TW201925499A - 蒸鍍裝置、蒸鍍方法和控制板 - Google Patents

蒸鍍裝置、蒸鍍方法和控制板 Download PDF

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Publication number
TW201925499A
TW201925499A TW107143551A TW107143551A TW201925499A TW 201925499 A TW201925499 A TW 201925499A TW 107143551 A TW107143551 A TW 107143551A TW 107143551 A TW107143551 A TW 107143551A TW 201925499 A TW201925499 A TW 201925499A
Authority
TW
Taiwan
Prior art keywords
vapor deposition
evaporation
pair
control board
substrate
Prior art date
Application number
TW107143551A
Other languages
English (en)
Chinese (zh)
Inventor
山下和吉
末永真吾
濱永教彰
Original Assignee
日商長州産業股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商長州産業股份有限公司 filed Critical 日商長州産業股份有限公司
Publication of TW201925499A publication Critical patent/TW201925499A/zh

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Electroluminescent Light Sources (AREA)
TW107143551A 2017-12-06 2018-12-05 蒸鍍裝置、蒸鍍方法和控制板 TW201925499A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017-234328 2017-12-06
JP2017234328A JP6941547B2 (ja) 2017-12-06 2017-12-06 蒸着装置、蒸着方法及び制御板

Publications (1)

Publication Number Publication Date
TW201925499A true TW201925499A (zh) 2019-07-01

Family

ID=66846693

Family Applications (1)

Application Number Title Priority Date Filing Date
TW107143551A TW201925499A (zh) 2017-12-06 2018-12-05 蒸鍍裝置、蒸鍍方法和控制板

Country Status (4)

Country Link
JP (1) JP6941547B2 (ja)
KR (1) KR20190067104A (ja)
CN (1) CN110004413A (ja)
TW (1) TW201925499A (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024009125A1 (en) * 2022-07-05 2024-01-11 Applied Materials, Inc. Vapor source, nozzle, and method of depositing an evaporated material on a substrate

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101558519B1 (ko) * 2010-09-15 2015-10-08 삼성디스플레이 주식회사 유기물 증착 장치 및 증착 방법
KR20140107515A (ko) * 2012-03-07 2014-09-04 파나소닉 주식회사 증착 장치
KR101885245B1 (ko) * 2012-05-31 2018-09-11 삼성디스플레이 주식회사 증착 장치 및 이를 이용한 유기 발광 표시장치의 제조방법
KR20140006499A (ko) * 2012-07-05 2014-01-16 삼성디스플레이 주식회사 증착 장치
KR102046440B1 (ko) 2012-10-09 2019-11-20 삼성디스플레이 주식회사 증착 장치 및 이를 이용한 유기 발광 표시장치의 제조방법
US20160010201A1 (en) 2013-01-29 2016-01-14 Sharp Kabushiki Kaisha Vapor deposition unit and vapor deposition device
KR102260572B1 (ko) * 2014-07-07 2021-06-07 (주)선익시스템 복수의 증발원을 갖는 박막 증착장치
JP6529257B2 (ja) * 2014-12-26 2019-06-12 キヤノントッキ株式会社 真空蒸着装置
KR20160112293A (ko) * 2015-03-18 2016-09-28 주식회사 선익시스템 증발원 및 이를 포함하는 증착장치
JP6276804B2 (ja) 2015-06-26 2018-02-07 キヤノントッキ株式会社 蒸着装置
KR20170007556A (ko) * 2015-06-30 2017-01-19 주식회사 선익시스템 다중 증착 증발원

Also Published As

Publication number Publication date
JP2019099885A (ja) 2019-06-24
CN110004413A (zh) 2019-07-12
KR20190067104A (ko) 2019-06-14
JP6941547B2 (ja) 2021-09-29

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