TW201914001A - 柔性顯示面板及其製作方法 - Google Patents
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Abstract
本發明提供了一種柔性顯示面板及其製作方法。該柔性顯示面板包括柔性基板;形成於該柔性基板上的緩衝層;和形成於該緩衝層上的金屬層,其中,該柔性顯示面板在橫向上包括顯示區和彎折區,該緩衝層包括第一部分和第二部分,該第一部分對應於該顯示區,該第二部分對應於該彎折區,該第二部分的厚度小於該第一部分的厚度。
Description
本發明屬於顯示器技術領域,具體是關於一種柔性顯示面板及其製作方法。
柔性可折疊顯示器,例如有機發光顯示器(Organic Light Emitting Display,OLED),可以為使用者帶來全新的視覺體驗。但這種顯示器在多次彎折後,容易產生金屬線斷裂問題,從而影響顯示。
目前的解決方法是採用絕緣層/金屬層/絕緣層/平坦化層結構對金屬線進行保護。但絕緣層的楊氏模量較大,在彎折時容易出現斷裂,從而導致金屬線斷裂。
有鑑於此,本發明實施例提供了一種柔性顯示面板及其製作方法,能夠提高柔性顯示面板的彎折能力。
本發明的一個方面提供一種柔性顯示面板,該柔性顯示面板包括:柔性基板;形成於該柔性基板上的緩衝層;和形成於該緩衝層上的金屬層,其中,該柔性顯示面板在橫向上包括顯示區和彎折區,該緩衝層包括第一部分和第二部分,該第一部分對應於該顯示區,該第二部分對應 於該彎折區,該第一部分的厚度小於該第二部分的厚度。
在一個實施例中,該第一部分包括依次設置的第一SIOx層、SINx層和第二SIOx層,其中該第一SIOx層設置在該柔性基板上,該第二部分包括第一SIOx層。
在一個實施例中,該柔性顯示面板進一步包括平坦化層及形成於該平坦化層與金屬層之間的鈍化層,該鈍化層和平坦化層的材料為有機材料,該緩衝層的材料是無機絕緣材料。
在一個實施例中,該緩衝層的第二部分不包括該SINx層和該第二SIOx層。
在一個實施例中,該第二部分的第一SIOx層的厚度小於或等於該第一部分的第一SIOx層的厚度。
在一個實施例中,該柔性顯示面板在橫向上還包括過渡區,該過渡區位於該顯示區和該彎折區之間,該緩衝層還包括第三部分,該第三部分對應於該過渡區,該第三部分在從該柔性基板朝向該金屬層的方向上寬度逐漸減少。
在一個實施例中,該第一部分的厚度為300nm至1400nm,該第二部分的厚度為10nm至100nm。
在一個實施例中,該第二部分的厚度為10nm至30nm。
本發明的一個方面提供了一種柔性顯示面板的製作方法,該柔性顯示面板在橫向上包括顯示區和彎折區,該方法包括:提供柔性基板;在柔性基板上形成緩衝層;令該緩衝層與該顯示區對應的部分作為第一部分,對該緩衝層與該彎折區對應的部分進行蝕刻,得到第二部分,令該第 二部分的厚度小於該第一部分的厚度;在該緩衝層上形成金屬層。
在一個實施例中,該在柔性基板上形成緩衝層包括:在該柔性基板上依次形成第一SIOx層、SINx層和第二SIOx層,其中,該對該緩衝層與該彎折區對應的部分進行蝕刻得到第二部分,包括:蝕刻該緩衝層的與彎折區對應的第二SIOx層和SINx層,以露出該第二部分的第一SIOx層。
在一個實施例中,該蝕刻該緩衝層的與彎折區對應的第二SIOx層和SINx層,以露出該第二部分的第一SIOx層之後,進一步蝕刻該第二部分的第一SIOx,使得該第二部分的第一SIOx層的厚度小於或等於該第一部分的第一SIOx層的厚度。
在一個實施例中,該柔性顯示面板在橫向上還包括過渡區,該過渡區位於該顯示區和該彎折區之間,該方法還包括:對該緩衝層對應於該過渡區的部分進行蝕刻,得到第三部分,其中該第三部分在從該柔性基板朝向該金屬層的方向上寬度逐漸減少。
在一個實施例中,該第二部分的厚度為10nm至30nm。
在一個實施例中,該方法進一步包括:在該金屬層上形成鈍化層,並在該鈍化層上形成平坦化層,該鈍化層和平坦化層的材料為有機材料,該緩衝層的材料是無機絕緣材料。
