TW201810478A - 基板檢測裝置 - Google Patents

基板檢測裝置 Download PDF

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Publication number
TW201810478A
TW201810478A TW106119837A TW106119837A TW201810478A TW 201810478 A TW201810478 A TW 201810478A TW 106119837 A TW106119837 A TW 106119837A TW 106119837 A TW106119837 A TW 106119837A TW 201810478 A TW201810478 A TW 201810478A
Authority
TW
Taiwan
Prior art keywords
test
test program
aforementioned
program
development environment
Prior art date
Application number
TW106119837A
Other languages
English (en)
Chinese (zh)
Inventor
杉山克昌
三井淳夫
小菅豊
成川健一
森田慎吾
Original Assignee
日商東京威力科創股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商東京威力科創股份有限公司 filed Critical 日商東京威力科創股份有限公司
Publication of TW201810478A publication Critical patent/TW201810478A/zh

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F11/00—Error detection; Error correction; Monitoring
    • G06F11/22—Detection or location of defective computer hardware by testing during standby operation or during idle time, e.g. start-up testing
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F9/00—Arrangements for program control, e.g. control units
    • G06F9/06—Arrangements for program control, e.g. control units using stored programs, i.e. using an internal store of processing equipment to receive or retain programs
    • G06F9/44—Arrangements for executing specific programs

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Software Systems (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Quality & Reliability (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Tests Of Electronic Circuits (AREA)
TW106119837A 2016-06-28 2017-06-14 基板檢測裝置 TW201810478A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016-127742 2016-06-28
JP2016127742A JP2018006406A (ja) 2016-06-28 2016-06-28 基板検査装置

Publications (1)

Publication Number Publication Date
TW201810478A true TW201810478A (zh) 2018-03-16

Family

ID=60786534

Family Applications (1)

Application Number Title Priority Date Filing Date
TW106119837A TW201810478A (zh) 2016-06-28 2017-06-14 基板檢測裝置

Country Status (3)

Country Link
JP (1) JP2018006406A (fr)
TW (1) TW201810478A (fr)
WO (1) WO2018003269A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI772189B (zh) * 2021-09-24 2022-07-21 英業達股份有限公司 硬碟模擬裝置及應用該裝置的測試系統及其測試方法
TWI822833B (zh) * 2019-08-15 2023-11-21 優顯科技股份有限公司 電子探測板、光電探測模組、與電子探測方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE112020000469T5 (de) * 2019-01-22 2021-10-07 Advantest Corporation Automatisierte testeinrichtung, die ein auf-chip-system-teststeuergerät verwendet

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090224793A1 (en) * 2008-03-07 2009-09-10 Formfactor, Inc. Method And Apparatus For Designing A Custom Test System
JP2010043993A (ja) * 2008-08-15 2010-02-25 Yokogawa Electric Corp 半導体テスト装置
MY166393A (en) * 2010-05-05 2018-06-25 Teradyne Inc System for concurrent test of semiconductor devices
JP2012181034A (ja) * 2011-02-28 2012-09-20 Yokogawa Electric Corp 半導体試験装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI822833B (zh) * 2019-08-15 2023-11-21 優顯科技股份有限公司 電子探測板、光電探測模組、與電子探測方法
TWI772189B (zh) * 2021-09-24 2022-07-21 英業達股份有限公司 硬碟模擬裝置及應用該裝置的測試系統及其測試方法

Also Published As

Publication number Publication date
WO2018003269A1 (fr) 2018-01-04
JP2018006406A (ja) 2018-01-11

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