JP2017024093A - Cutting device and cutting method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To suppress deformation caused by centrifugal force and prevent damage in a disk-shaped rotary blade.SOLUTION: A cutting device includes a first flange 15 and a second flange 16 which are fixed to a rotary shaft in a state of holding a rotary blade 9. The first flange 15 includes an annular holding section 15c which is adhered in an outer peripheral section to a first surface S1 of the rotary blade 9 and an annular first recess 19. The second flange 16 includes an annular holding section 16c which is adhered in an outer peripheral section to a second surface S2 of the rotary blade 9 and an annular second recess 24. The first recess 19 and the second recess 24 are arranged to be opposed to each other across the rotary blade 9. A distance L1 from the first surface S1 to an inner bottom surface of the first recess 19 and a distance L2 from the second surface S2 to an inner bottom surface of the second recess 24 are set to equidistance which is larger than a maximum diameter of an abrasive grain 26 of the rotary blade 9 and is smaller than a maximum value of deformation amount in an allowable range of deformation of the rotary blade 9. When the rotary blade 9 is deformed, the abrasive grain 26 is brought into contact with the inner bottom surfaces of the first recess 19 and the second recess 24.SELECTED DRAWING: Figure 5

Description

  The present invention relates to a cutting apparatus and a cutting method for manufacturing a plurality of separated products by cutting an object to be cut.

  A substrate composed of a printed circuit board, a lead frame, etc. is virtually divided into a plurality of grid-like areas, and chip-like elements (for example, semiconductor chips) are attached to the respective areas, and then the entire board is sealed with resin. This is called a sealed substrate. A product obtained by cutting a sealed substrate by a cutting mechanism using a rotary blade or the like and dividing it into individual regions is a product.

  Conventionally, a predetermined region of a sealed substrate has been cut using a cutting mechanism such as a rotary blade using a cutting device. First, the sealed substrate is placed on a cutting table. Next, the sealed substrate is aligned (positioned). By aligning, the position of a virtual cutting line that divides a plurality of regions is set. Next, the cutting table on which the sealed substrate is placed and the cutting mechanism are relatively moved. The cutting water is sprayed onto the cut portion of the sealed substrate, and the sealed substrate is cut along the cutting line set on the sealed substrate by the cutting mechanism. An individualized product is manufactured by cutting the sealed substrate.

  As the cutting mechanism, a spindle having a disk-shaped rotary blade is used. The spindle rotates the rotary blade at high speed. A rotating blade that rotates at high speed cuts the sealed substrate. Both sides of the rotary blade are sandwiched between flanges (fixing members), and are fixed in parallel to a plane orthogonal to the axial direction of the rotary shaft provided on the spindle. The rotary blade is made of, for example, an annular grindstone in which abrasive grains such as diamond are bonded with a binding material such as metal, resin, and ceramic. “Annular” means the shape of a portion sandwiched between two concentric circles having different diameters.

  Since the thickness of the rotary blade is very thin, such as several tens of μm to several hundreds of μm, it is difficult to ensure sufficient rigidity of the rotary blade. Since the rotary blade rotates at a high speed of about 30,000 to 50,000 rpm, centrifugal force acts from the center of the rotary blade toward the outer periphery. When this centrifugal force becomes larger than a certain level, tilting, warping, distortion, bending, etc. (hereinafter referred to as “deformation”) occur in the rotary blade due to the centrifugal force. If the amount of deformation of the rotary blade due to centrifugal force increases, the rotary blade may be damaged.

  The prior art document discloses that a washer-like cutting blade is fixed to a spindle tip by a nut while being sandwiched between two flanges in a cutting device. In addition, “Because the blade is fixed in contact with the flange, if the angle between the end surface contacting the blade of the flange and the rotation center line of the spindle is not 90 degrees, the flange will cause end face blurring during spindle rotation. Thus, it is disclosed that precise processing cannot be performed ”(see, for example, paragraphs [0003] and [0004] of FIG. 3 in FIG. 3).

JP 2009-297855 A

  According to the technique disclosed in Patent Document 1, the blade 31 and the flange 37 are fitted to the flange 36, and the blade 31 is sandwiched between the pair of flanges 36 and 37. Furthermore, the blade 31 is clamped and fixed by the end surfaces 36c and 37a near the outer peripheral surface of the flanges 36 and 37 by screwing the female screw portion 35a of the nut 35 to the flange male screw portion 36a of the flange 36 and tightening (see Patent Document 1). Paragraph [0020] of FIG. 3).

  As shown in FIG. 3 of Patent Document 1, the blade 31 is fixed by end surfaces 36 c and 37 a near the outer peripheral surfaces of the flanges 36 and 37. In the blade 31, the blade 31 is not held by the flanges 36 and 37 except for portions fixed by the end faces 36c and 37a of the flanges 36 and 37. Therefore, when the centrifugal force increases, the portion of the blade 31 that is not held by the flanges 36 and 37 is likely to be deformed due to the centrifugal force. If the amount of deformation increases, the blade 31 may be damaged.

  An object of this invention is to provide the cutting device and the cutting method which can prevent the failure | damage of a rotary blade by suppressing the deformation | transformation of the rotary blade which originates in centrifugal force.

