JP2001300854A - Electrocast thin blade grinding wheel - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an electrocast thin blade grinding wheel having improved cutting performance and lengthened life. SOLUTION: A plurality of corner parts 11 each having a first edge part 12 facing a tool rotating direction and a second edge part 13 extending rearward in the tool rotating direction of the first edge part 12 and inclined to the inner peripheral side with directing the rear part of the tool rotating direction are formed on the outer peripheral edge of an approximately ring-shaped and thin plate shaped electrocast thin blade grinding wheel 10.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electroformed thin blade used for cutting a workpiece such as an electronic material or a semiconductor product with high precision.

[0002]

2. Description of the Related Art Conventionally, as an example of this type of electroformed thin blade grindstone (electroformed blade), there is a substantially thin plate ring shape as shown in FIG. This electroformed thin blade grindstone 1 is formed by dispersing superabrasive grains such as diamond and cBN in a metal plating phase made of Ni, Co or an alloy thereof, and has a thickness of several tens μm.
It has a ring-shaped thin plate shape having a thickness of up to several hundred μm, and a plurality of slits 1a are formed on the outer peripheral edge thereof. This slit 1
a is an extremely thin one having a width of about 1 mm, regardless of the diameter of the grindstone, and its depth is set to be larger than its width. Have been. As shown in FIG. 6, the electroformed thin blade grindstone 1 has a pair of mounting flanges 2 provided on both side surfaces.
The workpiece is cut in the outer peripheral region by sandwiching the inner peripheral region between the two, and the electroformed thin blade grindstone 1 is a coaxial and small diameter shaft of a grinding wheel shaft 4 that rotates around the axis. Part 4
a, and tightened and fixed by the nut 3 for use. Such an electroformed thin blade grindstone 1 is excellent in strength and rigidity, so that an extremely thin grindstone can be manufactured, and is used for cutting or grooving of electronic component materials requiring ultra-precision processing. .

[0003]

When cutting a work material using the conventional electroformed thin blade whetstone 1, if the resistance to the work material is large, the work material is cut linearly. Processing performance cannot be ensured. This is a major problem particularly when the work material is required to have extremely high processing accuracy, such as electronic materials and semiconductor products. Therefore, in the conventional electroformed thin blade grindstone, by providing the slit 1a in the electroformed thin blade wheel as described above, it is easy to discharge shavings generated at the time of processing the work material to the outside from the slit, and the gap between the superabrasive grains is reduced. Although clogging is less likely to occur and resistance is reduced, the mere provision of the slits 1a limits its performance.

The present invention has been made in view of such circumstances, and an object of the present invention is to provide an electroformed thin blade grinding wheel having improved performance and life.

[0005]

According to the first aspect of the present invention,
In a substantially ring-shaped electroformed thin blade grindstone in which superabrasive grains are dispersed and arranged in a metal binder phase and rotated around the center thereof in a tool rotation direction, a first edge facing the tool rotation direction is provided on an outer peripheral edge thereof. And a plurality of corners having a second edge continuous with the first edge in the tool rotation direction rearward and inclined inward toward the tool rotation direction rearward. Features. In the electroformed thin blade grindstone configured as described above, since a gap is formed before and after the corner in the tool rotation direction, the contact area between the electroformed thin blade grindstone and the work material is reduced, and the electroformed thin blade grindstone is used. Resistance due to contact between the workpiece and the work material can be reduced. Further, shavings of the work material are easily discharged to the outside from this gap, and clogging between superabrasive grains is suppressed. Furthermore, since the coolant can be taken into the gap, wear and heat generation of the superabrasive grains and clogging between the superabrasive grains are suppressed, so that the performance is improved and the life is improved. In addition, clogging is suppressed even in dry cutting that does not use a coolant, so that it has sufficient sharpness. Here, these first and second edges may be straight or curved.

