TWI609439B - Substrate inspection transport method and device - Google Patents

Description

Substrate inspection transfer method and device

The present invention relates to a transport method and apparatus, and more particularly to a transport method and apparatus for inspecting a substrate for transporting a substrate between a supply and a collection when performing inspection on a substrate.

According to the general substrate processing process, quality inspection is usually required. These inspections have different requirements depending on the process. However, it is usually necessary to use a conveying device to assist the inspection in an automated manner. However, some substrates are quite fine during the transportation process. It is easy to be damaged by scratches, resulting in the formation of defective products. Therefore, in order to avoid scratches, the substrate must be protected outside the substrate, for example, coated with a coating on the outside as a whole, or a film or a sheet of paper is placed between the substrate and the substrate. Equal spacers; In addition, some inspections must check the front and back of the substrate (SubStrate), some are only for the front inspection of the substrate; some substrates are directly transported while the substrate is being inspected, and some substrates are being inspected. When the substrate must be placed in a carrier tray; some substrates have the need to avoid scratches, and some substrates are not afraid of scratches, such as substrate inspection, in the prior art, usually only one machine is suitable. A substrate inspection requirement or a transportation method. For example, the machine only performs an inspection that must check the front and back sides of the substrate. The process, or the machine is only used as an inspection process in which the substrate must be placed in a carrier for inspection, or the machine is only used as a substrate inspection process that does not require scratch avoidance, in other words, the prior art often adopts A substrate process is a machine mode to configure the production line.

In the prior art, taking a substrate inspection which is easily scratched, for example, it is necessary to perform surface inspection. For a large number of inspections, automation is an inevitable trend, but the use of a spacer for protecting the substrate causes troubles and complicated handling of substrate formation. How to prevent the substrate from being scratched during the surface inspection, it is necessary to effectively and properly plan the substrate transfer method and provide a suitable device. In addition, a substrate process is used to configure the machine. Although the production line can achieve stable control of the productivity of a single substrate, the inspection process for each substrate usually has some necessary inspection equipment common, such as CCD image inspection device or machine frame for inspection, electronic control System, computer----If the inspection process of each different substrate is implemented by an individual machine, only the purchase cost of the equipment and the temporary space of the plant are considerable; therefore, provide a consideration for surface inspection. The substrate prevents the scratched transport device from being transported and inspected, and provides integration of different substrates when necessary Charles needs to seek for effective planning on the integration of the common equipment to increase productivity and efficiency to reduce costs and save floor space, it is worthy of study as an important issue.

In view of the above, an object of the present invention is to provide a method of transporting a substrate which can prevent scratches when the substrate is inspected during the surface inspection.

Another object of the present invention is to provide a method of transporting substrates which can be separately inspected by a different substrate on a single stage.

Another object of the present invention is to provide a conveying apparatus which can ensure that a substrate is prevented from being scratched when being subjected to a surface inspection, and that the substrate is prevented from being scratched.

It is still another object of the present invention to provide a transfer apparatus which can perform inspection of substrates which are separately performed on a single stage by a different substrate.

Still another object of the present invention is to provide an apparatus using the transport method as described in the above substrate.

A substrate inspection transport method according to the present invention includes: providing a first transport device to form a first transport flow path for transporting a first substrate; providing a feed zone, and providing a first load material in the feed zone The mechanism and the second loading mechanism are arranged such that a first substrate and a spacer are alternately stacked in the first loading mechanism; and a first transfer mechanism is provided via a reciprocating transfer flow path from the feeding region The first loading mechanism extracts the first substrate into the first conveying flow path, and places the spacer in the second loading mechanism; and provides a first inspection mechanism on the path through which the first conveying flow path passes, The first substrate moved through the first transport flow path is inspected by a first image taking lens.

According to another aspect of the present invention, a substrate inspection transport method includes: providing a first transport device to form a first transport flow path for transporting a first substrate; providing a supply region, and providing a first in the supply region a loading mechanism and a second loading mechanism, wherein a first substrate and a spacer are alternately stacked in the first loading mechanism; and a first transfer mechanism is provided via a reciprocating transfer flow path, from the feeding The first loading mechanism of the zone extracts the first substrate into the first conveying flow path and places the spacer in the second loading mechanism; and provides a second conveying device to form a second conveying conveying the second substrate a flow path; the first transfer flow path and the second transfer flow path are co-constructed on the same machine and form a parallel first parallel flow path in the same axial direction, and a path is set on the path through which the first parallel flow path passes The first inspection mechanism inspects the first substrate that has moved through the first transport flow path by a first image taking lens.

According to still another object of the present invention, a substrate inspection conveying device includes: a first conveying device located on a table top; a feeding area located on a side of the first conveying device on the machine table; and a receiving area, The first conveying device on the other side of the table top is on the same side as the feeding area; the first conveying device provides a first conveying flow path for conveying a first substrate from the feeding area to the receiving area; a transfer mechanism, wherein the first substrate is transferred into the first conveying device from the feeding zone, and a second transfer mechanism removes the first substrate from the first conveying device to the receiving area for collecting; The inspection mechanism is disposed on the surface of the machine, and is provided with a first image taking lens for inspecting the first substrate conveyed by the first conveying device; the feeding area is provided with a first loading mechanism and a second loading mechanism. The first loading mechanism is provided with a first substrate and a spacer which are alternately stacked.

A substrate inspection conveying apparatus according to still another object of the present invention comprises: a first conveying device, wherein the first conveying device is composed of a first rail composed of two sliding rails spaced apart from each other, and a second rail composed of two sliding rails spaced apart from each other And a turning mechanism; the feeding area is provided with a first loading mechanism and a second loading mechanism, wherein the first loading mechanism is provided with a first substrate and a spacer which are alternately stacked; a first transfer The mechanism transfers the first substrate from the first transfer device to the first transfer device; the second transfer mechanism removes the first substrate from the first transfer device to the receiving area for collection; and a second transfer device The utility model comprises a fixed first rail frame, a fixed second rail frame and a movable rail frame between the two; the second conveying device provides a second conveying flow path for conveying a second The first conveying device and the second conveying device are disposed in the same axial direction and form a first parallel flow path; and a first inspection mechanism is disposed above the path through which the first parallel flow path passes. The first inspection mechanism is provided with a first The image taking lens checks the first substrate conveyed by the first bus path.