  In order to solve the above problems, a cutting apparatus according to the present invention includes a table on which a workpiece is placed, a cutting mechanism that cuts the workpiece, and a movement that relatively moves the table and the cutting mechanism. A cutting device having a mechanism and used when manufacturing a plurality of products by cutting a workpiece, a rotating shaft provided in the cutting mechanism, and a disc fixed to the rotating shaft A rotary blade, a first fixing member provided on the first surface located on the side of the rotary blade close to the main body of the cutting mechanism, and an outer peripheral portion of the first fixing member. A first holding portion that is in close contact with the abrasive grains formed on the first surface, a first recess provided on the inner side of the first holding portion in the first fixing member, and a first surface of the rotary blade A second fixing member provided on the second surface side opposite to the second surface, and an outer side of the second fixing member A second holding portion that is provided in the portion and is in close contact with the abrasive grains formed on the second surface of the rotary blade, and a second concave portion that is provided inside the second holding portion in the second fixing member. The rotary blade is fixed to the rotation shaft in a state where the rotary blade is sandwiched between the first fixing member and the second fixing member, and the first concave portion and the second concave portion sandwich the rotary blade. A first distance from the first surface of the rotary blade to the inner bottom surface of the first recess and a second distance from the second surface of the rotary blade to the inner bottom surface of the second recess, which are arranged opposite to each other. Are equal predetermined distances, and the predetermined distance is larger than the maximum diameter of the abrasive grains and smaller than the maximum value of the deformation amount in a range where the deformation of the rotary blade is allowed.

  In the cutting apparatus according to the present invention, in the above-described cutting apparatus, the first holding member and the first recess are each formed in an annular shape in the first fixing member, and the second holding member holds the second holding member. The portion and the second recess are each formed in an annular shape.

  The cutting device according to the present invention is the above-described cutting device, wherein the first holding portion is an end surface that is in close contact with the abrasive grains formed on the first surface of the rotary blade when the rotary blade is stopped. And, the second holding part is characterized in that an end face made of a surface that is in close contact with the abrasive grains formed on the second surface of the rotary blade is inclined so as to move away from the rotary blade as it approaches the rotation axis.

  The cutting apparatus according to the present invention is characterized in that, in the above-described cutting apparatus, the object to be cut is a sealed substrate.

  The cutting apparatus according to the present invention is characterized in that, in the above-described cutting apparatus, the object to be cut is a plate-like member in which functional elements are formed in a plurality of regions respectively corresponding to a plurality of products.

In order to solve the above-described problems, a cutting method according to the present invention includes a step of placing a workpiece on a table, a disk-shaped rotary blade fixed to a rotating shaft of a cutting mechanism, and the workpiece. A cutting method for manufacturing a plurality of products by cutting an object to be cut, the first surface side being located closer to the main body of the cutting mechanism in the rotary blade The first holding member having the first holding portion and the first recess, and the second holding on the side of the second surface opposite to the first surface of the rotary blade Preparing a second fixing member having a portion and a second recess, and preparing a rotary blade fixed to the rotary shaft in a state sandwiched between the first fixing member and the second fixing member And a step of rotating the rotary blade, and preparing a first fixing member In the step of providing the first holding portion on the outer peripheral portion of the first fixing member, providing the first concave portion on the inner side of the first holding portion, and preparing the second fixing member, the second fixing A cutting method characterized in that a step of providing a rotary blade by providing a second holding portion at an outer peripheral portion of a member, providing a second concave portion inside the second holding portion, and preparing a rotary blade includes the following steps.
-The process of arrange | positioning a 1st recessed part and a 2nd recessed part facing each other on both sides of a rotary blade.
A step of bringing the first holding portion into close contact with the abrasive grains formed on the first surface of the rotary blade.
A step of bringing the second holding portion into close contact with the abrasive grains formed on the second surface of the rotary blade.
The first distance from the first surface of the rotary blade to the inner bottom surface of the first recess is equal to the second distance from the second surface of the rotary blade to the inner bottom surface of the second recess. The process of making the distance.
A step of making the predetermined distance larger than the maximum diameter of the abrasive grains and smaller than the maximum deformation amount in a range where the deformation of the rotary blade is allowed.

  In the cutting method according to the present invention, in the above-described cutting method, in the step of preparing the first fixing member, the first holding portion and the first recess are each formed in an annular shape, and the second fixing member is prepared. In the step of performing, the second holding portion and the second concave portion are each formed in an annular shape.

  In the cutting method according to the present invention, in the cutting method described above, in the step of preparing the rotary blade, the first holding portion is formed on the first surface of the rotary blade while the rotary blade is stopped. The end surface composed of the surface that is in close contact with the grains and the end surface composed of the surface that the second holding part is in close contact with the abrasive grains formed on the second surface of the rotary blade are separated from the rotary blade as they approach the rotation axis. It is made to incline.

  The cutting method according to the present invention is characterized in that, in the above-described cutting method, the object to be cut is a sealed substrate.

  The cutting method according to the present invention is characterized in that, in the above-described cutting method, the object to be cut is a plate-like member in which functional elements are formed in a plurality of regions respectively corresponding to a plurality of products.