本發明實施例提供的柔性顯示面板的製作方法,通過在形成金屬層之前對彎折區的緩衝層進行蝕刻,使得彎折區的緩衝層的厚度小於顯示區的緩衝層的厚度,從而提高了柔性顯示面板的彎折能力。
301~303、401~409‧‧‧步驟
1‧‧‧顯示區
2‧‧‧過渡區
3‧‧‧彎折區
100‧‧‧柔性顯示面板
101‧‧‧柔性基板
102‧‧‧緩衝層
103‧‧‧金屬層
104‧‧‧鈍化層
105‧‧‧平坦化層
106‧‧‧第一SIOx層
107‧‧‧SINx層
108‧‧‧第二SIOx層
109‧‧‧第一SIOx層
110‧‧‧柵極絕緣層
111‧‧‧電容絕緣層
112‧‧‧層間介電層
圖1所示為本發明一實施例提供的一種柔性顯示面板的示意性剖面圖;圖2所示為本發明另一實施例提供的一種柔性顯示面板的剖面圖;圖3為本發明一個實施例的柔性顯示面板的製備方法的示意性流程圖;圖4為本發明另一實施例的柔性顯示面板的製備方法的示意性流程圖。
下面將結合本發明實施例中的附圖,對本發明實施例中的技術方案進行清楚、完整地描述,顯然,所描述的實施例僅是本發明一部分實施例,而不是全部的實施例。基於本發明中的實施例,本領域普通技術人員在沒有做出進步性勞動前提下所獲得的所有其他實施例,都屬於本發明保護的範圍。
圖1所示為本發明一實施例提供的一種柔性顯示面板100的示意性剖面圖。
柔性顯示面板100包括柔性基板101;形成於柔性基板101上的緩衝層102;和形成於緩衝層102上的金屬層103。柔性顯示面板100在橫向上包括顯示區1和彎折區3,緩衝層102包括第一部分和第二部分,第一部分對應於顯示區1,第二部分對應於彎折區3,第二部分的厚度小於第一部分的厚度。
根據本發明的實施例,通過在形成金屬層之前對彎折區的緩衝層進行蝕刻,使得彎折區的緩衝層的厚度小於顯示區的緩衝層的厚度,從而提高了柔性顯示面板的彎折能力。
根據本發明的實施例,緩衝層102的第一部分可以包括依次設置的第一SIOx層106、SINx層107和第二SIOx層108,緩衝層102的第二部分包括第一SIOx層,並且不包括SINx層和第二SIOx層。
參見圖1,在柔性顯示面板的顯示區,緩衝層從下向上依次設置有第一SIOx層106、SINx層107、第二SIOx層108(即第一部分)。在柔性顯示面板的彎折區,緩衝層可以是將SINx層和第二SIOx層去掉而剩下的第一SIOx層109(即第二部分)。第一SIOx層106和第一SIOx層109處於同一層。
應理解,緩衝層102的第一部分可以包括第一SIOx層、SINx層和第二SIOx層中的至少一層,而且本發明的實施例對各層的設置順序不作限制。可替代地,緩衝層102也可以是其它矽化合物或者其它可以用作緩衝層的材料。
進一步地,第二部分的第一SIOx層109的厚度小於或等於第一部分的第一SIOx層106的厚度。例如,第一部分的厚度可以為300nm至1400nm。第二部分的厚度為10nm至100nm。
優選地,第二部分的厚度為10nm至30nm。
可選地,作為另一實施例,柔性顯示面板100還包括平坦化層105。
例如,該柔性顯示面板100包括柔性基板101、以及在柔性 基板101上依次形成的緩衝層102、金屬層103和平坦化層105。彎折區的緩衝層的厚度小於顯示區的緩衝層的厚度。平坦化層105的材料為有機材料。緩衝層102例如可以是無機絕緣材料。例如,無機絕緣材料可以為無機矽材料,具體可以為氮化矽或氧化矽等。通常情況下,以無機矽材料作為緩衝層時,例如,在柔性顯示面板彎折時,容易導致金屬層中的金屬線斷裂。通常情況下,彎折區的緩衝層的厚度越薄,彎折區的金屬層的彎折能力越強。當彎折區的緩衝層的厚度非常小時,彎折區的金屬層位於有機層之間,在進行彎折時,彎折區的金屬層被折斷的風險大大降低。通過減小彎折區的緩衝層的厚度,可以增加柔性屏體彎折區的彎折能力。
可選地,作為另一實施例,該柔性基板101在橫向上還包括過渡區2。過渡區2位於顯示區1和彎折區3之間,緩衝層102還包括第三部分,第三部分對應於過渡區2,第三部分在從柔性基板101朝向金屬層103的方向上寬度逐漸減少。第三部分的厚度為300nm至700nm。過渡區2的作用是降低金屬層爬坡時斷線的風險,第三部分的厚度變薄是為了降低金屬層在彎折時斷線的風險。