A substrate inspection transfer apparatus according to still another object of the present invention includes: a device using the substrate inspection transfer method.

In the embodiment of the present invention, a substrate inspection and transport method and apparatus are provided with a first loading mechanism and a second loading mechanism in the feeding area, so that the first substrate and a spacer are alternately stacked in the first loading mechanism. And adopting a reciprocating transfer flow path by the first transfer mechanism, extracting the first substrate from the first loading mechanism of the feeding area into the first conveying flow path, and placing the spacer on the second loading material In the mechanism, a third loading mechanism, a fourth loading mechanism and a fifth loading mechanism are further disposed in the receiving area, so that the spacer is placed in the fifth loading mechanism, and the second transfer mechanism is passed through the first loading mechanism. a reciprocating transfer flow path, extracting, from the first transfer flow path, a first substrate that has been inspected as a good product into a third loading mechanism of the receiving area, and extracting a spacer from the fifth loading mechanism The three-loading mechanism is superposed on the first substrate, and the first substrate that has been inspected as a defective product from the first transport flow path is placed in the fourth loading mechanism of the receiving area, so the surface inspection is performed. When the first substrate and the spacer are taken in and out, the first substrate can be transported and inspected. The utility model can effectively prevent the transportation of the first substrate and the spacer of the substrate in the mechanism; and, in the same machine table, the first transfer device and the second transfer device form a two-stage X in a common manner. The parallel first parallel flow path and the second parallel flow path which are axially linearly displaced, and the different first substrate and the second substrate are respectively transmitted by different first transmission paths and second transmission streams, and can be shared The same first inspection mechanism is collected by different receiving areas and cartridges, so that the performance of the machine is greatly improved; and the single first conveying device or the second conveying device is conveyed by the turning mechanism and the movable displacement The movable rail frame can be performed on both the first substrate and the second substrate which are required to be positive, negative or only for front inspection, and can be transported and inspected even if the first transfer device or the second transfer device is used alone. , can achieve the function of the substrate inspection.

Referring to FIG. 1 and FIG. 2, the embodiment of the present invention can be used to selectively perform defect inspection on the front side of the first substrate S1, dirt on the reverse side, scratches, etc. on a machine table, or has been implanted. The front surface of the second substrate S2 of the wafer and the soldered wire is inspected, wherein the second substrate S2 is placed in a carrier O for positioning during inspection; and, in order to protect the surface of the first substrate S1 from damage, Each of the first substrates S1 has a rectangular sheet-like or frame-shaped thin paper-type spacer S11 attached and protected on both the upper and lower sides of the stack.

Referring to FIG. 1 to FIG. 4, the substrate inspection and transport method and apparatus according to the embodiment of the present invention may be described in the embodiment of the substrate inspection apparatus. The apparatus includes: a first transport apparatus A for transporting the first substrate S1 and a second conveying device B for conveying the carrier O carrying the second substrate S2; the first conveying device A and the second conveying device B are co-constructed on a table top T, but can be used separately Carrying the first substrate S1 or the carrier O carrying the second substrate S2, respectively; the first conveying device A provides a first conveying flow route to a feeding on the side of the first conveying device A on the table top T The area C is provided with the first substrate S1, and is transported by the first transfer device A in the X-axis direction to the first transfer device A on the other side of the machine table T and to a receiving area D on the same side of the supply area, wherein The first substrate S1 in the supply area C is transferred into the first conveying device A by the reciprocating transfer flow path provided by the first transfer mechanism, and is reciprocated by the second transfer mechanism F. The current-carrying path is removed from the first conveying device A to the receiving area D for collection; the feeding zone C is provided in the Y-axis a first loading mechanism G1 and a second loading mechanism G2 disposed adjacent to each other, wherein the first loading mechanism G1 is adjacent to the first rail A1 side of the first conveying device A, and the first to be inspected is not overlapped. a substrate S1, the second loading mechanism G2 is away from the first conveying device A for placing the spacer S11 separated from the first substrate S1; the receiving region D is disposed adjacent to the Y axis and adjacent to the first The third side, four, and five loading mechanisms G3, G4, and G5 are arranged in the vicinity of the transporting device A side, wherein the third loading mechanism G3 is for placing the first substrate S1 that passes the inspection, and the fourth load The material mechanism G4 is for placing the defective product of the first substrate S1 that has not passed the inspection, and the fifth loading mechanism G5 is provided with the preset spacer S11; the second conveying device B provides a second transport flow route for fixing to the machine table The supply device H on the one side of the T side is driven to be axially displaced on the one rail seat H1 and the inner layer is stacked on the cartridge H2 carrying the carrier O of the second substrate S2 to provide the carrier O to X. The axial direction is transported by the second conveying device B to the receiving device K fixed to the other side of the table top T, and can be driven on the one rail seat K1. The Z-axis displacement cartridge K2 is collected in a layered manner; the first conveying device A and the second conveying device B are taken up and placed in the same X-axis direction, the first conveying flow path and the second conveying flow path. And forming a second-stage X-axis linear displacement and parallel to the first parallel flow path AB1 and the second parallel flow path AB2; a first inspection mechanism L is provided above the path passing through the first parallel flow path AB1, which is a span The Y-axis rail seat L2 provided on the gantry type frame L1 above the first parallel flow path AB1 is provided with a Z-axis fixed seat L3, and a first portion formed by a CCD lens is disposed on the fixed seat L3. The image taking lens L4 is driven by the driving member L5 at one end of the rail base L2, so that the fixing seat L3 can be connected to the first image taking lens L4 for Y-axis displacement, and the driving member L6 is driven by the fixing seat L3 to make the first image capturing. The lens L4 can be axially displaced on the fixed seat L3 to inspect the inspected component of the first substrate S1 or the second substrate S2 carried on the carrier O through the first parallel bus path AB1; A second inspection mechanism M is disposed above the path through which the second parallel flow path AB2 passes, and is disposed across the second parallel flow path A. The gantry frame M1 above the B2 is provided with a Z-axis fixing base M2, and a second taking lens M3 composed of a CCD lens is disposed on the fixing base M2, and is driven by the driving member M4 above the fixing base M2. The second image taking lens M3 can be axially displaced on the fixed base M2. Since the second image taking lens M3 is used only for the reverse side inspection, it is only used to move the second parallel flow path AB2 and needs to check the reverse side. The first substrate S1 is inspected; wherein, due to the need for the wireless inspection of the reverse side of the first substrate S1, only a large range of defects such as dirt, scratches, etc. need to be inspected, or the reverse line is not as fine as the front line, so the first image taking lens L4 The image pickup resolution is higher than that of the second image taking lens M3, and the second substrate S2 held on the first substrate S1 or the carrier O can be clearly conveyed when the second substrate S2 is transported face up upward in the first parallel flow path AB1. an examination.