  According to the present invention, the cutting mechanism is provided with the first fixing member and the second fixing member that are fixed to the rotating shaft with the rotary blade sandwiched from both sides. An annular first holding portion that is in close contact with abrasive grains formed on the first surface of the rotary blade is provided on the outer peripheral portion of the first fixing member. An annular first concave portion is provided on the inner side of the first holding portion of the first fixing member (referring to a side close to the center of the rotating shaft; the same applies in the present application document). An annular second holding portion that is in close contact with the abrasive grains formed on the second surface of the rotary blade is provided on the outer peripheral portion of the second fixing member. An annular second concave portion is provided inside the second holding portion of the second fixing member. A 1st recessed part and a 2nd recessed part are mutually arrange | positioned on both sides of a rotary blade. The first predetermined distance from the first surface of the rotary blade to the inner bottom surface of the first recess and the second distance from the second surface of the rotary blade to the inner bottom surface of the second recess are equal to each other. To. The predetermined distance is set to be larger than the maximum diameter of the abrasive grains and smaller than the maximum value of the deformation amount in a range where the deformation of the rotary blade is allowed. Thereby, the deformation of the rotary blade due to the centrifugal force generated by the rotation of the rotary blade is suppressed to a minute deformation. Therefore, damage to the rotating blade caused by centrifugal force is prevented.

It is a top view which shows the outline | summary of the cutting device which concerns on this invention. (A), (b) is the schematic which shows the spindle used in the cutting device shown by FIG. 1, (a) is a front view, (b) is a right view. FIG. 3 is a schematic exploded sectional view showing components of the spindle shown in FIG. 2. It is a schematic sectional drawing which shows the state by which the structural member shown by FIG. 3 was fixed to the spindle. It is a schematic sectional drawing which expands and shows together the rotary blade and flange shown in FIG. 4, and the rotary blade and flange used in the cutting device concerning Example 2 of the present invention.

  As shown in FIGS. 4 and 5, the spindle 7 is provided with a first flange 15 and a second flange 16 that are fixed to the rotary shaft 8 with the rotary blade 9 sandwiched from both sides. The first flange 15 has an annular holding portion 15c that is in close contact with the abrasive grains formed on the first surface S1 of the rotary blade at the outer peripheral portion, and a first concave portion 19 that is annularly formed inside the holding portion 15c. And provide. The second flange 16 has an annular holding portion 16c that is in close contact with the abrasive grains formed on the second surface S2 of the rotary blade at the outer peripheral portion, and a second concave portion 24 that is annularly formed inside the holding portion 16c. And provide. The first concave portion 19 and the second concave portion 24 are arranged to face each other with the rotary blade 9 interposed therebetween. The distance L1 from the first surface S1 of the rotary blade 9 to the inner bottom surface of the first recess 19 is equal to the distance L2 from the second surface S2 of the rotary blade 9 to the inner bottom surface of the second recess 24. Set to a predetermined distance. The predetermined distance is larger than the maximum diameter of the abrasive grains 26 and smaller than the maximum value of the deformation amount in a range where the deformation of the rotary blade 9 is allowed. Thereby, the deformation of the rotary blade 9 due to the centrifugal force generated by the rotation of the rotary blade 9 is suppressed to a minute deformation. Therefore, damage to the rotary blade 9 caused by centrifugal force is prevented.

  A cutting apparatus according to the present invention will be described with reference to FIG. Any figure in the present application document is schematically omitted or exaggerated as appropriate for easy understanding. About the same component, the same code | symbol is attached | subjected and description is abbreviate | omitted suitably.

  As shown in FIG. 1, the cutting device 1 is a device that divides a workpiece into pieces by cutting the object to be cut. The cutting apparatus 1 includes a substrate supply module A, a substrate cutting module B, and an inspection module C as components. Each component (each module A to C) is detachable and replaceable with respect to other components.

  The substrate supply module A is provided with a substrate supply mechanism 3 that supplies a sealed substrate 2 corresponding to an object to be cut, and a control unit CTL that performs operation and control of the cutting apparatus 1. The sealed substrate 2 is a substrate made of a printed circuit board or a lead frame, a plurality of functional elements (chips such as semiconductor elements) mounted in a plurality of regions of the substrate, and a plurality of regions are collectively covered. The sealing resin thus formed is included. The sealed substrate 2 is an object to be cut that is finally cut into pieces. The sealed substrate 2 is transported to the substrate cutting module B by a transport mechanism (not shown).

  The cutting device 1 shown in FIG. 1 is a single-cut table type cutting device. Accordingly, the substrate cutting module B is provided with one cutting table 4. The cutting table 4 can be moved in the Y direction in the figure by the moving mechanism 5 and can be rotated in the θ direction by the rotating mechanism 6. A cutting jig (not shown) is fixed to the cutting table 4, and the sealed substrate 2 is placed on the cutting jig.

  The substrate cutting module B is provided with a spindle 7 as a cutting mechanism. The cutting device 1 shown in FIG. 1 is a cutting device having a single spindle configuration in which one spindle 7 is provided. The spindle 7 can move independently in the X direction and the Z direction. The spindle 7 includes a rotating shaft 8 and a disk-shaped rotating blade 9 attached to the tip of the rotating shaft 8. The rotary blade 9 is fixed in parallel to a plane (a plane including the Y axis and the Z axis) orthogonal to the axial direction (X direction) of the rotary shaft 8. The spindle 7 is provided with a cutting water nozzle (not shown) for injecting cutting water in order to suppress frictional heat generated by the rotary blade 9 rotating at high speed. The sealed substrate 2 is cut by relatively moving the cutting table 4 and the spindle 7. The rotary blade 9 cuts the sealed substrate 2 by rotating in a plane including the Y axis and the Z axis.

  The inspection module C is provided with an inspection table 10. On the inspection table 10, an aggregate made up of a plurality of products P cut into pieces by cutting the sealed substrate 2, that is, a cut substrate 11 is placed. The plurality of products P are inspected by a camera for inspection (not shown) and sorted into non-defective products and defective products. The non-defective product is stored in the tray 12.

