JP2021100779A - Blade fixing device and dicing device - Google Patents

Abstract

To provide a blade fixing device and a dicing device capable of preventing meandering of a dicing blade with respect to a workpiece by suppressing the swing of the dicing blade, even for the dicing blade in which a protrusion amount in the radial direction from a holding member is large just like a hubless blade.SOLUTION: A flange surface 44G includes a surface 44I as an inclined surface which is gradually separated from a side surface 10C of a dicing blade 10, toward a center 10F of the dicing blade 10. Likewise, a flange surface 46G includes a surface 46I as an inclined surface which is gradually separated from a side surface 10D of the dicing blade 10, toward the center 10F of the dicing blade 10.SELECTED DRAWING: Figure 7

Description

The present invention relates to a blade fixing device and a dicing device, and more particularly to a blade fixing device and a dicing device for fixing a dicing blade for cutting a work such as a semiconductor wafer to a rotating shaft.

The dicing device performs cutting processing such as cutting or grooving on a workpiece such as a wafer on which a semiconductor device or an electronic component is formed. The dicing device has a dicing blade that is mounted on the rotating shaft of the spindle unit and rotates at high speed, and the cutting edge portion of the rotating dicing blade is brought into contact with the work to perform cutting.

As a dicing blade used in a dicing apparatus, a hub blade in which a cutting edge portion and a hub as a support portion are integrated is known as in Patent Document 1, and a hub is used as in Patent Document 2. A hubless blade is known which is not provided and is composed only of a ring-shaped cutting blade. The hubless blade is fixed by pressing both side surfaces of the pair of flanges by fastening a pair of ring-shaped flanges (corresponding to a holding member) with nuts (corresponding to a pressing member).

On the other hand, Patent Document 3 discloses an example of a structure for attaching a hub blade to a rotating shaft. According to Patent Document 3, a pedestal is formed on the rotating shaft, and the blade surface (side surface) of the hub blade is brought into contact with the flange surface formed on the pedestal, and the hub blade is fixed to the pedestal. Further, Patent Document 3 discloses that the flange surface of the pedestal is a surface perpendicular to the rotation axis.

JP-A-2002-343746 JP-A-2009-279662 Japanese Unexamined Patent Publication No. 6-262515

By the way, in the hubless blade, generally, the amount of protrusion in the radial direction from the holding member when fixed by the holding member is set to be large. For this reason, especially when a difficult-to-cut material (lithium tantalate, sapphire, altic, etc.) is cut by a hubless blade, a large runout occurs in the hubless blade and the hubless blade meanders on the work, resulting in a meandering. There was a risk that the cut line would meander and, in the worst case, the hubless blade would be damaged.

The present invention has been made in view of such circumstances, and even for a dicing blade having a large amount of protrusion in the radial direction from a holding member such as a hubless blade, the dicing blade is suppressed from swinging to the work. It is an object of the present invention to provide a blade fixing device and a dicing device capable of preventing meandering of a dicing blade.

When the present inventor diligently verified the cause of the large runout of the dicing blade, the surface of the holding member on the outer peripheral end side of the flange surface was not effectively pressed against the side surface of the dicing blade, and the inner peripheral end of the flange surface was not pressed effectively. It was found that the cause was that only the side surface was pressed against the side surface of the dicing blade.

As disclosed in Patent Document 3, for example, the flange surface of the conventional holding member is generally a surface perpendicular to the rotation axis. When such a flange surface is pressed against the side surface of the dicing blade by the pressing member, the surface on the inner peripheral end side of the flange surface is pressed against the side surface of the dicing blade, and the flange surface is the inner circumference of the flange surface. It was confirmed that the dicing blade was elastically deformed from the end toward the outer peripheral end of the flange surface so as to gradually separate from the side surface of the dicing blade.

The amount of protrusion of the dicing blade that greatly affects the runout of the dicing blade due to such elastic deformation of the flange surface, that is, the amount of protrusion of the dicing blade in the radial direction from the holding member starts from the outer peripheral end of the flange surface. It is not a short protrusion amount, but a long protrusion amount starting from the inner peripheral end of the flange surface. For this reason, the amount of protrusion of the dicing blade is longer than the amount of protrusion from the outer peripheral edge of the flange surface, which was initially assumed, and it was found that an unexpectedly large runout occurs in the dicing blade during cutting.

