TW202103886A - Workpiece carrying-in device, workpiece take-out device, plastic sealing mould, and resin plastic sealing device including the same capable of positioning the plastic sealing mould and delivering the workpiece and/or resin by using a simplified mould structure - Google Patents

Workpiece carrying-in device, workpiece take-out device, plastic sealing mould, and resin plastic sealing device including the same capable of positioning the plastic sealing mould and delivering the workpiece and/or resin by using a simplified mould structure Download PDF

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TW202103886A
TW202103886A TW109122402A TW109122402A TW202103886A TW 202103886 A TW202103886 A TW 202103886A TW 109122402 A TW109122402 A TW 109122402A TW 109122402 A TW109122402 A TW 109122402A TW 202103886 A TW202103886 A TW 202103886A
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Taiwan
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workpiece
resin
mold
sleeve block
plastic
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TW109122402A
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Chinese (zh)
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TWI737382B (en
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中山英雄
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日商山田尖端科技股份有限公司
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56Encapsulations, e.g. encapsulation layers, coatings
    • H01L21/565Moulds
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C37/00Component parts, details, accessories or auxiliary operations, not covered by group B29C33/00 or B29C35/00
    • B29C37/0003Discharging moulded articles from the mould
    • B29C37/0007Discharging moulded articles from the mould using means operable from outside the mould for moving between mould parts, e.g. robots
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00Moulds or cores; Details thereof or accessories therefor
    • B29C33/12Moulds or cores; Details thereof or accessories therefor with incorporated means for positioning inserts, e.g. labels
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00Moulds or cores; Details thereof or accessories therefor
    • B29C33/20Opening, closing or clamping
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00Moulds or cores; Details thereof or accessories therefor
    • B29C33/30Mounting, exchanging or centering
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00Moulds or cores; Details thereof or accessories therefor
    • B29C33/56Coatings, e.g. enameled or galvanised; Releasing, lubricating or separating agents
    • B29C33/68Release sheets
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C37/00Component parts, details, accessories or auxiliary operations, not covered by group B29C33/00 or B29C35/00
    • B29C37/0003Discharging moulded articles from the mould
    • B29C37/0007Discharging moulded articles from the mould using means operable from outside the mould for moving between mould parts, e.g. robots
    • B29C37/001Discharging moulded articles from the mould using means operable from outside the mould for moving between mould parts, e.g. robots combined with means for loading preforms to be moulded or inserts, e.g. preformed layers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/14Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles
    • B29C45/14008Inserting articles into the mould
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/14Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles
    • B29C45/14065Positioning or centering articles in the mould
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/17Component parts, details or accessories; Auxiliary operations
    • B29C45/20Injection nozzles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/17Component parts, details or accessories; Auxiliary operations
    • B29C45/26Moulds
    • B29C45/2602Mould construction elements
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/17Component parts, details or accessories; Auxiliary operations
    • B29C45/40Removing or ejecting moulded articles

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Robotics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Injection Moulding Of Plastics Or The Like (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)

Abstract

The present invention provides a workpiece carrying-in device, a workpiece take-out device, a plastic sealing mould, and a resin plastic sealing device including the same, capable of positioning the plastic sealing mould and delivering the workpiece and/or resin by using a simplified mould structure. When delivering a workpiece (W) to a workpiece placement recess (3g) disposed on a side of a pot block (3a) (vertically movable on a lower mould clamping surface of the plastic sealing mould (1)), a workpiece holding portion (4d) in a state of holding the workpiece approaches each other to a position until the pot block (3a) in the raised position and the workpiece placement recess (3g) overlap in a plan view, and the workpiece ( W) is delivered to the workpiece placement recess (3g).

Description

工件搬入裝置、工件搬出裝置、塑封模具以及包括所述裝置及模具的樹脂塑封裝置Workpiece carrying-in device, workpiece carrying-out device, plastic packaging mold, and resin plastic packaging device including the device and mold

本發明是有關於一種對塑封模具搬入成形前的工件(work)及塑封樹脂(mould resin)的工件搬入裝置、將成形後的工件及多餘樹脂從塑封模具中搬出的樹脂搬出裝置、塑封模具、以及包括所述裝置及模具的任一個的樹脂塑封裝置。The present invention relates to a device for loading a plastic packaging mold into a workpiece (work) and a mold resin (mould resin) before forming, a resin unloading device for removing a molded workpiece and excess resin from the plastic packaging mold, a plastic packaging mold, And a resin molding device including any one of the device and the mold.

在將所述工件搬入至塑封模具並夾住外周緣部進行轉注成形時,存在如下擔憂,即:由於樹脂路(包含流道澆口(runner gate)、溢流澆口(overflow gate)、排氣槽(air vent)等)與工件端部交叉,導致塑封樹脂容易從端面洩漏,在工件表面或側面產生樹脂毛邊。因此提出了下述技術:將設有進膠套筒的進膠套筒塊設置成可升降,利用進膠套筒塊來按壓工件端部,並且在塊表面形成樹脂通路(橋接澆口(bridge gate):橋接部)。When the workpiece is carried into the plastic mold and the outer peripheral edge is clamped for transfer molding, there are concerns that due to the resin path (including runner gate, overflow gate), row Air grooves (air vents, etc.) intersect the end of the workpiece, causing the plastic resin to easily leak from the end surface, and produce resin burrs on the surface or side of the workpiece. Therefore, the following technology is proposed: the glue sleeve block provided with the glue sleeve is set up and down, the glue sleeve block is used to press the end of the workpiece, and the resin passage (bridge gate) is formed on the surface of the block. gate): bridging section).

例如,為了防止塑封樹脂繞向工件端面,需要將工件端面與相向的模具端面對位,並盡可能地消除間隙的產生。因此提出了下述技術:利用推動塊來推動作為工件的矩形狀的條帶基板的一端面,使相反側端面碰觸進膠套筒嵌件(pot insert)的端面並對齊(參照專利文獻1:日本專利特開2015-51557號公報)。 而且,也提出了設有往返移動機構的塑封模具,所述往返移動機構利用空氣氣缸(air cylinder)使塑封模具的半導體基板接受部相對於澆口塊位置在兩側往返移動(參照專利文獻2:日本專利特開2015-79864號公報)。 [現有技術文獻]For example, in order to prevent the plastic sealing resin from winding to the end face of the workpiece, it is necessary to position the end face of the workpiece with the opposite mold end face, and eliminate the generation of gaps as much as possible. Therefore, the following technology is proposed: one end surface of a rectangular strip substrate as a workpiece is pushed by a push block, and the opposite end surface touches and aligns the end surface of the pot insert (refer to Patent Document 1 : Japanese Patent Laid-Open No. 2015-51557). In addition, a plastic molding mold provided with a reciprocating movement mechanism has also been proposed. The reciprocating mechanism uses an air cylinder to move the semiconductor substrate receiving portion of the plastic molding mold to and from the gate block position on both sides (refer to Patent Document 2. : Japanese Patent Laid-Open No. 2015-79864). [Prior Art Literature]

[專利文獻] [專利文獻1]日本專利特開2015-51557號公報 [專利文獻2]日本專利特開2015-79864號公報[Patent Literature] [Patent Document 1] Japanese Patent Laid-Open No. 2015-51557 [Patent Document 2] Japanese Patent Laid-Open No. 2015-79864

[發明所要解決的問題] 近年來,為了提高成形品的生產性,在一台樹脂塑封裝置中包括多台(例如三台或四台)塑封模具的裝置增多。因此,對於專利文獻1、專利文獻2所公開的推動基板端面的推動塊或使半導體基板接受部相對於澆口塊位置在兩側往返移動的機構來說,塑封模具的結構容易變得複雜,製造成本(模具套的代價)變得昂貴。而且,對於近年那樣在一台樹脂塑封裝置中包括多台(例如三台或四台)塑封模具的裝置來說,總成本也變得昂貴。[The problem to be solved by the invention] In recent years, in order to improve the productivity of molded products, there has been an increase in devices that include multiple (for example, three or four) molding molds in one resin molding device. Therefore, the structure of the plastic encapsulation mold is likely to become complicated for the pushing block that pushes the end face of the substrate disclosed in Patent Literature 1 and Patent Literature 2, or the mechanism that reciprocates the semiconductor substrate receiving portion relative to the gate block position. Manufacturing costs (the cost of mold sets) become expensive. Moreover, the total cost has also become expensive for an apparatus that includes multiple (for example, three or four) molding dies in one resin molding apparatus as in recent years.

而且,若在塑封模具內設置可動部(推動塊或往返移動機構等),則產生樹脂洩漏或產生樹脂飛邊(flash),這樣一來,樹脂渣容易進入可動部,導致可動部的動作不良,而且維護作業也耗費工夫。進而,塑封模具的溫度變化劇烈,因而容易因熱而變形或劣化,可動部的零件更換頻率也可能提高。 [解決問題的技術手段]Moreover, if a movable part (pushing block or reciprocating mechanism, etc.) is installed in the plastic molding mold, resin leakage or resin flash will occur. As a result, resin slag will easily enter the movable part, resulting in malfunction of the movable part. , And maintenance work is also time-consuming. Furthermore, the temperature of the plastic packaging mold changes drastically, which is likely to be deformed or deteriorated by heat, and the frequency of replacement of parts of the movable part may also increase. [Technical means to solve the problem]

以下將述的若干實施方式所適用的公開是為了解決所述問題而成,其目的在於提供一種工件搬入裝置、工件搬出裝置、塑封模具及樹脂塑封裝置,所述工件搬入裝置及工件搬出裝置可利用經簡化的模具結構來對塑封模具定位並交付工件和/或樹脂,所述塑封模具可避免塑封樹脂繞向工件端面而且動作不良少,所述樹脂塑封裝置通過包括所述工件搬入裝置、工件搬出裝置及塑封模具,從而抑制成本而實現成形品質高的樹脂塑封。The disclosure to which several embodiments described below are applied is to solve the above-mentioned problems, and its purpose is to provide a workpiece carrying-in device, a workpiece carrying-out device, a plastic molding mold, and a resin plastic-sealing device, which can The simplified mold structure is used to position the plastic packaging mold and deliver the workpiece and/or resin. The plastic packaging mold can prevent the plastic packaging resin from winding to the end surface of the workpiece and has fewer malfunctions. The resin plastic packaging device includes the workpiece carrying device and the workpiece The device and the plastic mold are carried out, thereby reducing the cost and realizing high-quality resin molding.

與以下將述的若干實施方式有關的公開至少包括下述結構。 即,一種工件搬入裝置,向開模的塑封模具搬入工件及塑封樹脂,其特徵在於包括:搬入裝置本體,對設於進膠套筒塊的側方的工件載置部搬入所述工件,所述進膠套筒塊以能夠升降的方式設於所述塑封模具的模具夾持面;樹脂投入部,設於所述搬入裝置本體,以保持所述塑封樹脂的狀態投入至所述進膠套筒塊的進膠套筒;工件保持部,設於所述搬入裝置本體,以保持所述工件的狀態,以能夠接近或遠離所述樹脂投入部的方式移動,所述工件保持部以保持所述工件的狀態,相互接近至處於上升位置的所述進膠套筒塊與所述工件載置部之間在平面視時重合的位置,將所述工件交付給所述工件載置部。 這樣,使搬入裝置本體進入開模的塑封模具,利用樹脂投入部向進膠套筒塊的進膠套筒投入塑封樹脂,並且使保持成形前的工件的工件保持部相互接近至處於上升位置的進膠套筒塊與工件載置部之間在平面視時重合的位置,並交付工件。 藉此,工件保持部以不干擾進膠套筒塊的方式,以保持工件的狀態在工件載置部定位並搬入所述工件,因而可簡化塑封模具的結構。The disclosure related to several embodiments to be described below includes at least the following structures. That is, a workpiece loading device for loading a workpiece and a plastic molding resin into an opened plastic molding mold is characterized in that it includes: loading the device body, loading the workpiece into a workpiece mounting portion provided on the side of a rubber feeding sleeve block, and The plastic feeding sleeve block is provided on the mold clamping surface of the plastic packaging mold in a manner capable of lifting; a resin input part is provided on the carrying device body, and is inserted into the plastic feeding sleeve while maintaining the state of the plastic packaging resin The rubber feeding sleeve of the cylinder block; the workpiece holding part is provided in the carrying-in device body to maintain the state of the workpiece and move in a manner capable of approaching or away from the resin input part, the workpiece holding part to hold the The state of the workpiece is close to each other to a position where the glue-inlet sleeve block and the workpiece mounting portion in a raised position overlap in a plan view, and the workpiece is delivered to the workpiece mounting portion. In this way, the main body of the loaded device enters the opened plastic molding mold, and the resin input part is used to put the molding resin into the injection sleeve of the injection sleeve block, and the workpiece holding parts holding the workpiece before forming are brought close to each other to the raised position. The position where the glue sleeve block and the workpiece placement part coincide in a plane view, and the workpiece is delivered. Thereby, the workpiece holding part can position and carry the workpiece in the workpiece mounting part in a state of holding the workpiece without interfering with the rubber feeding sleeve block, thereby simplifying the structure of the plastic packaging mold.