According to a second aspect of the present invention, in the electroformed thin blade grinding wheel according to the first aspect, a third edge connected to the second edge is provided behind the second edge in the tool rotation direction. Is formed, a tangent at the tip of a circle that is concentric with the electroformed thin blade grindstone and touches the tip of the corner, and a first inclination angle between the second edge and the tangent is It is characterized by being smaller than a second inclination angle formed by the third edge. In the electroformed thin blade grindstone configured in this way, the tangent at the tip of a circle concentric with the electroformed thin blade grindstone and in contact with the tip of the corner, the first inclination angle formed by the second edge, Since it is smaller than the second inclination angle formed by the tangent and the third edge, while ensuring the size of the gap formed before and after the tool rotation direction of the corner, the angle of the corner And the strength can be ensured. As a result, the life of the electroformed thin blade grindstone can be improved while ensuring the chip discharge performance and the cooling performance using the coolant. Here, the first, second, and third edges may be linear or curved. In this case, for example, the second edge portion and the third edge portion can have curved shapes having different curvatures.

[0007] The invention described in claim 3 is claim 1 or 2.
In the electroformed thin blade grinding wheel described in the above, a slit is formed between the corners. In the electroformed thin blade grindstone configured as described above, the contact area between the electroformed thin blade grindstone and the work material can be further reduced, and the resistance generated by the contact with the work material can be further reduced. Since the shavings of the work material are discharged to the outside also from the slit, clogging between superabrasive grains is more effectively suppressed. In addition, coolant can be taken into the slit, and wear and heat generation of the superabrasive grains and clogging between the superabrasive grains can be more effectively suppressed. Here, if the width of the slit is too narrow, the effect of the slit is reduced, and if the width is too wide, the strength of the electroformed thin blade grindstone is reduced. With respect to the total length of the circumference of the circle that is concentric with the tip of the corner,
It is desirable to be within the range of 20% to 50%. Further, each slit may be provided between each corner, and each slit may be provided so as to sandwich an arbitrary number of corners between adjacent slits.

[0008]

BEST MODE FOR CARRYING OUT THE INVENTION [First Embodiment]
An electroformed thin blade grindstone according to a first embodiment of the present invention will be described with reference to FIG. FIG. 1 is a view showing the shape of an electroformed thin blade grindstone according to the first embodiment of the present invention.
1A is a plan view, and FIG. 1B is a partially enlarged view of FIG. The electroformed thin blade grindstone 10 of the present embodiment has a substantially ring-shaped thin plate shape, and is rotated around the center thereof in the tool rotation direction. Electroformed thin blade whetstone 1
0 is, in a vertical section in the thickness direction, as an abrasive layer,
Diamond or cB is randomly added to a metal plating phase (metal bonding phase) made of Ni, Co or an alloy thereof.
Super abrasive grains such as N are dispersedly arranged. A plurality of corners 11 are formed on the outer peripheral edge in a saw blade shape along the circumferential direction.
Are formed continuously.

The corner portion 11 is formed, for example, by forming the outer peripheral edge of the electroformed thin blade grindstone 10 into a predetermined shape by subjecting it to electric discharge machining using a wire or the like or grinding using a grindstone or the like. In the present embodiment, the corner 11 is
A first edge 12 facing the tool rotation direction, and a first edge 12
And a second edge 13 that is inclined inward toward the rear in the tool rotation direction. The tool rotation direction is a clockwise direction in FIG. ). The tip 11a of the corner 11 (the intersection of the first edge 12 and the second edge 13) and the electroformed thin blade whetstone 10
The inclination angle θ1 of the first edge portion 12 with respect to the straight line L1 passing through the center C1 is, for example, in the range of −10 ° to + 20 °, and in the present embodiment, θ1 = 0 °, that is, the first edge The part 12 is formed along the straight line L1. A tangent line T1 at a tip 11a of a circle (not shown) that is concentric with the electroformed thin blade grindstone 10 and contacts the tip 11a of the corner 11;
The first inclination angle θ2 formed by the second edge 13 is, for example, 5
Θ to 45 °, and in the present embodiment, θ2 =
25 °. Here, in the present embodiment, the first and second edges 12 and 13 are respectively formed on straight lines, but the present invention is not limited to this, and one or both of them may be curved. It may be formed in a shape.

