TW201703925A - Cutting device and cutting method - Google Patents

Abstract

A cutting device is provided with a first flange and a second flange secured to a rotary shaft in such a state as to sandwich a rotary blade. The first flange is provided with an annular holding part in close contact at the outer-peripheral portion thereof with a first surface of the rotary blade, and an annular first recess. The second flange is provided with an annular holding part in close contact at the outer-peripheral portion thereof with a second surface of the rotary blade, and an annular second recess. The first recess and the second recess are disposed facing each other with the rotary blade therebetween. The distance from the first surface to the inner bottom surface of the first recess and the distance from the second surface to the inner bottom surface of the second recess are set so as to be greater than the maximum size of abrasive grains of the rotary blade, less than the maximum amount of deformation within the permissible range of deformation of the rotary blade, and equal to each other. When the rotary blade deforms, the abrasive grains come into contact with the first recess and second recess.

Description

Cutting device and cutting method

The present invention relates to a cutting device and a cutting method for producing a plurality of singulated products by cutting the object to be cut.

A substrate produced in the following manner is referred to as a sealed substrate, that is, a substrate composed of a printed substrate, a lead frame, or the like is virtually divided into a plurality of regions in a lattice shape, and wafer-shaped components are mounted in the respective regions ( For example, after the semiconductor wafer), the entire substrate is resin-sealed. The sealed substrate is cut by using a cutting mechanism such as a rotary blade, and is singulated in a unit of a region, and each obtained by singulation is a product.

Conventionally, in the cutting of the sealed substrate using the cutting device, first, the sealed substrate is placed on the cutting platform. Next, the sealed substrate is aligned (aligned). By aligning, the position of the imaginary cutting line that separates the plurality of regions is set. Next, the cutting stage on which the sealed substrate is placed is moved relative to the cutting mechanism. The cutting water is sprayed to the cut portion of the sealed substrate, and the sealed substrate is cut along the cutting line set on the sealed substrate by the cutting mechanism. The singulated article is produced by cutting the sealed substrate.

As the cutting mechanism, a rotating shaft having a disk-shaped rotating blade is used. The rotating shaft rotates the rotating knife at a high speed. The sealed substrate is cut by a rotating knife that rotates at a high speed. Rotary knife The flange (fixing member) sandwiches both faces thereof and is fixed in parallel with a plane orthogonal to the axial direction of the rotating shaft provided on the rotating shaft. The rotary blade is composed of, for example, an annular grindstone obtained by combining abrasive grains such as diamond with a bonding material such as metal, resin, or ceramic. The term "annular" refers to the shape of a portion sandwiched by two concentric circles having different diameters.

The thickness of the rotary knives is very thin, ranging from several tens of μm to several hundreds of μm, so that it is difficult to sufficiently ensure the rigidity of the rotary knives. Since the rotary blade rotates at a high speed of about 30,000 to 50,000 rpm, the centrifugal force acts from the center of the rotary blade toward the outer circumferential direction. When the centrifugal force is increased to a certain extent or more, the rotary blade may be inclined, warped, twisted, deflected, or the like due to the centrifugal force (hereinafter referred to as "deformation"). If the amount of deformation of the rotary knives caused by the centrifugal force becomes large, there is a possibility that the rotary knives are broken.

In the prior art, it has been disclosed that "the washer-shaped cutting insert is fixed to the front end of the rotating shaft by a nut in a state of being sandwiched by two flanges". Further, it is disclosed that "the blade is fixed in contact with the flange, so if the angle between the end surface of the flange in contact with the blade and the rotation center line of the rotation shaft is not 90 degrees, the flange may occur when the rotation shaft rotates. The content of the end surface is swayed so that the precision machining cannot be performed (for example, refer to paragraphs [0003], [0004], and FIG. 3 of Patent Document 1).

[Previous Technical Literature]

[Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2009-297855

According to the technique disclosed in Patent Document 1, the blade 31 and the flange 37 are fitted to the flange 36, and the blade 31 is held by the pair of flanges 36, 37. Further, the female screw portion 35a of the nut 35 is screwed to the flange male screw portion 36a of the flange 36 and tightened, whereby the blade 31 is held by the end faces 36c, 37a of the outer peripheral faces of the flanges 36, 37. Fixed (refer to paragraph [0020] of Patent Document 1 and FIG. 3).

As shown in FIG. 3 of Patent Document 1, the blade 31 is fixed by the end faces 36c and 37a of the outer peripheral faces of the flanges 36 and 37. In the blade 31, the portion other than the portion fixed by the end faces 36c, 37a of the flanges 36, 37 is not held by the flanges 36, 37. Therefore, if the centrifugal force becomes large, the portion of the blade 31 that is not held by the flanges 36, 37 is liable to be deformed by the centrifugal force. If the amount of deformation becomes large, the blade 31 is broken.

An object of the present invention is to provide a cutting device and a cutting method capable of preventing breakage of a rotary blade by suppressing deformation of a rotary blade caused by centrifugal force.