Therefore, the blade fixing device of the present invention is a pair of holding members for holding the dicing blade mounted on the rotating shaft from both side surfaces in order to achieve the object of the present invention, and is pressed against the side surface of the dicing blade. In a blade fixing device including a pair of holding members having a ring-shaped flange surface and a pressing member for pressing each flange surface of the pair of holding members against the side surface of the dicing blade, before being pressed by the side surface of the dicing blade. The flange surfaces of the pair of holding members are provided with inclined surfaces that gradually separate from the side surface of the dicing blade from the outer peripheral end of the dicing blade toward the center of the dicing blade.

According to the blade fixing device of the present invention, when the flange surface of the holding member is pressed against the side surface of the dicing blade by the pressing member, the flange surface is elastically deformed, and when the pressing is completed, from the inner peripheral end of the flange surface. The entire surface or substantially the entire surface of the flange surface toward the outer peripheral end of the flange surface is pressed against the side surface of the dicing blade. Alternatively, at least the outer peripheral end side surface of the flange surface is pressed against the side surface of the dicing blade.

Therefore, according to the blade fixing device of the present invention, the amount of protrusion of the dicing blade, which greatly affects the runout of the dicing blade, is a short amount of protrusion starting from the vicinity of the outer peripheral end of the flange surface. As a result, according to the present invention, even a dicing blade having a large amount of protrusion in the radial direction from the holding member, such as a hubless blade, can suppress the runout of the dicing blade. Meandering can be prevented.

In one aspect of the blade fixing device of the present invention, it is preferable that the inclined surface of the flange surface of the holding member is formed into a curved surface.

According to one aspect of the present invention, even if the inclined surface of the flange surface is curved, the entire surface or substantially the entire surface of the flange surface from the inner peripheral end of the flange surface to the outer peripheral end of the flange surface is formed on the side surface of the dicing blade. Can be pressed. Alternatively, the surface on the outer peripheral end side excluding the surface on the inner peripheral end side of the flange surface can be pressed against the side surface of the dicing blade.

According to one aspect of the blade fixing device of the present invention, it is preferable that the entire surface of the flange surface of the pair of holding members is pressed against the side surface of the dicing blade by the pressing member.

According to one aspect of the present invention, since the entire surface of the flange surface presses both side surfaces of the dicing blade, the runout of the dicing blade can be effectively suppressed.

Further, the blade fixing device of the present invention is a pair of holding members for holding the dicing blade mounted on the rotating shaft from both side surfaces in order to achieve the object of the present invention, and is pressed against the side surface of the dicing blade. In a blade fixing device including a pair of holding members having a ring-shaped flange surface and a pressing member for pressing each flange surface of the pair of holding members against the side surface of the dicing blade, before being pressed by the side surface of the dicing blade. The flange surface of the pair of holding members includes a curved surface that is convexly curved outward from the outer peripheral end of the dicing blade toward the center of the dicing blade.

According to the blade fixing device of the present invention, when the flange surface of the holding member is pressed against the side surface of the dicing blade by the pressing member, the flange surface is elastically deformed. The central portion between the peripheral end and the peripheral end is pressed against the side surface of the dicing blade. As a result, the amount of protrusion of the dicing blade 10 is a length starting from the central portion, and is therefore shorter than the conventional longer amount of protrusion starting from the inner peripheral end of the flange surface. Therefore, according to the present invention, even a dicing blade having a large amount of protrusion in the radial direction from the holding member, such as a hubless blade, can suppress the runout of the dicing blade, so that the dicing blade meanders with respect to the work. Can be prevented.

In order to achieve the object of the present invention, the dying device of the present invention includes a work holding portion for holding a work, a spindle unit having a rotating shaft, a dying blade mounted on the rotating shaft of the spindle unit, and a spindle unit. The blade fixing device of the present invention mounted on the rotating shaft includes a blade fixing device for fixing the dicing blade mounted on the rotating shaft to the rotating shaft.

According to the dicing apparatus of the present invention, even a dicing blade having a large amount of protrusion in the radial direction from a holding member such as a hubless blade can suppress the runout of the dicing blade. Meandering can be prevented.