Referring to FIGS. 5 and 6, the first conveying device A is composed of a first track A1 composed of two X-axis parallel slide rails A11, and a second track A2 composed of two X-axis parallel slide rails A21 spaced apart by a distance. An inverting mechanism A3 is formed; the two-stage linear flow path such as the first track A1 and the second track A2 and the inverting flow path formed by the inverting mechanism A3 are arranged in a line to form the first conveying flow path; the first track A1; The second track A2 is disposed correspondingly in the same X-axis direction while maintaining a spacing A4. The first moving seat A13 provided with a first stage A12 on the first track A1 can be driven by a driving member A14. X axial sliding displacement; a second transfer A23 provided with a second stage A22 on the second track A2 can be driven by the driving member A24 for X-axis sliding displacement; the turning mechanism A3 is provided with a flip frame The A31 can be driven to be displaced and reversed in the X-axis, and is used for extracting the first substrate S1 on the first stage A12 of the first transfer seat A13 and facing the upper substrate, and transporting and flipping the substrate S during the transfer. After one hundred and eighty degrees, the second stage A22 of the second transfer seat A23 is turned upside down; The frame A31 is provided with a rectangular frame A311, and a rectangular hollow section A312 is formed in the outer side of the first substrate S1. The long sides of the frame A311 are respectively provided with a plurality of holding mechanisms A313 arranged in opposite directions. A holding mechanism A313 is provided with two clamping jaws A3131 which can be driven to open and close, and a protective block A3132 is respectively arranged on the inner side of the front end of the two clamping jaws A3131, which is composed of a soft flexible material. The A3131 is driven by a driving member A314 to be advanced or retracted in the Y-axis; the inverting frame A31 is horizontally pivoted on a Z-axis vertical supporting base A32 by a Y-axis rotating shaft A315, and the supporting base The A32 maintains a vertical relationship with the rotation axis A315 of the flip frame A31. The frame of the flip frame A31 is symmetric with respect to the left and right sides of the central axis of the rotation axis A315, and can be driven by a driving member A33 to rotate the rotating shaft A315 to the flip frame A31. With the Y-axis as the center, the horizontally-arranged state is reciprocated to one hundred and eighty degrees, and the support base A32 is erected on a rail seat A34, and is driven by a driving member A35 so that the supporting base A32 is linked to the flip frame A31 on the X-axis. Displacement.

Referring to FIGS. 7-8, the first stage A12 of the first transfer stand A13 on the first track A1 has a rectangular shape and a rectangular frame edge A121 is formed on the periphery of the first track A1, which is matched with the size of the substrate S. A supporting rib A122 is disposed at a middle of the frame edge A121, and a plurality of negative pressure suction nozzles A123 are disposed on the frame edge A121 to be disposed on the long sides of the frame edges A121. The negative pressure suction nozzle A123 is slightly convex. For the upper surface of the frame edge A121, the long sides of the frame edge A121 are respectively provided with a plurality of concavely disposed clamping sections A124 spaced apart from each other; the first transfer seat A13 is disposed on the first stage The first stage A12 is supported under the A12, and the first moving block A13 is provided with a driving member A131 for driving the first stage A12 to be lifted relative to the first moving seat A13. The first moving seat A13 is driven by the driving part A14. a screw A15, the first shifting seat A13 is X-axis moved on the first rail A1; the second loading platform A22 and the second shifting seat A23 are the same as the first loading platform A12 and the first shifting seat A13. Construction, the same reason can be pushed, I will not repeat them;