所述工件保持部也可相對於所述搬入裝置本體經由滑動機構以能夠滑動的方式組裝有裝載手,在裝載手包括開合爪,此開合爪保持矩形基板的寬度方向兩側並且能夠開合。 藉此,可利用裝載手的開合爪夾持並可靠地握持矩形基板,通過滑動機構使所述矩形基板與塑封模具的工件載置部對位,滑動移動而交付所述矩形基板。The workpiece holding portion may be slidably assembled with a loading hand via a sliding mechanism with respect to the loading device body. The loading hand includes opening and closing claws that hold both sides of the rectangular substrate in the width direction and can be opened. Together. Thereby, the rectangular substrate can be clamped and reliably held by the opening and closing claws of the loading hand, and the rectangular substrate can be aligned with the workpiece placement part of the plastic molding mold by the sliding mechanism, and the rectangular substrate can be delivered by sliding movement.

所述工件保持部也可保持一對工件,且對設於所述進膠套筒塊的兩側的工件載置部搬入所述一對工件。藉此,可將多個工件同時分別定位並搬入至工件載置部。The workpiece holding part may hold a pair of workpieces, and carry the pair of workpieces into the workpiece mounting parts provided on both sides of the glue sleeve block. Thereby, a plurality of workpieces can be separately positioned at the same time and carried in to the workpiece placement part.

所述樹脂投入部優選在將由所述一對工件保持部所保持的工件交付給所述模具夾持面時,將所述塑封樹脂投入至所述進膠套筒。 藉此,工件搬入裝置與向工件載置部搬入工件的時機一致而向進膠套筒塊的進膠套筒供給塑封樹脂,藉此可順利地實現工件搬入作業,可進行合模動作並利用進膠套筒塊來夾持經定位的工件。It is preferable that the resin injection part, when delivering the work held by the pair of work holding parts to the mold clamping surface, inject the molding resin into the injection sleeve. As a result, the workpiece loading device supplies the molding resin to the injection sleeve of the injection sleeve block at the same timing as the time of loading the work into the work placement section, thereby smoothly loading the work, and performing mold clamping and utilization. The rubber sleeve block is used to clamp the positioned workpiece.

對於包括所述任一工件搬入裝置的樹脂塑封裝置來說,可簡化模具結構,使裝置成本廉價,也不會產生動作不良,維護也可簡易地進行。For a resin molding device including any of the above-mentioned workpiece loading devices, the structure of the mold can be simplified, the device cost is low, and no malfunction occurs, and maintenance can be easily performed.

一種工件搬出裝置,將成形後的工件及多餘樹脂從開模的塑封模具中搬出,其特徵在於包括:搬出裝置本體,以由所述塑封模具的工件載置部所支撐的成形後的工件與由進膠套筒塊所支撐的多餘樹脂分離的狀態,搬出所述成形後的工件及所述多餘樹脂;多餘樹脂回收部,設於所述搬出裝置本體,保持所述進膠套筒塊上殘留的所述多餘樹脂;以及工件回收部,設於所述搬出裝置本體,以保持所述成形後的工件的狀態,在所述多餘樹脂回收部的側方以能夠接近或遠離的方式移動,所述工件回收部從所述工件載置部保持所述成形後的工件並且所述多餘樹脂回收部保持所述多餘樹脂後,所述工件回收部相互遠離至不與所述進膠套筒塊干擾的位置,將所述成形後的工件搬出。A workpiece carrying out device for carrying out formed workpieces and excess resin from the opened plastic sealing mold, which is characterized in that it comprises: a carrying out device body, so that the formed workpiece supported by the workpiece mounting portion of the plastic sealing mold and The excess resin supported by the rubber inlet sleeve block is separated, and the molded workpiece and the excess resin are removed; the excess resin recovery part is provided on the body of the removal device to hold the rubber inlet sleeve block The remaining excess resin; and a workpiece recovery part, which is provided in the carry-out device body to maintain the state of the molded workpiece, and moves in a manner capable of approaching or away from the side of the excess resin recovery part, After the workpiece recovery part holds the formed workpiece from the workpiece placement part and the excess resin recovery part retains the excess resin, the workpiece recovery part is far away from each other so as not to be with the rubber feeding sleeve block At the disturbed position, move the shaped workpiece out.

這樣,使搬出裝置本體進入開模的塑封模具,多餘樹脂回收部保持由進膠套筒塊所支撐的多餘樹脂,工件回收部保持成形後的工件,並且相互遠離至不與進膠套筒塊干擾的位置,將成形後工件搬出。 藉此,工件回收部以不干擾進膠套筒塊的方式,以保持成形後的工件的狀態進行搬出,因而可簡化塑封模具的結構。In this way, the body of the device is moved out into the opened plastic molding mold, the excess resin recovery part keeps the excess resin supported by the injection sleeve block, and the workpiece recovery part keeps the formed workpiece, and is far away from each other so as not to reach the injection sleeve block. Move the workpiece out of the disturbed position after forming. Thereby, the workpiece recovery part can carry out the workpiece while maintaining the state of the molded workpiece without interfering with the rubber sleeve block, thereby simplifying the structure of the plastic packaging mold.

所述工件回收部也可從設於所述進膠套筒塊的兩側的工件載置部保持並搬出一對工件。藉此,可將成形後的多個工件同時從工件載置部搬出。The workpiece recovery part may also hold and carry out a pair of workpieces from the workpiece mounting parts provided on both sides of the glue-in sleeve block. Thereby, a plurality of formed workpieces can be simultaneously carried out from the workpiece mounting portion.

對於包括所述任一工件搬出裝置的樹脂塑封裝置來說,可簡化模具結構,使裝置成本廉價,也不會產生動作不良,維護也可簡易地進行。For a resin molding device including any one of the above-mentioned workpiece carrying devices, the mold structure can be simplified, the device cost can be made cheap, no malfunctions are caused, and maintenance can be easily performed.

一種塑封模具,通過工件搬入裝置向開模的模具間供給工件及塑封樹脂,其特徵在於包括:第一模具,模腔凹部及與所述模腔凹部連接的樹脂路由離型膜覆蓋;以及第二模具,具有進膠套筒塊及嵌件,所述進膠套筒塊包括供投入所述塑封樹脂的進膠套筒,所述嵌件在所述進膠套筒塊的兩側具有工件載置部,所述工件載置部將由所述工件搬入裝置所搬入的工件定位並進行載置,所述進膠套筒塊一直向遠離所述第二模具的夾持面的方向受到施力,對於由所述工件搬入裝置定位並載置於所述工件載置部的工件來說,通過合模,所述進膠套筒塊被所述第一模具下壓而跨越所述工件端部,所述工件在所述進膠套筒塊與所述嵌件之間被夾住。A plastic molding mold, which supplies a workpiece and a plastic molding resin to the opened mold through a workpiece carrying device, which is characterized by comprising: a first mold, a cavity concave portion, and a resin route connected to the cavity concave portion covered by a release film; and Two molds, with a glue-feeding sleeve block and an insert. The glue-feeding sleeve block includes a glue-feeding sleeve for putting the plastic encapsulation resin into it. The insert has workpieces on both sides of the glue-feeding sleeve block. A mounting part, the workpiece mounting part positions and mounts the workpiece carried in by the workpiece carrying device, and the glue-in sleeve block is always energized in a direction away from the clamping surface of the second mold For the workpiece positioned by the workpiece carrying device and placed on the workpiece placing portion, by clamping the mold, the glue sleeve block is pressed down by the first mold to straddle the end of the workpiece , The workpiece is clamped between the glue feeding sleeve block and the insert.

這樣,由工件搬入裝置搬入至開模的塑封模具中第二模具的工件載置部的工件經定位,通過合模,進膠套筒塊被第一模具下壓而跨越工件端部,在與嵌件之間夾持所述工件,因而模具側的結構變得簡單,模具成本變得低廉,可避免塑封樹脂繞向工件端面,不易引起模具內的動作不良,而且維護也可簡易地進行。In this way, the workpiece carried by the workpiece carry-in device to the workpiece placement part of the second mold in the opened plastic mold is positioned, and the mold is clamped, and the glue sleeve block is pressed down by the first mold and crosses the end of the workpiece. The workpiece is clamped between the inserts, so the structure of the mold side becomes simple, the mold cost becomes low, the plastic sealing resin can be prevented from winding to the end surface of the workpiece, it is not easy to cause malfunction in the mold, and the maintenance can be easily performed.

優選所述其中一個模具中,朝向所述工件受到施力的輔助銷以通過開模而經由所述離型膜能夠碰觸所述工件的樹脂密封區域以外的基板面的方式突設。 藉此,在開模時,輔助銷經由離型膜而碰觸工件的樹脂密封區域以外的基板面,因而通過進膠套筒塊的上升而與多餘樹脂進行澆口切斷,並且通過輔助銷按壓基板,從而在模腔凹部成形的樹脂密封部與離型膜容易脫模。Preferably, in one of the molds, the auxiliary pin that is urged toward the workpiece is projected so as to be able to touch the substrate surface other than the resin sealing area of the workpiece via the release film by opening the mold. As a result, when the mold is opened, the auxiliary pin touches the substrate surface outside the resin sealing area of the workpiece through the release film, so the gate is cut off from the excess resin by the rise of the glue sleeve block, and the auxiliary pin passes through the auxiliary pin. By pressing the substrate, the resin sealing part and the release film formed in the cavity recess can be easily released from the mold.

在所述工件載置部,也可在多處設有定位銷,所述定位銷通過與設於所述工件的多個定位孔嵌合從而進行定位。 藉此,可將交付給工件載置部的工件無位置偏移地進行定位。The workpiece mounting portion may be provided with positioning pins at a plurality of locations, and the positioning pins are fitted with a plurality of positioning holes provided in the workpiece to perform positioning. Thereby, the workpiece delivered to the workpiece placement section can be positioned without positional deviation.

在所述工件載置部,也可設有多個支撐銷,所述支撐銷在開模時從第二模具面突出而支撐工件,隨著合模而從所述工件載置部退避至第二模具內,將所述工件載置於所述工件載置部。 藉此,在開模狀態下,在工件載置部中支撐銷從第二模具面突出,因而可通過工件搬入裝置以使開合爪保持工件兩側的狀態進行開合,將工件交付到支撐銷上。而且,若合模則支撐銷退避至第二模具內,藉此工件可載置於工件載置部。The workpiece placement portion may be provided with a plurality of support pins that protrude from the second mold surface to support the workpiece when the mold is opened, and are retracted from the workpiece placement portion to the first when the mold is closed. In the second mold, the workpiece is placed on the workpiece placement part. As a result, in the mold opened state, the support pin in the workpiece placement part protrudes from the second mold surface, so that the workpiece can be opened and closed by the workpiece loading device so that the opening and closing pawls hold the two sides of the workpiece, and the workpiece is delivered to the support Pin on. Furthermore, when the mold is closed, the support pin is retracted into the second mold, whereby the workpiece can be placed on the workpiece mounting portion.

在所述工件載置部,也可設有避讓槽,所述避讓槽在搬入成形前工件或搬出成形後工件時,避免與握持工件的開合爪發生干擾。 藉此,即便不在第二模具的工件載置部設有支撐銷,即便將握持工件的開合爪進行開合,也可通過避讓槽來回避干擾,藉此進行工件的交付或接受。The workpiece placement portion may also be provided with an escape groove, which avoids interference with the opening and closing claws holding the workpiece when the workpiece is loaded in or out of the workpiece after forming. Thereby, even if the support pin is not provided in the workpiece mounting portion of the second mold, even if the opening and closing pawls holding the workpiece are opened and closed, the interference can be avoided by the avoiding groove, and the workpiece can be delivered or received.

也可使所述第一模具包括經樹脂路連結的一對模腔凹部,所述第二模具包括一對嵌件,所述一對嵌件在進膠套筒塊的兩側具有將工件定位並載置的工件載置部。藉此,可在塑封模具同時搬入定位多個工件並進行樹脂塑封。It is also possible that the first mold includes a pair of cavity recesses connected by a resin path, the second mold includes a pair of inserts, the pair of inserts are provided on both sides of the glue sleeve block to position the workpiece Parallel workpiece placement section. In this way, multiple workpieces can be loaded and positioned in the plastic packaging mold at the same time, and resin plastic packaging can be performed.

對於包括所述任一塑封模具的樹脂塑封裝置來說,可抑制裝置成本,實現成形品質高的樹脂塑封。 [發明的效果]For a resin molding device including any one of the plastic molding molds, the cost of the device can be suppressed, and a resin molding device with high molding quality can be realized. [Effects of the invention]

本發明可提供一種工件搬入裝置及工件搬出裝置,可利用經簡化的模具結構來對塑封模具定位並交付工件及塑封樹脂。 而且,本發明可提供一種塑封模具,可避免塑封樹脂繞向工件端面而且動作不良少。 而且,本發明可提供一種樹脂塑封裝置,通過包括所述工件搬入裝置、工件搬出裝置及塑封模具,從而抑制成本,實現成形品質高的樹脂塑封。The invention can provide a workpiece carrying-in device and a workpiece carrying-out device, which can utilize a simplified mold structure to position the plastic sealing mold and deliver the workpiece and the plastic sealing resin. In addition, the present invention can provide a plastic sealing mold, which can prevent the plastic sealing resin from winding to the end surface of the workpiece and has fewer malfunctions. Moreover, the present invention can provide a resin molding device, which includes the workpiece carrying-in device, the workpiece carrying-out device, and the plastic molding mold, thereby reducing costs and realizing a resin molding with high molding quality.