  In the first embodiment, the single-cut table type cutting apparatus 1 having a single spindle configuration has been described. However, the present invention is not limited thereto, and a single-cut table type cutting device having a twin spindle configuration or a twin-cut table type cutting device having a twin spindle configuration may be used.

  The spindle 7 used in the cutting device 1 according to the present invention will be described with reference to FIGS. A spindle 7 that is a cutting mechanism shown in FIG. 2 includes a spindle body 13, a spindle motor 14 that is a drive mechanism, and a rotating shaft 8 that is connected to the spindle motor 14. The rotary shaft 8 is rotatably supported on the spindle 7 in a non-contact state by air (air) blown from a radial air bearing and an axial air bearing (not shown). A rotary blade 9 for cutting the sealed substrate 2 (see FIG. 1) is attached to the tip of the rotary shaft 8. The rotary blade 9 is fixed in parallel to a plane (a plane including the Y axis and the Z axis) orthogonal to the axial direction (X direction) of the rotary shaft 8. The rotary blade 9 is sandwiched between the first flange 15 and the second flange 16 which are fixed members. The first flange 15 and the second flange 16 are fixed to the rotary shaft 8 with the rotary blade 9 interposed therebetween. The rotary blade 9 is a washer type rotary blade having a through hole. The rotary blade 9 can be attached to and detached from the spindle 7 and can be exchanged.

  With reference to FIG. 3, the components of the spindle 7 used in this embodiment will be described. As shown in FIG. 3, the rotary shaft 8 provided on the spindle 7 has a tip 8a having a small diameter in order to fix the first flange 15 to the tip. A female screw portion 8 i to which a bolt 17 for fixing the first flange 15 to the rotary shaft 8 is screwed is formed at the distal end portion 8 a of the rotary shaft 8.

  The first flange 15 and the second flange 16 are members that hold the rotary blade 9 therebetween. With the first flange 15 and the second flange 16 sandwiching the rotary blade 9, the first flange 15 and the second flange 16 are fixed and integrated. Of the integrated first flange 15 and second flange 16, the first flange 15 is fixed to the rotary shaft 8 by a bolt 17.

  The first flange 15 is a rear flange disposed on the first surface S <b> 1 (the surface on the spindle 7 side) of the rotary blade 9. The first flange 15 is directly fixed to the rotating shaft 8. A through hole 18 is provided at the center of the first flange 15 so as to be fitted to the tip 8 a of the rotating shaft 8.

  The first flange 15 is provided with a cylindrical base portion 15a into which the rotary blade 9 is inserted, and a cylindrical base portion 15b with which the second flange 16 is fitted. A holding portion 15 c made of a convex portion formed in an annular shape (preferably an annular shape) for holding the rotary blade 9 is provided on the outer peripheral portion of the first flange 15. The first flange 15 is provided with a first recess 19 formed in an annular shape (preferably an annular shape) in order to suppress deformation of the rotary blade 9. At the center front end portion of the first flange 15, there are formed a recess 20 in which the head of the bolt 17 screwed to the female screw portion 8 i of the rotating shaft 8 is accommodated, and a nut male screw portion 15 e to which the nut 21 is screwed. Is done. In the present application document, the phrase “the outer peripheral portion of the rotary blade 9” refers to a portion that does not include the outer edge of the rotary blade 9 and that is slightly inside from the outer edge of the rotary blade 9 in addition to the portion that includes the outer edge of the rotary blade 9. Including.

  An annular holding portion 15 c is provided on the outer peripheral portion of the rotary blade 9. The 1st recessed part 19 is provided in the part which entered inside from the holding | maintenance part 15c. As will be described later, the depth of the first recess 19 is formed such that the abrasive grains of the rotary blade 9 do not contact the inner bottom surface of the first recess 19.

  The rotary blade 9 includes a through hole 22 and is a washer type rotary blade formed in an annular shape. The through hole 22 of the rotary blade 9 is inserted into the cylindrical base portion 15a of the first flange. The rotary blade 9 is made of, for example, an annular grindstone in which abrasive grains such as diamond are bonded with a binding material such as metal, resin, or ceramic. As abrasive grains used when cutting a sealed substrate, diamond abrasive grains having a particle diameter of about several μm to several tens of μm are often used.

  The second flange 16 is a front flange disposed on the second surface S2 (the surface on the side opposite to the spindle 7 and the surface opposite to the first surface S1) of the rotary blade 9. The second flange 16 is fitted to the first flange 15. A through hole 23 is provided at the center of the second flange 16 so as to be fitted to the cylindrical base portion 15 b of the first flange 15. A holding portion 16 c made of a convex portion formed in an annular shape (preferably an annular shape) for holding the rotary blade 9 is provided on the outer peripheral portion of the second flange 16. The second flange 16 is provided with a second recess 24 formed in an annular shape (preferably an annular shape) in order to suppress deformation of the rotary blade 9.

  The holding portion 16 c is provided on the outer peripheral portion of the rotary blade 9. The holding part 15c and the holding part 16c are provided at positions facing each other with the rotary blade 9 interposed therebetween. The 2nd recessed part 24 is provided in the part which entered inside from the holding | maintenance part 16c. The first concave portion 19 and the second concave portion 24 are provided at positions facing each other with the rotary blade 9 interposed therebetween. Similar to the depth of the first recess 19, the depth of the second recess 24 is formed to such a depth that the abrasive grains of the rotary blade 9 do not contact the inner bottom surface of the second recess 24.