In order to solve the above-described problems, the cutting device of the present invention includes a platform on which the object to be cut is placed, a cutting mechanism that cuts the object to be cut, and a movement that moves the platform and the cutting mechanism. a cutting device used for manufacturing a plurality of products by cutting the object to be cut, and a rotating shaft provided in the cutting mechanism; and a disk-shaped rotating blade opposite to the above The first fixing member is disposed on a side of the first surface facing the body of the cutting mechanism, and the first holding portion is provided on an outer peripheral portion of the first fixing member. And formed in the above The first concave portion is provided inside the first holding portion in the first fixing member, and the second fixing member is provided on the rotating blade as the first one. a second holding portion that is provided on the outer peripheral portion of the second fixing member and that is in close contact with the abrasive grains formed on the second surface of the rotary blade; and the second concave portion. The second fixing member is disposed inside the second holding portion; and the rotating blade is opposed to the rotating shaft in a state in which the rotating blade is sandwiched between the first fixing member and the second fixing member. The first recessed portion and the second recessed portion are disposed to face each other across the rotary blade, and the first distance from the first surface of the rotary blade to the inner bottom surface of the first recessed portion and the first step of the rotary blade The second distance from the two faces to the inner bottom surface of the second recess is equal to a predetermined distance, and the predetermined distance is larger than the maximum diameter of the abrasive grain and smaller than the maximum amount of deformation in the range in which the deformation of the rotary blade is allowed.

In the above-described first fixing member, the first holding portion and the first concave portion are each formed in a ring shape, and the second fixing member is the second portion. The holding portion and the second recess are formed in a ring shape.

In the cutting device of the present invention, the following aspects exist: In a state in which the rotary blade is stopped, an end surface formed by a surface of the first holding portion that is in contact with the abrasive grains formed on the first surface of the rotary blade, and a second holding portion are formed on the rotary blade. The end surface formed by the surface of the second surface in which the abrasive grains are in close contact is inclined so as to be away from the rotary blade as it is closer to the rotation axis.

In the cutting device of the present invention, there is a case where the object to be cut is a sealed substrate.

In the cutting device of the present invention, the object to be cut is a plate-shaped member in which a functional element is embedded in a plurality of regions corresponding to the plurality of products.

In order to solve the above problems, the cutting method of the present invention includes a step of placing the object to be cut on the platform, and a disk-shaped rotating blade fixed to the rotating shaft of the cutting mechanism and the object to be cut. a step of relatively moving, a method of cutting a plurality of products by cutting the object to be cut, and the cutting method comprising the steps of: preparing a first fixing member, wherein the first fixing member is The rotating blade has a first holding portion and a first recessed portion on a side close to the first surface of the body of the cutting mechanism, and a second fixing member is prepared, and the second fixing member is the first rotating member The second holding portion and the second concave portion are provided on the side opposite to the second surface of the surface, and the rotating blade is prepared, and the rotating blade is fixed by being sandwiched between the first fixing member and the second fixing member. And rotating the rotating blade; and in the step of preparing the first fixing member, the peripheral portion of the first fixing member is provided The first holding portion is provided, and the first concave portion is provided inside the first holding portion; and in the step of preparing the second fixing member, the second holding portion is provided on a peripheral portion of the second fixing member, and The second recess is provided inside the second holding portion, and the step of preparing the rotating blade includes the following steps.

‧ a step of arranging the first concave portion and the second concave portion facing each other with the rotating blade facing each other.

‧ a step of adhering the first holding portion to the abrasive grains formed on the first surface of the rotary blade.

‧ a step of adhering the second holding portion to the abrasive grains formed on the second surface of the rotary blade.

‧ setting the first distance from the first surface of the rotary blade to the inner bottom surface of the first recess to be equal to the second distance from the second surface of the rotary blade to the inner bottom surface of the second recess The steps of the distance.

‧ the step of setting the predetermined distance to be larger than the maximum diameter of the abrasive grains and smaller than the maximum amount of deformation within a range allowing the deformation of the rotary blade.

In the cutting method of the present invention, in the step of preparing the first fixing member, the first holding portion and the first concave portion are each formed in a ring shape; and the second fixing member is prepared In the step, the second holding portion and the second concave portion are formed in a ring shape.

In the cutting method of the present invention, in the step of preparing the rotating blade, in the state in which the rotating blade is stopped, An end surface formed by a surface of the first holding portion that is in contact with the abrasive grains formed on the first surface of the rotary blade, and an end surface of the second holding portion that is in contact with the abrasive grains formed on the second surface of the rotary blade The end surface formed is inclined so as to be away from the rotary blade as it is closer to the above-mentioned rotation axis.

In the cutting method of the present invention, there is a case where the object to be cut is a sealed substrate.

In the cutting method of the present invention, the object to be cut is a plate-shaped member in which a functional element is embedded in a plurality of regions corresponding to the plurality of products.

According to the invention, the first fixing member and the second fixing member that are fixed to the rotating shaft in a state in which the rotary blade is sandwiched from both sides are provided in the cutting mechanism. A ring-shaped first holding portion that is in close contact with the abrasive grains formed on the first surface of the rotary blade is provided on the outer peripheral portion of the first fixing member. An annular first recess is provided on the inner side of the first holding portion of the first fixing member (the side close to the center of the rotating shaft, the same as in the present application). A second holding portion that is in close contact with the abrasive grains formed on the second surface of the rotary blade is provided on the outer peripheral portion of the second fixing member. An annular second recess is provided inside the second holding portion of the second fixing member. The first recess and the second recess are disposed to face each other with a rotating blade interposed therebetween. The first distance from the first surface of the rotary blade to the inner bottom surface of the first concave portion and the second distance from the second surface of the rotary blade to the inner bottom surface of the second concave portion are set to be equal to each other. The maximum amount of deformation within a range that is greater than the maximum diameter of the abrasive particles and less than the deformation of the allowable rotary knives. Thereby, the deformation of the rotary blade caused by the centrifugal force generated by the rotation of the rotary blade is suppressed to a minute deformation. Therefore, damage of the rotary blade due to centrifugal force is prevented.