Referring to FIG. 9 to FIG. 10, the first to fifth loading mechanisms G1 to G5 have the same structure. Taking the first loading mechanism G1 as an example, the same can be pushed, including: a loading rack G11, including a hollowing out The placing table G112 of the section G111 and the plurality of rectangular rods G113 which are disposed on the placing table G112 and which are arranged in a rectangular shape outside the hollow section G111 and arranged in a vertical shape, are surrounded by the respective limiting columns G113. a rectangular inner section is provided for placing the first substrate S1 (or the separated spacer S11) to which the spacer S11 is attached; wherein each of the limiting pillars G113 enclosing the rectangle includes an activity on one side The limiting column G1131 and the fixed limiting column G1132 located on the other three sides, the movable limiting column G1131 is located on a sliding seat G115 which can be displaced on the sliding rail G114, and the sliding seat G115 is provided with a positioning member G116 for the sliding seat G115 is fixed to the positioning, and the sliding seat G115 can be slid so that the movable limit column G1131 of the side is moved outwardly or internally, and the size of the first substrate S1 (or the separated spacer S11) adapted to different segment specifications is provided. Capability; an inductive element G117 is disposed above the fixed limit column G1132 on both sides of a pair of hollow sections G111, The transmitting signal and the receiving signal can be used to sense whether the material is taken or not. A rack G12 is disposed under the placing table G112, and includes a seat plate G121 adjacent to the placing table G112 and below the seat plate G121 and spaced apart from the seat plate G121. The fixing seat G122 of the spacing is formed by a plurality of vertical supporting rods G123 arranged in a rectangular arrangement, and a driving member G124 is disposed under the fixing base G122, and drives the inner section of each supporting rod G123. A screw G125 can be rotated; a Z-axis positioning gauge G126 is arranged between the seat plate G121 on the side of the G12 and the fixed seat G122, and a sensor is respectively arranged on the upper and lower positioning positions of the positioning gauge G126. G127; a lifting frame G13, comprising a top abutment G131 above the seat plate G121 of the frame G12, and a base located under the seat plate G121 of the frame G12 and located in the inner section surrounded by the support bars G123 G132, the top abutment G131 and the base G132 are formed by forming a plurality of rectangular support rods G133 pivotally arranged by the seat plate G121 of the mount G12; the top abutment G131 is located at the loading rack G11. Placement table G112 in the hollow section G111; base G13 On one side of the 2, a sensing piece G134 is connected with the displacement of the base G132, and can be sensed by the positioning gauge G126 on the side of the frame G12 and the lower two sensors G127 in the positioning; the screw G125 is screwed through the lifting frame G13 The base G132 is pivoted at one end to the top abutment G131 of the lifting frame G13, and the other end is pivotally mounted on the fixing base G122 of the frame G12. When the screw G125 is driven to rotate by the driving member G124, the lifting frame G13 can be driven to abut the seat. The G131 is vertically displaced in the hollow section G111 of the placement table G112 of the carrier G11, and the first substrate S1 to which the spacer S11 is attached in the inner section surrounded by the respective limit pillars G113 is pushed up (or after separation) Spacer S11).

Referring to FIGS. 3 and 11, the substrate S1 in the feeding zone C is moved into the first transfer mechanism E conveyed in the first conveying device A, and is removed from the first conveying device A to the receiving area D. The second transfer mechanism F has the same mechanism and only corresponds to each other at the set position. The configuration of the first transfer mechanism E is as follows: including: first and second take-off arms E1 with spaced intervals , E2, the first and second pick-and-place arms E1, E2 are disposed on a sliding seat E3, and the sliding seat E3 is driven by a driving member E4 to perform Y-axis movement on a rail seat E6 of a rack E5, and The first and second take-off arms E1 and E2 are synchronously moved in the Y-axis, and the lower ends of the first and second pick-and-place arms E1 and E2 are respectively provided with a rectangle and driven by a driving member E12 for Z-axis height adjustment. The suction cup E11 is provided with a plurality of suction nozzles E111 arranged around the circumference of the rectangle. The first pick-and-place arm E1 is used for picking and placing the first substrate S1, and the suction nozzle E111 has a circular adsorption surface. The second pick-and-place arm E2 is used for picking up and placing the spacer S11, and the suction nozzle E111 has an elongated adsorption surface.

Referring to FIGS. 1 , 11 to 13 , the second conveying device B is composed of a fixed first rail frame B1 , a fixed second rail frame B2 and a movable rail frame B3 located therebetween; The two fixed first rails B1 and the second rails B2 are disposed correspondingly in the X-axis direction, and a connecting section B4 is disposed therebetween. The movable rail frame B3 is disposed on a rail seat of the connecting section B4 in the Y-axis direction. On the slider B32 of the B31, and driven by a driving member (not shown), the movable rail frame B3 can be moved from the Y axis into the connecting section B4 on the rail seat B31 to be connected to the second fixed type first rail frame B1. Between the second rail frame B2 and the second rail frame B1 and the second rail frame B2; the first and second rail frames B1 and B2 and the movable rail frame are removed from the connecting section B4. B3 is provided with two parallel side frames B5 spaced apart from each other, and each side of the two sides of the frame B5 is provided with a first-class road belt B6 driven by a belt driving member B7; two first straight lines formed by the first and second rail frames B1 and B2 The flow path and the movable docking linear flow path formed by the flow path belt B6 on the movable rail frame B3 are connected in series to form the second transport flow path, so that the carrier O carrying the second substrate S2 can be The second transmission channel is delivered.