According to the present invention, even if the dicing blade has a large amount of protrusion in the radial direction from the holding member such as a hubless blade, the dicing blade can suppress the runout, so that the dicing blade can be prevented from meandering with respect to the work. can do.

Perspective view of the dicing apparatus according to the embodiment Enlarged perspective view showing the structure of the machined part Schematic cross-sectional view of the blade fixing device of the first embodiment Enlarged view showing the cross-sectional shape of the flange surface of the flange member Enlarged cross-sectional view of the main part showing the deformed state of the flange surface when the nut is tightened. Enlarged sectional view of the main part of the conventional blade fixing device Schematic cross-sectional view of the blade fixing device of the second embodiment Schematic cross-sectional view of the blade fixing device of the third embodiment An enlarged cross-sectional view of a main part showing a deformed state of the flange surface in the third embodiment. Schematic cross-sectional view of the blade fixing device of the fourth embodiment An enlarged cross-sectional view of a main part showing a deformed state of the flange surface in the fourth embodiment. Explanatory drawing showing the streak formed on the flange surface

Hereinafter, preferred embodiments of the blade fixing device and the dicing device according to the present invention will be described in detail with reference to the accompanying drawings.

FIG. 1 is a perspective view showing the appearance of a dicing device 12 provided with a dicing blade 10.

The dicing device 12 includes a processing unit 18. The processing unit 18 has a pair of spindle units 14 and 14 with a built-in high-frequency motor to which a dicing blade 10 is attached to the tip, and a work table (work holding unit) 16 that attracts and holds the work W. Further, the dicing device 12 includes a cleaning unit 20 for spin-cleaning the processed work W, a load port 22 on which a cassette containing a large number of work Ws is placed, a transfer device 24 for transporting the work W, and the like. Be prepared.

FIG. 2 is an enlarged perspective view showing the structure of the processed portion 18.

The processing portion 18 shown in FIG. 2 is an X table 28 guided by a pair of X guides 26, 26 of the X base 25, and has an X table 28 driven in the X direction by a linear motor 30. The X table 28 is provided with a work table 16 via a rotary table 32 that rotates in the θ direction.

Above the X base 25, a Y base 34 is provided so as to straddle the X base 25. A pair of Y tables 38, 38 guided by a pair of Y guides 36, 36, which are driven in the Y direction by a feeding device (not shown), are provided on the front surface of the Y base 34. Be done.

Further, the pair of Y tables 38, 38 are provided with Z tables 40, 40 driven in the Z direction by a feeding device (not shown). Spindle units 14 and 14 with built-in high-frequency motors are fixed to the Z tables 40 and 40 so as to face each other, and dicing blades 10 and 10 are fixed to the rotating shaft 14A (see FIG. 3) of the spindle unit 14 so as to face each other. ing.

According to the processing unit 18 configured in this way, the spindle units 14 and 14 are index-fed in the Y direction and cut-fed in the Z direction, and the work table 16 is cut-fed in the X direction.

FIG. 3 is a schematic cross-sectional view of the blade fixing device 42 of the first embodiment.

The blade fixing device 42 includes a pair of holding members, a first flange member 44 and a second flange member 46, and a nut 48, which is a pressing member. The dicing blade 10 is sandwiched between the first flange member 44 and the second flange member 46.

The dicing blade 10 is a hubless blade configured in a ring shape. A mounting hole 10A for mounting the dicing blade 10 on the rotation shaft 14A side is formed in the central portion of the dicing blade 10.

The dicing blade 10 is formed by bonding diamond abrasive grains with a binder, and the diamond abrasive grains are scattered on the cutting edge portion 10B on the outer peripheral portion of the dicing blade 10.

The first flange member 44 is formed in a disk shape, and a mounting hole 44A for mounting the first flange member 44 on the rotating shaft 14A is formed in the central portion thereof. Further, a positioning surface 44C that comes into contact with the pedestal 15 of the rotating shaft 14A is formed on the back surface 44B of the first flange member 44. Further, on the front surface 44D of the first flange member 44, a tubular portion 44E which is a tubular portion 44E communicating with the mounting hole 44A and into which the mounting hole 10A of the dicing blade 10 is fitted is formed. The dicing blade 10 is mounted on the rotating shaft 14A via the tubular portion 44E by fitting the mounting hole 10A into the tubular portion 44E.