1‧‧‧cutting device

2‧‧‧Sealed substrate (cut object)

3‧‧‧Substrate supply mechanism

4‧‧‧Spreading platform (platform)

5‧‧‧Mobile agencies

6‧‧‧Rotating mechanism

7‧‧‧Rotary shaft (cutting mechanism)

8‧‧‧Rotary axis

8a‧‧‧ front end

8i‧‧‧ female thread

9‧‧‧Rotary knife

9a‧‧‧Combined materials

10‧‧‧Checking platform

11‧‧‧The substrate has been cut

12‧‧‧Tray

13‧‧‧Shaft main body

14‧‧‧Shaft motor

15‧‧‧1st flange (1st fixing member)

15a‧‧‧ base

15b‧‧‧ base

15c‧‧‧keeping department (1st holding department)

15e‧‧‧ nut male thread

16‧‧‧2nd flange (2nd fixing member)

16c‧‧‧keeping department (second holding unit)

17‧‧‧ bolt

17e‧‧‧ Male thread department

18‧‧‧through holes

19‧‧‧1st recess

20‧‧‧ recess

21‧‧‧ nuts

21i‧‧‧ nut female thread

22‧‧‧through holes

23‧‧‧through holes

24‧‧‧2nd recess

25‧‧‧ hexagonal hole

26‧‧‧Abrasive grain

A‧‧‧Substrate supply module

B‧‧‧Substrate cutting module

C‧‧‧Check module

CTL‧‧‧Control Department

Distance from the first surface of the L1‧‧1 to the inner bottom surface of the first recess (the first distance)

L2‧‧‧Distance from the second surface to the inner bottom surface of the second recess (second distance)

P‧‧‧Products

S1‧‧‧ first side

S2‧‧‧2nd

Fig. 1 is a plan view showing an outline of a cutting device of the present invention.

Fig. 2A is a schematic plan view showing a rotating shaft used in the cutting device shown in Fig. 1;

Fig. 2B is a schematic right side view showing a rotating shaft used in the cutting device shown in Fig. 1.

Fig. 3 is a schematic exploded cross-sectional view showing the constituent members of the rotating shaft shown in Figs. 2A and 2B.

Fig. 4 is a schematic cross-sectional view showing a state in which the constituent members shown in Fig. 3 are fixed to a rotating shaft.

Fig. 5 is a schematic cross-sectional view showing the rotary blade and the flange shown in Fig. 4 in an enlarged manner together with the rotary blade and the flange used in the cutting device according to the second embodiment of the present invention.

As shown in FIGS. 4 and 5, the first flange 15 and the second flange 16 which are fixed to the rotary shaft 8 in a state where the rotary blade 9 is sandwiched from both sides are provided on the rotary shaft 7. The first flange 15 is provided with an annular holding portion 15c that is in close contact with the abrasive grains formed on the first surface S1 of the rotary blade, and a first concave portion 19 that is formed in a ring shape inside the holding portion 15c. The second flange 16 is provided with an annular holding portion 16c in which the outer peripheral portion is in close contact with the abrasive grains formed on the second surface S2 of the rotary blade 9, and a second concave portion 24 formed in a ring shape inside the holding portion 16c. . The first recess 19 and the second recess 24 are disposed to face each other with the rotary blade 9 facing each other. The distance L1 from the first surface S1 of the rotary blade 9 to the inner bottom surface of the first concave portion 19 and the distance L2 from the second surface S2 of the rotary blade 9 to the inner bottom surface of the second concave portion 24 are set to be equal to each other. The predetermined distance is larger than the maximum diameter of the abrasive grains 26 and smaller than the maximum amount of deformation within the range in which the deformation of the rotary blade 9 is allowed. Thereby, the deformation of the rotary blade 9 caused by the centrifugal force generated by the rotation of the rotary blade 9 is suppressed to a slight change. shape. Therefore, damage of the rotary blade 9 due to centrifugal force is prevented.

(Example 1)

Embodiment 1 of the cutting device of the present invention will be described with reference to Fig. 1 . For the sake of easy understanding, any of the drawings in the present application is appropriately omitted or exaggeratedly drawn in a schematic manner. The same components are denoted by the same reference numerals, and the description thereof will be appropriately omitted.

As shown in Fig. 1, the cutting device 1 is a device that singulates a plurality of products into a single product by cutting the object to be cut. The cutting device 1 includes a substrate supply module A, a substrate cutting module B, and an inspection module C as constituent elements. Each component (each module A to C) can be detached and replaced with respect to other components.

The substrate supply module A is provided with a substrate supply mechanism 3 that supplies the sealed substrate 2 corresponding to the object to be cut, and a control unit CTL that performs operation or control of the cutting device 1. The sealed substrate 2 has a substrate composed of a printed substrate, a lead frame, or the like, a plurality of functional elements (a wafer such as a semiconductor element) mounted on a plurality of regions included in the substrate, and a plurality of regions collectively covering the plurality of regions. Sealing resin. The sealed substrate 2 is a cut object that is finally cut and singulated. The sealed substrate 2 is transported to the substrate cutting module B by a transport mechanism (not shown).

The cutting device 1 shown in Fig. 1 is a cutting device of a single cutting table type. Therefore, one cutting platform 4 is provided in the substrate cutting module B. The cutting platform 4 is movable in the Y direction of the drawing by the moving mechanism 5, and is rotatable in the θ direction by the rotating mechanism 6. The cutting jig (not shown) is fixed to the cutting platform 4, and the sealed substrate 2 is placed on the cutting jig.