Referring to FIG. 1 , FIG. 1 , FIG. 1 , FIG. 1 , the embodiment of the present invention performs the first substrate S1 inspection, and uses the first transport flow path provided by the first transport device A to cooperate with each mechanism as shown in the figure, including: In a loading step, (please refer to FIG. 16 at the same time), the sliding seat E3 of the first transfer mechanism E is driven to perform Y-axis movement on the rail seat E6 of the frame E5, and the first and second take-up arms E1 are linked. E2 is synchronously moved to the side of the two loading mechanisms G away from the feeding zone C in the Y-axis, so that the operator can place the material of the spacer S11 and the first substrate S1 to be inspected alternately into the feeding. In the first loading mechanism G1 of the zone C; at the same time, the entire stack of spacers S11 is placed in the fifth loading mechanism G5 in the receiving area D; a feeding step (please refer to FIG. 17 as well), the first shift The carriage E3 of the carrier E is driven to perform Y-axis movement on the rail seat E6 of the mount E5, and the first and second pick-and-place arms E1 and E2 are synchronously moved to the feed zone C in the Y-axis. Above one of the loading mechanism G1 and the second loading mechanism G2, the suction seats E11 of the first and second take-off arms E1 and E2 are synchronously moved downward, and the suction seat E11 of the first pick-and-place arm E1 is used. The first substrate S1 in the first loading mechanism G1 is attached, and then the suction seats E11 of the first and second loading and unloading arms E1 and E2 are synchronously moved up, and the sliding seat E3 of the first transfer mechanism E is driven to be on the frame E5. The Y-axis movement is performed on the rail seat E6, and the first and second pick-and-place arms E1 and E2 are synchronously moved in the Y-axis direction to be respectively located above the first stage A12 of the first track A1 of the first conveying device A and Above the first loading mechanism G1 (please refer to FIG. 18 at the same time), then the suction seats E11 of the first and second take-off arms E1 and E2 are synchronously moved downward, so that the first pick-and-place arm E1 places the first substrate S1 first. The first stage A12 of the first track A1 in the conveying device A is adsorbed, and the second pick-and-place arm E2 adsorbs the spacer S11 below the original first substrate S1 in the lower first loading mechanism G1; The suction E11 of the two pick-and-place arms E1 and E2 is synchronously moved upward, so that the first substrate S1 placed on the first stage A12 is transported by the first transport flow path provided by the slide rail A11 in the X-axis direction. In the first transfer mechanism E, the slide E3 is driven to perform Y-axis movement on the rail seat E6 of the mount E5, and the first and second pick-and-place arms E1 and E2 are synchronized in the Y-axis. Moving to the first loading mechanism G1 and the second loading mechanism G2 of the feeding zone C (please refer to FIG. 17 at the same time), and at the next feeding step, the first pick-and-place arm E1 continues to perform the first loading The material picking mechanism G1 performs the adsorption extraction, and the second pick-and-place arm E2 places the adsorbed spacer S11 into the second loading mechanism G2 for storage; a front inspection step, the first stage A12 holds the first substrate S1 at When the first inspection unit L is reached, the first substrate A12 is driven to move up the first substrate S1, so that the front surface of the first substrate S1 is inspected and imaged by the first image taking lens L4. A loading stage A12 is driven to move the first substrate S1 thereon to move back down and continue to be transferred to the next positioning; a reverse conveying step (please refer to FIG. 6 at the same time), the flip frame A31 of the turning mechanism A3 is driven to be displaced to The first stage A12 is horizontally above, the first stage A12 is driven to move up the first substrate S1 thereon, and the hollow area A312 of the first substrate S1 moving into the flip frame A31 is framed between the holding mechanisms A313. And each of the holding mechanisms A313 on both sides is driven forward to be provided with a protection block A3132 The second jaw A3131 clamps the periphery of the first substrate S1, and after the clamping, the flip frame A31 of the flip mechanism A3 is flipped one hundred and eighty degrees so that the first substrate S1 faces upward and is driven to be displaced to the second track A2. In the horizontal state above the second stage A22, after the second stage A22 is driven up and adsorbs the first substrate S1 in the flip frame A31, the two jaws A3131 of each holding mechanism A313 are loosened and driven back, and then The second stage A22 adsorbs the first substrate S1 and moves down and moves to the next position on the second track A2. In the reverse inspection step, the second stage A22 carries the first substrate S1 to reach the second inspection mechanism M. When the lower stage is positioned, the second stage A22 is driven to move up the first substrate S1 thereon, so that the reverse side of the first substrate S1 is inspected and imaged by the second image taking lens M3, and after the second stage A22 is driven, the second stage A22 is driven. The first substrate S1 on which the first substrate S1 is moved back is moved back to the next position; and an extraction step is taken, the second transfer mechanism F is extracted from the second stage A22 of the second track A2 in the first transfer device A And removing the first substrate S1 that has completed the reverse inspection to collect in the receiving area D; the second transfer The operation of the F is such that the carriage F3 is driven by the driving member F4 to perform Y-axis movement on the rail seat F6 of the mount F5, and the first and second pick-and-place arms F1 and F2 are synchronously moved in the Y-axis to the respective It is located above the second stage A22 of the second track A2 in the first conveying device A and above the third loading mechanism G3 (please refer to FIG. 19 at the same time), and then the suction cups F11 of the first and second take-off arms F1 and F2 are synchronized. Moving downward, the first pick-and-place arm F1 adsorbs the first substrate S1 on the first stage A12, and then the suction cups F11 of the first and second pick-and-place arms F1 and F2 are synchronously moved upward, when the first substrate S1 is When the good product is inspected, the carriage F3 is driven to perform Y-axis movement on the rail seat F6 of the mount F5, and the first and second pick-and-place arms F1 and F2 are synchronously moved in the Y-axis to be respectively located in the third. Above the loading mechanism G3 and the fourth loading mechanism G4 (please refer to FIG. 20 at the same time), the suction seats F11 of the first and second take-off arms F1 and F2 are synchronously moved downward, and the first pick-and-place arm F1 is adsorbed below. A substrate S1 is placed in the third loading mechanism G3, and then the sliding seat F3 is driven to perform Y-axis movement on the rail seat F6 of the mount F5, and the first and second pick-and-place arms F1 and F are interlocked. 2 is synchronously moved in the Y-axis to be located above the fourth loading mechanism G5 and the fifth loading mechanism G4 (please refer to FIG. 21 at the same time), so that the suction seats E11 of the first and second take-off arms F1 and F2 are synchronized. Shifting, the suction seat F11 of the second pick-and-place arm F2 is attracted to the spacer S11 of the fifth loading mechanism G5; if the suction seat F11 of the first pick-and-place arm F1 is adsorbed, the first one detected as a defective product In the substrate S1, the suction E11 of the first and second pick-and-place arms F1 and F2 will be directly displaced to the fourth loading mechanism G5 by the program above the corresponding third loading mechanism G3 and the fourth loading mechanism G4. Above the five-loading mechanism G4, and placed by the suction F11 of the first pick-and-place arm F1 into the corresponding fourth loading mechanism G4; then, the suction seats F11 of the first and second pick-and-place arms F1 and F2 are moved up synchronously. In the next extraction and collection step, the carriage F3 is driven to perform Y-axis movement on the rail seat F6 of the mount F5, and the first and second pick-and-place arms F1 and F2 are synchronously moved in the Y-axis to be respectively located. When the second stage A22 of the second rail A2 is above the third stage A22 and above the third loading mechanism G3 (please refer to FIG. 19 at the same time), the second pick-and-place arm F2 is The adsorption of the spacer placed above the first substrate S1 S11 feeding mechanism G3 is disposed in the third carrier.