  The rotary blade 9 is held by being sandwiched between an annular holding portion 15 c provided on the outer peripheral portion of the first flange 15 and an annular holding portion 16 c provided on the outer peripheral portion of the second flange 16. The The rotary blade 9 is held so as to be parallel to a plane orthogonal to the axial direction of the rotary shaft 8. The end surface of the holding portion 15c (the lower surface of the holding portion 15c in FIG. 3) is a surface that comes into contact (contact) with the first surface S1 of the rotary blade 9. Speaking microscopically, the end surface of the holding portion 15c comes into contact (adhesion) with the abrasive grains formed on the first surface S1 of the rotary blade 9. The end surface of the holding portion 16c (the upper surface of the holding portion 16c in FIG. 3) is a surface that comes into contact (contact with) the second surface S2 of the rotary blade 9. Speaking microscopically, the end surface of the holding portion 16c comes into contact (adhesion) with the abrasive grains formed on the second surface S2 of the rotary blade 9. In order to hold the rotary blade 9 with high accuracy, the end surface of the holding portion 15c and the end surface of the holding portion 16c have high flatness.

  The nut 21 is a flange nut for fixing the second flange 16 to the first flange 15. A nut female screw portion 21 i is formed on the inner peripheral surface of the nut 21. By screwing the nut 21 to the nut male screw portion 15 e of the first flange 15, the rotary blade 9 is sandwiched and fixed between the first flange 15 and the second flange 16.

  The bolt 17 is a fixing member for fixing the first flange 15 and the second flange 16 fixed by the nut 21 with the rotary blade 9 interposed therebetween to the rotary shaft 8. The bolt 17 is formed with a male screw portion 17 e that is screwed to the female screw portion 8 i of the rotating shaft 8. For example, a hexagonal hole 25 is formed at the head of the bolt 17 in order to rotate the bolt 17 when the bolt 17 is screwed to the rotating shaft 8 or when the bolt 17 is loosened from the rotating shaft 8.

  With reference to FIG. 3, the procedure for mounting the rotary blade 9 on the spindle 7 will be described. First, the through hole 22 of the rotary blade 9 is inserted into the cylindrical base portion 15 a of the first flange 15. Next, the through hole 23 of the second flange 16 is fitted into the cylindrical base portion 15 b of the first flange 15. Further, the nut female screw portion 21 i of the nut 21 is screwed into the nut male screw portion 15 e formed at the tip portion of the first flange 15 and tightened. Thus, the rotary blade 9 is sandwiched and fixed between the first flange 15 and the second flange 16.

  Next, in a state where the rotary blade 9 is fixed by the first flange 15 and the second flange 16, the through hole 18 formed at the center of the first flange 15 is formed at the tip 8 a of the rotary shaft 8 of the spindle 7. Fit. Next, the bolt 17 is screwed into the female screw portion 8 i formed at the tip portion 8 a of the rotating shaft 8 and tightened. For example, an L-shaped hexagon wrench or the like is inserted into the hexagon hole 25 formed at the head of the bolt 17, and the bolt 17 is tightened. By screwing the bolt 17 to the rotary shaft 8, the rotary blade 9 sandwiched and fixed between the first flange 15 and the second flange 16 is fixed to the rotary shaft 8 of the spindle 7.

  A state in which the rotary blade 9 is mounted on the spindle 7 will be described with reference to FIGS. 4 and 5. As shown in FIG. 4, the rotary blade 9 is sandwiched between the first flange 15 and the second flange 16 and fixed by the nut 21. The fixed rotary blade 9 is fixed to the rotary shaft 8 by a bolt 17. The rotary blade 9 is sandwiched and fixed by a holding portion 15 c formed on the outer peripheral portion of the first flange 15 and a holding portion 16 c formed on the outer peripheral portion of the second flange 16.

  As shown in FIG. 5, the end surface of the holding portion 15 c contacts (adheres) the abrasive grains 26 formed on the first surface S <b> 1 of the rotary blade 9. The end surface of the holding part 16c contacts (adheres) the abrasive grains 26 formed on the second surface S2 of the rotary blade 9. The sealed blade 2 (see FIG. 1) is cut by rotating the rotating blade 9 sandwiched and fixed between the end face of the holding portion 15c and the end face of the holding portion 16c at a high speed.

  The procedure for mounting the rotary blade 9 on the spindle 7 is the same as that in the present embodiment and the conventional technology (see paragraphs [0019] and [0020] in FIG. 3 and FIG. 3). Conventionally, the depth of the first recess 19 and the depth of the second recess 24 are different from the invention according to the present application. Conventionally, problems that occur when two flanges corresponding to the first flange 15 and the second flange 16 shown in FIG. 4 of the present application are used will be described with reference to FIG. 4 of the present application as appropriate. To do.

  Conventionally, generally, the depth corresponding to the depth of the first recess 19 and the depth of the second recess 24 shown in FIG. 4 of the present application is about 0.3 mm to 0.5 mm. In addition, two recesses are formed. When the rotary blade 9 rotates at high speed, centrifugal force acts on the rotary blade 9. The centrifugal force acts from the center of the rotary blade 9 toward the outside along the radial direction. Due to the centrifugal force, the rotary blade 9 receives a force from the center toward the outside and tends to be displaced (deformed) toward the outside.

