子及第2銅粒子較佳為均採用濕式還原法製造。濕式還原法例如可採用日本專利特開2003-34802號公報、日本專利特開2015-168878號公報或日本專利特開2017-179555號公報中記載之方法。
濕式還原法例如製備如下反應液,該反應液於含有水及碳原子數較佳為1以上5以下之一元醇之液體介質中,含有氯化銅、乙酸銅、氫氧化銅、硫酸銅、氧化銅或氧化亞銅等一價或二價銅源。將該反應液與肼以相對於銅1莫耳較佳為0.5莫耳以上50莫耳以下之比率混合,將源自該銅源之銅離子還原,獲得目標第1銅粒子或第2銅粒子。所得之銅粒子可視需要藉由傾析法或旋轉過濾法等洗淨方法洗淨。藉由該方法所得之各銅粒子係含有粒子集合體之漿料,或包含該集合體之乾燥粉末。亦可對所得之銅粒子進而實施上述表面處理或被覆處理。
於濕式還原法中,為了控制銅粒子之平均一次粒徑,例如可藉由變更反應液中所含之銅離子濃度、反應液之溫度等條件而容易地進行調整。藉此,可分別獲得粒徑互不相同之第1銅粒子及第2銅粒子。其後,可將第1銅粒子及第2銅粒子混合,使目標銅粉具有上述粒度分佈及質量比率。
就容易獲得製成導電性組合物時之銅粉之粒度分佈、以及第1銅粒子及第2銅粒子之所需粒徑的觀點而言,用於製造導電性組合物之第1銅粒子之平均一次粒徑較佳為0.11 μm以上且未達1 μm,更佳為0.11 μm以上0.8 μm以下。 就相同之觀點而言,用於製造導電性組合物之第2銅粒子之平均一次粒徑較佳為1 μm以上10 μm以下,更佳為1 μm以上8 μm以下。
用於製造導電性組合物之第1銅粒子及第2銅粒子之平均一次粒徑係分別自例如倍率1000倍~10萬倍下之銅粒子之掃描式電子顯微鏡圖像中隨機選擇50個以上粒子彼此不重疊者,測定粒徑(投影面積圓相當徑),根據該等測定值,算出換算成球體之體積平均粒徑。
關於經過以上步驟所得之導電性組合物,例如可藉由特定方法將其塗佈於應用對象物之表面而形成塗膜,然後,將該塗膜於無加壓下或加壓下加熱而製成導電膜。
本發明之導電性組合物適宜用作用以將各種導電體等電子零件用材料彼此接合之黏晶用材料等導電性接合用材料。又,此外,亦可用作印刷配線基板中之通孔填充用材料、或將電子裝置表面封裝於印刷配線基板時之接著劑。尤其是,本發明之導電性組合物於無加壓下接合時可表現出充分之接合強度。
作為成為接合對象物之電子零件用材料,較佳者例如例舉:包含金、銀或銅等各種導電性金屬之間隔件或散熱板、金屬線、表面具有該金屬之基板、或半導體晶片等導電體。
以下對使用導電性組合物作為用以將導電體彼此接合之接合用材料之方法的一例進行說明。本方法具有將導電性組合物配置於兩個導電體之間,燒結上述接合用導電性組合物之步驟。
首先,於第1導電體之表面塗佈導電性組合物,形成塗膜。接合用組合物之塗佈方法並無特別限制,可使用公知之塗佈方法。形成之塗膜可形成於第1導電體之整個表面,或者亦可不連續地形成於第1導電體之表面。就表現出更高接合強度之觀點而言,較佳為於下述第2導電體之整個配置預定區域形成塗膜。
就形成穩定地具有高接合強度之接合構造之觀點而言,形成之塗膜之厚度於剛塗佈後,較佳為設定為1 μm以上500 μm以下,進而較佳為設定為5 μm以上300 μm以下。
繼而,於塗膜上積層第2導電體。藉此,獲得配置有第1導電體、第2導電體、及介於該等之間之作為導電性組合物之塗膜的導電性構件。 第1導電體及第2導電體分別可為同種材料,或亦可為不同種材料。
最後,將導電性構件於無加壓下或加壓下進行加熱處理,加熱塗膜而燒結所含之銅粉,藉此將第1導電體與第2導電體接合。藉此,可獲得形成有源自導電性組合物之接合部位之導電性接合構造。
燒結時之氛圍較佳為氫氣或甲酸等還原氣體氛圍、或者氮氣或氬氣等惰性氣體氛圍。燒結溫度較佳為未達300℃,更佳為150℃以上且未達300℃,進而較佳為200℃以上且未達300℃,特佳為230℃以上且未達300℃。 以燒結溫度處於上述範圍內為條件,燒結時間較佳為20分鐘以上,更佳為20分鐘以上60分鐘以下,進而較佳為30分鐘以上60分鐘以下。
當燒結時賦予壓力時,較佳為0.001 MPa以上,更佳為0.001 MPa以上20 MPa以下,進而較佳為0.01 MPa以上15 MPa以下。