Referring to FIGS. 2, 22, and 23, in the embodiment of the present invention, when the inspection of the second substrate S2 by the carrier O is performed, the second transfer flow path provided by the second transfer device B is used and matched as shown in the figure. Executed by each mechanism, comprising: a feeding step, the carrier O carrying the second substrate S2 is moved from the cartridge H2 on the feeding device H into the first rail frame B1 of the second conveying device B. The flow path belt B6 provided on the inner side of B5 is conveyed on the second conveying flow path provided by the flow path belt B6; and a front inspection step, the carrier tray O carrying the second substrate S2 arrives at the first inspection mechanism L When being positioned below, the first stage A12 on the first track A1 of the second conveying device A is also driven to be displaced to the lower position of the carrier O, so that the first stage A12 is driven up to adsorb and link the carrier. O moves up, so that the front surface of the second substrate S2 is inspected and imaged by the first image taking lens L4. After the completion, the first substrate A12 is driven to move back to the second substrate S2, so that the second substrate is loaded. The carrier O of S2 falls on the flow path belt B6 of the second conveying device B and is continuously conveyed; an output collecting step is completed. In the front inspection step, the carrier O of the second substrate S2 is loaded, and the computer system of the machine will record only the inspection result of the second substrate S2 on the specific carrier O, regardless of the result of the inspection, or the defective product. The carrier O of the two substrates S2 is transported through the movable rail B3 that has been moved into the connecting section B4 and connected to the first rail B1 and the second rail B2, and is directly transmitted to the second rail B2. The magazine K2 of the receiving device K is collected in a layered manner.

In the embodiment of the present invention, the substrate inspection method and apparatus are arranged such that the first loading mechanism G1 and the second loading mechanism G2 are disposed in the feeding area C, so that the first substrate S1 and the spacer S11 are alternately stacked. In a loading mechanism G1, and taking the first transfer mechanism E via a reciprocating transfer flow path, the first substrate S1 is taken out from the first loading mechanism G1 of the supply area C and placed in the first transfer flow path. And placing the spacer S11 in the second loading mechanism G2, and further providing a third loading mechanism in the receiving area to make G3, the fourth loading mechanism G4, and the fifth loading mechanism G5, so that the fifth loading mechanism The spacer S11 is placed in the G5, and the second transfer mechanism F is caused to extract the third substrate S1 that has been inspected as good by the first transfer path from the first transfer path to be placed in the receiving area D. In the loading mechanism G3, the extraction member S11 from the fifth loading mechanism G5 is placed in the third loading mechanism G3 and overlaps with the first substrate S1, and the extraction from the first conveying flow path is checked as The first substrate S1 of the defective product is placed in the fourth loading mechanism G4 of the receiving area D. Therefore, when the surface inspection is performed, the first substrate S1 can be considered. The pick-and-place of the spacer S11 prevents the first substrate S1 from being scratched during the transport inspection, and the mechanism can effectively and properly plan the transport of the first substrate S1 and the spacer S11 of the substrate; On the T, the first transfer device A and the second transfer device B form a parallel first parallel channel AB1 and a second parallel channel AB2 in a two-segment X-axis linear displacement to make different first substrates S1. When the second substrate S2 is transported and inspected by the different first transport path and the second transport stream, respectively, the same first inspection mechanism L can be shared, and the different receiving areas D and the cartridge K can be collected. The performance of the machine is greatly improved; and the transportation of the single first conveying device A or the second conveying device B is performed by the inverting mechanism A3 and the movable displacement movable rail frame B3, so that the front side, the back side or the front side only check is performed. Both the first substrate S1 and the second substrate S2 can be performed, and the function of inspecting the substrate can be achieved even if the first transfer device A or the second transfer device B is used for transport and inspection.

The above is only the preferred embodiment of the present invention, and the scope of the invention is not limited thereto, that is, the simple equivalent changes and modifications made by the scope of the invention and the description of the invention are All remain within the scope of the invention patent.