  Conventionally, the rotary blade 9 is sandwiched and fixed between the holding portion 15c and the holding portion 16c at the outer peripheral portions of the two flanges. As a result, the rotary blade 9 cannot be displaced outwardly along the radial direction by centrifugal force. Therefore, the rotary blade 9 receives a force toward the inner bottom surface of the first recess 19 formed in the first flange 15 or the inner bottom surface of the second recess 20 formed in the second flange 16. Therefore, the rotary blade 9 is deformed due to centrifugal force. Since both the first recess 19 and the second recess 24 have a depth of about 0.3 mm to 0.5 mm, the rotary blade 9 is deformed in the internal space corresponding to these depths. The amount of deformation of the rotary blade 9 may exceed the allowable range due to the centrifugal force. In this case, the rotary blade 9 is damaged in the internal space formed by the first flange 15 and the first surface S1 and the internal space formed by the second flange 16 and the second surface S2. There is a fear.

  On the other hand, according to the present invention, as shown in FIGS. 4 and 5, the first recess 15 and the second recess 24 are formed in the first flange 15 and the second flange 16, respectively. The first recess 19 and the second recess 24 have a very small depth. As shown in FIG. 5, the rotary blade 9 is configured by bonding a large number of abrasive grains 26 made of, for example, diamond to the surface of a bonding material 9 a called a bond. The abrasive grains 26 included in the rotary blade 9 are embedded in the vicinity of the surface of the binder 9a. The abrasive grains 26 included in the rotary blade 9 have a particle size of several μm to several tens of μm.

  In a state where the rotary blade 9 is sandwiched and fixed between the first flange 15 and the second flange 16, the distance from the first surface S1 of the rotary blade 9 to the inner bottom surface of the first recess 19 is L1. The distance from the 2nd surface S2 which the rotary blade 9 has to the inner bottom face of the 2nd recessed part 24 is set to L2.

  The distance L1 from the first surface S1 of the rotary blade 9 to the inner bottom surface of the first recess 19 and the distance L2 from the second surface S2 of the rotary blade 9 to the inner bottom surface of the second recess 24 are rotations. It is set to be slightly larger than the maximum value of the particle size of the abrasive grains 26 contained in the blade 9. In addition, the distance L1 and the distance L2 are set to be equal predetermined distances.

  For example, the case where the maximum value of the particle size of the abrasive grains 26 formed on the rotary blade 9 is 15 μm is assumed. In this case, the distance L1 from the first surface S1 to the inner bottom surface of the first recess 19 is slightly larger than the maximum value of the particle size of the abrasive grains 26 formed on the rotary blade 9. For example, it is set to 0.02 mm (= 20 μm). Similarly, the distance L2 from the second surface S2 to the inner bottom surface of the second recess 24 is slightly larger than the maximum value of the particle size of the abrasive grains 26 formed on the rotary blade 9, for example, Set to 0.02 mm.

  Of the abrasive grains 26 formed on the rotary blade 9, more specifically, among the abrasive grains 26 embedded in the surface of the binder 9 a of the rotary blade 9, the abrasive grain 26 has the largest particle size (= 15 μm). An abrasive grain 26 is assumed. The maximum amount of the abrasive grains 26 protruding from the surface of the binding material 9a (the first surface S1 and the second surface S2) is 15 μm when the abrasive grains 26 are slightly embedded in the binding material 9a. The value is slightly less than

  In this case, when the deformation amount of the deformation generated in the rotary blade 9 slightly exceeds 5 (= 20−15) μm, the inner bottom surface of the first recess 19 is applied to the abrasive grains 26 protruding from the first surface S1. Contact. Similarly, when the amount of deformation generated in the rotary blade 9 slightly exceeds 5 (= 20−15) μm, the inner bottom surface of the second recess 24 contacts the abrasive grains 26 protruding from the second surface S2. To do. By these things, the abrasive grains 26 prevent the deformation that has been increased to slightly exceed 5 μm from being further deformed. Therefore, even if deformation occurs in the rotary blade 9 due to the centrifugal force acting on the rotary blade 9, the deformation is suppressed to a minute deformation amount (for example, a deformation amount slightly exceeding 5 μm). .

  The distance L1 from the first surface S1 to the inner bottom surface of the first recess 19 and the distance L2 from the second surface S2 to the inner bottom surface of the second recess 24 allow deformation of the rotary blade 9. It is set to be smaller than the maximum value of the deformation amount in the range. Therefore, the deformation of the rotary blade 9 is suppressed to the maximum value or less.

  According to the present invention, the recess 19 of the first flange 15 and the recess 24 of the second flange 16 are provided so as to face each other with the rotary blade 9 in between. The distance L1 from the first surface S1 of the rotary blade 9 to the inner bottom surface of the first recess 19 and the distance L2 from the second surface S2 of the rotary blade 9 to the inner bottom surface of the second recess 24 are It is preset at an equal predetermined distance. The set predetermined distance is larger than the maximum diameter of the abrasive grains 26 of the rotary blade 9 and smaller than the maximum value of the deformation amount in the range where the deformation of the rotary blade 9 is allowed.

  As described above, when the rotary blade 9 starts to deform due to centrifugal force, the abrasive grains 26 protruding from the first surface S1 come into contact with the inner bottom surface of the first recess 19 at an early stage. . The abrasive grains 26 protruding from the second surface S2 come into contact with the inner bottom surface of the second recess 24 at an early stage. As a result, the inner bottom surface of the first concave portion 19 and the inner bottom surface of the second concave portion 24 prevent the deformation of the rotary blade 9 from being increased at a minute stage. Therefore, even when the rotary blade 9 rotates at a high speed, damage to the rotary blade 9 caused by centrifugal force is prevented.