設為惰性氣體氛圍且採用上述燒結溫度條件之燒結條件係先前技術中粒子彼此不能良好地燒結且亦難以表現出接合強度之溫和條件。又,於無加壓下進行接合,難以使銅粒子之熔融性充分或粒子彼此難以充分形成頸縮,結果,不能充分地表現出接合強度,或者所得之燒結體中容易產生孔隙。
關於該點,藉由使用本發明之導電性組合物,即便為上述溫和之燒結條件,因存在具有支鏈之羧酸而銅粒子彼此之分散性較高,且各銅粒子之表面活性維持得較高,因此銅粒子彼此可良好地燒結,表現出高接合強度。又,即便於無加壓下接合時,由於粒徑較大之第2銅粒子承擔骨材之作用,且粒徑較小之第1銅粒子承擔填埋銅粒子間之間隙之填料的作用,故可提高填充性。結果,所得之燒結體之構造變得緻密,不易產生孔隙,可表現出高接合強度。又,塗膜之厚度均勻,接合對象物不易發生意外傾斜或接合不良。此外,於無加壓下進行接合,具有可將高度不同之複數個接合對象物同時接合之優點、或無須另外設置加壓裝置而製造成本降低之優點。 進而,當不含分散介質時,可進一步減少因源自分散介質之揮發成分所產生之孔隙,因此可良好地進行燒結,並且可表現出更高之接合強度,就該方面而言亦有利。
經過以上步驟所形成之接合部位係藉由燒結導電性組合物而形成。詳細而言,接合部位係構成導電性組合物之各銅粒子之燒結體,具有導電性。
具有此種接合部位之接合構造利用其高接合強度或導電性等特性,適宜用於各種電子線路、或暴露於高溫之環境中使用之電子線路,例如車輛用電子線路或安裝有功率裝置之電子線路。 [實施例]
以下,藉由實施例更詳細地對本發明進行說明。然而本發明之範圍並不限於該實施例。以下表中,「-」所示之欄表示不含、或不實施評價。又,「平均一次粒徑」表示藉由上述方法對用作原料之各銅粒子進行測定所得之粒徑。本發明人確認到,該值與製成導電性組合物時之各銅粒子之體積累積粒徑D 50相等。
[實施例1] 銅粉採用使用平均一次粒徑為0.14 μm之球狀第1銅粒子(CH-0200L1,三井金屬礦業公司製造)、及平均一次粒徑為2.2 μm之球狀第2銅粒子(CS20,三井金屬礦業公司製造),以按質量比計第1銅粒子:第2銅粒子=90:10之比率混合而成者。羧酸使用新癸酸(Hexion公司製造之VERSATIC 10,於1氣壓、20℃下為液體之支鏈三級飽和脂肪族單羧酸,碳數為10)。 相對於銅粉100質量份添加新癸酸12.99質量份,藉由刮刀進行預混練後,使用Thinky股份有限公司製造之自轉公轉真空攪拌機ARE-500,將攪拌模式(1000 rpm×1分鐘)及消泡模式(2000 rpm×30秒)作為1個循環,進行2個循環之處理而使其糊劑化。進而使用三輥研磨機處理該糊劑,進而進行分散混合,製備糊狀接合用導電性組合物。
[實施例2] 於實施例1中製成之導電性組合物中,相對於銅粉100質量份,進而添加1質量份之燒結助劑(聚乙二醇300(PEG300)),使用Thinky股份有限公司製造之自轉公轉真空攪拌機ARE-500,實施1個循環之攪拌模式(1000 rpm×1分鐘)及消泡模式(2000 rpm×30秒),製備本實施例之糊狀接合用導電性組合物。
[實施例3] 將第1銅粒子與第2銅粒子之質量比設為第1銅粒子:第2銅粒子=70:30之比率,將新癸酸之添加量設為相對於銅粉100質量份為11.11質量份。除該等以外,以與實施例1相同之方式進行預混練、糊劑化及分散混合,製備糊狀接合用導電性組合物。
[實施例4] 於實施例3中製成之導電性組合物中,相對於銅粉100質量份,進而添加1質量份之燒結助劑(聚乙二醇300(PEG300)),使用Thinky股份有限公司製造之自轉公轉真空攪拌機ARE-500,實施1個循環之攪拌模式(1000 rpm×1分鐘)及消泡模式(2000 rpm×30秒),製備本實施例之糊狀接合用導電性組合物。
[實施例5] 將第1銅粒子與第2銅粒子之質量比設為第1銅粒子:第2銅粒子=50:50之比率,將新癸酸之添加量設為相對於銅粉100質量份為11.11質量份。除該等以外,以與實施例1相同之方式進行預混練、糊劑化及分散混合,製備糊狀接合用導電性組合物。
[實施例6] 於實施例5中製成之導電性組合物中,相對於銅粉100質量份,進而添加1質量份之燒結助劑(聚乙二醇300(PEG300)),使用Thinky股份有限公司製造之自轉公轉真空攪拌機ARE-500,實施1個循環之攪拌模式(1000 rpm×1分鐘)及消泡模式(2000 rpm×30秒),製備本實施例之糊狀接合用導電性組合物。