A‧‧‧First transport device

A1‧‧‧ first track

A11‧‧‧rails

A12‧‧‧First stage

A121‧‧‧ frame

A122‧‧‧Support ribs

A123‧‧‧Negative pressure nozzle

A124‧‧‧Capture interval

A13‧‧‧First shift seat

A131‧‧‧ drive parts

A14‧‧‧ drive parts

A15‧‧‧ screw

A2‧‧‧ second track

A21‧‧‧rails

A22‧‧‧Second stage

A23‧‧‧Second transfer

A24‧‧‧ drive parts

A3‧‧‧ flip mechanism

A31‧‧‧Flip box

A311‧‧‧Frame

A312‧‧‧ Short-term interval

A313‧‧‧ Keeping institutions

A3131‧‧‧claw

A3132‧‧‧protection block

A314‧‧‧Driver

A315‧‧‧Rotary axis

A32‧‧‧ support

A33‧‧‧ drive parts

A34‧‧‧ rail seat

A35‧‧‧ drive parts

A4‧‧‧ spacing

B‧‧‧Second transport device

B1‧‧‧First rail

B2‧‧‧Second rail

B3‧‧‧ activity rail

B31‧‧‧ rail seat

B32‧‧‧ slide

B4‧‧‧ convergence interval

B5‧‧‧Side frame

B6‧‧‧Flower belt

B7‧‧‧Belt drive parts

AB1‧‧‧ First Convergence Road

AB2‧‧‧Second merged road

C‧‧‧Feeding area

D‧‧‧ receiving area

E‧‧‧First transfer mechanism

E1‧‧‧first take-off arm

E11‧‧‧ suction seat

E12‧‧‧ drive parts

E2‧‧‧Second access arm

E3‧‧‧ slide

E4‧‧‧ drive parts

E5‧‧‧Rack

E6‧‧‧ rail seat

F‧‧‧Second transfer mechanism

F1‧‧‧first take-off arm

F11‧‧‧ suction seat

F2‧‧‧Second access arm

G1‧‧‧First loading mechanism

G11‧‧‧Loading rack

G111‧‧‧ hollow space

G112‧‧‧Placement

G113‧‧‧Limited column

G1131‧‧‧ activity limit column

G1132‧‧‧Fixed limit column

G114‧‧‧rails

G115‧‧‧ slide

G116‧‧‧ positioning parts

G117‧‧‧Inductive components

G12‧‧‧Rack

G121‧‧‧ seat board

G122‧‧‧ fixed seat

G123‧‧‧Support rod

G124‧‧‧ drive parts

G125‧‧‧ screw

G126‧‧‧ Positioning gauge

G127‧‧‧ sensor

G13‧‧‧ lifting frame

G131‧‧‧Right

G132‧‧‧Base

G133‧‧‧Support rod

G134‧‧‧Sensor

G2‧‧‧Second loading mechanism

G3‧‧‧ third loading mechanism

G4‧‧‧fourth loading mechanism

G5‧‧‧ fifth loading mechanism

H‧‧‧Feeding device

H1‧‧‧ rail seat

H2‧‧‧material box

K‧‧‧ receiving device

K1‧‧‧ rail seat

K2‧‧‧material box

L‧‧‧First inspection agency

L1‧‧‧Rack

L2‧‧‧ rail seat

L3‧‧‧ fixed seat

L4‧‧‧first image taking lens

L5‧‧‧ drive parts

L6‧‧‧ drive parts

M‧‧‧Second inspection agency

M1‧‧‧Rack

M2‧‧‧ fixed seat

M3‧‧‧second image taking lens

M4‧‧‧ drive parts

O‧‧‧ Carrier

S1‧‧‧ first substrate

S2‧‧‧second substrate

S11‧‧‧ spacers

T‧‧‧ machine counter

1 is a perspective view showing the arrangement of a first substrate and different spacers in an embodiment of the present invention. 2 is a schematic perspective view showing a second substrate carried on a carrier in the embodiment of the present invention. FIG. 3 is a schematic perspective view showing the arrangement of each mechanism on a machine table in the embodiment of the present invention. 4 is a top plan view showing the arrangement of each mechanism on a machine table in the embodiment of the present invention. FIG. 5 is a perspective view showing the mechanism of the first conveying device in the embodiment of the present invention. Fig. 6 is a perspective view showing the flip frame in the first conveying device of the embodiment of the present invention. . Figure 7 is a perspective view showing the first stage in the first conveying device of the embodiment of the present invention. Fig. 8 is a side view showing the first stage in the first conveying device of the embodiment of the present invention. FIG. 9 is a perspective view of a loading mechanism for loading a first substrate in an embodiment of the present invention. Figure 10 is a perspective view showing the loading mechanism for loading the first substrate in the embodiment of the present invention. Figure 11 is a perspective view of the transfer mechanism in the embodiment of the present invention. Figure 12 is a perspective view of a second conveying device in the embodiment of the present invention. FIG. 13 is a perspective view showing the movable rail frame of the second transport device in the second embodiment of the present invention connected between the first rail frame and the second rail frame. Fig. 14 is a perspective view showing the mechanism associated with the first transport path provided by the first transport device in the embodiment of the present invention. Fig. 15 is a top plan view showing the mechanism associated with the first transport path provided by the first transport device in the embodiment of the present invention. Figure 16 is a schematic view (1) of the transfer mechanism of the transfer mechanism between the various loading mechanisms in the feeding zone in the embodiment of the present invention. Figure 17 is a schematic view (2) of the transfer mechanism of the transfer mechanism between the various loading mechanisms in the feeding zone in the embodiment of the present invention. Figure 18 is a schematic view (3) of the transfer mechanism of the transfer mechanism between the various loading mechanisms in the feeding zone in the embodiment of the present invention. Figure 19 is a schematic view (1) of the transfer mechanism of the transfer mechanism between the various loading mechanisms in the receiving area according to the embodiment of the present invention. Figure 20 is a schematic view (2) of the transfer mechanism between the various loading mechanisms in the receiving area in the embodiment of the present invention. Figure 21 is a schematic view (3) of the transfer mechanism of the transfer mechanism between the various loading mechanisms in the receiving area according to the embodiment of the present invention. Fig. 22 is a perspective view showing the mechanism associated with the second transport path provided by the second transport device in the embodiment of the present invention. Fig. 23 is a top plan view showing the mechanism associated with the second transport path provided by the second transport device in the embodiment of the present invention.

A‧‧‧First transport device

A1‧‧‧ first track

A11‧‧‧rails

A2‧‧‧ second track

A21‧‧‧rails

A22‧‧‧Second stage

A312‧‧‧ Short-term interval

A313‧‧‧ Keeping institutions

C‧‧‧Feeding area

D‧‧‧ receiving area

L4‧‧‧first image taking lens

M3‧‧‧second image taking lens

Claims (17)