以下,關於本發明的工件搬入裝置、工件搬出裝置、塑封模具以及包括所述裝置及模具的樹脂塑封裝置的適宜的實施方式,與圖式一起進行詳述。而且,當提及塑封模具時,是指分別支撐於模架(mould base)的上模及下模,稱為所謂模套(chase),是指將模開合機構(加壓裝置)除外。而且,當提及樹脂塑封裝置時,為至少包括塑封模具及對所述塑封模具進行開合的模開合機構(作為一例,為電動馬達及螺旋軸或肘杆機構等加壓裝置;未圖示)的裝置,此裝置還以自動化為目的而包括工件及樹脂的搬送裝置、成形後的工件(成形品)及多餘樹脂的搬出裝置。所謂工件,是導線架(lead frame)或多層基板等呈四邊形或短條狀的物品,以下簡稱為矩形基板。包括在轉注成形的情況下插入至進膠套筒而使擠膠頭(plunger)運轉的轉注機構,還包括在合模時在模具內形成減壓空間的減壓機構等。以下,以塑封模具的結構為中心進行說明。而且,關於工件W,設想對搭載了晶片的矩形基板進行樹脂塑封的情況。關於塑封模具,作為一例,設下模為可動模且上模為固定模來進行說明,但也可使上模為可動模且下模為固定模,也可使兩者為可動模。Hereinafter, suitable embodiments of the workpiece carrying-in device, the workpiece carrying-out device, the plastic molding mold, and the resin molding device including the device and the mold of the present invention will be described in detail together with the drawings. Moreover, when referring to a plastic mold, it refers to an upper mold and a lower mold respectively supported on a mold base, and is called a so-called chase, which excludes the mold opening and closing mechanism (pressurizing device). Moreover, when referring to a resin molding device, it includes at least a molding mold and a mold opening and closing mechanism for opening and closing the molding mold (as an example, a pressure device such as an electric motor and a screw shaft or a toggle mechanism; not shown) The device shown), this device also includes a workpiece and resin conveying device for the purpose of automation, a formed workpiece (molded product), and a removal device of excess resin. The so-called workpiece is a quadrilateral or short strip-shaped article such as a lead frame or a multilayer substrate, and is referred to as a rectangular substrate hereinafter. It includes a transfer mechanism that is inserted into the injection sleeve to operate the plunger in the case of transfer molding, and also includes a decompression mechanism that forms a decompression space in the mold when the mold is closed. Hereinafter, the description will be focused on the structure of the plastic packaging mold. Furthermore, regarding the work W, it is assumed that a rectangular substrate on which a wafer is mounted is resin-molded. Regarding the plastic molding mold, as an example, the lower mold is a movable mold and the upper mold is a fixed mold. However, the upper mold may be a movable mold and the lower mold may be a fixed mold, or both may be movable molds.

(塑封模具) 首先,關於用於樹脂塑封裝置的向塑封模具搬入工件及塑封樹脂的工件搬入裝置、將成形後的工件及多餘樹脂從塑封模具中搬出的工件搬出搬送裝置的結構,與塑封模具的結構一起進行說明。(Plastic mold) First of all, the structure of the work-in device for loading the workpiece and the plastic-sealing resin into the plastic-sealing mold for the resin molding device, and the structure of the work-out conveying device for the molded work and the excess resin from the plastic-sealing mold are carried out together with the structure of the plastic-sealing mold. Description.

首先,參照圖7及圖12對塑封模具1的結構進行說明。 對於開模的一對上模2(第一模具)及下模3(第二模具),通過後述的工件搬入裝置來供給工件W(例如矩形基板)及塑封樹脂R1(例如樹脂錠片)。 如圖12的A所示,上模2中,在上模夾持面形成有上模模腔凹部2a、以及與其連接的包含上模餘料部2b及上模流道澆口2c的樹脂路。First, the structure of the plastic packaging mold 1 will be described with reference to FIGS. 7 and 12. To the opened pair of upper mold 2 (first mold) and lower mold 3 (second mold), a workpiece W (for example, rectangular substrate) and molding resin R1 (for example, resin pellets) are supplied by a workpiece loading device described later. As shown in A of FIG. 12, in the upper mold 2, an upper mold cavity recessed portion 2a is formed on the upper mold clamping surface, and a resin path including an upper mold remnant portion 2b and an upper mold runner gate 2c connected thereto is formed .

如圖7所示,上模夾持面包含模腔凹部2a及樹脂路,由離型膜F覆蓋。離型膜F例如為厚度50 μm左右且具有耐熱性的膜材,容易自模具面剝離,可適宜地使用具有柔軟性、伸展性的膜,例如以PTFE(Polytetrafluoroethylene,聚四氟乙烯)、ETFE(Ethylene-Tetrafluoroethylene,乙烯-四氟乙烯共聚物)、PET(Polyethylene terephthalate,聚對苯二甲酸乙二酯)、FEP(Fluorinated ethylene propylene,氟化乙烯丙烯)膜、氟含浸玻璃布、聚丙烯膜、聚氯乙烯等作為主成分的單層或多層膜。離型膜F可為單張膜、捲繞在輥間的長條膜的任一種。As shown in FIG. 7, the upper mold clamping surface includes the cavity recess 2a and the resin path, and is covered by the release film F. The release film F is, for example, a film material with a thickness of about 50 μm and heat resistance, which is easily peeled from the mold surface. A flexible and stretchable film can be suitably used, such as PTFE (Polytetrafluoroethylene, polytetrafluoroethylene), ETFE (Ethylene-Tetrafluoroethylene, ethylene-tetrafluoroethylene copolymer), PET (Polyethylene terephthalate, polyethylene terephthalate), FEP (Fluorinated ethylene propylene, fluorinated ethylene propylene) film, fluorine impregnated glass cloth, polypropylene film , Polyvinyl chloride, etc. as the main component of single-layer or multi-layer film. The release film F may be either a single film or a long film wound between rolls.

而且,如圖12的A所示,在上模2的由與上模流道澆口2c交叉的工件外形線L1和封裝部(樹脂密封部)外形線L2所包圍的區域中,以可經由離型膜F而碰觸工件W的樹脂密封區域以外的基板部分的方式設有多個輔助銷2d。如圖7所示,輔助銷2d是由設於上模2內的彈性構件向從上模夾持面突出的方向一直施力而設置。多個輔助銷2d設置成通過開模而輔助銷2d碰觸工件W(基板部分),促進封裝部自模腔凹部2a的脫模及澆口切斷(gate break),且通過合模而退避至上模2內。Moreover, as shown in A of FIG. 12, in the upper mold 2 in the area surrounded by the workpiece contour line L1 intersecting the upper mold runner gate 2c and the encapsulation portion (resin sealing portion) contour line L2, it is possible to pass A plurality of auxiliary pins 2d are provided so that the release film F touches the substrate portion other than the resin sealing area of the workpiece W. As shown in FIG. 7, the auxiliary pin 2d is provided by the elastic member provided in the upper mold|type 2 by always urging|biasing in the direction which protrudes from the upper mold clamping surface. A plurality of auxiliary pins 2d are provided so that the auxiliary pins 2d touch the workpiece W (substrate portion) by opening the mold, promote the release of the package portion from the cavity recess 2a and gate break, and retreat by clamping the mold To the upper mold 2.

圖7中,在下模3的下模套塊(未圖示)寬度方向中央部,設有進膠套筒塊3a及下模嵌件3b。在進膠套筒塊3a內同心狀地嵌入有進膠套筒3e。進膠套筒塊3a及進膠套筒3e是相對於下模嵌件3b而由線圈彈簧3c一直以遠離下模夾持面的方式向上方施力。In FIG. 7, in the center part of the lower mold block (not shown) in the width direction of the lower mold 3, a rubber feed sleeve block 3 a and a lower mold insert 3 b are provided. A glue sleeve 3e is embedded concentrically in the glue sleeve block 3a. The glue sleeve block 3a and the glue sleeve 3e are urged upward by the coil spring 3c with respect to the lower mold insert 3b so as to be far away from the lower mold clamping surface.

如圖12的B所示,進膠套筒塊3a的上端面中,與相向的上模餘料部2b及上模流道澆口2c一起形成樹脂路的橋接部3d在進膠套筒塊3a的兩側突設。如圖7所示,橋接部3d的外周緣部以板厚逐漸變薄的方式形成,前端延伸至模腔面,跨越工件W的端部而按壓基板面。而且,進膠套筒塊3a的橋接部3d彼此的空間部成為後述的握持工件W的裝載手4f的開合爪4g的避讓空間S。在進膠套筒3e的筒孔3e1內,以通過未圖示的驅動源而可升降的方式設有擠膠頭3f。在進膠套筒3e內,通過後述的裝載器4而投入塑封樹脂R1(例如樹脂錠片)。As shown in Figure 12B, in the upper end surface of the rubber inlet sleeve block 3a, a bridge portion 3d of the resin path is formed together with the opposing upper mold remnant portion 2b and upper mold runner gate 2c in the rubber inlet sleeve block. Protruding on both sides of 3a. As shown in FIG. 7, the outer peripheral edge portion of the bridge portion 3d is formed so that the plate thickness gradually becomes thinner, and the front end extends to the cavity surface, and the end portion of the workpiece W is pressed across the substrate surface. And the space part of the bridge|bridging part 3d of the glue sleeve block 3a becomes the escape space S of the opening and closing claw 4g of the loading hand 4f which grasps the workpiece|work W mentioned later. In the cylindrical hole 3e1 of the glue feeding sleeve 3e, a glue squeezing head 3f is provided in a manner capable of being raised and lowered by a driving source not shown. In the filling sleeve 3e, the molding resin R1 (for example, a resin pellet) is injected|thrown-in by the loader 4 mentioned later.

如圖7所示,在下模嵌件3b的上表面,挖入有供載置工件W的工件安置凹部3g(工件載置部)。工件安置凹部3g的深度相當於工件W的板厚近似程度。 如圖12的B所示,沿著較工件安置凹部3g的外形線L3更靠內側的假想線L4,等間隔地以環繞的方式配置有吸引保持工件W的多個吸引孔3h。而且,由設有多個吸引孔3h的假想線L4所包圍的工件區域中,以可保持工件W的方式以良好的平衡配置有多個支撐銷3i,且所述多個支撐銷3i設置成可升降。多個支撐銷3i例如設於未圖示的下模座,在開模時若下模3下降,則從工件安置凹部3g突出而支撐工件W,若因合模而下模3上升,則從工件安置凹部3g退避至下模3內,而可將工件W載置於工件安置凹部3g。As shown in FIG. 7, in the upper surface of the lower mold insert 3b, a workpiece placement recess 3g (work placement portion) in which the workpiece W is placed is dug. The depth of the workpiece placement recess 3g corresponds to the approximate degree of the thickness of the workpiece W. As shown in FIG. 12B, along a virtual line L4 that is inside the outline L3 of the workpiece placement recess 3g, a plurality of suction holes 3h for sucking and holding the workpiece W are arranged in a circumferential manner at equal intervals. Furthermore, in the workpiece region surrounded by the imaginary line L4 provided with the plurality of suction holes 3h, a plurality of support pins 3i are arranged in a good balance so that the workpiece W can be held, and the plurality of support pins 3i are arranged as Can be raised and lowered. A plurality of support pins 3i are provided in, for example, a lower mold base not shown. When the lower mold 3 is lowered during mold opening, it protrudes from the workpiece placement recess 3g to support the workpiece W, and if the lower mold 3 rises due to mold clamping, the lower mold 3 rises from The workpiece placement recess 3g is retracted into the lower mold 3, and the workpiece W can be placed in the workpiece placement recess 3g.

而且,如圖12的B所示,在工件安置凹部3g的與進膠套筒塊3a的橋接部3d重疊的區域,沿著工件長度方向在多處突設有定位銷3j。在工件W,設有沿著進膠套筒側長邊部而供定位銷3j嵌入的定位孔Wh(參照圖5),在上模2也開有定位銷3j的避讓孔。由後述的裝載器4搬入至下模3上的工件W通過定位孔Wh與定位銷3j對位並嵌入,從而將工件W定位並載置於工件安置凹部3g。 如圖7所示,進膠套筒塊3a與進膠套筒3e一起由線圈彈簧3c一直向遠離下模3的夾持面的方向施力,對於由後述的工件搬入裝置(裝載器4)定位並載置於工件安置凹部3g的工件W來說,通過合模,進膠套筒塊3a被上模2下壓而跨越工件端部,所述工件W在所述進膠套筒塊3a與下模嵌件3b之間被夾住。Furthermore, as shown in B of FIG. 12, positioning pins 3j are protrudingly provided in a plurality of locations along the longitudinal direction of the workpiece in a region overlapping with the bridge portion 3d of the glue sleeve block 3a of the workpiece seating recess 3g. The workpiece W is provided with a positioning hole Wh (refer to FIG. 5) into which the positioning pin 3j fits along the long side of the glue sleeve side, and the upper mold 2 also has an escape hole for the positioning pin 3j. The workpiece W carried into the lower mold 3 by the loader 4 described later is aligned with the positioning pin 3j through the positioning hole Wh and fitted, and the workpiece W is positioned and placed in the workpiece placement recess 3g. As shown in Fig. 7, the glue sleeve block 3a and the glue sleeve 3e are always urged by the coil spring 3c in a direction away from the clamping surface of the lower mold 3. For the workpiece carrying device (loader 4) described later For the workpiece W positioned and placed in the workpiece seating recess 3g, by clamping the mold, the glue sleeve block 3a is pressed down by the upper mold 2 to straddle the end of the workpiece, and the workpiece W is in the glue sleeve block 3a. It is clamped with the lower mold insert 3b.