In the substrate cutting module B, the rotating shaft 7 is provided as a cutting mechanism. The cutting device 1 shown in Fig. 1 is provided with a cutting device comprising a single rotating shaft of one rotating shaft 7. The shaft 7 can be independently Move in the X direction and the Z direction. The rotating shaft 7 includes a rotating shaft 8 and a disk-shaped rotating blade 9 attached to the front end of the rotating shaft 8. The rotary blade 9 is disposed in parallel with a plane orthogonal to the axial direction (X direction) of the rotary shaft 8 (including a surface of the Y axis and the Z axis). A cutting water nozzle (not shown) for jetting the cutting water in order to suppress the frictional heat generated by the rotating blade 9 rotating at a high speed is provided in the rotating shaft 7. The sealed substrate 2 is cut by relatively moving the cutting platform 4 and the rotating shaft 7. The rotary blade 9 cuts the sealed substrate 2 by rotating in a plane including the Y axis and the Z axis.

The inspection platform 10 is provided in the inspection module C. The inspection platform 10 is provided with an assembly formed of a plurality of products P obtained by cutting the sealed substrate 2 and singulated, that is, the substrate 11 has been cut. A plurality of products P are inspected by an inspection camera (not shown), and are selected as good and defective. The good product is housed in the tray 12.

In the first embodiment, the cutting device 1 having a single cutting table type and a single rotating shaft has been described. The present invention is not limited thereto, and a cutting device comprising a single cutting table method and a double rotating shaft, or a cutting device comprising a double cutting system and a double rotating shaft may be used.

The rotation shaft 7 used in the cutting device 1 of the present invention will be described with reference to Figs. 2A to 5 . The rotating shaft 7 as a cutting mechanism shown in FIGS. 2A and 2B includes a rotating shaft main body portion 13, a rotating shaft motor 14 as a driving mechanism, and a rotating shaft 8 connected to the rotating shaft motor 14. The rotary shaft 8 is rotatably supported by the rotary shaft 7 in a non-contact state by air blown from a radial air bearing and an axial air bearing (not shown). A rotary blade 9 that cuts the sealed substrate 2 (see FIG. 1) is attached to the end of the rotating shaft 8. The rotary blade 9 is disposed in parallel with a plane orthogonal to the axial direction (X direction) of the rotary shaft 8 (including a surface of the Y axis and the Z axis). The rotary blade 9 is sandwiched by the first flange 15 as a fixing member and the second flange 16 on both sides. First flange 15 and second protrusion The rim 16 is fixed to the rotating shaft 8 in a state in which the rotary blade 9 is clamped. The rotary blade 9 is a rotary cutter of a washer type having a through hole. The rotary knife 9 is detachable from the rotary shaft 7 and is replaceable.

The constituent members of the rotary shaft 7 used in the present embodiment will be described with reference to Fig. 3 . As shown in Fig. 3, the rotating shaft 8 provided on the rotating shaft 7 has a small diameter front end portion 8a for fixing the first flange 15 at its front end. At the end portion 8a of the rotating shaft 8, a female screw portion 8i that is screwed to fix the first flange 15 to the bolt 17 of the rotating shaft 8 is formed.

The first flange 15 and the second flange 16 are members that hold the rotary blade 9 by nip. In a state where the rotary blade 9 is sandwiched between the first flange 15 and the second flange 16, the first flange 15 and the second flange 16 are fixed and integrated. The first flange 15 and the first flange 15 of the integrated first flange 15 and the second flange 16 are fixed to the rotating shaft 8 by bolts 17.

The first flange 15 is disposed on the rear side flange of the first surface S1 (the surface on the side of the rotating shaft 7) of the rotary blade 9. The first flange 15 is directly fixed to the rotating shaft 8. A through hole 18 that is fitted to the end portion 8a of the rotating shaft 8 is provided at a center portion of the first flange 15.

The first flange 15 is provided with a cylindrical base portion 15a into which the rotary blade 9 is inserted, and a cylindrical base portion 15b into which the second flange 16 is fitted. In order to hold the rotary blade 9, the outer peripheral portion of the first flange 15 is provided with a holding portion 15c formed of a convex portion formed in an annular shape (preferably an annular shape). In order to suppress deformation of the rotary blade 9, the first flange 15 is provided with a first recess 19 formed in an annular shape (preferably annular shape). A recess 20 that receives the head of the bolt 17 screwed to the female screw portion 8i of the rotary shaft 8 and a nut male thread portion 15e of the nut 21 are formed at the center end portion of the first flange 15. In the present application, the expression "the outer peripheral portion of the rotary blade 9" includes, in addition to the outer edge of the rotary blade 9, the portion that does not include the outer edge of the rotary blade 9 and enters slightly from the outer edge thereof. .

The annular holding portion 15c is provided at a position corresponding to the outer peripheral portion of the rotary blade 9. The first recess 19 is provided in a portion that enters inward from the holding portion 15c. As described below, the depth of the first recess 19 is formed to a depth such that the abrasive grains of the rotary blade 9 do not contact the inner bottom surface of the first recess 19 .

The rotary blade 9 is a rotary blade of a washer type having a through hole 22 and formed in an annular shape. The through hole 22 of the rotary blade 9 is inserted into the cylindrical base portion 15a of the first flange. The rotary blade 9 is composed of, for example, an annular grindstone obtained by combining abrasive grains such as diamond with a bonding material such as metal, resin, or ceramic. As the abrasive grains used for cutting the sealed substrate, diamond abrasive grains having a particle diameter of about several μm to several tens of μm are often used.