A substrate inspection conveying method comprises: providing a first conveying device to form a first conveying flow path for conveying a first substrate; providing a feeding region, and providing a first loading mechanism and a second in the feeding region a loading mechanism, wherein a first substrate and a spacer are alternately stacked in the first loading mechanism; and a first transfer mechanism is provided via a reciprocating transfer flow path, the first carrier from the feeding region The mechanism extracts the first substrate into the first transport flow path, and places the spacer in the second load mechanism; and sets a first inspection mechanism on the path through which the first transport flow path passes, which is a first The image taking lens inspects the first substrate that has moved through the first transport flow path. A substrate inspection conveying method comprises: providing a first conveying device to form a first conveying flow path for conveying a first substrate; providing a feeding region, and providing a first loading mechanism and a second in the feeding region a loading mechanism, wherein a first substrate and a spacer are alternately stacked in the first loading mechanism; and a first transfer mechanism is provided via a reciprocating transfer flow path, the first carrier from the feeding region The mechanism extracts the first substrate into the first transport flow path and places the spacer in the second load mechanism; and provides a second transport device to form a second transport flow path for transporting the second substrate; The transport flow path and the second transport flow path are co-constructed on the same machine and form a parallel first parallel flow path in the same axial direction, and a first inspection mechanism is disposed on the path through which the first parallel flow path passes. The first substrate moved through the first transport flow path is inspected by a first image taking lens. The method for transporting a substrate inspection according to claim 1 or 2, wherein the first substrate that has been inspected is sent to a receiving area, and a third loading mechanism and a fourth load are disposed in the receiving area. a material loading mechanism and a fifth loading mechanism for placing a spacer in the fifth loading mechanism; and providing a second transfer mechanism for extracting from the first conveying flow path through the reciprocating transfer flow path a substrate is placed in the third loading mechanism of the receiving area, and the spacer is extracted from the fifth loading mechanism and placed in the third loading mechanism to overlap with the first substrate; from the first conveying stream The first substrate, which has been inspected as defective, is placed in the fourth loading mechanism of the receiving area. The method for transporting a substrate inspection according to the first or second aspect of the invention, wherein the first transport flow path and the two reverse flow paths are arranged in a line arrangement. The method of transporting a substrate inspection according to the first or second aspect of the invention, wherein a path of the first transport flow path is provided with a second inspection mechanism, which is coupled to the first transport stream by a second image capturing lens. The first substrate moved by the road is inspected. A substrate inspection conveying device comprises: a first conveying device located on a table top; a feeding area located on a side of the first conveying device on the machine table; a receiving area located on the table top The first conveying device of the side is on the same side as the feeding zone; the first conveying device provides a first conveying flow path for conveying a first substrate from the feeding zone to the receiving zone; a first transfer mechanism a first substrate is transferred into the first conveying device to be conveyed in the feeding zone; a second transfer mechanism removes the first substrate from the first conveying device to the receiving area for collecting; a first inspection mechanism is disposed at the a first image capturing lens is arranged on the surface of the machine to inspect the first substrate conveyed by the first conveying device; the feeding area is provided with a first loading mechanism and a second loading mechanism, and the first loading mechanism is A first substrate and a spacer are disposed in an alternating manner. A substrate inspection conveying device comprises: a first conveying device, wherein the first conveying device is formed by a first rail composed of two sliding rails spaced apart from each other, a second rail composed of two sliding rails spaced apart from each other, and a turning mechanism The feeding zone is provided with a first loading mechanism and a second loading mechanism, wherein the first loading mechanism is provided with a first substrate and a spacer which are alternately stacked; a first transfer mechanism from the feeding The first substrate is moved into the first conveying device to be conveyed; the second transfer mechanism removes the first substrate from the first conveying device to the receiving area for collecting; and a second conveying device is provided by a fixed type a first rail frame, a fixed second rail frame and a movable rail frame therebetween; the second conveying device provides a second conveying flow path for conveying a second substrate; the first conveying device a first parallel flow path which is disposed in the same axial direction as the second conveying device and which is linearly displaced; a first inspection mechanism is disposed above the path through which the first parallel flow path passes, the first inspection mechanism, Having a first image taking lens pair first Checking a first flow path substrate transported. The conveying device for substrate inspection according to the sixth or seventh aspect of the invention, wherein the receiving area is provided with a third loading mechanism, a fourth loading mechanism, and a fifth loading mechanism, wherein the third loading material The mechanism is configured to place a first substrate that is inspected as a good product, the fourth loading mechanism is configured to place a first substrate that is inspected as a defective product, and a spacer is disposed in the fifth loading mechanism. The apparatus for inspecting a substrate according to claim 8 , wherein one of the first to fifth loading mechanisms comprises: a loading rack, comprising a placing table provided with a hollow section, and The plurality of shelves are arranged in a rectangular shape and are arranged outside the hollow section and are arranged in a vertical position; a frame is arranged below the placement platform, including a seat plate adjacent to the placement table and located at the seat a fixing seat at a distance from the seat plate and spaced apart from the seat plate, the two are formed by a plurality of standing support rods; a lifting frame includes a top abutting seat and a base, and the top abutting seat and the base are erected Formed by the support rod; the top abuts and is located in the hollow section of the loading platform of the loading rack; the lifting frame is driven to be vertically displaced into the hollow section of the loading platform in the loading rack. The substrate inspection apparatus according to claim 6 or 7, wherein the first transfer mechanism comprises: a carriage that is driven by a driving member to move on a rail seat of the rack And the first and second pick-and-place arms are arranged to be moved synchronously, and the lower ends of the first and second pick-and-place arms are respectively provided with a suction seat driven by a driving member for height adjustment, and the suction seat is provided Multiple nozzles. The conveying device for substrate inspection according to the sixth aspect of the invention, wherein the first conveying device comprises a first rail composed of two sliding rails spaced apart from each other, a second rail composed of two sliding rails spaced apart from each other, and a turning mechanism Formed. The substrate inspection inspection apparatus according to claim 7 or 11, wherein the first rail is provided with a first stage on which the first stage can be driven to be slidably displaced. The substrate inspection inspection apparatus according to claim 7 or 11, wherein the second rail is provided with a second stage on which the second stage can be driven to be slidably displaced. The apparatus for inspecting the substrate according to the seventh or eleventh aspect of the invention, wherein the inverting mechanism is provided with a flip frame, the flip frame is provided with a frame, and a hollow space larger than the area of the first substrate is disposed, the frame is provided with A plurality of holding mechanisms. The substrate inspection transport device according to claim 14, wherein each of the holding mechanisms is provided with two jaws that can be driven to open and close, and the two jaws are driven by a driving member to make Move forward or backward. The transport device for substrate inspection according to claim 6 or 7, wherein a second inspection mechanism is disposed on the surface of the machine, and a second image bearing lens is disposed on the first substrate conveyed by the first transfer device. checking. A substrate inspecting apparatus comprising: a device using a substrate inspecting method as described in claims 1 to 5.