(裝載器機構) 接下來,參照圖1及圖6對將工件W及塑封樹脂R1搬入至塑封模具1的裝載器4(工件搬入裝置)的一例進行說明。 如圖1所示,裝載器4向開模的塑封模具1(下模3)搬入工件W及塑封樹脂R1。裝載器本體4a設置成在水平面內在X-Y方向移動,並且可相對於下模3的下模夾持面而升降。相對於設於下模3的進膠套筒塊3a及配置於其兩側的工件安置凹部3g,進行工件W的定位。(Loader mechanism) Next, with reference to FIGS. 1 and 6, an example of the loader 4 (work loading device) that loads the work W and the molding resin R1 into the molding die 1 will be described. As shown in FIG. 1, the loader 4 loads the workpiece W and the molding resin R1 into the opened plastic mold 1 (lower mold 3). The loader body 4a is arranged to move in the X-Y direction in a horizontal plane, and can be raised and lowered relative to the lower mold clamping surface of the lower mold 3. Positioning of the workpiece W is performed with respect to the glue feeding sleeve block 3a provided on the lower mold 3 and the workpiece placement recesses 3g arranged on both sides thereof.

如圖6所示,在裝載器本體4a設有樹脂投入部4b,此樹脂投入部4b以保持塑封樹脂R1(例如樹脂錠片)的狀態將其投入至進膠套筒塊3a的進膠套筒3e。樹脂投入部4b在筒狀的容器內收納塑封樹脂R1並進行搬送,通過設於容器底部的閘板4c開合,從而將塑封樹脂R1投入至進膠套筒3e。而且,圖1中,在樹脂投入部4b的兩側,設有以保持工件W(例如矩形基板)的狀態可接近或遠離地移動的一對工件保持部4d。一對工件保持部4d相對於裝載器本體4a經由滑動機構4e而可滑動地組裝有裝載手4f。作為滑動機構4e,例如可使用無杆氣缸(rodless cylinder),一對裝載手4f可在圖1的左右方向,向接近的方向及遠離的方向同時移動。而且,在各裝載手4f,可開合地設有保持工件W(例如矩形基板)的寬度方向兩側的可開合的一對開合爪4g。開合爪4g經由連杆機構而進行開合操作,所述連杆機構例如通過未圖示的氣缸驅動而開合。As shown in Fig. 6, the loader body 4a is provided with a resin input portion 4b. The resin input portion 4b puts the resin R1 (for example, resin pellets) into the rubber inlet sleeve of the rubber inlet sleeve block 3a while maintaining the state of molding resin R1 (for example, resin pellets).管3e. The resin input part 4b accommodates and conveys the molding resin R1 in a cylindrical container, and is opened and closed by the shutter 4c provided in the bottom of the container, and the molding resin R1 is injected into the injection sleeve 3e. In addition, in FIG. 1, on both sides of the resin input portion 4b, a pair of workpiece holding portions 4d that can move closer to or away from each other while holding the workpiece W (for example, a rectangular substrate) is provided. The pair of workpiece holding portions 4d is slidably assembled with a loading hand 4f via a sliding mechanism 4e with respect to the loader main body 4a. As the sliding mechanism 4e, for example, a rodless cylinder can be used, and the pair of loading hands 4f can simultaneously move in the direction of approach and the direction of separation in the left-right direction of FIG. 1. In addition, each loading hand 4f is provided with a pair of opening and closing claws 4g that can be opened and closed to hold both sides in the width direction of the workpiece W (for example, a rectangular substrate). The opening and closing pawls 4g perform opening and closing operations via a link mechanism that is driven by an air cylinder not shown to open and close, for example.

如圖1所示,工件保持部4d以保持工件W的狀態,相互接近至處於上升位置的進膠套筒塊3a與工件安置凹部3g之間在平面視時重合的位置,將工件W交付給從工件安置凹部3g突出的多個支撐銷3i。這樣,使裝載器本體4a進入開模的塑封模具1,從樹脂投入部4b向進膠套筒塊3a的進膠套筒3e投入塑封樹脂R1,並且使保持成形前的工件W的一對工件保持部4d,相互接近至處於上升位置的進膠套筒塊3a與工件安置凹部3g之間在平面視時重合的位置,將工件W交付給下模3。樹脂投入部4b優選在將由一對工件保持部4d所保持的工件W交付給下模3時,向進膠套筒3e投入塑封樹脂R1。As shown in FIG. 1, the workpiece holding portion 4d is in a state of holding the workpiece W, approaching each other to a position where the rubber feeding sleeve block 3a and the workpiece seating recess 3g in the raised position overlap in a plan view, and the workpiece W is delivered to A plurality of support pins 3i protruding from the workpiece placement recess 3g. In this way, the loader body 4a is inserted into the opened molding die 1, and the molding resin R1 is injected from the resin input portion 4b into the injection sleeve 3e of the injection sleeve block 3a, and a pair of workpieces holding the workpiece W before molding The holding portion 4 d is close to each other to a position where the rubber feeding sleeve block 3 a and the workpiece placement recess 3 g overlap in a plan view, and the workpiece W is delivered to the lower mold 3. It is preferable that the resin injection part 4b injects the molding resin R1 into the injection sleeve 3e when the work W held by the pair of work holding parts 4d is delivered to the lower mold 3.

藉此,裝載器4與工件安置凹部3g的工件W的搬入時機一致而向進膠套筒塊3a的進膠套筒3e供給塑封樹脂R1,藉此可順利地實現工件搬入作業,可進行合模動作而由進膠套筒塊3a的橋接部3d夾持經定位的工件W。 而且,工件保持部4d以不干擾進膠套筒塊3a的方式,以保持工件W的狀態通過滑動機構4e滑動而定位並搬入至工件安置凹部3g,因此可簡化塑封模具1的結構。As a result, the loader 4 and the work placement recess 3g have the same timing of loading the workpiece W, and supply the plastic resin R1 to the injection sleeve 3e of the injection sleeve block 3a, so that the work can be carried in smoothly, and the assembly can be performed smoothly. The positioning work piece W is clamped by the bridge portion 3d of the rubber feeding sleeve block 3a by the mold operation. In addition, the workpiece holding portion 4d is positioned and carried into the workpiece seating recess 3g by sliding the workpiece W by the sliding mechanism 4e in a state of holding the workpiece W without interfering with the glue sleeve block 3a, so the structure of the plastic packaging mold 1 can be simplified.

(卸載器機構) 接下來,參照圖13對在塑封模具1中搬出成形後的工件W(成形品)及多餘樹脂R2的卸載器5(工件搬出裝置)的一例進行說明。 如圖13所示,卸載器5將成形後的工件W(成形品)及多餘樹脂R2從開模的塑封模具1(下模3)中搬出。 若在樹脂塑封後將塑封模具1開模,則成形後的工件W支撐於在塑封模具1的工件安置凹部3g突出的支撐銷3i,由遠離下模夾持面的進膠套筒塊3a支撐的多餘樹脂R2成為經分離的狀態(下文中將在模具成形後的動作中描述)。此狀態下,卸載器本體5a進入塑封模具1而搬出工件W及多餘樹脂R2(成形品餘料流道)。在卸載器本體5a中,設有以保持多餘樹脂R2的狀態從進膠套筒塊3a中回收多餘樹脂R2的餘料保持塊5b(多餘樹脂回收部)。餘料保持塊5b是相對於卸載器本體5a而由線圈彈簧5c懸吊支撐。餘料保持塊5b通過設於下端部的吸附墊5b1而被按壓於成形品餘料流道R2並吸附保持。此外,本實施例利用吸附墊5b1來保持多餘樹脂R2,但未必須要設為吸附墊5b1,餘料保持塊5b也可通過開合爪(未圖示)來保持多餘樹脂R2。(Unloader mechanism) Next, an example of the unloader 5 (work unloading device) that unloads the molded workpiece W (molded product) and excess resin R2 in the plastic packaging mold 1 will be described with reference to FIG. 13. As shown in FIG. 13, the unloader 5 unloads the molded workpiece W (molded product) and excess resin R2 from the opened plastic mold 1 (lower mold 3). If the plastic molding mold 1 is opened after resin molding, the formed workpiece W is supported by the support pins 3i protruding from the workpiece placement recess 3g of the plastic molding mold 1, and is supported by the injection sleeve block 3a away from the clamping surface of the lower mold The surplus resin R2 becomes a separated state (which will be described in the action after the mold is formed below). In this state, the unloader body 5a enters the plastic packaging mold 1 to carry out the workpiece W and the excess resin R2 (molded product residual material flow path). The unloader body 5a is provided with a residual material holding block 5b (excess resin recovery part) for recovering the surplus resin R2 from the rubber feeding sleeve block 3a while holding the surplus resin R2. The remaining material holding block 5b is suspended and supported by the coil spring 5c with respect to the unloader body 5a. The surplus material holding block 5b is pressed against the molded article surplus material flow path R2 by the suction pad 5b1 provided at the lower end, and is sucked and held. In addition, in this embodiment, the adsorption pad 5b1 is used to hold the excess resin R2, but it is not necessary to be the adsorption pad 5b1. The remaining material holding block 5b can also hold the excess resin R2 by opening and closing claws (not shown).

而且,在餘料保持塊5b的兩側,設有以保持成形後的工件W(成形品)的狀態而可接近或遠離地移動的一對工件回收部5d。一對工件回收部5d相對於卸載器本體5a經由滑動機構5e而可滑動地組裝有卸載手5f。作為滑動機構5e,例如可使用無杆氣缸,一對卸載手5f可在圖13的左右方向,向接近的方向和遠離的方向同時移動。而且,在各卸載手5f,可開合地設有保持工件W(例如矩形基板)的寬度方向兩側的可開合的開合爪5g。開合爪5g經由連杆機構進行開合操作,所述連杆機構例如通過未圖示的氣缸驅動而開合。In addition, on both sides of the remaining material holding block 5b, a pair of workpiece collecting parts 5d which can move closer to or away from each other while holding the formed workpiece W (molded product) is provided. The pair of workpiece collecting parts 5d is slidably assembled with an unloader hand 5f with respect to the unloader main body 5a via a sliding mechanism 5e. As the sliding mechanism 5e, for example, a rodless cylinder can be used, and the pair of unloader hands 5f can simultaneously move in the direction of approach and the direction of separation in the left-right direction of FIG. 13. In addition, each unloader hand 5f is provided with openable and closable opening and closing claws 5g that hold both sides in the width direction of the workpiece W (for example, a rectangular substrate) in an openable and closable manner. The opening and closing pawl 5g performs opening and closing operations via a link mechanism that is driven by an air cylinder not shown to open and close, for example.

餘料保持塊5b保持多餘樹脂R2,工件回收部5d從下模3的工件安置凹部3g保持成形後的工件W,並且一對工件回收部5d相互遠離至不與進膠套筒塊3a干擾的位置,將成形後的工件W搬出。 這樣,使卸載器本體5a進入開模的塑封模具1,餘料保持塊5b吸引保持由進膠套筒塊3a所支撐的多餘樹脂R2,一對工件回收部5d保持成形後的工件W,並且通過滑動機構5e而相互遠離至不與進膠套筒塊3a干擾的位置,將成形後的工件W搬出。藉此,工件回收部5d以不干擾進膠套筒塊3a的方式,以保持成形品的狀態從工件安置凹部3g搬出成形後的工件W,因而可簡化塑封模具1的結構。The remaining material holding block 5b holds the excess resin R2, the workpiece recovery part 5d holds the formed workpiece W from the workpiece placement recess 3g of the lower mold 3, and the pair of workpiece recovery parts 5d are far away from each other so as not to interfere with the rubber sleeve block 3a Position, unload the formed workpiece W. In this way, the unloader body 5a enters the opened plastic molding mold 1, the remaining material holding block 5b attracts and retains the excess resin R2 supported by the feeding sleeve block 3a, the pair of workpiece recovery parts 5d hold the formed workpiece W, and The sliding mechanism 5e is used to move away from each other to a position where it does not interfere with the rubber feeding sleeve block 3a, and the formed workpiece W is carried out. Thereby, the workpiece recovery part 5d carries out the molded workpiece W from the workpiece seating recess 3g without disturbing the glue sleeve block 3a while maintaining the molded product, so that the structure of the plastic packaging mold 1 can be simplified.

(裝載器動作) 此處,關於樹脂塑封裝置的塑封動作的一例,與對塑封模具的工件搬入搬出動作一起進行說明。首先,參照圖1至圖5對利用裝載器4進行的工件搬入動作進行說明。 圖1中,將工件W(矩形基板)及塑封樹脂R1搬入至開模的下模3。下模3中,進膠套筒塊3a及進膠套筒3e由線圈彈簧3c施力,相較於下模夾持面(下模嵌件3b上表面)而處於上升位置,支撐銷3i處於從工件安置凹部3g突出的狀態。 裝載器4在樹脂投入部4b內保持塑封樹脂R1,一對工件保持部4d通過滑動機構4e而在自樹脂投入部4b相互遠離的位置(左右拉開的位置)保持裝載手4f,且在開合爪4g握持工件W(矩形基板)的短邊方向兩側,在此狀態下進入塑封模具1。(Loader action) Here, an example of the molding operation of the resin molding device will be described together with the loading and unloading operations of the workpiece to the molding die. First, with reference to FIGS. 1 to 5, the work carrying-in operation by the loader 4 will be described. In FIG. 1, the workpiece W (rectangular substrate) and the molding resin R1 are carried into the lower mold 3 where the mold is opened. In the lower mold 3, the rubber inlet sleeve block 3a and the rubber inlet sleeve 3e are urged by the coil spring 3c, and are in a raised position compared to the lower mold clamping surface (the upper surface of the lower mold insert 3b), and the support pin 3i is at A state protruding from the workpiece placement recess 3g. The loader 4 holds the molded resin R1 in the resin input portion 4b, and the pair of work holding portions 4d hold the loader hand 4f at a position away from each other (left and right pulled apart positions) from the resin input portion 4b by a sliding mechanism 4e, and is open The claws 4g hold both sides in the short-side direction of the workpiece W (rectangular substrate), and enter the plastic packaging mold 1 in this state.