The distance D1 between the corners 11 is, for example, in the range of 1 mm to 10 mm (D1 = 4.7 mm in the present embodiment), and the height H1 of each corner 11 is, for example, 1 mm To 10 mm (H1 = 2 mm in the present embodiment).

The electroformed thin blade grindstone 10 constructed as described above.
Is mounted on the shaft portion 4a of the grinding wheel shaft 4 with the inner peripheral side sandwiched between the mounting flanges 2 and 2 as shown in FIG. While rotating the electroformed thin blade grindstone 10 around the axis of the grindstone shaft 4 in this state, a work material such as an electronic component material is cut on the outer peripheral surface of the abrasive grain layer.

In the electroformed thin blade grindstone 10 configured as described above, since a gap is formed before and after the corner portion 11 in the tool rotation direction, the contact area between the electroformed thin blade grindstone 10 and the work material is reduced. However, the resistance due to the contact between the electroformed thin blade grindstone 10 and the work material can be reduced. Further, shavings of the work material are easily discharged to the outside from this gap, and clogging between superabrasive grains is suppressed. Furthermore, since the coolant can be taken into the gap, wear and heat generation of the superabrasive grains and clogging between the superabrasive grains are suppressed, so that the performance is improved and the life is improved. In addition, clogging is suppressed even in dry cutting that does not use a coolant, so that it has sufficient sharpness.

As described above, according to the electroformed thin blade wheel 10 of the present embodiment, it is possible to improve the performance and the life thereof.

[Second Embodiment] An electroformed thin blade grindstone according to a second embodiment of the present invention will be described below with reference to FIG. FIG. 2 is a view showing the shape of an electroformed thin blade grindstone according to a second embodiment of the present invention, wherein FIG. 2 (a) is a plan view and FIG. 2 (b) is a part of FIG. 2 (a). It is an enlarged view. The electroformed thin blade grindstone 20 of the present embodiment has a substantially ring-shaped thin plate shape, similarly to the electroformed thin blade grindstone 10 shown in the first embodiment, and its outer peripheral edge has a saw along the circumferential direction. A plurality of corners 21 are formed continuously like a blade.

In the present embodiment, the corner portion 21 is connected to the first edge portion 22 facing the tool rotation direction, and to the rear of the first edge portion 22 in the tool rotation direction. It has a substantially trapezoidal shape having a second edge 23 inclined to the side and a third edge 24 connected to the second edge 23 (the tool rotation direction is clockwise in FIG. 2). . The tip 21a of the corner 21 (the first edge 22 and the second edge 2)
3) and the inclination angle θ3 of the first edge portion 22 with respect to the straight line L2 passing through the center C2 of the electroformed thin blade grindstone 10 is, for example, in the range of −10 ° to + 20 °, and the present embodiment. Then, θ3 = 0 °, that is, the first edge portion 22 is a straight line L2
Are formed along. The first inclination angle θ4 formed by the tangent line T2 at the tip 21a of the circle (not shown) concentric with the electroformed thin blade whetstone 20 and in contact with the tip 21a of the corner 21 and the second edge 23 is For example, in the range of 0 ° to 10 °, in the present embodiment, θ4 = 0 °.
Similarly, the second inclination angle θ5 formed by the tangent line T2 and the third edge portion 24 is, for example, in the range of 5 ° to 60 °, and in the present embodiment, θ5 = 15 °. In the corner 21, the first inclination angle θ4 is equal to the second inclination angle θ5.
Is smaller than

Here, in the present embodiment, the first and third edges 22 and 24 are respectively formed in a straight line, and the second edge 23 is formed in a curved shape. Instead, they may be formed in a straight line or in a curved line.