The second flange 16 is disposed on the front side flange of the second surface S2 of the rotary blade 9 (the surface opposite to the rotation shaft 7 and opposite to the first surface S1). The second flange 16 is fitted to the first flange 15 . A through hole 23 fitted to the cylindrical base portion 15b of the first flange 15 is provided at a central portion of the second flange 16. In order to hold the rotary blade 9, the outer peripheral portion of the second flange 16 is provided with a holding portion 16c formed of a convex portion formed in an annular shape (preferably an annular shape). In order to suppress deformation of the rotary blade 9, the second flange 16 is provided with a second recess 24 formed in an annular shape (preferably annular shape).

The holding portion 16c is provided at a position corresponding to the outer peripheral portion of the rotary blade 9. The holding portion 15c and the holding portion 16c are provided at positions facing each other across the rotary blade 9. The second recess 24 is provided in a portion that enters inward from the holding portion 16c. The first recess 19 and the second recess 24 are provided at positions facing each other with the rotary blade 9 interposed therebetween. Similarly to the depth of the first recess 19, the depth of the second recess 24 is formed to a depth such that the abrasive grains of the rotary blade 9 do not contact the inner bottom surface of the second recess 24.

The rotary blade 9 is held by a ring formed on the outer periphery of the first flange 15 The holding portion 15c is held between the annular holding portion 16c provided on the outer peripheral portion of the second flange 16. The rotary blade 9 is held in parallel with a plane orthogonal to the axial direction of the rotary shaft 8. The end surface of the holding portion 15c (the lower surface of the holding portion 15c in Fig. 3) is a surface that is in contact with (close contact with) the first surface S1 of the rotary blade 9. Microscopically, the end surface of the holding portion 15c is in contact with (adhered to) the abrasive grains formed on the first surface S1 of the rotary blade 9. The end surface of the holding portion 16c (the upper surface of the holding portion 16c in Fig. 3) is a surface that is in contact (adhesively) with the second surface S2 of the rotary blade 9. Microscopically, the end surface of the holding portion 16c is in contact with (adhered to) the abrasive grains formed on the second surface S2 of the rotary blade 9. In order to hold the rotary blade 9 with high precision, the end faces of the holding portion 15c and the end faces of the holding portion 16c have high flatness, respectively.

The nut 21 is for fixing the second flange 16 to the flange nut of the first flange 15 . A nut female thread portion 21i is formed on the inner circumferential surface of the nut 21. By screwing the nut 21 to the nut male thread portion 15e of the first flange 15, the rotary blade 9 is held by the first flange 15 and the second flange 16 and fixed.

The bolt 17 is a fixing member for fixing the first flange 15 and the second flange 16 that sandwich the rotary blade 9 and fixed by the nut 21 to the rotary shaft 8. The bolt 17 is formed with a male screw portion 17e screwed to the female screw portion 8i of the rotary shaft 8. In order to screw the bolt 17 with respect to the rotating shaft 8, or to rotate the bolt 17 from the rotating shaft 8, a hexagonal hole 25 is formed at the head of the bolt 17, for example.

The sequence in which the rotary blade 9 is attached to the rotary shaft 7 will be described with reference to Fig. 3 . First, the through hole 22 of the rotary blade 9 is inserted into the cylindrical base portion 15a of the first flange 15. Next, the through hole 23 of the second flange 16 is fitted into the cylindrical base portion 15b of the first flange 15. Further, the nut female thread portion 21i of the nut 21 is screwed to the nut end formed at the front end of the first flange 15 The threaded portion 15e is screwed in and tightened. Thereby, the rotary blade 9 is sandwiched and fixed by the first flange 15 and the second flange 16.

Next, in a state in which the rotary blade 9 is fixed by the first flange 15 and the second flange 16, the through hole 18 formed in the center portion of the first flange 15 is fitted to the front end of the rotary shaft 8 of the rotary shaft 7. Part 8a. Next, the bolt 17 is screwed into the female screw portion 8i formed at the end portion 8a before the rotary shaft 8 and tightened. For example, an L-shaped hexagonal wrench or the like is inserted into the hexagonal hole 25 formed in the head of the bolt 17, and the bolt 17 is tightened. By screwing the bolt 17 to the rotating shaft 8, the rotary blade 9 held by the first flange 15 and the second flange 16 is fixed to the rotating shaft 8 of the rotating shaft 7.

A state in which the rotary blade 9 is attached to the rotary shaft 7 will be described with reference to Figs. 4 and 5 . As shown in FIG. 4, the rotary blade 9 is sandwiched by the first flange 15 and the second flange 16, and is fixed by the nut 21. The fixed rotary blade 9 is fixed to the rotary shaft 8 by bolts 17. The rotary blade 9 is fixed by being held by a holding portion 15c formed on the outer peripheral portion of the first flange 15 and a holding portion 16c formed on the outer peripheral portion of the second flange 16.

As shown in FIG. 5, the end surface of the holding portion 15c is in contact with (adhered to) the abrasive grains 26 formed on the first surface S1 of the rotary blade 9. The end surface of the holding portion 16c is in contact with (adhered to) the abrasive grains 26 formed on the second surface S2 of the rotary blade 9. The rotary blade 9 which is fixed by the end surface of the holding portion 15c and the end surface of the holding portion 16c is rotated at a high speed, thereby cutting the sealed substrate 2 (see Fig. 1).

Regarding the order in which the rotary blade 9 is attached to the rotary shaft 7, the present embodiment and the conventional techniques are all performed in exactly the same order (see paragraphs [0019], [0020], and FIG. 3 of Patent Document 1). It is known that the depth of the first recess 19 and the depth of the second recess 24 are different from the invention of the present application. Referring to Fig. 4 of the present application as appropriate, a problem occurring when conventionally using two flanges corresponding to the first flange 15 and the second flange 16 shown in Fig. 4 of the present application will be described.