[實施例7] 將第1銅粒子與第2銅粒子之質量比設為第1銅粒子:第2銅粒子=30:70之比率,將新癸酸之添加量設為相對於銅粉100質量份為8.11質量份。除該等以外,以與實施例1相同之方式進行預混練、糊劑化及分散混合,製備糊狀接合用導電性組合物。
[實施例8] 於實施例7中製成之導電性組合物中,相對於銅粉100質量份,進而添加1質量份之燒結助劑(聚乙二醇300(PEG300)),使用Thinky股份有限公司製造之自轉公轉真空攪拌機ARE-500,實施1個循環之攪拌模式(1000 rpm×1分鐘)及消泡模式(2000 rpm×30秒),製備本實施例之糊狀接合用導電性組合物。
[比較例1] 除將第1銅粒子與第2銅粒子之質量比設為第1銅粒子:第2銅粒子=10:90之比率以外,以與實施例3相同之方式進行預混練、糊劑化及分散混合,製備糊狀接合用導電性組合物。
[比較例2] 除將第1銅粒子與第2銅粒子之質量比設為第1銅粒子:第2銅粒子=10:90之比率以外,以與實施例4相同之方式進行預混練、糊劑化及分散混合,製備糊狀接合用導電性組合物。
[比較例3] 不含羧酸,將第1銅粒子與第2銅粒子之質量比設為第1銅粒子:第2銅粒子=50:50之比率,相對於銅粉100質量份添加作為分散介質之萜品醇11.11質量份。除此以外,以與實施例1相同之方式進行預混練、糊劑化及分散混合,製備糊狀接合用導電性組合物。
[比較例4] 於比較例3中製成之導電性組合物中,相對於銅粉100質量份,進而添加1質量份之燒結助劑(聚乙二醇300(PEG300)),使用Thinky股份有限公司製造之自轉公轉真空攪拌機ARE-500,實施1個循環之攪拌模式(1000 rpm×1分鐘)及消泡模式(2000 rpm×30秒),製備本比較例之糊狀接合用導電性組合物。
[比較例5] 相對於銅粉100質量份添加作為羧酸之癸酸(直鏈碳鏈之一級飽和羧酸,碳數為10,富士膠片和光純藥公司製造)11.11質量份,相對於銅粉100質量份添加作為分散介質之萜品醇7.41質量份,除此以外,以與實施例5相同之方式製備糊狀導電性組合物。
[實施例9~11及比較例6] 除相對於銅粉100質量份,以如下表1所示之量添加新癸酸以外,以與實施例5相同之方式進行預混練、糊劑化及分散混合,製備糊狀接合用導電性組合物。
[實施例12] 除使用平均一次粒徑為0.16 μm之球狀第1銅粒子(CH-0200,三井金屬礦業公司製造)來代替實施例5中使用之第1銅粒子以外,以與實施例5相同之方式進行預混練、糊劑化及分散混合,製備糊狀接合用導電性組合物。
[實施例13] 於實施例12中製成之導電性組合物中,相對於銅粉100質量份,進而添加1質量份之燒結助劑(聚乙二醇300(PEG300)),使用Thinky股份有限公司製造之自轉公轉真空攪拌機ARE-500,實施1個循環之攪拌模式(1000 rpm×1分鐘)及消泡模式(2000 rpm×30秒),製備本實施例之糊狀接合用導電性組合物。
[比較例7] 不含羧酸,將第1銅粒子與第2銅粒子之質量比設為第1銅粒子:第2銅粒子=50:50之比率,相對於銅粉100質量份,添加作為分散介質之萜品醇11.11質量份。除此以外,以與實施例12相同之方式進行預混練、糊劑化及分散混合,製備糊狀接合用導電性組合物。
[比較例8] 於比較例7中製成之導電性組合物中,相對於銅粉100質量份,進而添加1質量份之燒結助劑(聚乙二醇300(PEG300)),使用Thinky股份有限公司製造之自轉公轉真空攪拌機ARE-500,實施1個循環之攪拌模式(1000 rpm×1分鐘)及消泡模式(2000 rpm×30秒),製備本比較例之糊狀接合用導電性組合物。
[導電性之評價] 將實施例及比較例之導電性組合物分別以10 mm×20 mm之尺寸塗佈於玻璃板上,其次,於260℃下燒結30分鐘,製成導電性組合物之燒結體即導電膜。對於該導電膜,使用Mitsubishi Analytech公司製造之四探針法比電阻測定裝置Loresta MCP-T600,測定比電阻(μΩ・cm)。再者,關於比較例5之導電性組合物,由於經時變化而固體化,無法於玻璃板上進行印刷,因此未實施導電性之評價。將結果示於以下表1中。