圖2中,裝載器4下降,成為將由裝載手4f所保持的工件W載置於在工件安置凹部3g上突出的多個支撐銷3i的狀態。開合爪4g處於保持閉合而保持工件W的狀態。In FIG. 2, the loader 4 is lowered, and the workpiece W held by the loader hand 4f is placed on the plurality of support pins 3i protruding from the workpiece placement recess 3g. The opening and closing pawl 4g is in a state where the workpiece W is kept closed.

圖3中,使滑動機構4e運轉,使一對裝載手4f向靠近樹脂投入部4b的方向滑動。此時,開合爪4g在平面視時位於橋接部3d之間,因而不與進膠套筒塊3a干擾,而且,工件W的上表面高度成為較橋接部3d的下表面更靠下的位置,因而工件W的前端以潛入橋接部3d之下的方式滑動。而且,樹脂投入部4b位於進膠套筒塊3a的正上方,因而開放閘板4c而將塑封樹脂R1(樹脂錠片)投入至進膠套筒3e。In FIG. 3, the slide mechanism 4e is operated, and the pair of loading hands 4f slides in the direction approaching the resin injection part 4b. At this time, the opening and closing claws 4g are located between the bridge portions 3d in a plan view, so they do not interfere with the glue sleeve block 3a, and the height of the upper surface of the workpiece W becomes a position lower than the lower surface of the bridge portion 3d Therefore, the front end of the workpiece W slides so as to sneak under the bridge portion 3d. Furthermore, since the resin input part 4b is located right above the filling sleeve block 3a, the shutter 4c is opened, and the molding resin R1 (resin pellet) is injected into the filling sleeve 3e.

圖4中,開放裝載手4f的開合爪4g而將工件W(矩形基板)交付至支撐銷3i上。此時,使工件W的定位孔Wh與下模3的定位銷3j對位。開合爪4g在平面視時配置於進膠套筒塊3a的避讓空間S(參照圖12的B),因而不與橋接部3d干擾。 圖5中,裝載器4將工件W交付於下模3後,裝載器本體4a上升而自塑封模具1退避。而且,工件W及塑封樹脂R1向塑封模具1的搬入完成,因而進行塑封模具1的合模動作。即,下模3開始上升,因而支撐銷3i相對下降,定位銷3j嵌入至定位孔Wh,在工件安置凹部3g決定工件W的位置並載置。 而且,從設於工件安置凹部3g的吸引孔3h預先開始抽吸空氣,或者在載置工件後抽吸空氣,因而工件W定位固定於工件安置凹部3g。In FIG. 4, the opening/closing claw 4g of the loading handle 4f is opened, and the workpiece|work W (rectangular board|substrate) is delivered to the support pin 3i. At this time, the positioning hole Wh of the workpiece W is aligned with the positioning pin 3j of the lower mold 3. The opening and closing claws 4g are arranged in the avoidance space S (refer to FIG. 12B) of the glue sleeve block 3a in a plan view, and therefore do not interfere with the bridge portion 3d. In FIG. 5, after the loader 4 delivers the workpiece W to the lower mold 3, the loader body 4 a rises and retracts from the plastic mold 1. Then, the loading of the workpiece W and the molding resin R1 into the molding mold 1 is completed, and thus the clamping operation of the molding mold 1 is performed. That is, the lower mold 3 starts to rise, and therefore the support pins 3i are relatively lowered, the positioning pins 3j are fitted into the positioning holes Wh, and the position of the workpiece W is determined and placed in the workpiece placement recess 3g. Furthermore, since air is sucked in advance from the suction hole 3h provided in the workpiece placement recess 3g, or after the workpiece is placed, the workpiece W is positioned and fixed in the workpiece placement recess 3g.

這樣,在開模的塑封模具1中,在下模3的工件安置凹部3g將由裝載器4搬入的工件W定位,通過合模,進膠套筒塊3a被上模2下壓,在進膠套筒塊3a與下模嵌件3b之間夾住工件W,因而模具側的結構變得簡單,模具成本變得低廉,可避免塑封樹脂R1向工件端面迂回,也不易引起模具內的動作不良,而且維護也可簡易地進行。In this way, in the opened plastic sealing mold 1, the workpiece W carried in by the loader 4 is positioned in the workpiece placement recess 3g of the lower mold 3. By clamping the mold, the rubber feeding sleeve block 3a is pressed down by the upper mold 2, and the rubber sleeve block 3a is pressed down by the upper mold 2. The workpiece W is clamped between the cylinder block 3a and the lower mold insert 3b, so the structure of the mold side becomes simple, the mold cost becomes low, and the plastic resin R1 can be avoided to detour to the end surface of the workpiece, and it is not easy to cause malfunction in the mold. Moreover, maintenance can be carried out easily.

(塑封模具動作) 接下來,參照圖7至圖11對利用塑封模具1進行的樹脂塑封動作進行說明。圖7表示將工件W安置於下模3的工件安置凹部3g,在進膠套筒3e裝填了樹脂錠片R的狀態。進膠套筒塊3a及進膠套筒3e受到線圈彈簧3c施力而處於上升位置。而且,上模2的夾持面吸附保持離型膜F,輔助銷2d以將離型膜F下壓的方式從上模夾持面突出。(Plastic mold action) Next, the resin molding operation performed by the molding die 1 will be described with reference to FIGS. 7 to 11. FIG. 7 shows a state in which the workpiece W is set in the workpiece setting recess 3g of the lower mold 3, and the resin pellet R is loaded in the glue sleeve 3e. The rubber inlet sleeve block 3a and the rubber inlet sleeve 3e are urged by the coil spring 3c to be in a raised position. Furthermore, the clamping surface of the upper mold 2 sucks and holds the release film F, and the auxiliary pin 2d protrudes from the upper mold clamping surface so as to press the release film F downward.

若進行合模動作而上模2碰觸進膠套筒塊3a,則抵抗線圈彈簧3c的施力而將進膠套筒塊3a及進膠套筒3e下壓。接下來,若如圖8所示那樣下模3與上模2合模,則成為進膠套筒塊3a及進膠套筒3e被上模2及下模3夾住的狀態。此時,設於進膠套筒塊3a的橋接部3d跨越經定位於工件安置凹部3g的工件W的外周緣部,按壓工件上表面(基板面)。藉此,在上模餘料部2b、上模流道澆口2c與進膠套筒塊3a的上端面(橋接部3d上表面)之間,在多處(圖12中為五處)形成與上模模腔凹部2a連通的樹脂路。而且,從上模2突出的輔助銷2d(參照圖7)碰觸相向的工件W的基板面而被壓回。When the mold clamping action is performed and the upper mold 2 touches the rubber inlet sleeve block 3a, the rubber inlet sleeve block 3a and the rubber inlet sleeve 3e are pressed down against the force of the coil spring 3c. Next, as shown in FIG. 8, when the lower mold 3 and the upper mold 2 are closed, the rubber feeding sleeve block 3 a and the rubber feeding sleeve 3 e are sandwiched by the upper mold 2 and the lower mold 3. At this time, the bridge portion 3d provided in the glue-in sleeve block 3a straddles the outer peripheral edge portion of the workpiece W positioned in the workpiece placement recess 3g, and presses the upper surface (substrate surface) of the workpiece. Thereby, between the upper mold residual material part 2b, the upper mold runner gate 2c and the upper end surface (the upper surface of the bridge part 3d) of the injection sleeve block 3a, it is formed in multiple places (five places in FIG. 12) A resin path communicating with the upper mold cavity recess 2a. And the auxiliary pin 2d (refer FIG. 7) protruding from the upper mold|type 2 touches the board|substrate surface of the workpiece|work W which opposes, and is pressed back.

圖9中,在塑封模具1內置著加熱器(未圖示),在進膠套筒3e內熔融的塑封樹脂R1通過擠膠頭3f的上升,而經過上模餘料部2b、上模流道澆口2c與進膠套筒塊3a的上端面之間的樹脂路,填充至上模模腔凹部2a內。填充至上模模腔凹部2a內的塑封樹脂R1加熱硬化(固化)。In FIG. 9, a heater (not shown) is built in the plastic molding mold 1, and the plastic molding resin R1 melted in the injection sleeve 3e is raised by the extrusion head 3f, and then passes through the upper mold remnant part 2b and the upper mold flow The resin path between the sprue 2c and the upper end surface of the injection sleeve block 3a is filled into the upper mold cavity recess 2a. The molding resin R1 filled in the cavity 2a of the upper mold is heated and hardened (cured).

圖10中,將塑封模具1開模。此時,下模3以在工件安置凹部3g吸附保持工件W的狀態下降,藉此,受到線圈彈簧3c施力的進膠套筒塊3a及進膠套筒3e相對地上升。藉此,成形後的工件W(成形品)的封裝部PK(樹脂密封部)與形成於進膠套筒塊3a上的多餘樹脂R2(成形品餘料流道)進行澆口切斷。而且,輔助銷2d從上模2突出並按壓工件W的基板面,藉此封裝部PK與經離型膜F覆蓋的上模模腔凹部2a容易脫模。In Figure 10, the plastic packaging mold 1 is opened. At this time, the lower mold 3 is lowered while sucking and holding the workpiece W in the workpiece placement recess 3g, whereby the rubber feeding sleeve block 3a and the rubber feeding sleeve 3e that are urged by the coil spring 3c rise relatively. Thereby, the encapsulation part PK (resin sealing part) of the molded workpiece W (molded product) and the excess resin R2 (molded product residual flow path) formed on the feed sleeve block 3a are gate-cut. In addition, the auxiliary pin 2d protrudes from the upper mold 2 and presses the substrate surface of the workpiece W, whereby the packaging portion PK and the upper mold cavity concave portion 2a covered with the release film F are easily demolded.

接下來,圖11中,若進行開模,則支撐銷3i從工件安置凹部3g突出,因而工件W從工件安置凹部3g被上推。藉此,工件W成為定位銷3j從定位孔Wh脫出的狀態。而且,設於工件安置凹部3g的吸引孔3h的空氣抽吸可繼續,或也可與開模一起停止。Next, in FIG. 11, when the mold is opened, the support pin 3i protrudes from the workpiece placement recess 3g, and therefore the workpiece W is pushed up from the workpiece placement recess 3g. Thereby, the workpiece W is in a state where the positioning pin 3j has come out of the positioning hole Wh. In addition, the air suction of the suction hole 3h provided in the workpiece placement recess 3g may be continued or may be stopped together with the mold opening.

(卸載器動作) 最後,參照圖13至圖16對利用卸載器5進行的工件搬出動作加以說明。圖13中,卸載器5進入開模的塑封模具1。下模3中,進膠套筒塊3a及進膠套筒3e受到線圈彈簧3c施力而較下模夾持面(下模嵌件3b上表面)處於上升位置,支撐銷3i處於自工件安置凹部3g突出的狀態。因此,成形後的工件W(成形品)與多餘樹脂R2(成形品餘料流道)處於經分離的狀態。卸載器5在一對工件回收部5d通過滑動機構5e而向餘料保持塊5b相互接近的位置(靠近中央的位置)保持卸載手5f,且開合爪5g張開,在此狀態下進入塑封模具1。(Uninstaller action) Finally, with reference to FIGS. 13 to 16, the work unloading operation performed by the unloader 5 will be described. In FIG. 13, the unloader 5 enters the opened plastic mold 1. In the lower mold 3, the rubber inlet sleeve block 3a and the rubber inlet sleeve 3e are urged by the coil spring 3c and are in a raised position relative to the lower mold clamping surface (the upper surface of the lower mold insert 3b), and the support pin 3i is positioned from the workpiece The state where the recess 3g protrudes. Therefore, the molded workpiece W (molded product) and excess resin R2 (molded product residual material flow path) are in a separated state. The unloader 5 holds the unloader hand 5f at a position (near the center) where the pair of workpiece recovery parts 5d approach the remaining material holding block 5b through the sliding mechanism 5e, and the opening and closing claws 5g are opened, and in this state, it enters the plastic package Mold 1.

圖14中,卸載器5下降,卸載手5f的開合爪5g進入經支撐銷3i支撐的工件W的兩側。此時,開合爪5g位於橋接部3d之間,因而不會與進膠套筒塊3a干擾。另外,通過閉合開合爪5g從而握持工件W。而且,餘料保持塊5b將吸附墊5b1按壓於多餘樹脂R2(成形品餘料流道),因而吸附保持多餘樹脂R2。In FIG. 14, the unloader 5 descends, and the opening and closing claws 5g of the unloader hand 5f enter both sides of the workpiece W supported by the support pin 3i. At this time, the opening and closing claws 5g are located between the bridge portions 3d, so they will not interfere with the glue sleeve block 3a. In addition, the workpiece W is held by closing the opening and closing claws 5g. In addition, the remaining material holding block 5b presses the adsorption pad 5b1 against the excess resin R2 (molded product remaining material flow path), thereby adsorbing and holding the excess resin R2.