Conventionally, in general, two recesses are formed so that the depth of the first recess 19 and the depth of the second recess 24 shown in FIG. 4 of the present application are about 0.3 mm to 0.5 mm. The rotary blade 9 is rotated at a high speed, whereby centrifugal force acts on the rotary blade 9. The centrifugal force acts from the center of the rotary blade 9 toward the radially outer side. Due to this centrifugal force, the rotary blade 9 is subjected to a force from the center toward the outside, and is intended to be displaced (deformed) to the outside.

Conventionally, the rotary blade 9 is fixed to the outer peripheral portion of the two flanges by the holding portion 15c and the holding portion 16c. Thereby, the rotary blade 9 cannot be displaced toward the radially outer side by the centrifugal force. Therefore, the rotary blade 9 receives a force toward the inner bottom surface of the first recess 19 formed in the first flange 15 or the inner bottom surface of the second recess 20 of the second flange 16. Therefore, deformation due to centrifugal force is generated in the rotary blade 9. Since both the first recessed portion 19 and the second recessed portion 24 have a depth of about 0.3 mm to 0.5 mm, the rotary blade 9 is deformed in the internal space corresponding to the depths. There is a case where the amount of deformation of the rotary blade 9 exceeds the allowable range due to the centrifugal force. In this case, the inner blade formed by the first flange 15 and the first surface S1 and the inner blade formed by the second flange 16 and the second surface S2 are damaged.

On the other hand, according to the present invention, as shown in FIGS. 4 and 5, the first recessed portion 19 and the second recessed portion 24 are formed in the first flange 15 and the second flange 16, respectively. The first recess 19 and the second recess 24 have a very small depth. As shown in Fig. 5, the rotary blade 9 is formed by bonding a plurality of abrasive grains 26 made of, for example, diamond, to the surface of a bonding material 9a called a binder. The abrasive grains 26 contained in the rotary blade 9 are in a state of being buried near the surface of the bonding material 9a. The abrasive grains 26 contained in the rotary blade 9 have a particle diameter of several μm to several tens of μm.

In the state in which the first flange 15 and the second flange 16 are sandwiched and fixed by the first blade 15 and the second flange 16, the distance from the first surface S1 of the rotary blade 9 to the inner bottom surface of the first concave portion 19 is set to L1. The distance from the second surface S2 of the rotary blade 9 to the inner bottom surface of the second concave portion 24 is defined as L2.

The distance L1 from the first surface S1 of the rotary blade 9 to the inner bottom surface of the first concave portion 19 and the distance L2 from the second surface S2 of the rotary blade 9 to the inner bottom surface of the second concave portion 24 are slightly larger than those in the rotary blade 9. The maximum value of the particle diameter of the abrasive grains 26 contained is set. Further, the distance L1 and the distance L2 are set so as to be equal to a predetermined distance.

For example, it is assumed that the maximum value of the particle diameter of the abrasive grains 26 formed on the rotary blade 9 is 15 μm. In this case, the distance L1 from the inner surface of the first surface S1 to the inner surface of the first concave portion 19 is set to be 0.02 mm, for example, to be slightly larger than the maximum value of the particle diameter of the abrasive grains 26 formed on the rotary blade 9. = 20 μm). Similarly, the distance L2 from the inner surface of the second surface S2 to the inner surface of the second concave portion 24 is slightly larger than the maximum value of the particle diameter of the abrasive grains 26 formed on the rotary blade 9, and is equal to the distance L1. For example, it is set to 0.02 mm.

It is assumed that the abrasive grains 26 formed in the abrasive grains 26 of the rotary blade 9, more specifically, the abrasive grains 26 having the largest particle diameter (= 15 μm) in the state of being embedded in the surface of the bonding material 9a of the rotary blade 9. The maximum value of the amount of the abrasive grains 26 protruding from the surface (the first surface S1 and the second surface S2) of the bonding material 9a is a value slightly less than 15 μm when the abrasive grains 26 are slightly buried in the bonding material 9a. .

In this case, when the amount of deformation of the deformation by the rotary blade 9 slightly exceeds 5 (= 20-15) μm, the inner bottom surface of the first recess 19 comes into contact with the abrasive grains 26 protruding from the first surface S1. Similarly, when the deformation amount of the deformation generated by the rotary blade 9 slightly exceeds 5 (= 20-15) μm, the inner bottom surface of the second concave portion 24 comes into contact with the abrasive grains 26 protruding from the second surface S2. By such a case, the deformation which has become large to slightly more than 5 μm is further greatly deformed by the abrasive grains 26. because Thus, even if the rotary blade 9 is deformed by the centrifugal force acting on the rotary blade 9, the deformation is suppressed to a small amount of deformation (for example, a deformation amount slightly exceeding 5 μm).

The distance L1 from the first surface S1 to the inner bottom surface of the first concave portion 19 and the distance L2 from the second surface S2 to the inner bottom surface of the second concave portion 24 are smaller than the deformation amount within the range of the deformation of the allowable rotary blade 9. The value is set in the way. Therefore, the deformation of the rotary blade 9 is suppressed below the maximum value.

According to the present invention, the concave portion 19 of the first flange 15 and the concave portion 24 of the second flange 16 are disposed to face each other with the rotary blade 9 interposed therebetween. The distance L1 from the first surface S1 of the rotary blade 9 to the inner bottom surface of the first concave portion 19 and the distance L2 from the second surface S2 of the rotary blade 9 to the inner bottom surface of the second concave portion 24 are set to be equal to each other at a predetermined distance. . The predetermined distance set is larger than the maximum diameter of the abrasive grains 26 which the rotary blade 9 has, and is smaller than the maximum amount of deformation within the range in which the deformation of the rotary blade 9 is allowed.