Further, a flange surface 44F that comes into contact with one side surface 10C of the dicing blade 10 is formed on the front surface 44D of the first flange member 44. The flange surface 44F is a ring-shaped surface along the outer edge of the front surface 44D, and has an outer peripheral end a and an inner peripheral end b. The flange surface 44F will be described later.

The second flange member 46 is formed in a disk shape, and a mounting hole 46A for mounting the second flange member 46 on the tubular portion 44E is formed in the central portion thereof. Further, a flange surface 46F that comes into contact with the other side surface 10D of the dicing blade 10 is formed on the front surface 46B of the second flange member 46. The flange surface 46F faces the flange surface 44F of the first flange member 44 when the second flange member 46 is mounted on the tubular portion 44E. Further, the flange surface 46F is a ring-shaped surface along the outer edge portion of the front surface 46B, and has an outer peripheral end a and an inner peripheral end b like the flange surface 44F. The flange surface 46F will also be described later.

Since the first and second flange members 44 and 46 rotate at high speed together with the dicing blade 10, it is preferable that the first and second flange members 44 and 46 are made of lightweight and rigid titanium in order to prevent inertial deformation.

The nut 48 is screwed into a screw portion (not shown) formed on the outer peripheral surface of the tubular portion 44E, and is brought into contact with the back surface 46C of the second flange member 46. When the nut 48 is fastened from this state, the second flange member 46 is pressed and urged toward the first flange member 44 by the axial force (pushing pressure) of the nut 48. As a result, the side surface C of the dicing blade 10 is pressed against the flange surface 44F of the first flange member 44, and the side surface D of the dicing blade 10 is pressed against the flange surface 46F of the second flange member 46. As a result, the dicing blade 10 is sandwiched between the first and second flange members 44 and 46 and fixed to the rotating shaft 14A.

Next, the flange surfaces 44F and 46F of the first and second flange members 44 and 46 will be described.

FIG. 4 is an enlarged view showing an example of the cross-sectional shape of the flange surfaces 44F and 46F of the first and second flange members 44 and 46 before fixing the dicing blade 10 to the rotating shaft 14A.

As shown in FIG. 4, the flange surface 44F is formed as an inclined surface that gradually separates from the side surface 10C of the dicing blade 10 from the outer peripheral end a to the inner peripheral end b of the flange surface 44F. That is, the flange surface 44F is formed as an inclined surface that gradually separates from the side surface 10C of the dicing blade 10 from the outer peripheral end 10E of the dicing blade 10 toward the center 10F of the dicing blade 10.

Similarly, the flange surface 46F is formed as an inclined surface that gradually separates from the side surface 10D of the dicing blade 10 from the outer peripheral end a to the inner peripheral end b of the flange surface 46F. That is, the flange surface 46F is formed as an inclined surface that gradually separates from the side surface 10D of the dicing blade 10 from the outer peripheral end 10E of the dicing blade 10 toward the center 10F of the dicing blade 10.

According to the blade fixing device 42 of the first embodiment, the flange surfaces 44F and 46F of the first and second flange members 44 and 46 are attached to the side surfaces 10C and 10D of the dicing blade 10 by the axial force of the nut 48 (see FIG. 3). As the pressure is applied, as shown in FIG. 4, the flange surfaces 44F and 46F, which are separated from the side surfaces 10C and 10D of the dicing blade 10, are elastically deformed in the direction of approaching each other due to the axial force of the nut 48.

When the nut 48 shown in FIG. 5 is fastened, the entire surface or substantially the entire surface of the flange surfaces 44F and 46F from the inner peripheral end b of the flange surfaces 44F and 46F toward the outer peripheral end a becomes the side surfaces 10C and 10D of the dicing blade 10. Be pressed. Alternatively, at least the outer peripheral end a side of the flange surfaces 44F and 46F is pressed against the side surfaces 10C and 10D of the dicing blade 10.

Here, a comparison with a conventional example is made. FIG. 6 is an enlarged cross-sectional view of a main part of the conventional blade fixing device 1. FIG. 6 shows the deformed states of the flange surfaces 3A and 4A of the first and second flange members 3 and 4 when the nut 2 has been fastened.