圖15中,使滑動機構5e運轉,使一對卸載手5f分別向遠離餘料保持塊5b的方向(左右兩側)滑動。 圖16中,卸載器5的卸載器本體5a以保持成形後的工件W(成形品)及多餘樹脂R2(成形品餘料流道)的狀態上升,從塑封模具1退避。 卸載器5將成形品交付給成形品收納部,將多餘樹脂R2回收至廢料箱(scrap box),藉此結束一系列樹脂塑封動作。In FIG. 15, the sliding mechanism 5e is operated, and the pair of unloading hands 5f are respectively slid in a direction away from the remaining material holding block 5b (left and right sides). In FIG. 16, the unloader body 5a of the unloader 5 rises while holding the molded workpiece W (molded product) and excess resin R2 (molded product residual material flow path), and is retracted from the plastic molding die 1. The unloader 5 delivers the molded product to the molded product storage section, and collects the excess resin R2 to a scrap box, thereby ending a series of resin molding operations.

關於包括所述的塑封模具1、裝載器4、卸載器5的樹脂塑封裝置6,例如可適用於圖25的平面佈局圖所示那樣的裝置。 圖25中,模塊型的樹脂塑封裝置6被工件及樹脂的供給部6a與成形品及多餘樹脂的收納部6b夾持,是將單個或多個加壓部6c連結而成。裝載器4在工件及樹脂的供給部6a與加壓部6c之間往返移動,卸載器5在加壓部6c與成形品及多餘樹脂的收納部6b之間往返移動。而且雖未圖示,但裝載器4及卸載器5可沿著對工件及樹脂的供給部6a、加壓部6c、成形品及多餘樹脂的收納部6b共同設置的移動軌道而往返移動,或也可沿著個別的移動軌道而往返移動。Regarding the resin molding apparatus 6 including the above-mentioned molding die 1, the loader 4, and the unloader 5, it can be applied to, for example, the apparatus shown in the plan layout diagram of FIG. 25. In FIG. 25, the module-type resin molding device 6 is sandwiched between a workpiece and resin supply part 6a and a molded product and excess resin storage part 6b, and is formed by connecting a single or a plurality of pressurizing parts 6c. The loader 4 reciprocates between the workpiece and resin supply part 6a and the pressure part 6c, and the unloader 5 reciprocates between the pressure part 6c and the molded product and the accommodating part 6b of excess resin. Also, although not shown, the loader 4 and the unloader 5 can move back and forth along a moving rail that is provided for the workpiece and the resin supply part 6a, the pressure part 6c, the molded product, and the excess resin storage part 6b, or It can also move back and forth along individual moving tracks.

(其他實施例1) 接下來,參照圖17至圖24,對塑封模具1的其他實施例加以說明。裝載器4及卸載器5的結構相同,因此對相同構件標注相同編號而援用說明。(Other embodiment 1) Next, with reference to FIGS. 17 to 24, other embodiments of the plastic molding mold 1 will be described. The loader 4 and the unloader 5 have the same structure, so the same components are assigned the same numbers and the description is cited.

如圖17所示,在下模3,在工件安置凹部3g設有突出的多個支撐銷3i,但為了簡化模具結構,也可省略多個支撐銷3i。在工件安置凹部3g設有吸引工件W的吸引孔3h的結構相同。 如圖17所示,在下模嵌件3b的上表面,挖入有供載置工件W的工件安置凹部3g(工件載置部)。工件安置凹部3g的深度相當於工件W的板厚近似程度。 圖24為下模3的平面佈局圖。在工件安置凹部3g的外形線L3上,在不與設於進膠套筒塊3a的橋接部3d干擾的位置,在四處各設有左右一對開合爪4g的避讓凹部3k。避讓凹部3k是以在與下模3之間交接工件W時,不與裝載器4的開合爪4g、卸載器5的開合爪5g干擾的方式,與開合爪4g、開合爪5g的配置對應地設有左右一對。沿著較工件安置凹部3g的外形線L3更靠內側的假想線L4,等間隔地以環繞的方式配置有吸引保持工件W的多個吸引孔3h。As shown in FIG. 17, in the lower mold 3, a plurality of support pins 3i protruding in the workpiece placement recess 3g are provided, but in order to simplify the mold structure, the plurality of support pins 3i may be omitted. The structure in which a suction hole 3h for sucking the workpiece W is provided in the workpiece placement recess 3g is the same. As shown in FIG. 17, in the upper surface of the lower mold insert 3b, the workpiece|work mounting recessed part 3g (workpiece mounting part) in which the workpiece|work W is mounted is dug. The depth of the workpiece placement recess 3g corresponds to the approximate degree of the thickness of the workpiece W. FIG. 24 is a plan view of the lower mold 3. On the contour line L3 of the workpiece placement recess 3g, at a position that does not interfere with the bridge portion 3d provided in the glue sleeve block 3a, a pair of left and right opening and closing claws 4g are provided with escape recesses 3k at four places. The avoiding recessed portion 3k is a method that does not interfere with the opening and closing claws 4g of the loader 4 and the opening and closing claws 5g of the unloader 5 when the workpiece W is transferred between the lower mold 3 and the lower mold 3. The configuration corresponding to the left and right pairs. Along the imaginary line L4 which is inside the outer line L3 of the workpiece placement recess 3g, a plurality of suction holes 3h for sucking and holding the workpiece W are arranged in a circumferential manner at equal intervals.

以下,關於利用裝載器4進行的工件搬入動作、利用塑封模具1進行的樹脂塑封動作、利用卸載器5進行的工件搬出動作,以不同點為中心進行說明。而且,以利用裝載器4向下模3搬入工件的工件搬入動作為中心進行說明,關於利用卸載器5進行的工件搬出動作,援用裝載器4的說明。Hereinafter, the workpiece carrying-in operation by the loader 4, the resin molding operation by the molding die 1 and the workpiece carrying-out operation by the unloader 5 will be described centering on the differences. Furthermore, the description will be centered on the workpiece carrying-in operation of carrying the workpiece into the lower mold 3 by the loader 4, and the description of the loader 4 will be cited for the workpiece carrying-out operation by the unloader 5.

(裝載器動作) 如圖17所示,首先裝載器4在樹脂投入部4b內保持塑封樹脂R1,在一對工件保持部4d通過滑動機構4e而自樹脂投入部4b相互遠離的位置(左右拉開的位置)保持裝載手4f,且在開合爪4g握持工件W(矩形基板)的短邊方向兩側,在此狀態下進入塑封模具1。下模3中,進膠套筒塊3a及進膠套筒3e受到線圈彈簧3c施力,較下模夾持面(下模嵌件3b上表面)而處於上升位置。(Loader action) As shown in Fig. 17, the loader 4 first holds the molded resin R1 in the resin input portion 4b, and holds the pair of workpiece holding portions 4d at a position separated from each other from the resin input portion 4b by a sliding mechanism 4e (left and right opened position). The hand 4f is loaded, and both sides of the short side direction of the workpiece W (rectangular substrate) are held by the opening and closing claws 4g, and the plastic mold 1 is entered in this state. In the lower mold 3, the rubber inlet sleeve block 3a and the rubber inlet sleeve 3e are urged by the coil spring 3c, and are in a raised position relative to the lower mold clamping surface (the upper surface of the lower mold insert 3b).

圖18中,裝載器本體4a下降,以裝載手4f的開合爪4g保持工件W的狀態,開合爪4g下降至工件W的上表面較進膠套筒塊3a的橋接部3d更靠下方的位置。接下來,使滑動機構4e運轉,使一對裝載手4f向靠近樹脂投入部4b的方向滑動。此時,開合爪4g在平面視時位於橋接部3d之間,因而不會與進膠套筒塊3a干擾。而且,樹脂投入部4b位於進膠套筒塊3a的正上方,因而開放閘板4c而將塑封樹脂R1(樹脂錠片)投入至進膠套筒3e。In FIG. 18, the loader body 4a is lowered to hold the workpiece W with the opening and closing claws 4g of the loading hand 4f. The opening and closing claws 4g are lowered to the upper surface of the workpiece W below the bridge portion 3d of the glue sleeve block 3a. s position. Next, the sliding mechanism 4e is operated, and the pair of loading hands 4f is slid in a direction approaching the resin input portion 4b. At this time, the opening and closing pawls 4g are located between the bridging portions 3d in a plan view, so they will not interfere with the rubber feeding sleeve block 3a. Furthermore, since the resin input part 4b is located right above the filling sleeve block 3a, the shutter 4c is opened, and the molding resin R1 (resin pellet) is injected into the filling sleeve 3e.

圖19中,使裝載手4f進一步下降,使開合爪4g下降至進入避讓凹部3k,開放開合爪4g而將工件W交付給工件安置凹部3g。此時,使工件W的定位孔Wh與下模3的定位銷3j對位並嵌入。而且,預先自設於工件安置凹部3g的吸引孔3h開始抽吸空氣,因而工件W定位固定於工件安置凹部3g。作為整體的工件W的移動,描繪L字狀、左右相反的倒L字狀的軌跡而移動。In FIG. 19, the loading handle 4f is further lowered, the opening and closing pawl 4g is lowered to enter the avoiding recess 3k, the opening and closing pawl 4g is opened, and the workpiece W is delivered to the workpiece placement recess 3g. At this time, the positioning hole Wh of the workpiece W and the positioning pin 3j of the lower mold 3 are aligned and fitted. Furthermore, since the suction hole 3h provided in the workpiece placement recess 3g in advance starts to suck air, the workpiece W is positioned and fixed to the workpiece placement recess 3g. The movement of the work W as a whole draws an L-shaped trajectory with an inverted L-shaped trajectory in the left and right directions.

圖20中,裝載器4將工件W交付給下模3後,裝載器本體4a上升,從塑封模具1在X-Y方向移動退避。而且,工件W及塑封樹脂R1的搬入完成,因而進行塑封模具1的合模動作。In FIG. 20, after the loader 4 delivers the workpiece W to the lower mold 3, the loader body 4a rises and moves and retracts from the plastic mold 1 in the X-Y direction. Furthermore, since the loading of the workpiece W and the molding resin R1 is completed, the clamping operation of the molding mold 1 is performed.

(塑封模具動作) 接下來,參照圖21至圖23對利用塑封模具1進行的樹脂塑封動作加以說明。圖21表示工件W安置於下模3的工件安置凹部3g,在進膠套筒3e裝填了樹脂錠片R1的狀態。進膠套筒塊3a及進膠套筒3e受到線圈彈簧3c施力而處於上升位置。而且,上模2的夾持面吸附保持離型膜F,輔助銷2d以將離型膜F下壓的方式從上模夾持面突出。(Plastic mold action) Next, the resin molding operation performed by the molding die 1 will be described with reference to FIGS. 21 to 23. FIG. 21 shows a state in which the workpiece W is set in the workpiece placement recess 3g of the lower mold 3, and the resin pellet R1 is loaded in the glue sleeve 3e. The rubber inlet sleeve block 3a and the rubber inlet sleeve 3e are urged by the coil spring 3c to be in a raised position. Furthermore, the clamping surface of the upper mold 2 sucks and holds the release film F, and the auxiliary pin 2d protrudes from the upper mold clamping surface so as to press the release film F downward.

進行合模動作,如圖22所示,成為進膠套筒塊3a及進膠套筒3e由上模2與下模3夾住的狀態。此時,設於進膠套筒塊3a的橋接部3d跨越經定位於工件安置凹部3g的工件W的外周緣部,按壓工件上表面(基板面)。藉此,在上模餘料部2b、上模流道澆口2c與進膠套筒塊3a的上端面(橋接部3d上表面)之間,在多處(圖24中為五處)形成與上模模腔凹部2a連通的樹脂路。而且,從上模2突出的輔助銷2d碰觸相向的工件W的基板面而被壓回。When the mold clamping operation is performed, as shown in FIG. 22, the rubber inlet sleeve block 3 a and the rubber inlet sleeve 3 e are clamped by the upper mold 2 and the lower mold 3. At this time, the bridge portion 3d provided in the glue-in sleeve block 3a straddles the outer peripheral edge portion of the workpiece W positioned in the workpiece placement recess 3g, and presses the upper surface (substrate surface) of the workpiece. Thereby, a plurality of places (five places in Fig. 24) are formed between the upper mold remnant part 2b, the upper mold runner gate 2c, and the upper end surface (the upper surface of the bridging part 3d) of the injection sleeve block 3a A resin path communicating with the upper mold cavity recess 2a. Then, the auxiliary pin 2d protruding from the upper mold 2 touches the substrate surface of the opposing workpiece W and is pressed back.

圖22中,在模架和/或塑封模具1內置著加熱器(未圖示),在進膠套筒3e內熔融的塑封樹脂R1通過擠膠頭3f的上升,而經過上模餘料部2b、上模流道澆口2c與進膠套筒塊3a的上端面之間的樹脂路,填充至上模模腔凹部2a內。填充至上模模腔凹部2a內的塑封樹脂R1加熱硬化(固化)。In Fig. 22, a heater (not shown) is built in the mold base and/or the plastic molding mold 1, and the plastic resin R1 melted in the feeding sleeve 3e passes through the upper mold remnant part through the ascending of the extrusion head 3f 2b. The resin path between the upper mold runner gate 2c and the upper end surface of the injection sleeve block 3a is filled into the upper mold cavity recess 2a. The molding resin R1 filled in the cavity 2a of the upper mold is heated and hardened (cured).

