JPH06143249A - Blade clamper for slicing machine - Google Patents

Abstract

PURPOSE:To easily mount a blade while holding uniformity of roundness and tension and to effectively prevent a positional deviation of the blade while holding uniformity of a tension to be operated at the blade even during high speed rotating. CONSTITUTION:A blade clamper for mounting a doughnutlike blade 1 formed with a cutting edge 2 at its inner peripheral edge in a slicing machine nips a periphery of the blade 1 in cooperation with first and second clamping members 10, 20 and pressurizes part of the periphery of the blade by a pressurizing member 40 to apply a radial tension to the blade 1. Further, a groove 14 extended circumferentially is, for example, provided on a blade nipping surface 10b of an outer peripheral side from the groove 12 of the member 10 to form anti-sliding means of the blade 1, and an outer peripheral side from a position to be pressurized by the member 40 of the blade 11 is fixed by the means.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a slicing machine for cutting hard and brittle materials such as silicon, glass and ceramics with high precision, and more particularly to a blade clamp device for clamping a blade mounted on the slicing machine.

[0002]

2. Description of the Related Art A slicing machine for cutting hard and brittle materials such as silicon, glass, and ceramics with high precision by a donut-shaped blade having a cutting blade formed on the inner peripheral edge is used.
A blade clamp device is required to attach the blade to the machine. A conventional blade clamp device is provided with a pair of ring-shaped clamp members. The clamp members sandwich the circumferential surface of the blade, and clamp clamp bolts clamp the two clamp members between them. Further, in order to apply radial tension to the blade to prevent runout during cutting work, a ring-shaped pressure member is pressed against the peripheral surface of the blade.

[0003]

With the above-mentioned conventional blade clamp device, it is difficult to adjust the tension so that the tension is uniform over the entire circumference of the blade when the blade is mounted while maintaining the circularity of the blade edge. there were. The blade clamped by the above-described conventional blade clamp device is mounted on the rotary shaft of the slicing machine and rotates at high speed. Then, the cutting blade formed on the inner peripheral edge is pressed against the workpiece to perform the cutting work. Therefore, the blade is subjected to a reaction force from the work piece together with the centrifugal force generated by the high speed rotation. However, in the conventional blade clamp device, the blade holding surface of the clamp member is a smooth surface, and the fixing state of the blade is maintained by simply receiving the fastening force of the clamp bolt on this smooth surface. The fastening force of the bolt was dispersed, and the displacement was likely to occur due to the external force such as the centrifugal force described above. If the bearing blade is misaligned, the cutting depth will change and the machining accuracy will decrease, as well as
As a result of the rotational force acting non-uniformly and causing the blade to shake, the blade may be damaged.

The present invention has been made in order to solve the above problems, and the blade can be easily mounted while maintaining the circularity and the uniformity of the tension, and the tension acting on the blade even during high-speed rotation. An object of the present invention is to provide a blade clamp device in a slicing machine capable of reliably preventing positional deviation of a blade while maintaining uniformity.

[0005]

In order to achieve the above object, the present invention is a blade clamp device for mounting a donut-shaped blade having a cutting blade formed on an inner peripheral edge thereof to a slicing machine. The first and second clamp members that cooperatively hold the peripheral surface, and a pressing member that applies radial tension to the blade by pressing a portion of the blade peripheral surface, and in the blade It is characterized in that a non-slip means for the blade is formed at the sandwiching portion of the first or second clamp member that sandwiches the outer peripheral side of the portion pressed by the pressing member. Further, according to the invention of claim 2, a plurality of grooves extending in the circumferential direction are concentrically formed with respect to the sandwiching portion of the first or second clamp member to constitute the slip preventing means of the blade. Is characterized by.