The flange surfaces 3A and 4A of the conventional first and second flange members 3 and 4 are perpendicular to the axis 5 of the rotation axis (not shown) before being pressed by the side surfaces 6A and 6B of the dicing blade 6. It is generally a surface. When such flange surfaces 3A and 4A are pressed against the side surfaces 6A and 6B of the dicing blade 6 by the axial force of the nut 2, only the surface of the flange surfaces 3A and 4A on the inner peripheral end b side is the dicing blade 6. The flange surfaces 3A and 4A are elastically deformed from the inner peripheral end b to the outer peripheral end a so as to be gradually separated from the side surfaces 6A and 6B of the dicing blade 6.

The amount d of the dicing blade 6 protruding in the radial direction from the flange members 3 and 4, which greatly affects the runout of the dicing blade 6 due to such elastic deformation of the flange surfaces 3A and 4A, is the outer peripheral end a of the flange surfaces 3A and 4A. It is not a short protrusion amount c (see FIG. 5) starting from the vicinity of the flange surface 3A, but a long protrusion amount starting from the inner peripheral end b of the flange surfaces 3A and 4A. Therefore, the protrusion amount d of the dicing blade 6 is longer than the initially expected protrusion amount c (see FIG. 5), so that an unexpectedly large runout occurs in the dicing blade 6 during cutting.

In contrast to the above conventional example, in the blade fixing device 42 of the first embodiment, as shown in FIG. 4, the flange surfaces 44F and 46F are directed from the outer peripheral end 10E of the dicing blade 10 toward the center 10F of the dicing blade 10. Since the surface was formed as an inclined surface gradually separated from the side surfaces 10C and 10D of the dicing blade 10, the entire surface or substantially the entire surface of the flange surfaces 44F and 46F was formed as the side surface 10C and 10D of the dicing blade 10 when the nut 48 was fastened as shown in FIG. Is pressed against. Alternatively, at least the outer peripheral end a surface of the flange surfaces 44F and 46F is pressed against the side surfaces 10C and 10D of the dicing blade 10.

Therefore, according to the first embodiment, the protrusion amount c of the dicing blade 10, which greatly affects the runout of the dicing blade 10, is a short protrusion amount starting from the vicinity of the outer peripheral ends a of the flange surfaces 44F and 46F. As a result, even in the hubless type dicing blade 10 having a large amount of protrusion in the radial direction from the first and second flange members 44 and 46, the runout of the dicing blade 10 can be effectively suppressed. , The meandering of the dicing blade 10 with respect to the work W can be prevented.

As shown in FIG. 3, the inclination angles α (see FIG. 4) of the flange surfaces 44F and 46F with respect to the direction orthogonal to the axis 14C of the rotating shaft 14A are the first and second flanges that are the deformation factors of the flange surfaces 44F and 46F. It is preferable to appropriately adjust the inertial force during rotation of the members 44 and 46, the material and shape of the first and second flange members 44 and 46, the axial force of the nut 48, and the like.

FIG. 7 is an enlarged cross-sectional view of a main part of the blade fixing device 50 according to the second embodiment. The same or similar members as those of the blade fixing device 42 of the first embodiment shown in FIG. 5 are designated by the same reference numerals, and the description thereof will be omitted.

The shape of the flange surface is different between the blade fixing device 42 shown in FIG. 5 and the blade fixing device 50 shown in FIG. The flange surfaces 44F and 46F in FIG. 5 are formed with all surfaces of the flange surfaces 44F and 46F from the outer peripheral end a to the inner peripheral end b as inclined surfaces. On the other hand, in the flange surfaces 44G and 46G of FIG. 7, the surfaces 44H and 46H on the outer peripheral end a side are formed as surfaces parallel to the side surfaces 10C and 10D of the dicing blade 10, and the surfaces 44H and 46H are excluded. The surfaces 44I and 46I on the peripheral end b side are formed as inclined surfaces similar to the flange surfaces 44F and 46F (see FIG. 4). That is, the blade fixing device 50 of the second embodiment is provided with the surfaces 44I and 46I which are inclined surfaces in a part of the flange surfaces 44G and 46G.