The interval D2 between the corners 21 is, for example, in the range of 1 mm to 10 mm (D2 = 5.2 mm in the present embodiment), and the height H2 of each corner 21 is, for example, 1 mm (H2 = 1.6 mm in the present embodiment).

The electroformed thin blade grindstone 20 constructed as described above
Is used for cutting a work material such as an electronic component material in the same manner as the electroformed thin blade grindstone 10 shown in the first embodiment.

According to the electroformed thin blade grindstone 20 configured as described above, the same effect as the electroformed thin blade grindstone 10 shown in the first embodiment can be obtained, and further, the first inclination angle θ4
Is smaller than the second inclination angle θ5, the angle of each corner 21 is increased while securing the size of the gap formed between each corner 21, and the strength of the corner 21 is increased. Can be secured. Further, the service life of the electroformed thin blade grindstone 20 can be improved while securing the chip discharging property and the cooling effect by the coolant.

[Third Embodiment] An electroformed thin blade grindstone according to a third embodiment of the present invention will be described below with reference to FIG. FIG. 3 is a plan view showing the shape of an electroformed thin blade grindstone according to the third embodiment of the present invention. The electroformed thin blade grindstone 25 of the present embodiment is obtained by forming a slit 26 between the corners 21 in the electroformed thin blade grindstone 20 shown in the second embodiment. In the present embodiment, the slit 26
Are disposed with three corners 21 interposed between adjacent slits 26, whereby the corners 21 are provided with discontinuous portions at a plurality of locations. Slit 2
6 is substantially semicircular, and the edges of the corners 21 located on both sides of the slit 26 are connected by a smooth curve.
Here, the sum of the width D3 of each slit 26 is, for example, 20% to 50% with respect to the total length of the outer circumference of a circle (not shown) concentric with the electroformed thin blade grindstone 25 and in contact with the tip 21a of the corner 21.
%, And in the present embodiment, this ratio is 30%.
%. The depth W is, for example, in the range of 2 mm to 10 mm, and in this embodiment, W = 5 m
m.

The thus formed electroformed thin blade grindstone 25 has the same effect as the electroformed thin blade grindstone 20, and
Since the shavings of the work material are discharged to the outside also from the slit 26, the clogging between the superabrasive grains is more effectively suppressed. In addition, coolant can be taken into the slit 26, and wear and heat generation of the superabrasive grains and clogging between the superabrasive grains can be more effectively suppressed, and the life thereof can be improved. Further, the contact area between the electroformed thin blade grindstone 25 and the work material can be further reduced, so that the resistance caused by the contact with the work material can be further reduced, and the performance can be improved. Here, if the width of the slit 26 is too narrow,
If the effect of the slit 26 is small and the width is too wide, the strength of the electroformed thin blade grindstone 25 is reduced. Therefore, the width D3 of the slit 26 is, for example, concentric with the electroformed thin blade grindstone 25 and the tip of the corner 21. It is desirable to set the range of 20% to 50% with respect to the entire length of the outer circumference of a circle (not shown) in contact with 21a.

In the above embodiment, the electroformed thin blade grindstone 25 shown in the second embodiment is used as the electroformed thin blade grindstone 25.
Although the slit 26 is shown in FIG. 1, the present invention is not limited to this. For example, the electroformed thin blade grindstone 10 shown in the first embodiment may be provided with the slit 26. Further, each slit 26 is provided so as to sandwich the three corners 21 between the adjacent slits 26. However, the present invention is not limited to this.
6 may be provided so as to sandwich an arbitrary number of corners 21, and slits 26 may be provided between each corner 21. In the above embodiment, the slit 26
Is shown in the form of a semicircle, but the present invention is not limited to this, and may be a linear shape such as a substantially triangular shape or a substantially square shape.