[0006]

The region in which the peripheral surface of the blade is held by the first and second clamp members can be divided into two regions, the inner peripheral side and the outer peripheral side, with the region pressed by the pressing member as a boundary. . Then, in the region on the inner peripheral side, the blade must be allowed to slide in order to exert a radial tension on the blade. On the other hand, in the region on the outer peripheral side, it is necessary to firmly fix the blade in order to prevent displacement of the blade. Therefore, in the present invention, a blade anti-slip means is formed in the sandwiching portion of the first or second clamp member that sandwiches the region on the outer peripheral side of the region pressed by the pressing member. As a result, the blade can be firmly fixed in the area on the outer peripheral side and the sliding of the blade can be allowed on the area on the inner peripheral side.

[0007]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a plan view of a blade clamp device according to the present embodiment, FIG. 2 is an enlarged sectional view taken along line II-II in FIG. 1, and FIG. 3 is a diagram showing a further enlarged portion A in FIG. The clamp bolt is omitted in FIG.

First, the overall configuration of the apparatus of this embodiment will be described with reference to FIGS. 1 and 2. The ring-shaped blade 1
A cutting blade 2 is formed on the inner peripheral edge. In the device of this embodiment,
The peripheral surface of the blade 1, in particular, the outer peripheral portion thereof is clamped by the first clamp member 10 and the second clamp member 20 in cooperation with each other, and fixed by the fastening force of the clamp bolt 30. Each of the clamp members 10 and 20 is formed in a ring shape, and the first clamp member 10 is arranged on the upper surface side of the blade 1 and the second clamp member 20 is arranged on the lower surface side of the blade 1. . The second clamp member 20 on the lower surface side is fixed to the slicing machine body. Screw holes 11 and 21 through which the clamp bolt 30 is inserted and screwed are formed at corresponding intervals of the clamp members 10 and 20 in the circumferential direction at regular intervals. Further, through holes 3 through which the clamp bolts 30 are inserted are also formed at corresponding positions of the blade 1 with the screw holes 11 and 21.

The blade clamping surface 10a on the inner peripheral side of the screw hole 11 of the first clamp member 10 is formed.
A groove 12 extending in the circumferential direction for arranging the pressing member 40 is formed in the groove. Further, the first clamp member 10
Includes a thread groove 13 that penetrates from the top surface to the ceiling surface of the groove 12.
Are formed at regular intervals in the circumferential direction, and the press bolt 41 is screwed into the thread groove 13. The pressure member 40 is formed in a ring shape, and the lower end surface thereof is an arc-shaped curved surface. The pressure member 40 is provided in the groove 12
It is slidably arranged inside and receives a pressing force from above by the press bolt 41. On the other hand, the second clamp member 2
A concave portion 22 is formed in the circumferential direction at a portion of the No. 0 facing the pressing member 40.

The blade 1 receives a pressing force from a press bolt 41 via a pressure member 40, and a part of its peripheral surface is recessed 2.
Sink into 2 As a result, tension acts on the inner peripheral side of the contact portion of the pressure member 40.

With the above-described structure, in the blade clamp device of this embodiment, as shown in FIG. 3, a groove 14 extending in the circumferential direction is formed on the blade holding surface 10b on the outer peripheral side of the groove 12 of the first clamp member 10. By providing a plurality of concentric circles, a non-slip means for the blade 1 is formed. That is, the blade 1 sandwiched between the clamp members 10 and 20 must receive the fastening force of the clamp bolt 30 in the region on the outer peripheral side of the pressure member 40 and maintain the fixed state. Therefore, in this embodiment, by providing a plurality of grooves 13 in the same region, the area in which the first clamp member 10 contacts the blade 1 is reduced, and the contact surface pressure acting on the blade 1 is increased. . Further, as a result of the edge portion of the groove 14 biting slightly into the blade 1, the positional displacement of the blade 1 is further prevented. On the other hand, in the region on the inner peripheral side of the pressure member 40,
Each clamp member 10, 20 has a blade holding surface 10a,
20a is a flat surface. Therefore, when the tension is applied by the pressing member 40, the blade 1 in the same region is applied.
A slip occurs on the surface, and the tension can be uniformly applied.