Even in the blade fixing device 50 configured in this way, the surfaces 44I and 46I separated from the side surfaces 10C and 10D of the dicing blade 10 are elastic in the direction of approaching each other due to the axial force of the nut 48 (see FIG. 3). As the nut 48 is deformed, the surfaces 44I and 46I are pressed against the side surfaces 10C and 10D of the dicing blade 10.

Further, according to the blade fixing device 50, the surfaces 44H and 46H on the outer peripheral end a side are surfaces parallel to the side surfaces 10C and 10D of the dicing blade 10, and the surfaces 44I and 46I on the inner peripheral end b side are inclined surfaces. Therefore, the dicing blade 10 can be sandwiched between the surfaces 44H and 46H on the outer peripheral end a side while ensuring the required rigidity on the outer peripheral end a side.

As a modification of the blade fixing device 50 of the second embodiment, the shapes of the surfaces 44H and 46H on the outer peripheral end a side may be arcuate surfaces protruding outward.

FIG. 8 is an enlarged cross-sectional view of a main part of the blade fixing device 52 according to the third embodiment. The same or similar members as those of the blade fixing device 42 of the first embodiment shown in FIG. 5 are designated by the same reference numerals, and the description thereof will be omitted.

The shape of the flange surface is different between the blade fixing device 42 shown in FIG. 5 and the blade fixing device 52 shown in FIG. The inclined surfaces of the flange surfaces 44F and 46F in FIG. 5 are flat surfaces from the outer peripheral end a to the inner peripheral end b of the flange surfaces 44F and 46F. On the other hand, the inclined surfaces of the flange surfaces 44J and 46J in FIG. 8 are formed in a curved surface shape from the outer peripheral end a to the inner peripheral end b of the flange surfaces 44F and 46F.

FIG. 9 is an enlarged cross-sectional view of a main part showing a deformed state of the flange surfaces 44J and 46J when the nut 48 (see FIG. 3) has been fastened in the blade fixing device 52 of FIG.

As shown in FIG. 9, even if the inclined surfaces of the flange surfaces 44J and 46J of the first and second flange members 44 and 46 are curved, the flanges of the flange surfaces 44J and 46J from the inner peripheral end b to the outer peripheral end a. The entire surface or substantially the entire surface of the surfaces 44J and 46J can be pressed against the side surfaces 10C and 10D of the dicing blade 10. Alternatively, the surface of the flange surfaces 44J and 46J on the outer peripheral end a side excluding the surface on the inner peripheral end b side can be pressed against the side surfaces 10C and 10D of the dicing blade 10.

The radius of curvature r of the flange surfaces 44J and 46J (see FIG. 7) is the inertial force during rotation of the first and second flange members 44 and 46, which are the deformation factors of the flange surfaces 44F and 46F, and the first and second flange surfaces. It is preferable that the flange members 44 and 46 are appropriately adjusted according to the material and shape of the flange members 44 and 46, the axial force of the nut 48 and the like.

FIG. 10 is an enlarged cross-sectional view of a main part of the blade fixing device 54 according to the fourth embodiment. The same or similar members as those of the blade fixing device 42 of the first embodiment shown in FIG. 5 are designated by the same reference numerals, and the description thereof will be omitted.

The shape of the flange surface is different between the blade fixing device 42 shown in FIG. 5 and the blade fixing device 54 shown in FIG. The flange surfaces 44F and 46F in FIG. 5 are flat surfaces gradually separated from the side surfaces 10C and 10D of the dicing blade 10 from the outer peripheral end 10E (see FIG. 4) of the dicing blade 10 toward the center 10F of the dicing blade 10. Is. On the other hand, the flange surfaces 44K and 46K in FIG. 10 are curved surfaces that are convexly curved outward from the outer peripheral end 10E of the dicing blade 10 toward the center 10F.

FIG. 11 is an enlarged cross-sectional view of a main part showing the deformed states of the flange surfaces 44K and 46K when the nut 48 (see FIG. 3) has been fastened in the blade fixing device 54 of FIG.