圖23中,將塑封模具1開模。此時,下模3以在工件安置凹部3g吸附保持工件W的狀態下降,藉此,受到線圈彈簧3c施力的進膠套筒塊3a及進膠套筒3e相對地上升。藉此,成形後的工件W(成形品)與形成於進膠套筒塊3a上的多餘樹脂(成形品餘料流道)進行澆口切斷。而且,輔助銷2d從上模2突出而按壓工件W的基板面,藉此封裝部P與上模模腔凹部2a容易脫模。In Figure 23, the plastic packaging mold 1 is opened. At this time, the lower mold 3 is lowered while sucking and holding the workpiece W in the workpiece placement recess 3g, whereby the rubber feeding sleeve block 3a and the rubber feeding sleeve 3e that are urged by the coil spring 3c rise relatively. Thereby, the molded workpiece W (molded product) and the excess resin (molded product residual material flow path) formed on the injection sleeve block 3a are gated off. Moreover, the auxiliary pin 2d protrudes from the upper mold 2 and presses the substrate surface of the workpiece W, whereby the package portion P and the upper mold cavity concave portion 2a are easily demolded.

(卸載器動作) 卸載器5在一對工件回收部5d通過滑動機構5e而向餘料保持塊5b相互接近的位置(靠近中央的位置)保持卸載手5f,且開合爪5g張開,在此狀態下進入塑封模具1。(Uninstaller action) The unloader 5 holds the unloader hand 5f at a position (near the center) where the pair of workpiece recovery parts 5d approach the remaining material holding block 5b through the sliding mechanism 5e, and the opening and closing claws 5g are opened, and in this state, it enters the plastic package Mold 1.

與圖19所示的裝載器4同樣地,卸載器5下降,卸載手5f的開合爪5g在載置於工件安置凹部3g的工件W的兩側進入避讓凹部3k。此時,開合爪5g在平面視時位於橋接部3d之間,因而不會與進膠套筒塊3a干擾。而且,一對開合爪5g進入避讓凹部3k,因而也不會與工件安置凹部3g干擾。接下來,通過閉合開合爪5g從而握持工件W。而且,餘料保持塊5b將吸附墊5b1按壓於多餘樹脂R2(成形品餘料流道),因而吸附保持多餘樹脂R2。As with the loader 4 shown in FIG. 19, the unloader 5 descends, and the opening and closing claws 5g of the unloader hand 5f enter the avoidance recess 3k on both sides of the workpiece W placed in the workpiece placement recess 3g. At this time, the opening and closing pawls 5g are located between the bridging portions 3d in a plan view, so they will not interfere with the glue sleeve block 3a. In addition, the pair of opening and closing claws 5g enter the avoiding recess 3k, so that they do not interfere with the workpiece placement recess 3g. Next, the workpiece W is held by closing the opening and closing claws 5g. In addition, the remaining material holding block 5b presses the adsorption pad 5b1 against the excess resin R2 (molded product remaining material flow path), thereby adsorbing and holding the excess resin R2.

圖16中,使滑動機構5e運轉,使一對卸載手5f分別向遠離餘料保持塊5b的方向(左右兩側)滑動。 圖16中,卸載器5的卸載器本體5a以保持成形後的工件W(成形品)及多餘樹脂R2(成形品餘料流道)的狀態上升,從塑封模具1退避。In FIG. 16, the sliding mechanism 5e is operated, and the pair of unloading hands 5f are respectively slid in the direction away from the remaining material holding block 5b (left and right sides). In FIG. 16, the unloader body 5a of the unloader 5 rises while holding the molded workpiece W (molded product) and excess resin R2 (molded product residual material flow path), and is retracted from the plastic molding die 1.

此時,可省略在塑封模具1的下模3的工件安置凹部3g設有多個的支撐銷3i,因而可進一步簡化塑封模具1的結構,抑制裝置成本,實現成形品質高的樹脂塑封。所述實施例的情況下,在支撐銷3i上使工件W橫向滑動,但其他實施例1中,在工件安置凹部3g上或正上方的空間上橫向滑動的方面不同。At this time, it is possible to omit the multiple support pins 3i provided in the workpiece placement recess 3g of the lower mold 3 of the plastic packaging mold 1, so that the structure of the plastic packaging mold 1 can be further simplified, the device cost can be suppressed, and a high-quality resin plastic packaging can be realized. In the case of the above-mentioned embodiment, the workpiece W is slid laterally on the support pin 3i. However, in the other embodiment 1, the aspect of lateral sliding on the workpiece placement recess 3g or in the space directly above is different.

(其他實施例2) 所述實施例及其他實施例1以配置有多個進膠套筒3e的進膠套筒塊3a為中心,以一對工件W在兩側而長邊彼此相向的方式配置,但工件W未必須要為兩片,即便在配置於進膠套筒塊3a的側方的工件載置部配置了一片工件W的情況下,也可同樣地實施。(Other embodiment 2) The described embodiment and other embodiment 1 are centered on the glue sleeve block 3a provided with a plurality of glue sleeves 3e, and are arranged such that a pair of workpieces W are on both sides and the long sides face each other. However, the workpiece W is not Two pieces are necessary, and even when one piece of work W is placed on the work placement part arranged on the side of the glue-in sleeve block 3a, the same can be implemented.

如以上所說明,這樣使裝載器本體4a進入開模的塑封模具1,利用樹脂投入部4b向進膠套筒塊3a的進膠套筒3e投入塑封樹脂R1,並且使保持成形前的工件W的一對工件保持部4d,相互接近至處於上升位置的進膠套筒塊3a與工件安置凹部3g之間在平面視時重合的位置,將工件W交付給模具夾持面,因而工件保持部3d能以不干擾進膠套筒塊3d的方式,以保持工件W的狀態將工件W定位並搬入至工件安置凹部3g。而且,可使卸載器本體5a進入開模的塑封模具3,餘料保持塊5b(多餘樹脂回收部)吸附保持由進膠套筒塊3a所支撐的多餘樹脂R1,一對工件回收部5d保持成形後的工件W,並且相互遠離至不與進膠套筒塊3a干擾的位置,將成形後工件搬出。通過以上內容,可簡化塑封模具1的結構。As described above, in this way, the loader body 4a is inserted into the opened plastic molding mold 1, and the resin injection portion 4b is used to inject the molding resin R1 into the injection sleeve 3e of the injection sleeve block 3a, and the workpiece W before molding is held The pair of workpiece holding portions 4d close to each other to a position where the glue sleeve block 3a in the raised position and the workpiece placement recess 3g overlap in a plan view, and the workpiece W is delivered to the mold clamping surface, thus the workpiece holding portion In 3d, the workpiece W can be positioned and carried into the workpiece placement recess 3g while maintaining the state of the workpiece W without interfering with the glue-in sleeve block 3d. Moreover, the unloader body 5a can enter the opened plastic mold 3, and the remaining material holding block 5b (excess resin recovery part) adsorbs and holds the excess resin R1 supported by the rubber feeding sleeve block 3a, and a pair of workpiece recovery parts 5d hold The formed workpieces W are kept away from each other to a position where they do not interfere with the rubber feeding sleeve block 3a, and the formed workpieces are carried out. Through the above content, the structure of the plastic packaging mold 1 can be simplified.

這樣,針對開模的塑封模具1,利用裝載器4將工件W搬入至工件安置凹部3g,且不與進膠套筒塊3a干擾地進行定位,並且利用卸載器5將成形後的工件W及多餘樹脂R2不與進膠套筒塊3a干擾地從工件安置凹部3g取出,因而模具側的結構變得簡單,模具成本變得低廉,可避免塑封樹脂R1繞向工件端面,不易引起模具內的動作不良,而且維護也可簡易地進行。In this way, for the opened plastic molding mold 1, the workpiece W is carried into the workpiece placement recess 3g by the loader 4, and positioned without interfering with the glue sleeve block 3a, and the unloader 5 is used to transfer the formed workpiece W and The excess resin R2 is taken out from the workpiece placement recess 3g without interfering with the rubber inlet sleeve block 3a, so the structure of the mold side becomes simple, the mold cost becomes low, and the plastic sealing resin R1 can be prevented from winding to the end surface of the workpiece, and it is not easy to cause the mold in the mold. The operation is not good, and maintenance can be performed easily.

對於包括所述塑封模具1的樹脂塑封裝置而言,可抑制裝置成本,實現成形品質高的樹脂塑封。For the resin molding device including the molding die 1, the cost of the device can be suppressed, and resin molding with high molding quality can be realized.

而且,塑封樹脂R1不限於樹脂錠片,例如也可供給顆粒狀樹脂、粉體狀樹脂、液狀樹脂等。 塑封模具1在上模2形成有模腔凹部,但也可在下模3設有模腔凹部。In addition, the molding resin R1 is not limited to resin pellets, and for example, pelletized resin, powdered resin, liquid resin, etc. may be supplied. In the plastic packaging mold 1, the upper mold 2 is formed with a cavity recess, but the lower mold 3 may be provided with a cavity recess.

1:塑封模具 2:上模 2a:上模模腔凹部 2b:上模餘料部 2c:上模流道澆口 2d:輔助銷 3:下模 3a:進膠套筒塊 3b:下模嵌件 3c:線圈彈簧 3d:橋接部 3e:進膠套筒 3e1:筒孔 3f:擠膠頭 3g:工件安置凹部 3h:吸引孔 3i:支撐銷 3j:定位銷 3k:避讓凹部 4:裝載器 4a:裝載器本體 4b:樹脂投入部 4c:閘板 4d:工件保持部 4e:滑動機構 4f:裝載手 4g:開合爪 5:卸載器 5a:卸載器本體 5b:餘料保持塊 5b1:吸附墊 5c:線圈彈簧 5d:工件回收部 5e:滑動機構 5f:卸載手 5g:開合爪 6:樹脂塑封裝置 6a:工件及樹脂的供給部 6b:成形品及多餘樹脂的收納部 6c:加壓部 F:離型膜 L1:工件外形線 L2:封裝部(樹脂密封部)外形線 L3:外形線 L4:假想線 PK:封裝部(樹脂密封部) R1:塑封樹脂 R2:多餘樹脂 S:避讓空間 W:工件 Wh:定位孔1: Plastic mold 2: upper die 2a: The concave part of the upper mold cavity 2b: Leftover part of upper die 2c: Upper mold runner gate 2d: auxiliary pin 3: Lower die 3a: Inlet sleeve block 3b: Lower mold insert 3c: coil spring 3d: bridging part 3e: Inlet sleeve 3e1: barrel hole 3f: Extrusion head 3g: Workpiece placement recess 3h: suction hole 3i: Support pin 3j: positioning pin 3k: Avoid recess 4: Loader 4a: Loader body 4b: Resin input department 4c: Ram 4d: Workpiece holding part 4e: sliding mechanism 4f: Loader 4g: opening and closing claw 5: Uninstaller 5a: Unloader body 5b: Remaining material holding block 5b1: Adsorption pad 5c: coil spring 5d: Workpiece Recycling Department 5e: sliding mechanism 5f: Uninstaller 5g: opening and closing claw 6: Resin molding device 6a: Workpiece and resin supply unit 6b: Storage area for molded products and excess resin 6c: Pressure section F: Release film L1: Workpiece outline line L2: Outline line of encapsulation part (resin sealing part) L3: Outline line L4: imaginary line PK: Encapsulation part (resin sealing part) R1: Plastic resin R2: Excess resin S: Avoid space W: Workpiece Wh: positioning hole