[接合強度之評價] 藉由網版印刷,於銅制引線框架(厚度為2.0 mm)之晶片搭載部上塗佈實施例或比較例之導電性組合物,形成塗膜。塗膜形成為5 mm見方之正方形。塗膜之厚度為100 μm。 其次,於塗膜上載置2 mm見方之正方形SiC晶片(厚度為0.37 mm),藉由數顯千分錶(三豐公司製造)調整至塗膜之厚度為50 μm。然後,在氮氣氛圍下,於260℃下燒結30分鐘,製成於銅板與SiC晶片之間形成有導電性組合物之燒結體的接合構造。 對於藉由上述方法所得之接合構造,分別測定斷裂強度。測定中使用XYZTEC公司製造之黏結強度試驗機Condor Sigma。斷裂強度(MPa)係由斷裂負載(N)/接合面積(mm 2)定義之值。再者,關於比較例5之導電性組合物,由於如上所述發生了固體化,故未實施接合強度之評價。將結果示於以下表1中。
[表1]
   羧酸 燒結助劑 導電性之評價 接合強度之評價
種類 相對於銅粉100質量份之質量份 種類 相對於銅粉100質量份之質量份 比電阻 [μΩ・cm] 斷裂強度[MPa]
實施例1 新癸酸 12.99 - - 17 16.1
實施例2 新癸酸 12.99 聚乙二醇 1 21 11.5
實施例3 新癸酸 11.11 - - 13 12.4
實施例4 新癸酸 11.11 聚乙二醇 1 15 17.8
實施例5 新癸酸 11.11 - - 13 15.9
實施例6 新癸酸 11.11 聚乙二醇 1 12 30.0
實施例7 新癸酸 8.11 - - 14 12.0
實施例8 新癸酸 8.11 聚乙二醇 1 16 18.0
實施例9 新癸酸 13 - - 17 22.2
實施例10 新癸酸 19 - - 16 26.3
實施例11 新癸酸 22 - - 18 14.4
實施例12 新癸酸 11.11 - - 14 10.4
實施例13 新癸酸 11.11 聚乙二醇 1 12 13.4
比較例1 新癸酸 11.11 - - 9 0.9
比較例2 新癸酸 11.11 聚乙二醇 1 9 3.7
比較例3 - - - - 8 2.0
比較例4 - - 聚乙二醇 1 10 6.1
比較例5 癸酸 11.11 - - - -
比較例6 新癸酸 25 - - 15 7.5
比較例7 - - - - 12 2.2
比較例8 - - 聚乙二醇 1 10 4.7
[產業上之可利用性]
根據本發明,提供一種可同時表現出高導電性及高接合強度之接合用導電性組合物。

Claims (7)

  1. 一種接合用導電性組合物,其係將銅粉與羧酸混合而成, 上述羧酸於其結構中具有分支碳鏈, 上述銅粉包含第1銅粒子及第2銅粒子,上述第1銅粒子於藉由掃描式電子顯微鏡所測得之粒度分佈中,未達1 μm之區域之累積體積為50體積%之體積累積粒徑D 50為0.11 μm以上且未達1 μm,上述第2銅粒子於藉由掃描式電子顯微鏡所測得之粒度分佈中,1 μm以上之區域之累積體積為50體積%之體積累積粒徑D 50為1 μm以上10 μm以下, 相對於上述銅粉100質量份,上述羧酸之含量為6質量份以上24質量份以下。
  2. 如請求項1之接合用導電性組合物,其中上述羧酸係碳數為4以上18以下之脂肪族一元羧酸。
  3. 如請求項1之接合用導電性組合物,其中上述羧酸為三級羧酸。
  4. 如請求項1之接合用導電性組合物,其中上述羧酸於1氣壓、20℃下為液體。
  5. 如請求項1之接合用導電性組合物,其中上述羧酸為新癸酸。
  6. 一種接合構造,其具備第1導電體、第2導電體、及將第1導電體與第2導電體接合之接合部位,且 上述接合部位包含如請求項1至5中任一項之接合用導電性組合物之燒結體。
  7. 一種接合構造之製造方法,其具有下述步驟:將如請求項1至5中任一項之接合用導電性組合物配置於兩個導電體之間,燒結上述接合用導電性組合物。
TW110134565A 2021-03-04 2021-09-16 接合用導電性組合物及使用其之接合構造以及其製造方法 TW202236308A (zh)

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