Here, in each of the above-described embodiments, the electroformed thin blade grindstone having the corners formed over the entire circumference is shown. However, the present invention is not limited to this, and the corners are provided only on a part of the outer circumference. Is also good.

[0024]

Next, cutting tests were performed on the electroformed thin blade grindstones 10 and 20 shown in the above embodiments and the conventional electroformed thin blade grindstone 1. Electroformed thin blade whetstones 10, 20, 2 of each embodiment
5 and the conventional electroformed thin blade whetstone 1 have an outer diameter of 56 m, respectively.
m, an inner diameter of 40 mm, and a thickness of 0.2 mm were used. Here, in the electroformed thin blade whetstone 10, the inclination angle θ1 = 0 °,
The first inclination angle θ2 = 25 °, and the distance D1 between the corners 11
= 4.7 mm, and the height H1 of the corner 11 is set to 2 mm. Further, in the electroformed thin blade grindstone 20, the inclination angle θ3 = 0
°, first inclination angle θ4 = 0 °, second inclination angle θ5 = 15
°, the interval D2 between the corners 21 = 5.2 mm, the corner 21
Height H2 = 1.6 mm. And as a work material, length 100mm, width 100mm, thickness 1mm,
99.6% is a work material of Al ₂ O _3, the number of revolutions of the main shaft holding each electroformed thin blade grindstone is 18000 min ⁻¹ , the feed speed is 480 mm / min, and the cut is 1 + 0.05 mm.
(Full cut (base cut 0.05mm))
Water is used as a coolant.

Under such cutting conditions, the electroformed thin blade whetstone 1
The work material was cut using 0, 20, 25 and the conventional electroformed thin blade 1. FIG. 4 shows the results of the cutting test. FIG.
Table shows the current value (A) supplied to the main shaft for rotating and driving each electroformed thin blade grindstone when the work material is cut using each of the electroformed thin blade grindstones. (M). The magnitude of the current value supplied to the spindle is
This reflects the magnitude of the load applied to the main shaft, that is, the magnitude of the resistance generated in the electroformed thin blade whetstone when cutting the work material.

In the conventional electroformed thin blade grindstone 1, the current value supplied to the main shaft at the start of cutting of the work material is 5.3 A, but as the cutting length increases, the current value supplied to the main shaft rapidly increases. And the cutting became impossible when the cutting length reached 5 m. This is due to the progress of clogging between superabrasive grains,
It is considered that the performance of the electroformed thin blade grindstone 1 is deteriorated due to, for example, abrasion of the superabrasive grains due to polishing heat generated when cutting the work material.

On the other hand, in the electroformed thin blade grindstone 10 of the present invention, the current value supplied to the spindle at the start of the first cutting of the workpiece is 3.0 A, and even if the cutting length increases, The current value hardly changes, and the work material can be cut even when the cut length reaches 5 m. Even if the cutting length further increases, the current value rises slowly, and even when the cutting length reaches 10 m, the current value remains at 3.1 A, and it is presumed that the cutting length can be further increased. You. Similarly, in the electroformed thin blade grindstone 20 of the present invention, the current value supplied to the main spindle at the start of cutting of the work material is 3.4 A, and the current value gradually increases even if the cutting length increases. However, even if the cutting length reaches 5 m, the work material can be cut. Even if the cut length further increases, the current value rises slowly, and even when the cut length reaches 10 m, the current value remains at 3.9 A, and it is presumed that the cut length can be further increased. You. Further, in the electroformed thin blade grindstone 25 of the present invention, the current value supplied to the main spindle at the start of cutting the work material is 2.8 A, and even when the cutting length increases, the current value hardly changes. Even when the cutting length reaches 5 m, the work material can be cut. Even if the cut length further increases, the current value hardly changes, and the cut length is 1
Even when the current reaches 0 m, the current value remains at 2.8 A, and it is presumed that the cut length can be further increased.