根據本發明的實施例,金屬層103可以是金屬線。
圖2所示為本發明另一實施例提供的一種柔性顯示面板200的剖面圖。柔性顯示面板100包括柔性基板101;形成於柔性基板101上的緩衝層102;形成於緩衝層102上的金屬層103、鈍化層104和平坦化層105,鈍化層104設置在平坦化層105與金屬層103之間。柔性顯示面板100在橫向上包括顯示區1和彎折區3,緩衝層102包括第一部分和第二部分,第一部分對應於顯示區1,第二部分對應於彎折區3,第二部分的厚度小於第一 部分的厚度。
根據本發明的實施例,通過在形成金屬層之前對彎折區的緩衝層進行蝕刻,使得彎折區的緩衝層的厚度小於顯示區的緩衝層的厚度,從而提高了柔性顯示面板的彎折能力。
根據本發明的實施例,緩衝層102的第一部分可以包括依次設置的第一SIOx層106、SINx層107和第二SIOx層108,緩衝層102的第二部分包括第一SIOx層,並且不包括SINx層和第二SIOx層。
參見圖2,在柔性顯示面板的顯示區,緩衝層從下向上依次設置有第一SIOx層106、SINx層107、第二SIOx層108(即第一部分)。在柔性顯示面板的彎折區,緩衝層可以是將SINx層和第二SIOx層去掉而剩下的第一SIOx層109(即第二部分)。第一SIOx層106和第一SIOx層109處於同一層。
應理解,緩衝層102的第一部分可以包括第一SIOx層、SINx層和第二SIOx層中的至少一層,而且本發明的實施例對各層的設置順序不作限制。可替代地,緩衝層102也可以是其它矽化合物或者其它可以用作緩衝層的材料。
進一步地,第二部分的第一SIOx層109的厚度小於或等於第一部分的第一SIOx層106的厚度。例如,第一部分的厚度可以為300nm至1400nm。第二部分的厚度為10nm至100nm。
優選地,第二部分的厚度為10nm至30nm。
可選地,作為另一實施例,該柔性基板101在橫向上還包括過渡區2。過渡區2位於顯示區1和彎折區3之間,緩衝層102還包括第三 部分,第三部分對應於過渡區2,第三部分在從柔性基板101朝向金屬層103的方向上寬度逐漸減少。第三部分的厚度為300nm至700nm。過渡區2的作用是降低金屬層爬坡時斷線的風險,第三部分的厚度變薄是為了降低金屬層在彎折時斷線的風險。
根據本發明的實施例,金屬層103可以是金屬線。
鈍化層104和平坦化層105的材料為有機材料。緩衝層102例如可以是無機絕緣材料。例如,無機絕緣材料可以為無機矽材料,具體可以為氮化矽或氧化矽等。通常情況下,以無機矽材料作為緩衝層時,例如,在柔性顯示面板彎折時,容易導致金屬層中的金屬線斷裂。通常情況下,彎折區的緩衝層的厚度越薄,彎折區的金屬層的彎折能力越強。當彎折區的緩衝層的厚度非常小時,彎折區的金屬層位於有機層之間,在進行彎折時,彎折區的金屬層被折斷的風險大大降低。通過減小彎折區的緩衝層的厚度,可以增加柔性屏體彎折區的彎折能力。
圖3為本發明實施例的柔性顯示面板的製備方法的示意性流程圖。柔性顯示面板在橫向上包括顯示區和彎折區。圖3的製備方法用於製備圖1和圖2的實施例中的柔性顯示面板。圖3的製備方法包括如下內容:301:在柔性基板上形成緩衝層;302:對緩衝層與彎折區對應的部分進行蝕刻,得到第二部分,其中,緩衝層與顯示區對應的部分作為第一部分,第二部分的厚度小於第一部分的厚度;303:在緩衝層上形成金屬層。
根據本發明的實施例,通過在形成金屬層之前對彎折區的緩衝層進行蝕刻,使得彎折區的緩衝層的厚度小於顯示區的緩衝層的厚度,從而提高了柔性顯示面板的彎折能力。
根據本發明的實施例,在形成緩衝層時,可以在柔性基板上依次形成第一SIOx層、SINx層和第二SIOx層,並且可以蝕刻緩衝層的與彎折區對應的第二SIOx層和SINx層,以露出第二部分的第一SIOx層。
可選地,作為另一實施例,在形成緩衝層時,可以進一步蝕刻第二部分的第一SIOx,使得第二部分的第一SIOx層的厚度小於或等於第一部分的第一SIOx層的厚度。
在一個實施例中,柔性顯示面板在橫向上還包括過渡區,過渡區位於顯示區和彎折區之間,圖3的製備方法還包括:對緩衝層對應於過渡區的部分進行蝕刻,得到第三部分,其中第三部分在從柔性基板朝向金屬層的方向上寬度逐漸減少。