As shown in FIG. 11, since the flange surfaces 44K and 46K of the first and second flange members 44 and 46 are curved surfaces, the central portion e between the outer peripheral end a and the inner peripheral end b of the flange surfaces 44K and 46K is the dicing blade. It is pressed by the side surfaces 10C and 10D of 10. Therefore, since the protrusion amount f of the dicing blade 10 starts from the central portion e, it is shorter than the conventional protrusion amount d shown in FIG.

Therefore, even in the blade fixing device 54 in which the flange surfaces 44K and 46K are curved surfaces, the dicing blade 10 can be suppressed from swinging, so that the dicing blade 10 can be prevented from meandering with respect to the work.

The radius of curvature r of the flange surfaces 44K and 46K (see FIG. 7) is the inertial force during rotation of the first and second flange members 44 and 46, which are the deformation factors of the flange surfaces 44F and 46F, and the first and second flange surfaces. It is preferable that the flange members 44 and 46 are appropriately adjusted according to the material, shape, axial force of the nut 48, and the like.

By the way, as a means for increasing the holding force of the first and second flange members 44 and 46 with respect to the dicing blade 10, it is conceivable to form streaks on the flange surfaces of the first and second flange members 44 and 46. In this case, the streaks generated when a # 400 to # 800 level grindstone is applied to the flange surface and the flange surface is ground while rotating the holding member are effective.

FIG. 12 shows the above-mentioned streak f formed on the flange surface 44F of the first flange member 44.

By forming the streak f on the flange surface 44F as shown in FIG. 12, the streak f is dicing, especially when the contact between the flange surface 44F and the side surface 10C of the dicing blade 10 (see FIG. 3) is partial. By engaging with the side surface 10C of the blade 10, it is possible to prevent the dicing blade 10 from idling with respect to the first flange member 44. In the end face correction work of the flange surface 44F performed in the dicing apparatus, titanium has a lower hardness than stainless steel, so that the streak f can be easily obtained.

10 ... Dying blade, 12 ... Dying device, 14 ... Spinnge unit, 14A ... Rotating shaft, 15 ... Pedestal, 16 ... Work table, 18 ... Machining part, 20 ... Cleaning part, 22 ... Load port, 24 ... Conveying device, 25 ... X base, 26 ... X guide, 28 ... X table, 30 ... Linear motor, 32 ... Rotating table, 34 ... Y base, 36 ... Y guide, 38 ... Y table, 40 ... Z table, 42 ... Blade fixing device, 44 ... 1st flange member, 46 ... 2nd flange member, 44F ... Flange surface, 46F ... Flange surface, 44G ... Flange surface, 46G ... Flange surface, 44J ... Flange surface, 46J ... Flange surface, 44K ... Flange surface, 46K ... Flange surface, 48 ... Nut, 50 ... Blade fixing device, 52 ... Blade fixing device, 54 ... Blade fixing device

Claims (4)

A pair of holding members for holding the dicing blade mounted on the rotating shaft from both side surfaces, and the pair of holding members having a ring-shaped flange surface pressed against the side surface of the dicing blade.
A pressing member that presses the flange surface of each of the pair of holding members against the side surface of the dicing blade, and
In the blade fixing device including
The flange surface of the pair of holding members before being pressed against the side surface of the dicing blade includes an inclined surface that gradually separates from the side surface of the dicing blade toward the center of the dicing blade.
A blade fixing device in which the inclined surface of the flange surface of the holding member is formed in a curved surface. The blade fixing device according to claim 1, wherein the entire surface of the flange surface of the pair of holding members is pressed against the side surface of the dicing blade by the pressing member. A pair of holding members for holding the dicing blade mounted on the rotating shaft from both side surfaces, and the pair of holding members having a ring-shaped flange surface pressed against the side surface of the dicing blade.
A pressing member that presses the flange surface of each of the pair of holding members against the side surface of the dicing blade, and
In the blade fixing device including
A blade fixing device in which the flange surface of the pair of holding members before being pressed against the side surface of the dicing blade includes a curved surface that is convexly curved outward toward the center of the dicing blade. The work holding part that holds the work and
A spindle unit with a rotating shaft and
A dicing blade mounted on the rotating shaft of the spindle unit and
The blade fixing device according to any one of claims 1 to 3 mounted on the rotating shaft of the spindle unit, wherein the dicing blade mounted on the rotating shaft is fixed to the rotating shaft. Fixing device and
A dicing device.

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