As can be understood from the above test results, according to the electroformed thin blade grinding wheel 10 and the electroformed thin blade grinding wheel 20 of the present invention, the resistance due to the contact with the work material is smaller than that of the conventional electroformed thin blade grinding wheel 1. Can be reduced, and the life of the electroformed thin blade grindstone can be improved.

[0029]

According to the present invention, the following effects can be obtained.
According to the electroformed thin blade grindstone of the first aspect, the contact area between the electroformed thin blade grindstone and the work material is reduced, and the resistance is reduced, so that the performance is improved. In addition, since the shavings of the work material are easily discharged to the outside from the gap formed between the corners, clogging between the superabrasive grains is suppressed. Furthermore, since coolant can be taken into the gap, wear and heat generation of the superabrasive grains and clogging between the superabrasive grains are suppressed, so that the performance is improved and the life thereof is improved.

According to the electroformed thin blade grindstone of the second aspect, the edge angle of the corner is increased while securing the size of the gap formed between the corners, thereby ensuring the strength of the corner. Thus, the life of the electroformed thin blade grindstone can be improved while ensuring the chip discharge performance and the cooling performance of the electroformed thin blade grindstone.

According to the electroformed thin blade grindstone of the third aspect, the contact area between the electroformed thin blade grindstone and the work material can be further reduced, the resistance can be further reduced, and the performance can be improved. Since the shavings of the work material are discharged to the outside also from the slit, clogging between superabrasive grains is more effectively suppressed. In addition, coolant can be taken into the slit, and wear and heat generation of the superabrasive grains and clogging between the superabrasive grains can be more effectively suppressed, and the life thereof can be improved.

[Brief description of the drawings]

FIG. 1 is a view showing a shape of an electroformed thin blade grindstone according to a first embodiment of the present invention, wherein FIG.
FIG. 2B is a partially enlarged view of FIG.

FIG. 2 is a view showing a shape of an electroformed thin blade grindstone according to a second embodiment of the present invention, wherein FIG.
FIG. 2B is a partially enlarged view of FIG.

FIG. 3 is a plan view showing a shape of an electroformed thin blade grindstone according to a third embodiment of the present invention.

FIG. 4 is a table showing cutting test results when cutting a work material using each of the electroformed thin blade grindstone of the first and second embodiments of the present invention and the conventional electroformed thin blade grindstone. is there.

FIG. 5 is a plan view showing the shape of a conventional electroformed thin blade grindstone.

FIG. 6 is a view showing a state in which a conventional electroformed thin blade grindstone is fixed to a grindstone shaft.

[Explanation of symbols]

10, 20, 25 Electroformed thin blade whetstone 11, 21, Corner 12, 22, First edge 13, 23 Second edge 24 Third edge 26 Slit θ2, θ4 First inclination angle θ5 Second Tilt angle

 ────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor Masanori Torisaka 246-1 Egoshi, Kurosuno, Izumi-cho, Iwaki-shi, Fukushima F-term in Mitsubishi Materials Corporation Iwaki Works (reference) 3C063 AA02 AB03 BA02 BA23 BB02 BC02 CC12 EE10 FF18 FF20 FF30

Claims (3)

[Claims] 1. A substantially ring-shaped electroformed thin blade grindstone in which superabrasive grains are dispersed in a metal binder phase and rotated around the center thereof in the tool rotation direction. A plurality of corners are formed, each having a first edge that faces and a second edge that continues rearward in the tool rotation direction of the first edge and that is inclined inward toward the rear in the tool rotation direction. An electroformed thin blade whetstone characterized by being made. 2. A third edge continuous with the second edge is formed behind the second edge in the tool rotation direction, and the corner is concentric with the electroformed thin blade grindstone. A tangent at the tip of a circle contacting the tip of the first edge, and a first inclination angle formed by the second edge is smaller than a second inclination angle formed by the tangent and the third edge. The electroformed thin blade grindstone according to claim 1, wherein: 3. The electroformed thin blade grinding wheel according to claim 1, wherein a slit is formed between the corners.