根據本發明的實施例,第二部分的厚度為10nm至30nm。
根據本發明的實施列,金屬層包括金屬線。
圖4為本發明實施例的柔性顯示面板的製備方法的示意性流程圖。圖4的製備方法是圖3的製圖方法的例子,用於製備圖1和圖2的實施例中的柔性顯示面板。圖的製備方法包括如下內容:401:在柔性基板上形成緩衝層;402:在整個柔性基板上依次形成第一SIOx層、SINx層和第二SIOx層;403:蝕刻緩衝層的與彎折區對應的第二SIOx層和SINx層,以露出第二部分的第一SIOx層; 404:蝕刻第二部分的第一SIOx,使得第二部分的第一SIOx層的厚度小於或等於第一部分的第一SIOx層的厚度;405:對緩衝層對應於過渡區的部分進行蝕刻,得到第三部分,其中第三部分在從柔性基板朝向金屬層的方向上寬度逐漸減少;406:在緩衝層上形成柵極絕緣層110、電容絕緣層111、層間介電層112;407:在層間介電層112上形成金屬層。即金屬層可以覆蓋層間介電層112以及緩衝層的第二部分和第三部分;408:在金屬層上形成鈍化層;409:在鈍化層上形成平坦化層。
應理解,408和409是可選的。平坦化層和鈍化層的材料為有機材料。緩衝層例如可以是無機絕緣材料。例如,無機絕緣材料可以為無機矽材料,具體可以為氮化矽或氧化矽等。通常情況下,以無機矽材料作為緩衝層時,例如,在柔性顯示面板彎折時,容易導致金屬層中的金屬線斷裂。通常情況下,彎折區的緩衝層的厚度越薄,彎折區的金屬層的彎折能力越強。當彎折區的緩衝層的厚度非常小時,彎折區的金屬層位於有機層之間,在進行彎折時,彎折區的金屬層被折斷的風險大大降低。同時,較薄的無機層可以防止刻蝕和沉積時有機材料污染腔室。通過減小彎折區的緩衝層的厚度,可以增加柔性屏體彎折區的彎折能力。此外,在沉積金屬層之前對彎折區的緩衝層進行蝕刻,該工藝流程較為簡單,從而節省成本。
以上所述僅為本發明的較佳實施例而已,並不用以限制本發 明,凡在本發明的精神和原則之內,所作的任何修改、等同替換等,均應包含在本發明的保護範圍之內。
本發明的柔性顯示面板,通過在形成金屬層之前對彎折區的緩衝層進行蝕刻,使得彎折區的緩衝層的厚度小於顯示區的緩衝層的厚度,從而提高了柔性顯示面板的彎折能力。
Claims (10)
- 一種柔性顯示面板,該柔性顯示面板包括:柔性基板;形成於該柔性基板上的緩衝層,該緩衝層包括第一部分和第二部分;和形成於該緩衝層上的金屬層,其中,該柔性顯示面板在橫向上包括顯示區和彎折區,該緩衝層的第一部分對應於該顯示區,該緩衝層的第二部分對應於該彎折區,該緩衝層的第二部分的厚度小於該第一部分的厚度。
- 如請求項1所述的柔性顯示面板,其中,該緩衝層的第一部分包括依次設置的第一SIO X層、SIN X層和第二SIO X層,其中該第一SIO X層設置在該柔性基板上,該第二部分包括第一SIO X層。
- 如請求項2所述的柔性顯示面板,其中,該緩衝層的第二部分不包括該SIN X層和該第二SIO X層。
- 如請求項2所述的柔性顯示面板,其中,該第二部分的第一SIO X層的厚度小於或等於該第一部分的第一SIO X層的厚度。
- 如請求項1至4中任一項所述的柔性顯示面板,其中,該柔性顯示面板在橫向上還包括過渡區,該過渡區位於該顯示區和該彎折區之間,該緩衝層還包括第三部分,該第三部分對應於該過渡區,該第三部分在從該柔性基板朝向該金屬層的方向上寬度逐漸減少。
- 如請求項1所述的柔性顯示面板,其中,該第二部分的厚度為10nm至30nm。
- 一種柔性顯示面板的製作方法,該柔性顯示面板在橫向上包括顯示區和彎折區,該方法包括: 提供柔性基板;在柔性基板上形成緩衝層;令該緩衝層與該顯示區對應的部分作為第一部分,對該緩衝層與該彎折區對應的部分進行蝕刻,得到第二部分,令該第二部分的厚度小於該第一部分的厚度;在該緩衝層上形成金屬層。
- 如請求項7所述的製作方法,其中,該在柔性基板上形成緩衝層,包括:在該柔性基板上依次形成第一SIO X層、SIN X層和第二SIO X層,其中,該對該緩衝層與該彎折區對應的部分進行蝕刻得到第二部分,包括:蝕刻該緩衝層的與彎折區對應的第二SIO X層和SIN X層,以露出該第二部分的第一SIO X層。