  In the present application document, the term “equal distance” means that the distances are strictly different, but the difference between the distances is small enough to suppress the deformation of the rotary blade 9 from becoming large. including. In other words, the phrase “equal distance” includes the case where the distances are substantially equal.

  The holding portion 15c formed on the first flange 15 and the holding portion 16c formed on the second flange 16 both have an annular (preferably annular) shape. Without being limited thereto, at least one of the holding portions 15c and 16c may have a shape in which an annular (preferably annular) convex portion over the entire circumference is partially interrupted. At least one of the holding portions 15c and 16c may be a convex portion having a width in a polygonal shape. A plurality of line-shaped convex portions having a radial width, or a plurality of curved convex portions having a radial width, at least one of the holding portions 15c and 16c being along the outer periphery of the rotary blade 9. You may have.

  The first recess 19 formed in the first flange 15 and the second recess 24 formed in the second flange 16 both have an annular (preferably annular) shape. Without being limited thereto, at least one of the first concave portion 19 and the second concave portion 24 has a shape in which an annular (preferably annular) concave portion over the entire circumference is partially interrupted. Also good. At least one of the first concave portion 19 and the second concave portion 24 may be a concave portion having a width of a polygonal shape. At least one of the first recess 19 and the second recess 24 has a plurality of line-shaped recesses having a width in the radial direction along the outer periphery of the rotary blade 9, or a plurality of having a width in the radial direction. You may have a curved recessed part.

  In the present application document, the term “annular” means a shape including the shapes of the holding portions 15 c and 16 c, the first concave portion 19, and the second concave portion 24 described so far.

  In the case of rotating the rotary blade 9 at a high speed or the like, there may be a case where the occurrence of deformation at the cutting edge of the rotary blade 9 cannot be sufficiently suppressed even by the first embodiment of the present invention. In that case, a spindle (cutting mechanism) 7 that suppresses deformation at the cutting edge of the rotary blade 9 will be described with reference to FIG. In Embodiment 2 of the cutting device according to the present invention, the cutting device includes the spindle 7 described above.

  The reason why the occurrence of deformation at the cutting edge of the rotary blade 9 cannot be sufficiently suppressed is that the first flange 15 and the second flange 16 are deformed due to centrifugal force. For example, due to centrifugal force, at least one of the outer peripheral portion of the first flange 15 and the outer peripheral portion of the second flange 16 extends from the surface of the rotary blade 9 along the axial direction of the cutting shaft 8 (see FIG. 4). It may be deformed to bend in the direction of leaving. In this case, the end face of the holding portion (at least one of the holding portions 15c or 16c) of the deformed flange is closer to the rotation axis in a state where the rotary blade 9 is stopped. You may incline so that it may leave | separate. In FIG. 5, the inclined end surface is indicated by a thin broken line. The angle (inclination) of the end surface of the holding portion 15c with respect to the first surface S1 of the rotary blade 9 is adjusted. The angle (inclination) of the end surface of the holding portion 16c with respect to the second surface S2 of the rotary blade 9 is adjusted. According to the present embodiment, the deformation of the cutting edge of the rotary blade 9 is suppressed by executing at least one of these adjustments.

  In each Example, the case where the sealed board | substrate 2 which formed sealing resin on the board | substrate as a to-be-cut object was cut | disconnected was shown. Not limited to this, a sealed substrate in which a glass epoxy laminated board, a printed wiring board, a ceramic substrate, a metal base substrate, a film base substrate, etc. are used as a substrate in an object to be cut and a sealing resin is formed thereon The present invention is also applied.

  The functional elements include sensors, filters, actuators, oscillators, etc., in addition to semiconductor elements such as IC (Integrated Circuit), transistors, and diodes. A plurality of functional elements may be mounted in one area.

  Furthermore, the present invention is also applied to the case of cutting an object having a substantially circular shape such as a wafer level package in which a silicon semiconductor or a compound semiconductor wafer is encapsulated in a wafer as it is. . The present invention is also applied to the case of cutting a silicon semiconductor or compound semiconductor wafer itself.

  The object to be cut is not limited to the sealed substrate 2 (see FIG. 1). In some cases, a plate-shaped member (resin molded body) manufactured by the resin molding method is cut to manufacture a product such as an optical component such as a lens array or a general resin molded product. The resin molded body in this case is included in the object to be cut. When cutting the workpiece (plate-like member) using the rotary blade 9, when it is desired to suppress the deformation of the rotary blade 9 as much as possible, in other words, the dimensional accuracy required for a product manufactured by cutting. The higher the level of appearance quality, the more effective the present invention.

  The present invention is not limited to the above-described embodiments, and can be arbitrarily combined, modified, or selected and adopted as necessary within the scope not departing from the gist of the present invention. It is.