Here, an embodiment of the present inventor for a slicing machine for φ200 mm silicon wafers will be described. For a so-called 34-inch blade, first and second clamps are provided on a region 50 mm wide from the outer peripheral edge of the blade. It is held by the members 10 and 20, and the inner peripheral side of the area is 7 mm.
Both clamp members had a flat blade holding surface. Then, with respect to a width of 25 mm on the outer peripheral side of the region, a blade holding surface is left by a width of 3 mm from the outer peripheral edge, and subsequently, a circumferential groove having a width of 3 mm and a depth of 2 mm is formed. Blade holding surfaces and grooves were alternately formed at such intervals (intervals of width 3 mm) to form a total of four grooves. As a result, when tension is applied by the pressure member, appropriate sliding occurs on the inner peripheral side of the blade, and uniform tension can be achieved, and moreover,
The blade was firmly fixed on the outer peripheral side, and no slight displacement occurred during the normal cutting operation.

Further, in the blade clamp device of this embodiment, the first clamp member 10 (top) which can be removed from the machine body is not the second clamp member 20 (bottom side) fixed to the machine body. Since the groove 14 as the anti-slip means is formed on the side), sludge accumulated in the groove 14 can be easily removed by washing. Further, although the blade holding surface 10b of the first clamp member 10 has a narrow area, the flatness is maintained with high accuracy, so that the blade 1 is not subjected to asymmetrical distortion.

It should be noted that the present invention is not limited to the above-described embodiment, and various modifications or applications are possible without changing the gist. For example, as a non-slip means for the blade, the first clamp member may have a configuration in which irregularities of arbitrary shape are scattered, and the finished surface roughness of the clamp member with respect to the blade holding surface is determined by the pressing member It is also possible to adopt a configuration in which the inner surface of the arrangement position is made smoother while the outer peripheral surface is finished to have a rough surface. Further, a configuration may be adopted in which a concave portion is formed on one of the clamp members and a convex portion is formed on the other relative position so that the blade is held between these concave and convex portions. In the above-described embodiment, the slip preventing means of the blade is formed on the first clamp member arranged on the top side, but the slip preventing means can be formed on the second clamp member or both clamp members, if necessary. Of course.

[0015]

As described above, according to the blade clamp device of the present invention, the blade can be easily mounted while maintaining the circularity and the uniformity of the tension, and the tension applied to the blade even during the high speed rotation is applied. It is possible to reliably prevent the positional deviation of the blade while maintaining the uniformity, and as a result, it is possible to maintain the machining accuracy of the slicing machine at a high level and reduce the risk of blade damage.

[Brief description of drawings]

FIG. 1 is a plan view of a blade clamp device according to an embodiment of the present invention.

FIG. 2 is an enlarged sectional view taken along line II-II in FIG.

FIG. 3 is a diagram showing a further enlarged part A in FIG.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Blade 3 Through hole 10 First clamp member 14 Groove (slip preventing means) 20 Second clamp member 30 Clamp bolt 40 Pressing member 41 Press bolt

Claims (2)

[Claims] 1. A blade clamp device for mounting a donut-shaped blade having a cutting blade formed on an inner peripheral edge thereof on a slicing machine, the first and second clamps holding the peripheral surface of the blade in cooperation with each other. A member and a pressing member that applies radial tension to the blade by pressing a part of the peripheral surface of the blade, and clamps the outer peripheral side of the portion of the blade that is pressed by the pressing member. A blade clamp device in a slicing machine, characterized in that a non-slip means for the blade is formed in the holding portion of the first or second clamp member. 2. The non-slip means of the blade is characterized in that a plurality of concentrically extending grooves extending in the circumferential direction are formed in the holding portion of the first or second clamp member. Blade clamping device for slicing machine in Japan.