- 如請求項8所述的製作方法,其中,該蝕刻該緩衝層的與彎折區對應的第二SIO X層和SIN X層,以露出該第二部分的第一SIO X層之後,還包括:進一步蝕刻該第二部分的第一SIO X,使得該第二部分的第一SIO X層的厚度小於或等於該第一部分的第一SIO X層的厚度。
- 如請求項7至9中任一項所述的製作方法,其中,該柔性顯示面板在橫向上還包括過渡區,該過渡區位於該顯示區和該彎折區之間,該方法還包括:對該緩衝層對應於該過渡區的部分進行蝕刻,得到第三部分,其中該第三部分在從該柔性基板朝向該金屬層的方向上寬度逐漸減少。
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KR102535784B1 (ko) * | 2018-02-02 | 2023-05-24 | 삼성디스플레이 주식회사 | 표시 장치 및 그것의 제조 방법 |
KR102651935B1 (ko) * | 2018-10-18 | 2024-03-28 | 삼성디스플레이 주식회사 | 표시 장치 및 이의 제조 방법 |
KR20200046221A (ko) * | 2018-10-23 | 2020-05-07 | 삼성디스플레이 주식회사 | 디스플레이 장치 및 디스플레이 장치를 제조하기 위한 마스크 |
KR20200053991A (ko) * | 2018-11-09 | 2020-05-19 | 엘지디스플레이 주식회사 | 표시 장치 |
KR102626885B1 (ko) * | 2018-11-28 | 2024-01-19 | 삼성디스플레이 주식회사 | 플렉서블 표시 장치 및 이의 조립 방법 |
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2017
- 2017-08-31 CN CN201710773133.6A patent/CN109427249A/zh active Pending
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2018
- 2018-05-24 KR KR1020197033418A patent/KR102380403B1/ko active IP Right Grant
- 2018-05-24 WO PCT/CN2018/088107 patent/WO2019041901A1/zh unknown
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- 2018-05-24 JP JP2019564010A patent/JP2020521175A/ja active Pending
- 2018-06-26 TW TW107121861A patent/TWI670845B/zh active
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KR20190133267A (ko) | 2019-12-02 |
TWI670845B (zh) | 2019-09-01 |
US20190214412A1 (en) | 2019-07-11 |
KR102380403B1 (ko) | 2022-03-31 |
EP3614431A1 (en) | 2020-02-26 |
CN109427249A (zh) | 2019-03-05 |
US10756126B2 (en) | 2020-08-25 |
WO2019041901A1 (zh) | 2019-03-07 |
EP3614431A4 (en) | 2020-04-22 |
JP2020521175A (ja) | 2020-07-16 |
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