According to the above, when the rotary blade 9 starts to deform due to the centrifugal force, the abrasive grains 26 protruding from the first surface S1 come into contact with the inner bottom surface of the first recess 19 at an early stage. The abrasive grains 26 protruding from the second surface S2 are in contact with the inner bottom surface of the second recess 24 at an earlier stage. By this, the inner bottom surface of the first recessed portion 19 and the inner bottom surface of the second recessed portion 24 are deformed by the deformation of the rotary blade 9 at a stage where the deformation is minute. Therefore, even when the rotary blade 9 is rotated at a high speed, the damage of the rotary blade 9 due to the centrifugal force is prevented.

In the present application, the expression "equal distance" includes the case where the distances are strictly different, but the difference between the distances is sufficiently small to the extent that the deformation of the rotary blade 9 is suppressed. In other words, the expression "equal distance" includes the case where the distances are substantially equal.

Both the holding portion 15c formed in the first flange 15 and the holding portion 16c formed in the second flange 16 have an annular shape (preferably an annular shape). The present invention is not limited thereto, and at least one of the holding portions 15c and 16c may have a shape in which the convex portion (e.g., the annular shape) of the entire circumference is partially interrupted. At least one of the holding portions 15c and 16c may be a convex portion having a width formed by a polygonal shape. At least one of the holding portions 15c and 16c may have a plurality of line-shaped convex portions having a width in the radial direction of the outer circumference of the rotary blade 9, or a plurality of curved convex portions having a width in the radial direction.

Both the first recess 19 formed in the first flange 15 and the second recess 24 formed in the second flange 16 have an annular shape (preferably an annular shape). The present invention is not limited thereto, and at least one of the first recessed portion 19 and the second recessed portion 24 may have a shape in which a recessed portion (e.g., an annular shape) extending over the entire circumference is partially broken. At least one of the first recess 19 and the second recess 24 may be a recess having a width formed by a polygonal shape. At least one of the first recessed portion 19 and the second recessed portion 24 may have a plurality of line-shaped recesses having a width in the radial direction of the outer circumference of the rotary blade 9, or a plurality of curved recesses having a width in the radial direction. .

In the present specification, the expression "annular" means a shape including the shapes of the holding portions 15c and 16c, the first concave portion 19, and the second concave portion 24 described above.

(Example 2)

In the case where the rotary blade 9 is rotated at a high speed or the like, the occurrence of deformation at the blade edge of the rotary blade 9 cannot be sufficiently suppressed by the first embodiment of the present invention. A rotation shaft (cutting mechanism) 7 that suppresses deformation at the cutting edge of the rotary blade 9 in this case will be described with reference to Fig. 5 . In the second embodiment of the cutting device of the present invention, the cutting device includes the above-described rotating shaft 7.

The original generation that cannot sufficiently suppress the deformation of the tip of the rotary blade 9 Therefore, the first flange 15 and the second flange 16 may be deformed by centrifugal force. For example, at least one of the outer peripheral portion of the first flange 15 and the outer peripheral portion of the second flange 16 is rotated toward the axial direction of the rotary shaft 8 (see FIG. 4) by the centrifugal force 9 due to the centrifugal force. The surface is deformed in such a way as to bend away from it. In this case, the end face of the holding portion (at least one of the holding portions 15c or 16c) of the flange to be deformed may be rotated away from the rotating shaft 8 in a state where the rotary blade 9 is stopped. The way the knife 9 is tilted. In Fig. 5, the inclined end faces are indicated by thin broken lines. The angle (inclination) of the end surface of the holding portion 15c with respect to the first surface S1 of the rotary blade 9 is adjusted. The angle (inclination) of the end surface of the holding portion 16c with respect to the second surface S2 of the rotary blade 9 is adjusted. According to the present embodiment, the deformation of the blade edge of the rotary blade 9 is suppressed by performing at least one of the adjustments.

In each of the examples, the sealed substrate 2 in which the sealing resin is formed on the substrate is cut as the object to be cut. The substrate is not limited thereto, and a glass epoxy laminate, a printed wiring board, a ceramic substrate, a metal base substrate, a film base substrate, or the like can be used as the substrate to be cut, and a sealing resin is formed thereon. The substrate can also be applied to the present invention.

The functional element includes a sensor, a filter, an actuator, a resonator, and the like in addition to a semiconductor element such as an IC (Integrated Circuit), a transistor, or a diode. A plurality of functional components can also be mounted in one area.

Further, when the wafer of the germanium semiconductor or the compound semiconductor is held in a wafer state, and the wafer-level package in which the resin is sealed in a wafer-like package has a substantially circular shape, the cut object is also cut. The invention can be applied. The present invention can also be applied to the case where the wafer of the germanium semiconductor or the compound semiconductor itself is cut.

The object to be cut is not limited to the sealed substrate 2 (see Fig. 1). There is a case where a plate member (resin molded body) produced by a resin molding method is cut to produce an optical component such as a lens array or a product such as a general resin molded article. In this case, the resin molded body is contained in the object to be cut. The present invention is intended to suppress the deformation of the rotary blade 9 as much as possible when the object to be cut (plate member) is cut by using the rotary blade 9, in other words, the size required for the article manufactured by cutting. It is effective when the level of accuracy, appearance quality, etc. is high.

The present invention is not limited to the above-described embodiments, and may be arbitrarily and appropriately combined, changed, or selected as needed within the scope of the gist of the invention.