DESCRIPTION OF SYMBOLS 1 Cutting apparatus 2 Sealed board | substrate (to-be-cut object)
3 Substrate supply mechanism 4 Cutting table (table)
5 Moving mechanism 6 Rotating mechanism 7 Spindle (cutting mechanism)
DESCRIPTION OF SYMBOLS 8 Rotating shaft 8a Tip part 8i Female thread part 9 Rotating blade 9a Binding material 10 Inspection table 11 Cut substrate 12 Tray 13 Spindle body part 14 Spindle motor 15 First flange (first fixing member)
15a base part 15b base part 15c holding part (first holding part)
15e Nut male thread portion 16 Second flange (second fixing member)
16c holding part (second holding part)
17 Bolt 17e Male thread part 18 Through hole 19 1st recessed part 20 Recessed part 21 Nut 21i Nut female thread part 22 Through hole 23 Through hole 24 2nd recessed part 25 Hexagonal hole 26 Abrasive grain A Substrate supply module B Substrate cutting module C Inspection module CTL Control unit L1 Distance from the first surface to the inner bottom surface of the first recess (first distance)
L2 Distance from the second surface to the inner bottom surface of the second recess (second distance)
P product S1 first side S2 second side

Claims (10)

A table on which the workpiece is placed, a cutting mechanism for cutting the workpiece, and a moving mechanism for moving the table and the cutting mechanism relative to each other, by cutting the workpiece A cutting device used when manufacturing a plurality of products,
A rotating shaft provided in the cutting mechanism;
A disc-shaped rotary blade fixed to the rotary shaft;
A first fixing member provided on the side of the first surface located on the side closer to the main body of the cutting mechanism in the rotary blade;
A first holding portion that is provided on an outer peripheral portion of the first fixing member and is in close contact with abrasive grains formed on the first surface of the rotary blade;
A first recess provided on the inside of the first holding portion in the first fixing member;
A second fixing member provided on a second surface side opposite to the first surface of the rotary blade;
A second holding portion that is provided on an outer peripheral portion of the second fixing member and is in close contact with abrasive grains formed on the second surface of the rotary blade;
A second recessed portion provided inside the second holding portion in the second fixing member,
The rotary blade is fixed to the rotary shaft in a state where the rotary blade is sandwiched between the first fixing member and the second fixing member;
The first recess and the second recess are arranged opposite to each other across the rotary blade;
A first distance from the first surface of the rotary blade to the inner bottom surface of the first recess, and a second distance from the second surface of the rotary blade to the inner bottom surface of the second recess; Are equal predetermined distances,
The said predetermined distance is larger than the maximum diameter of the said abrasive grain, and is smaller than the maximum value of the deformation amount in the range which the deformation | transformation of the said rotary blade is accept | permitted. The cutting device according to claim 1, wherein
In the first fixing member, the first holding portion and the first recess are each formed in an annular shape,
In the second fixing member, the second holding portion and the second recess are each formed in an annular shape. The cutting device according to claim 1, wherein
In the state where the rotary blade is stopped, the first holding portion is an end surface composed of a surface that is in close contact with the abrasive grains formed on the first surface of the rotary blade, and the second holding portion is The cutting device characterized in that an end surface composed of a surface that is in close contact with the abrasive grains formed on the second surface of the rotary blade is inclined so as to move away from the rotary blade as it approaches the rotation axis. In the cutting device as described in any one of Claims 1-3,
The cutting apparatus, wherein the object to be cut is a sealed substrate. In the cutting device as described in any one of Claims 1-3,
The cutting apparatus is a cutting device in which a functional element is formed in each of a plurality of regions corresponding to the plurality of products. A step of placing the object to be cut on a table; and a step of relatively moving a disk-shaped rotary blade fixed to a rotating shaft of a cutting mechanism and the object to be cut. A cutting method for manufacturing a plurality of products by cutting,
Preparing a first fixing member having a first holding portion and a first recess on the first surface side of the rotary blade located on the side closer to the main body of the cutting mechanism;
Preparing a second fixing member having a second holding portion and a second concave portion on the second surface side opposite to the first surface of the rotary blade;
Preparing the rotary blade fixed to the rotary shaft in a state sandwiched between the first fixed member and the second fixed member;
A step of rotating the rotary blade,
In the step of preparing the first fixing member, the first holding portion is provided on an outer peripheral portion of the first fixing member, and the first recess is provided on the inner side of the first holding portion,
In the step of preparing the second fixing member, the second holding portion is provided on an outer peripheral portion of the second fixing member, and the second recess is provided on the inner side of the second holding portion,
The step of preparing the rotary blade includes the following steps.
(6-1) A step of arranging the first concave portion and the second concave portion so as to face each other with the rotary blade interposed therebetween.
(6-2) A step of bringing the first holding portion into close contact with the abrasive grains formed on the first surface of the rotary blade.
(6-3) A step of bringing the second holding portion into close contact with the abrasive grains formed on the second surface of the rotary blade.
(6-4) A first distance from the first surface of the rotary blade to the inner bottom surface of the first recess, and from the second surface of the rotary blade to the inner bottom surface of the second recess. The second distance is set to an equal predetermined distance.
(6-5) A step of making the predetermined distance larger than a maximum diameter of the abrasive grains and smaller than a maximum value of deformation amount in a range where deformation of the rotary blade is allowed. The cutting method according to claim 6, wherein
In the step of preparing the first fixing member, the first holding portion and the first recess are each formed in an annular shape,
In the step of preparing the second fixing member, the second holding portion and the second recess are each formed in an annular shape. The cutting method according to claim 6, wherein
In the step of preparing the rotary blade, in a state where the rotary blade is stopped, the end surface made of a surface in which the first holding portion is in close contact with the abrasive grains formed on the first surface of the rotary blade, And, the second holding portion is inclined so that the end face formed by the surface closely contacting the abrasive formed on the second surface of the rotary blade is separated from the rotary blade as it approaches the rotation axis. Cutting method characterized. In the cutting method as described in any one of Claims 6-8,
The cutting method, wherein the object to be cut is a sealed substrate. In the cutting method as described in any one of Claims 6-8,
The cutting method according to claim 1, wherein the object to be cut is a plate-like member in which functional elements are formed in a plurality of regions corresponding to the plurality of products, respectively.

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