圖1為表示利用工件搬入裝置進行的工件及塑封樹脂的模具搬入動作的步驟說明圖。 圖2為表示繼圖1之後的工件及塑封樹脂的模具搬入動作的步驟說明圖。 圖3為表示繼圖2之後的工件及塑封樹脂的模具搬入動作的步驟說明圖。 圖4為表示繼圖3之後的工件及塑封樹脂的模具搬入動作的步驟說明圖。 圖5為表示繼圖4之後的工件及塑封樹脂的模具搬入動作的步驟說明圖。 圖6為工件搬入裝置的下表面圖。 圖7為利用塑封模具進行的樹脂塑封步驟的說明圖。 圖8為繼圖7之後的樹脂塑封步驟的說明圖。 圖9為繼圖8之後的樹脂塑封步驟的說明圖。 圖10為繼圖9之後的樹脂塑封步驟的說明圖。 圖11為繼圖10之後的樹脂塑封步驟的說明圖。 圖12的A為上模的平面佈局圖,圖12的B為下模的平面佈局圖。 圖13為表示利用工件搬出裝置進行的成形品及多餘樹脂的模具搬出動作的步驟說明圖。 圖14為表示繼圖13之後的成形品及多餘樹脂的模具搬出動作的步驟說明圖。 圖15為表示繼圖14之後的成形品及多餘樹脂的模具搬出動作的步驟說明圖。 圖16為表示繼圖15之後的成形品及多餘樹脂的模具搬出動作的步驟說明圖。 圖17為表示向其他例的塑封模具利用工件搬入裝置進行的工件及塑封樹脂的搬入動作的步驟說明圖。 圖18為表示繼圖17之後的工件及塑封樹脂的搬入動作的步驟說明圖。 圖19為表示繼圖18之後的工件及塑封樹脂的搬入動作的步驟說明圖。 圖20為表示繼圖19之後的工件及塑封樹脂的搬入動作的步驟說明圖。 圖21為利用其他例的塑封模具進行的樹脂塑封步驟的說明圖。 圖22為繼圖21之後的樹脂塑封步驟的說明圖。 圖23為繼圖21之後的樹脂塑封步驟的說明圖。 圖24為下模的平面佈局圖。 圖25為樹脂塑封裝置的平面佈局圖。Fig. 1 is an explanatory diagram showing the steps of loading a workpiece and a mold of plastic molding resin by a workpiece loading device. Fig. 2 is an explanatory diagram showing a step of carrying in a mold of a workpiece and a molding resin following Fig. 1. Fig. 3 is an explanatory diagram showing the steps of carrying in the mold of the workpiece and the molding resin following Fig. 2. Fig. 4 is an explanatory diagram showing a procedure for carrying in a mold of a workpiece and a plastic molding resin following Fig. 3. Fig. 5 is an explanatory diagram showing the steps of carrying in the mold of the workpiece and the molding resin following Fig. 4; Fig. 6 is a bottom view of the workpiece loading device. Fig. 7 is an explanatory diagram of a resin molding step performed by using a molding die. Fig. 8 is an explanatory diagram of a resin molding step following Fig. 7. Fig. 9 is an explanatory diagram of a resin molding step following Fig. 8. Fig. 10 is an explanatory diagram of a resin molding step subsequent to Fig. 9. Fig. 11 is an explanatory diagram of the resin molding step following Fig. 10. Fig. 12A is a plan layout view of the upper mold, and Fig. 12B is a plan layout view of the lower mold. 13 is an explanatory diagram showing the steps of the mold unloading operation of the molded product and excess resin by the work unloading device. Fig. 14 is an explanatory diagram showing the steps of the mold unloading operation of the molded product and excess resin following Fig. 13. Fig. 15 is an explanatory diagram showing a procedure for unloading a molded product and excess resin following Fig. 14. Fig. 16 is an explanatory diagram showing the steps of the mold unloading operation of the molded product and excess resin following Fig. 15. Fig. 17 is an explanatory diagram showing steps of loading the workpiece and the molding resin into the plastic molding mold of another example by the workpiece loading device. Fig. 18 is a step explanatory diagram showing the loading operation of the workpiece and the molding resin following Fig. 17. Fig. 19 is a step explanatory diagram showing the loading operation of the workpiece and the molding resin following Fig. 18. Fig. 20 is an explanatory diagram showing the steps of the loading operation of the workpiece and the molding resin following Fig. 19. Fig. 21 is an explanatory diagram of a resin molding step by using a molding die of another example. Fig. 22 is an explanatory diagram of the resin molding step following Fig. 21. Fig. 23 is an explanatory diagram of the resin molding step following Fig. 21. Figure 24 is a plan view of the lower die. Figure 25 is a plan layout diagram of a resin molding device.

3:下模 3: Lower die

3a:進膠套筒塊 3a: Inlet sleeve block

3b:下模嵌件 3b: Lower mold insert

3c:線圈彈簧 3c: coil spring

3d:橋接部 3d: bridging part

3e:進膠套筒 3e: Inlet sleeve

3f:擠膠頭 3f: Extrusion head

3g:工件安置凹部 3g: Workpiece placement recess

3h:吸引孔 3h: suction hole

3i:支撐銷 3i: Support pin

3j:定位銷 3j: positioning pin

4:裝載器 4: Loader

4b:樹脂投入部 4b: Resin input department

4c:閘板 4c: Ram

4d:工件保持部 4d: Workpiece holding part

4e:滑動機構 4e: sliding mechanism

4f:裝載手 4f: Loader

4g:開合爪 4g: opening and closing claw

R1:塑封樹脂 R1: Plastic resin

W:工件 W: Workpiece

Claims (15)

一種工件搬入裝置,其特徵在於,向開模的塑封模具搬入工件及塑封樹脂,所述工件搬入裝置包括: 搬入裝置本體,對設於進膠套筒塊的側方的工件載置部搬入所述工件,所述進膠套筒塊以能夠升降的方式設於所述塑封模具的模具夾持面; 樹脂投入部,設於所述搬入裝置本體,以保持所述塑封樹脂的狀態投入至所述進膠套筒塊的進膠套筒;以及 工件保持部,設於所述搬入裝置本體,以保持所述工件的狀態,以能夠接近或遠離所述樹脂投入部的方式移動, 所述工件保持部以保持所述工件的狀態,相互接近至處於上升位置的所述進膠套筒塊與所述工件載置部之間在平面視時重合的位置,將所述工件交付給所述工件載置部。A workpiece carrying device, which is characterized in that the workpiece and the plastic sealing resin are carried into the opened plastic sealing mold, and the workpiece carrying device includes: Carrying in the device body, loading the workpiece into the workpiece mounting part provided on the side of the glue feeding sleeve block, and the glue feeding sleeve block is arranged on the mold clamping surface of the plastic packaging mold in a manner capable of being lifted and lowered; The resin input part is provided in the main body of the carrying-in device, and puts the resin in the injection sleeve of the injection sleeve block while maintaining the state of the plastic-encapsulated resin; and The workpiece holding part is provided in the carrying-in device body to hold the workpiece in a state and move so as to be close to or away from the resin input part, The workpiece holding portion is to hold the workpiece, and approach each other to a position where the glue-inlet sleeve block and the workpiece mounting portion in a raised position overlap in a plan view, and deliver the workpiece to The workpiece placement part. 如請求項1所述的工件搬入裝置,其中, 所述工件保持部相對於所述搬入裝置本體經由滑動機構以能夠滑動的方式組裝有裝載手,在裝載手包括開合爪,所述開合爪保持矩形基板的寬度方向兩側並且能夠開合。The workpiece carrying-in device according to claim 1, wherein: The workpiece holding portion is slidably assembled with a loading hand with respect to the carrying-in device body via a sliding mechanism. The loading hand includes opening and closing claws that hold both sides of the rectangular substrate in the width direction and can be opened and closed . 如請求項1或請求項2所述的工件搬入裝置,其中, 所述工件保持部保持一對工件,對設於所述進膠套筒塊的兩側的工件載置部搬入所述一對工件。The workpiece carrying-in device described in claim 1 or claim 2, wherein: The workpiece holding portion holds a pair of workpieces, and carries the pair of workpieces into the workpiece mounting portions provided on both sides of the glue sleeve block. 如請求項1或請求項2所述的工件搬入裝置,其中, 所述樹脂投入部在將由所述一對工件保持部所保持的工件交付給所述模具夾持面時,將所述塑封樹脂投入至所述進膠套筒。The workpiece carrying-in device described in claim 1 or claim 2, wherein: The resin injection part, when delivering the work held by the pair of work holding parts to the mold clamping surface, injects the molding resin into the injection sleeve. 一種樹脂塑封裝置,包括如請求項1至請求項4中任一項所述的工件搬入裝置。A resin molding device includes the workpiece carrying device according to any one of claim 1 to claim 4. 一種工件搬出裝置,其特徵在於,將成形後的工件及多餘樹脂從開模的塑封模具中搬出,所述工件搬出裝置包括: 搬出裝置本體,以由所述塑封模具的工件載置部所支撐的成形後的工件與由進膠套筒塊所支撐的多餘樹脂經分離的狀態,將所述成形後的工件及所述多餘樹脂搬出; 多餘樹脂回收部,設於所述搬出裝置本體,保持所述進膠套筒塊上殘留的所述多餘樹脂;以及 工件回收部,設於所述搬出裝置本體,以保持所述成形後的工件的狀態,在所述多餘樹脂回收部的側方以能夠接近或遠離的方式移動, 所述工件回收部自所述工件載置部保持所述成形後的工件並且所述多餘樹脂回收部保持所述多餘樹脂後,所述工件回收部相互遠離至不與所述進膠套筒塊干擾的位置,將所述成形後的工件搬出。A workpiece removal device, characterized in that, the formed workpiece and excess resin are removed from the opened plastic mold, and the workpiece removal device includes: The main body of the device is moved out, and the formed workpiece supported by the workpiece placement portion of the plastic packaging mold and the excess resin supported by the glue sleeve block are separated, and the molded workpiece and the excess resin are separated. Resin move out; The surplus resin recovery part is provided in the body of the carry-out device, and keeps the surplus resin remaining on the rubber inlet sleeve block; and The workpiece recovery part is provided in the carrying-out device body to maintain the state of the formed workpiece, and moves on the side of the excess resin recovery part so as to be able to approach or move away, After the workpiece recovery part holds the formed workpiece from the workpiece placement part and the excess resin recovery part retains the excess resin, the workpiece recovery part is far away from each other so as not to be in contact with the rubber feeding sleeve block At the disturbed position, move the shaped workpiece out. 如請求項6所述的工件搬出裝置,其中, 所述工件回收部從設於所述進膠套筒塊的兩側的工件載置部保持並搬出一對工件。The workpiece unloading device according to claim 6, wherein: The workpiece recovery part holds and carries out a pair of workpieces from the workpiece mounting parts provided on both sides of the glue-in sleeve block. 一種樹脂塑封裝置,包括如請求項6或請求項7所述的工件搬出裝置。A resin molding device includes the workpiece carrying out device according to Claim 6 or Claim 7. 一種塑封模具,其特徵在於,通過工件搬入裝置在開模的模具間供給工件及塑封樹脂,所述塑封模具包括: 第一模具,模腔凹部及連接於所述模腔凹部的樹脂路由離型膜覆蓋;以及 第二模具,具有進膠套筒塊及嵌件,所述進膠套筒塊包括供投入所述塑封樹脂的進膠套筒,所述嵌件在所述進膠套筒塊的兩側具有工件載置部,所述工件載置部將由所述工件搬入裝置搬入的工件定位並進行載置, 所述進膠套筒塊一直向遠離所述第二模具的夾持面的方向受到施力,對於由所述工件搬入裝置定位並載置於所述工件載置部的工件而言,通過合模,所述進膠套筒塊被所述第一模具下壓而跨越所述工件端部,所述工件在所述進膠套筒塊與所述嵌件之間被夾住。A plastic sealing mold is characterized in that a workpiece and plastic sealing resin are supplied between the opened molds through a workpiece carrying device, and the plastic sealing mold includes: The first mold, the cavity concave portion and the resin connected to the cavity concave portion are covered with a release film; and The second mold has a rubber inlet sleeve block and an insert, the rubber inlet sleeve block includes a rubber inlet sleeve for putting the plastic encapsulation resin, and the insert is provided on both sides of the rubber inlet sleeve block A workpiece placement part that positions and places the workpiece carried in by the workpiece carry-in device, The glue-in sleeve block is always energized in a direction away from the clamping surface of the second mold, and for the workpiece positioned by the workpiece carrying device and placed on the workpiece mounting portion, the A mold, the glue feeding sleeve block is pressed down by the first mold to straddle the end of the workpiece, and the workpiece is clamped between the glue feeding sleeve block and the insert. 如請求項9所述的塑封模具,其中, 在所述其中一個模具,以通過開模而能夠經由所述離型膜碰觸所述工件的樹脂密封區域以外的基板面的方式,設有朝向所述工件受到施力的輔助銷。The plastic packaging mold according to claim 9, wherein: In one of the molds, auxiliary pins that are urged toward the workpiece are provided so as to be able to touch the substrate surface other than the resin sealing area of the workpiece via the release film by opening the mold. 如請求項9或請求項10所述的塑封模具,其中, 在所述工件載置部,在多處設有定位銷,所述定位銷通過與設於所述工件的多個定位孔嵌合從而進行定位。The plastic packaging mold according to claim 9 or claim 10, wherein: The workpiece mounting portion is provided with positioning pins at a plurality of locations, and the positioning pins are fitted with a plurality of positioning holes provided in the workpiece to perform positioning. 如請求項9或請求項10所述的塑封模具,其中, 在所述工件載置部設有:多個支撐銷,在開模時從第二模具面突出而支撐工件,隨著合模而從所述工件載置部退避至所述第二模具內,將所述工件載置於所述工件載置部。The plastic packaging mold according to claim 9 or claim 10, wherein: The workpiece placement portion is provided with a plurality of support pins that protrude from the second mold surface to support the workpiece when the mold is opened, and are retracted from the workpiece placement portion into the second mold as the mold is closed, The workpiece is placed on the workpiece placing portion. 如請求項9或請求項10所述的塑封模具,其中, 在所述工件載置部設有:避讓槽,在搬入成形前工件或搬出成形後工件時,避免與握持工件的開合爪發生干擾。The plastic packaging mold according to claim 9 or claim 10, wherein: The workpiece placement part is provided with an avoidance groove to avoid interference with the opening and closing claws holding the workpiece when the workpiece before the forming is carried in or the workpiece after the forming is carried out. 如請求項9或請求項10所述的塑封模具,其中, 所述第一模具包括經樹脂路連結的一對模腔凹部,所述第二模具在進膠套筒塊的兩側包括一對嵌件,所述一對嵌件具有將工件定位並載置的工件載置部。The plastic packaging mold according to claim 9 or claim 10, wherein: The first mold includes a pair of cavity recesses connected by a resin path, and the second mold includes a pair of inserts on both sides of the glue sleeve block, and the pair of inserts has a function for positioning and placing a workpiece The workpiece placement department. 一種樹脂塑封裝置,包括如請求項9至請求項14中任一項所述的塑封模具。A resin molding device, comprising the plastic molding mold according to any one of Claim 9 to 14.
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