1‧‧‧cutting device

2‧‧‧Sealed substrate (cut object)

3‧‧‧Substrate supply mechanism

4‧‧‧Spreading platform (platform)

5‧‧‧Mobile agencies

6‧‧‧Rotating mechanism

7‧‧‧Rotary shaft (cutting mechanism)

8‧‧‧Rotary axis

9‧‧‧Rotary knife

10‧‧‧Checking platform

11‧‧‧The substrate has been cut

12‧‧‧Tray

A‧‧‧Substrate supply module

B‧‧‧Substrate cutting module

C‧‧‧Check module

CTL‧‧‧Control Department

P‧‧‧Products

Claims (10)

A cutting device including a platform on which a workpiece is placed, a cutting mechanism that cuts the object to be cut, and a moving mechanism that moves the platform and the cutting mechanism in a relative manner The cutting device is used for cutting a plurality of products, and the cutting device is characterized by comprising: a rotating shaft provided in the cutting mechanism; and a disk-shaped rotating blade fixed to the rotating shaft a first fixing member provided on a side of the first surface of the rotating blade located on a side close to the main body of the cutting mechanism, and a first holding portion provided on an outer peripheral portion of the first fixing member and formed The first concave portion is provided inside the first holding portion in the first fixing member, and the second fixing member is provided on the rotating blade as the above-mentioned rotating blade. a second holding portion provided on the outer peripheral portion of the second fixing member, and is in close contact with the abrasive grains formed on the second surface of the rotary blade; and the second a recessed portion in the second fixed structure In the state in which the rotating blade is held by the first fixing member and the second fixing member, the rotating blade is fixed to the rotating shaft, and the first concave portion is provided inside the second holding portion. a first distance from the first surface of the rotating blade to the inner bottom surface of the first recessed portion, wherein the second concave portion is disposed to face the rotating blade a predetermined distance equal to a second distance from the second surface of the rotary blade to the inner bottom surface of the second concave portion, wherein the predetermined distance is larger than a maximum diameter of the abrasive grain and smaller than a range allowing deformation of the rotary blade The maximum amount of deformation within. The cutting device according to the first aspect of the invention, wherein the first holding member and the first recess are formed in a ring shape, and the second fixing member is in the second holding member The second portion and the second recess are formed in a ring shape. The cutting device according to the first aspect of the invention, wherein the end surface of the first holding portion and the surface of the first surface of the rotary blade that is in close contact with the abrasive grains is in a state where the rotary blade is stopped, And an end surface formed by the second holding portion and the surface of the second surface of the rotary blade that is in close contact with the abrasive grains is inclined so as to be away from the rotary blade as it approaches the rotation axis. The cutting device according to any one of claims 1 to 3, wherein the object to be cut is a sealed substrate. The cutting device according to any one of claims 1 to 3, wherein the object to be cut is a plate-shaped member in which a functional element is embedded in a plurality of regions respectively corresponding to the plurality of products. A cutting method comprising the steps of: placing a object to be cut on a platform; and moving a disk-shaped rotating blade fixed to a rotating shaft of the cutting mechanism to move relative to the object to be cut, Manufacturing a plurality of articles by cutting the above-mentioned object to be cut; and the cutting method The method includes the steps of: preparing a first fixing member having a first holding portion and a first recess on a side of the rotating blade located on a side close to a body of the cutting mechanism; a second fixing member having a second holding portion and a second recess on the side of the second surface opposite to the first surface of the rotary blade; the rotary blade is prepared, and the rotary cutter is provided The first fixing member is fixed to the rotating shaft while being sandwiched between the first fixing member and the second fixing member; and the rotating blade is rotated; and in the step of preparing the first fixing member, the first fixing member The first holding portion is provided on the outer peripheral portion, and the first recess portion is provided inside the first holding portion. In the step of preparing the second fixing member, the second holding portion is provided on the outer peripheral portion of the second fixing member. And providing the second recessed portion inside the second holding portion; and the step of preparing the rotating blade includes the step of: (6-1) facing the first recessed portion and the second recessed portion via the rotary blade Configuration (6-2) a step of adhering the first holding portion to the abrasive grains formed on the first surface of the rotary blade; (6-3) a step of forming the second holding portion and the rotary blade formed a step of adhering the abrasive grains of the second surface; (6-4) a first distance from the first surface of the rotary blade to an inner bottom surface of the first concave portion, and the second surface to the second surface of the rotary blade a step of setting a second distance from the inner bottom surface of the concave portion to be equal to a predetermined distance; (6-5) A step of setting the predetermined distance to be larger than the maximum diameter of the abrasive grains and smaller than the maximum amount of deformation within a range in which the deformation of the rotary blade is allowed. The cutting method of claim 6, wherein in the step of preparing the first fixing member, the first holding portion and the first concave portion are each formed in a ring shape; and the second fixing member is prepared In the step, the second holding portion and the second concave portion are formed in a ring shape. The cutting method of claim 6, wherein in the step of preparing the rotary blade, the first holding portion and the first surface formed on the rotary blade are in a state in which the rotary blade is stopped An end surface formed by the surface in which the abrasive grains are in close contact with each other, and an end surface formed by the surface of the second holding portion and the surface of the second surface of the rotary blade that is in close contact with the abrasive grains is further away from the rotary blade as it approaches the rotation axis The way it is tilted. The cutting method according to any one of claims 6 to 8, wherein the object to be cut is a sealed substrate. The cutting method according to any one of claims 6 to 8, wherein the object to be cut is a plate-shaped member in which a functional element is embedded in a plurality of regions respectively corresponding to the plurality of products.